• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.8-8
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• 2008

Two-dimensional photonic quasicrystal (PQCs) template patterns have been fabricated on a $1.1{\mu}m$-thick DMI-150 photoresist using a multiple-exposure holographic method. A 442-nm HeCd laser was utilized as a light source and the holographic exposure was carried out at a fixed angle of $\theta=6^{\circ}$. After the first holographic exposure, the sample was rotated to a proper angle and the second exposure was performed to the same manner. This exposure process was repeated n/2 times to obtain n-fold symmetric PQC patterns and then the sample was developed. The fabricated PQCs exhibited 8, 10 and 12-fold rotational symmetry and the diffraction patterns using a 632.8-nm HeNe laser were observed for n-rotation symmetry corresponding n-fold PQCs. The fabricated PQC template patterns were examined using scanning electron microscopy(SEM). Transmission spectra were measured fourier transform infrared(FTIR) spectrometer.

• 한국전기전자재료학회논문지
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• 제21권9호
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• pp.829-834
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• 2008

Two-dimensional photonic quasicrystal (PQCs) template patterns have been fabricated on a 1.1 ${\mu}m$-thick DMI-150 photoresist using a multiple-exposure holographic method. A 442-nm HeCd laser was utilized as a light source and the holographic exposure was carried out at a fixed angle of ${\theta}$ = 6$^{\circ}$. After the first holographic exposure, the sample was rotated to a proper angle and the second exposure was performed to the same manner. This exposure process was repeated n/2 times to obtain n-fold symmetric PQC patterns and then the sample was developed. The diffraction patterns of the fabricated PQC template were observed using a 632.8-nm HeNe laser. The fabricated PQCs exhibited 8, 10 and 12-fold rotational symmetry, which was in a good agreement with the interference simulation results. In addition, the diffraction patterns with n-rotation symmetry were observed for the corresponding n-fold PQCs. We believe that the multiple-exposure holography is a good method to fabricate the mesoscale PQCs with a high rotational symmetry.

• 마이크로전자및패키징학회지
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• 제29권1호
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• pp.67-70
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• 2022

본 연구는 최근 유행하고 있는 코로나 바이러스(SARS-CoV-2) UV 살균을 위한 1차원 광자 준결정 구조 개념의 광학 필터를 설계하고 시뮬레이션 하였다. 시뮬레이터는 수치해석 프로그램으로 사용되는 MATLAB 프로그램과 직접 코딩한 연산수식을 사용하였다. 비주기(복합구조) 다중층 구조 모델을 설계한 후, 특성 계산을 위하여 다중층 구조 모델의 물성치를 천이 행렬법(TMM, Transfer Matrix Method)으로 설정하였다. 설계된 복합 다중층 구조의 MATLAB을 활용한 전산모사법을 통하여 얻은 행렬값으로부터 반사도와 투과도를 계산하였다. 이 연구의 결과로 인체에 무해하면서 코로나 바이러스 UV 살균이 가능한 253.7 nm 파장만을 투과하는 광학 필터의 제작 및 응용 가능성을 증명하였다.