• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07a
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• pp.172-176
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• 2002

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structured solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20um width and 3um thickness is electroplated on Cr(300${\AA}$)/Au(1500${\AA}$) films for the pick-up(42turn) and the excitation(24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3 $\mu\textrm{m}$ is obtained under 2000Gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ∼1,100 and coercive field of -0.1Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150V/T at the excitation frequency of 2MHz and the excitation voltage of 4.4Vp-p. The power consumption is estimated to be 50mW.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.2
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• pp.120-124
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• 2003

This paper describes a MEMS-based micro-fluxgate magnetic sensing element using Ni$\_$0.8/Fe$\_$0.2/ film formed by electroplating. The micro-fluxgate magnetic sensor composed of a thin film magnetic core and micro-structure solenoids for the pick-up and the excitation coils, is developed by using MEMS technologies in order to take advantage of low-cost, small size and lower power consumption in the fabrication. A copper with 20${\mu}$m width and 3${\mu}$m thickness is electroplated on Cr (300${\AA}$) / Au (1500${\AA}$) films for the pick-up (42turn) and the excitation (24turn) coils. In order to improve the sensitivity of the sensing element, we designed the magnetic core into a rectangular-ring shape to reduce the magnetic flux leakage. An electroplated permalloy film with the thickness of 3${\mu}$m is obtained under 2000 gauss to induce magnetic anisotropy. The magnetic core has the high DC effective permeability of ~1,100 and coercive field of ~0.1 Oe. The fabricated sensing element using rectangular-ring shaped magnetic film has the sensitivity of about 150 V/T at the excitation frequency of 2 MHz and the excitation voltage of 4.4 V$\_$p p/. The power consumption is estimated to be 50mW.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.07a
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• pp.96-99
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• 2001

The formation of soft magnets on paper(SMOP) is proposed for the first time and we have demonstrated it successfully. Iorn was used to form the soft magnet thin film on paper. And Cr layer was used as a buffer layer because the roughness of substrate(paper) is not negligible. The maximum magnetization of Cr/Fe/Cr/Paper(Fe:5000${\AA}$) is about 1000 [emu/cc] and the coercive field is about 80 [Oe.]. It is necessary to reduce the coercivity and to enlarge the magnetization value of SMOP to perform a good soft magnetic characteristics on paper. On, the permalloy material is the proper candidate for its high permeability, low coercivity and high magnetization values.

• Proceedings of the Korean Magnestics Society Conference
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• 2002.12a
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• pp.186-187
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• 2002

Recently, there has been much interest in magnetic thin film patterned in submicron scale because of possible ultrahigh density storage media or logical device applications [1-3]. Various geometries such as rectangle, circle, ring and ellipse type dots have been studied to find the shape showing stable switching behavior from repeated cycles. However, rectangle and circle types may not be suitable for device applications because they have two uncontrollable different magnetization reversal modes: C state and S state, resulting in different coercivity and irreproducible switching[4]. (omitted)

• Proceedings of the Korean Magnestics Society Conference
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• 2008.12a
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• pp.80.2-80.2
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• 2008

• Journal of Magnetics
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• v.6 no.1
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• pp.9-12
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• 2001

The dependence of the magnetoimpedance effect (MI) on magnetic properties has been investigated in mumetal thin films prepared by rf magnetron sputtering. Coercivity of thin films prepared at 400 W was about 0.4 Oe, and the magnetic anisotropy field of films deposited under a uniaxial magnetic field decreased with increasing film thickness. The saturation magnetization of mumetal films increased with rising input power and thickness and was smaller than that of permalloy films. Transverse incremental Permeability (TPR) of films of 1$\mu m$ thick increased with increasing effective permeability. The magneto impedance ratio (MIR) was proportional to TPR in films 1$\mu m$ thick but in spite of lower effective permeability at higher thicknesses, MIR increased due to skin effect. The height of the double peaks in the MIR curves decreased with decreasing anisotropy and thickness. The maximum MIR value for a 4$\mu m$ thick 75% at 36.5 MHz.

