• 동력기계공학회지
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• 제7권4호
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• pp.61-66
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• 2003

In this paper, the relation between displacement of piezoelectric material and electric field was proposed. FEA was introduced to predict the displacement and reaction force of plate spring attached in the piezoelectric material. The relation between displacement of piezoelectric material forced by plate spring and applied electric field were further verified by experimental investigation. Also, the flow rate of gas in piezoelectric valve was examined by experiment. Finally, the relation between electric field and gas flow was derived. Based on these results, these relations can be used in the design of mass flow controller.

• 한국소음진동공학회논문집
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• 제26권1호
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• pp.82-88
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• 2016

This paper proposes a new type of semi-active direct-drive valve(DDV) car suspension system using piezoelectric actuator associated with displacement amplifier. As a first step, controllable piezoelectric DDV damper is designed and governing equation of a quarter-vehicle suspension system consisting of sprung mass, spring, tire and the piezostack DDV damper is constructed. After deriving the equations of the motion, in order to control spool displacement and damping force the skyhook controller is designed and applied. The performance evaluation of the proposed semi-active suspension system is conducted with different displacement of spool. Then, the ride comfort analysis is undertaken in time domain with bump road profile.

• 드라이브 ㆍ 컨트롤
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• 제6권2호
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• pp.10-16
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• 2009

• 대한기계학회논문집B
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• 제30권4호
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• pp.350-357
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• 2006

A new valveless micropump for bi-directional application has been developed and tested. The micropump was fabricated on silicon and glass substrates by micromachining process. The micropump in this study consists of a membrane actuator, a pumping chamber, fluidic channels and two piezoelectric ceramic films. The channels and pumping chamber were etched on a glass wafer and the membrane was made on a silion wafer which is actuated by a piezoelectric ceramic (PZT) film. The geometry of the micropump was optimized by numerical analysis and the performance of the micropump was investigated by the experiments. The maximum flow rate was $323{\mu}L/min$ and the maximum back pressure was 294 Pa when the membrane actuator of $10{\times}10mm^2$ was driven at 130 Hz and 385 V.

• 한국소음진동공학회논문집
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• 제16권7호
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• pp.739-745
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• 2006

This paper presents a novel type of hybrid dispensing head for IC fabrication and surface mount technology. The proposed mechanism consists of solenoid valve and piezoelectric stack as actuators, and provides positive-displacement and jet dispensing. The positive-displacement dispensing can produce desired adhesive amount without viscosity effect, while the jet dispensing can produce high precision adhesive amount. In order to determine the relationship between required voltage of the piezoelectric actuator and needle displacement, both static and dynamic analysis are undertaken, In addition, finite element analysis is performed in order to find optimal design parameters. Dispensing flow rate and pressure in the chamber are evaluated through fluid dynamic model.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1994년도 Proceedings of the Korea Automatic Control Conference, 9th (KACC) ; Taejeon, Korea; 17-20 Oct. 1994
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• pp.54-59
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• 1994

In this study, a high-speed servo valve with no outer leakage is developed, which is used to drive flexible hydraulic actuators (FHA) for extreme environments. In the valve, multilayered PZT devices are used to drive a spool directly and quickly. A bellows is also used to prevent outer leak from the clearance between the spool and the sleeve. Employing a disturbance observer, the lack of the system damping of the valve is improved by feeding back the estimated velocity of the spool, as well as the estimated disturbance is fed back to eliminate effectively the hysteresis between input voltage and output displacement of the PZT devices.

• 한국군사과학기술학회지
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• 제18권3호
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• pp.213-219
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• 2015

Piezoelectric-based hydraulic actuator is a hybrid device consisting of a hydraulic pump driven by piezoelectric stacks that is coupled to a conventional hydraulic cylinder via a set of fast-acting valves. Nowadays, such hybrid actuators are being researched and developed actively in many developed countries by requirement of high performance and compact flight system. In this research, a piezoelectric hybrid actuator has been designed and tested. To achieve bi-directional capabilities in the actuator, solenoid valves were used to control the direction of output fluid. The experimental testing of the actuator in uni-directional and bi-directional modes was performed to examine performance issues related to the solenoid valves. The results showed that the bi-directional performance was slightly lower than uni-directional performance due to air bubble developed in the valve system. A new design to solve the vacuum problem has been proposed to improve the performance of the hybrid actuator.

• 항공우주시스템공학회지
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• 제12권5호
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• pp.32-39
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• 2018

본 논문에서는 소형 압전유압펌프에 적용된 박판 스프링 형 체크밸브의 변형에 의한 이론적인 압력전달 비율을 계산하였다. 박판 체크밸브는 외력에 의해 변형이 발생하는 유연체이며, 체크밸브의 변형은 챔버 압력이 부하 압력으로 전달되는 비율에 영향을 미친다. 박판 체크밸브를 강체로 가정하였을 때와 유연체 모델일 때의 차이를 비교하기 위해 각각의 모델에 대한 이론적인 압력 전달 비율을 계산하였고, 유연체 체크밸브 모델의 압력 전달 비율 계산을 위해 P-delta 효과를 고려하였다. 또한, 유연체 체크밸브 모델의 변형을 고려하여 계산된 압력 전달 비율의 검증 실험을 수행하였다. 실험에는 박판 스프링 형의 체크밸브와 볼-박판 스프링 형의 체크밸브를 각각 적용하여 부하 압력을 측정하였다. 실험을 통해 얻어진 각각의 부하 압력을 이용하여 실험적인 압력 전달 비율을 계산하였다. 실험으로 얻어진 결과를 이론적으로 계산된 압력 전달 비율과 비교하여 P-delta 효과를 고려한 박판형 체크밸브 압력전달 해석의 타당성을 검증하였다.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2005년도 추계종합학술대회
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• pp.913-916
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• 2005

This paper describes the design, fabrication and characteristics of a piezoelectric valve using MCA(Multilayer ceramic actuator). The MCA valve, which has the buckling effect, consists of three separate structures; MCA, a valve actuator die and an a seat die. The design of the actuator die was done by FEM modeling and displacement measurement, respectively. The valve seat die with 6 trenches was made, and the actuator die, which is driven to MCA under optimized conditions, was also fabricated. After Si-wafer direct bonding between the seat die and the actuator die, MCA was also anodic bonded to the seat/actuator die structure. PDMS sealing pad was fabricated to minimize a leak-rate. It was also bonded to seat die and SUS package. The MCA valve shows a flow rate of 9.13 sccm at a supplied voltage of 100 V with a 50 % duty cycle, maximum non-linearity was 2.24 % FS and leak rate was $3.03{\times}10^{-8}pa$. $m^3/cm^2$.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2009년도 하계학술대회 논문집
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• pp.159-159
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• 2009

Existence of physical moving parts (ex. check valve) produces several problems (mechanical abrasion, deterioration of reliability, limited temperature performances etc.) in driving pumps. To overcome such problems, we proposed a valveless piezoelectric micro-pump which has new type volume transferring mechanism. The proposed micro-pump has a double faced disk type vibrator that can generate peristaltic motion formed by traveling wave in each surface of a disk. This type of micro-pump is able to apply to a fluid supply system that provides two different kinds of fluid simultaneously. In this paper, we propose a simple and novel design of piezoelectric micro-pump that is peristaltically by piezoelectric actuators and allows the removal of the need for valves of other physically moving parts. The finite elements analysis on the proposed pump model was carried out to verify its operation principle using the commercial analysis software.