• Journal of Sensor Science and Technology
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• v.33 no.5
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• pp.353-358
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• 2024

Al-Ni thin films were fabricated using combinatorial sputtering system to realize highly sensitive surface acoustic wave (SAW) devices. The Al-Ni sample library was grown with various chemical compositions and electrical resistivities, which provided important information for selecting the most suitable materials for SAW devices. As acoustic waves generated from piezoelectric materials are significantly affected by the resistivity and density of the interdigital transducer (IDT) electrodes, three types of Al-Ni thin films with different Al contents were fabricated. The thickness of the Al-Ni thin film used in the SAW-IDT electrode was fixed at 100 nm. As the Al content of the Al-Ni film decreased from 79.2 to 24.5 at%, the resistivity increased slightly from 4.8 to 5.8 × 10^-5 Ω-cm, whereas the calculated density increased significantly from 3.6 to 6.9 g/cm³. The SAW device composed of Al-Ni IDT electrodes resonated at 71 MHz without frequency shifts; however, the selectivity of the resonant frequency and insertion loss deteriorated as the Al content decreased. When there is no significant difference in the electrical characteristics of the SAW-IDT electrodes, the performance of the SAW devices can be determined by the density of the IDT electrodes.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.42 no.1
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• pp.9-17
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• 2005

We studied the characteristics of impedance and electromechanical coupling coefficient in ZnO and AIN thin films by using resonance frequency spectrum method. The response peak of impedance decreased with the decrease of thickness of piezoelectrics, the number of mode of response peak decreased with the decrease of substrate thickness. An error of Kt² estimated from input Kt² increased as the thickness of piezoelectrics decreased and the thickness of substrate increased. Also, the error was increased in case of a large acoustic impedance of substrate. It was found that the composite resonator operating in optimized condition could be designed through the resonance frequency spectrum analysis of composited resonator consisted of piezoelectric thin film and substrate.

• Composites Research
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• v.15 no.5
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• pp.7-13
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• 2002

The piezoelectric thin film sensor has good characteristics to observe the impact responses of composite structures. The capabilities for monitoring impact behavior of Gr/Ep laminates subjected to damage-induced impact using the PVDF(polyvinylidene fluoride) film sensor were examined. For a series of low-velocity impact tests from low energy to damage-induced energy, simulated sensor signals were compared with measured signals and the PVDF film sensor. Local impact damages(matrix cracking and delamination) were found at three impact tests, but the measured signals agreed well with the simulated sensor signals based on the linear relationship between the impact forces and the PVDF film sensor signals. And the inverse technique was applied to reconstruct the impact forces using the PVDF film sensor signals. Most of reconstructed impact forces had good agreement with the measured forces. The comparison results showed that the local damage due. to low-velocity impact didn't disturb the global impact responses of composite laminates and the reconstruction of impact forces from PVDF sensor signals wasn't affected by the local damage.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.10 no.12
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• pp.2251-2257
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• 2006

We fabricated ZnO thin film successfully by using RF magnetron sputtering and investigated its potential for being utilized as the key material of piezoelectric device with the characterization of ZnO thin film such as such as crystallinity, surface morphology, c-axis orientation, film density. In thin study, $Ar/O_2$ gas ratio is fixed 70/30, RF power 125W, working pressure 8mTorr, distance between substrate and target 70mm, but the substrate temperature is varied from room temperature to $400^{\circ}C$. The relative intensity ($I_{(002)}/I_{(100)}$) or (002) peak in ZnO thin film deposited at $300^{\circ}$ was exhibited as 94%, then its FWHM was $0.571^{\circ}C$. Also, from the surface morphology evaluated by SEM and AFM, the film deposited at $300^{\circ}C$ showed uniform particle shape and excellent surface roughness of 4.08 m. The tendency of ZnO thin film density was exhibited to be denser with increasing substrate temperature but slightly decreased at near $400^{\circ}C$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.11a
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• pp.45-46
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• 2005

The piezoelectric ZnO thin films were deposited onto Al/Si substrate in order to figure out the crystalline and the residual stress of deposited films. As the $Ar/O_2$ gas ratio is increased, c-axis orientation of deposited films is significantly enhanced and also the residual stresses of ZnO films are all compressive. They are decreased from -1.2 GPa to -950 MPa as the $Ar/O_2$ gas ratio is increased. A diaphragm-based piezoelectric microspeaker fabricated on ONO films shows about 14 mPa output pressure at 1 kHz with $8V_{peak-to-peak}$.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 1996.05a
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• pp.189-192
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• 1996

In this paper ZnO Piezoelectric transducers were fabricated as follows, counter electrode (pt 99.9%) was deposited on the sapphire substrates by DC sputter method, and then piezoelectric layer (ZnO 99.999%) was deposited on the counter electrode according to the sputtering parameters, and then top electrode (pt 99.9%) was deposited on the piezoelectric layer by Electron Beam Gun Evaporator. Structural characteristic of deposited ZnO thin film was measured by XRD, SEM. Also, Frequency characteristic of ZnO transducer was analyzed theoretically and practically for input frequencies.

• Journal of Korea Multimedia Society
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• v.25 no.9
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• pp.1307-1315
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• 2022

In this paper, we proposed and developed a new portable skin elasticity measuring device based on the indentation method using piezoelectric effect. The proposed device is designed to minimize the uncertainty caused by the layer structure of the skin when measuring the elasticity of the skin. And, we developed a piezoelectric-based thin-film pressure sensor that can measure quantitatively and quickly during repeated measurement as a device sensor. To confirm the effectiveness of the proposed measuring device, it was compared with the experimental results of the conventional measuring devices under the same experimental conditions, and statistical correlation analysis was performed between the experimental data of the proposed measuring device and the experimental data of the conventional measuring devices. As a result of the correlation analysis, it was confirmed that the proposed measuring device had a high correlation with the conventional measuring devices. Therefore, it was confirmed that the proposed skin elasticity measuring device was effective.

• Proceedings of the Materials Research Society of Korea Conference
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• 2002.11a
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• pp.106-106
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• 2002

• Journal of information and communication convergence engineering
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• v.7 no.4
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• pp.530-534
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• 2009

C-axis-oriented ZnO thin films were successfully deposited on p-Si (100) in an RF magnetron sputtering system. Deposition conditions such as deposition power, working pressure, and oxygen gas ratio $O_2/(O_2+Ar)$ were varied. Crystalline structures of the deposited ZnO films were investigated by a scanning electron microscope (SEM) technique. Results show that the deposition parameters can have a strong impact on the preferred orientations and grain sizes of the deposited ZnO films.

• Journal of the Korean Ceramic Society
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• v.26 no.5
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• pp.670-676
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• 1989

The PbTiO3 is well known materials having remarkable ferroelectric, piezoelectric, and pyroelectric properties. PbTiO3 thin films with a perovskite structure were successfully fabricated on titanium substrate by chemical vapor deposition. These films were characterized according to composition, crystal structure, and electrical properties. Semi-quantitative compositional analysis of the deposited films was made by Auger Electron Spectroscopy(AES). The PbTiO3 film deposited on titanium substrate at the deposition temperature 75$0^{\circ}C$, the Ti(C2H5O)4 fraction 0.15, and O2 partial pressure 0.06atm, has a columnar structure and grows with(001) preferred orientation, and has stoichiometric composition. A clear dielectric transition and offset in the dc conductivity near the transition temperature(48$0^{\circ}C$) were observed in the deposited lead titanate film.