• Journal of the Korean Magnetics Society
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• v.19 no.6
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• pp.197-202
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• 2009

The property of soft magnetism for the Corning glass/non-buffer or buffer Ta/Conetic(NiFeCuMo)/Ta prepared by the ion beam deposition sputtering was studied. The effect of crystal property and post annealing treatment depending on the thickness of Conetic thin films was investigated. The coercivities of Conetic thin films with easy and hard direction along to the applying magnetic field during deposition were compared with each other. The coercivity and magnetic susceptibility of Ta(5 nm)/Conetic(50 nm) thin film were 0.12 Oe and 1.2 ${\times}\;10^4$, respectively. From these results, firstly, the Conetic thin film was more soft magnetism thin film than other one such as permalloy NiFe. Secondly, the usage of soft magnetism Conetic thin film for GMR-SV (giant magneoresistance-spin valve) or MTJ (Megnetic Tunnel Junction) structure in a low magnetic field can be possible.

• Journal of the Korean Magnetics Society
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• v.20 no.1
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• pp.18-23
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• 2010

Ferromagnetic resonance (FMR) measurement is an important experimental technique for the study of magnetic dynamics. We designed and set up the vector network analyzer ferromagnetic resonance (VNA-FMR) measurement system with home made coplanar waveguides (CPW). We examined 10-, 20-, 40-nm thick Py thin films to test the performance of the VNA-FMR measurement system. We measured S-parameter (transmission/reflection coefficient) of Py thin films on a CPW. Resonance frequency is investigated from 2.5 to 7 GHz for a field range from 0 to 490 Oe. The VNA-FMR data shows the resonance frequency increment when the external magnetic field increases. We also investigated Gilbert damping constant of Py thin film using resonance frequency (${\omega}_r$) and linewidth ($\Delta\omega$). After investigating dependence of thickness, we find that an decrease in S-parameter intensity as Py thin film thickness decreases. And the FMR results show that the effective saturation magnetization, $M_{eff}$, increase from 7.205($\pm$0.013) kOe to 7.840($\pm$0.014) kOe, while the film thickness varies from 10 to 40 nm.

• Proceedings of the Korean Magnestics Society Conference
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• 2003.06a
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• pp.272-273
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• 2003

Spin dynamics has been investigated intensively in various kinds of fields. Most popular one is an initial permeability at high frequency. Also, magnetic after-effect such as thermal fluctuation of fine magnetic particles and disaccommodation in soft magnetic materials were extensively studied in the past. When we apply an external farce with the same frequency as that of the system being examined, the system absorbs the external energy and the precession enhances. It is called resonance in general. Among the various resonances, ferromagnetic resonance (FMR) has been used as a good tool to evaluate material constants such as saturation manetization or spin damping parameter by analyzing a resonance curve. In this talk first instinctive understanding of Gilbert spin damping and spin pumping will be explained. Then, experimental data for enhancement of Gilbert damping parameter (G) evaluated from FMR spectrum and spin precession measured by a time resolved pump-probe method for Permalloy thin film will be introduced. Finally, magnetization reversal observed by air-coplanar probe will be given.

• Journal of the Korean Magnetics Society
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• v.16 no.5
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• pp.249-254
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• 2006

CoFeNi alloys are some of the most studied soft magnetic materials because of their superial properties over FeNi alloys as write head core materials in HDD and MEMS. We studied the effect of magnetic property according to size and orientation of crystal for electroplated Co-Fe-Ni alleys. In case of heat treated ternary alloy, it affect the change of crystal size and structure. In this study, it intends to improve the magnetic properties of CoFeNi thin film by heat treatment. Minimized coercivity and increased magnetization are due to heat treatment from $300^{\circ}C\;to\;400^{\circ}C$. As a bcc phase formation, it grow to amount of magnetization.