• 한국생산제조학회지
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• 제18권6호
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• pp.558-564
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• 2009

To aim at obtaining a correct and fine small pattern by an electron beam lithography several conditions and methods affecting a real pattern shape needs to be investigated. A micro/nano sized pattern shape is sometimes dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a $11\times11um$ pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape. It is proved that abrupt change in the pattern generation limits to obtaining a fine and small pattern.

• Current Optics and Photonics
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• 제2권2호
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• pp.172-178
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• 2018

We propose a precise 3D endoscopic technique for medical and industrial applications. As the 3D measuring principle, the continuously scanning structured illumination microscopy (CSSIM), which enables to obtain 3D sectional images by the synchronous axial scanning of the target with the lateral scanning of the sinusoidal pattern, is adopted. In order to reduce the size of the probe end, the illumination and detection paths of light are designed as coaxial and a coherent imaging fiber bundle is used for transferring the illumination pattern to the target and vice versa. We constructed and experimentally verified the proposed system with a gauge block specimen. As the result, it was confirmed that the 3D surface profile was successfully measured with $16.1{\mu}m$ repeatability for a gauge block specimen. In order to improve the contrast of the sinusoidal illumination pattern reflected off on the target, we used polarizing optical components and confirmed that the visibility of the pattern was suitable in CSSIM.

• 한국의학물리학회지:의학물리
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• 제28권3호
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• pp.129-133
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• 2017

The machine log files recorded by a scanning control unit in proton beam therapy system have been studied to be used as a quality assurance method of scanning beam deliveries. The accuracy of the data in the log files have been evaluated with a standard calibration beam scan pattern. The proton beam scan pattern has been delivered on a gafchromic film located at the isocenter plane of the proton beam treatment nozzle and found to agree within ${\pm}1.0mm$. The machine data accumulated for the scanning beam proton therapy of five different cases have been analyzed using a statistical method to estimate any systematic error in the data. The high-precision scanning beam log files in line scanning proton therapy system have been validated to be used for off-line scanning beam monitoring and thus as a patient-specific quality assurance method. The use of the machine log files for patient-specific quality assurance would simplify the quality assurance procedure with accurate scanning beam data.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.847-851
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• 1997

In the stereolithography process, the accuracy of cured shape depends on laser power, scanning speed, scanning pattern, resin characteristics etc. When three-dimensional objects are built, higher laser power gives higher building efficiency. Normally we could control scanning speed and scanning pattern, which affect curing thickness and generate volume of curl in & after building. Oligomer, Monomer and Initiator are major components. Kinds and of them decide characteristic of resin. In this paper, we deak with major facts and their characteristics for precision shape building.

• 한국정밀공학회지
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• 제14권5호
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• pp.15-21
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• 1997

In the stereolithography process, the accuracy of cured shape depends on laser power, scanning speed, scanning pattern, resin characteristics etc. When three-dimensional objects are built, higher laser power gives higher building efficiency. Normally we could control scanning speed and scanning pattern, which affect curing thickness and generate volume of curl in & after building. Olgomer, Monomer and Initiator are major components. Kinds and volume of them decide characteristic of resin. In this paper, we deal with major facts and their characteristics for precision shape building.

• 한국멀티미디어학회논문지
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• 제4권1호
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• pp.29-36
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• 2001

본 논문에서는 회전 주사 패턴을 사용하여 영상 검색을 위한 효율적인 영상 기술 방법을 제안하였다. 본 논문에서 근회전 주사 패턴을 영상 중심부에 위치시키고, 이를 이용하여 공간 칼라 정보를 기술하였다. 사용된 특징은 회전 대표 칼라와 회전 칼라 질감 그리고 회전 칼라 변화도이다. 제안 방식은 영상의 색상 정보와 그와 관련된 국부적 공간 분포를 효율적으로 기술할 수 있었다. 따라서 위 방식은 영상 검색에 있어 기존방식에 비하여 계산량, 메모리 사용량 등을 줄일 수 있었다.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1085-1088
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• 2001

The process of styrofoam pattern that has been used for material of press die pattern depends chiefly on handwork. Laser manufacturing system developed to increase precision and efficiency of process that is also able to convert the design easily. Applying the RP(rapid prototyping) concept reversely, the unnecessary part of section is vapored away by heat source of laser beam after converting 3-D CAD model into cross-sectional shape information. Laser beam is line-scanned in plane specimens to measure the depth and width of cut, surface roughness, cross-sectional shape as converting laser power, scanning speed, cutting gas pressure. With these basic data, plane surface, inclined surface, hole, outer contour trimming process is experimented and optimum condition are obtained. In plane and inclined surface experiments, 15W laser power and 50mm/s scanning speed make superior processing property and 30W, 10mm/s make processing efficiency increase in trimming process. With these results, simple patterns were manufactured and the possibility of applying laser manufacturing system to styrofoam pattern was convinced.

• Journal of Advanced Marine Engineering and Technology
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• 제12권4호
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• pp.32-45
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• 1988

The scanning moire method, in which the master grating is replaced by the scanning line of television camera and in which the moire pattern is obtained by thining out some scanning line, is discussed by the sampling theory. It is determined also by the sampling theory that relationship between the fringe pattern. The programs that analyze the strain by the scanning moire method have been developed. For the simulation model in which we are able to calculate analytically the distribution of strains, the scanning moire method is discussed. It is shown that the small strains and the large strains are analyzed from the same picture by the thinning out technique and that the accuracy of analysis is improved by change of the phase in the thinning out technique.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2004년도 추계학술대회 논문집
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• pp.590-595
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• 2004

The shape and size variations of the nanopatterns produced on a positive photoresist using a near-field scanning optical microscope(NSOM) are investigated with respect to the process variables. A cantilever type nanoprobe having a 100nm aperture at the apex of the pyramidal tip is used with the NSOM and a He-Cd laser at a wavelength of 442nm as the illumination source. Patterning characteristics are examined for different laser beam power at the entrance side of the aperture( $P_{in}$ ), scan speed of the piezo stage(V), repeated scanning over the same pattern, and operation modes of the NSOM(DC and AC modes). The pattern size remained almost the same for equal linear energy density. Pattern size decreased for lower laser beam power and greater scan speed, leading to a minimum pattern width of around 50nm at $P_{in}$ =1.2$\mu$W and V=12$\mu$m/. Direct writing of an arbitrary pattern with a line width of about 150nm was demonstrated to verify the feasibility of this technique for nanomask fabrication. Application on high-density data storage using azopolymer is discussed at the end.

• 한국레이저가공학회지
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• 제18권3호
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• pp.6-8
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• 2015

Finishing process includes deburring, polishing and edge radiusing. It improves the surface profile of specimen and eliminates the alien substance on surface. Deburring is the elimination process for debris of edges. Polishing lubricates surfaces by rubbing or chemical treatment. There are two types for electron finishing. The one is using pulse beam. The other is using the convergent and scanning electron beam. Pulse type device appropriates the large area process. But it does not control the beam dosage. Scanning type device has advantages for dosage control and edge deburring. We design the convergence and scan type. It has magnetic lenses for convergence and scan device for scanning beam. Magnetic lenses consist of convergent and objective lens. The lenses are designed by the specification(beam size and working distance). In this paper, we evaluate the convergence performance by pattern process. Also, we analysis the results and important factors for process. The important factors for process are beam size, pressure, stage speed and vacuum. These results will be utilized into systematizing pattern shape and the factors.