• 제목/요약/키워드: particle deposition

검색결과 570건 처리시간 0.028초

초음속 마이크로노즐에 적합한 프로파일을 위한 공정변수의 최적화

  • 송우진;정규봉;천두만;안성훈;이선영
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2009년도 춘계학술발표대회
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    • pp.38.2-38.2
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    • 2009
  • 마이크로노즐은 우주공간에서 인공위성의 자세를 바로잡는 데 필요한 마이크로 로켓에 들어가는 필수적인 부품이다. 마이크로 노즐은 또한 나노입자 적층 시스템(nano-particle deposition system, NPDS)에 들어갈 수 있다. NPDS는 세라믹 또는 금속 나노분말 입자를 노즐을 통해 초음속으로 가속시킨 뒤 상온에서 이를 기판에 적층시키는 새로운 시스템이다. 본 연구의 목표는 NPDS에 쓰이는 노즐을 일반적인 반도체 공정을 이용하여 마이크론 스케일의 목을 갖도록 한 마이크로노즐을 제작하는 데 있다. 보쉬 공정은 이러한 마이크로노즐을 제작하는데 필수적인 공정으로, 유도결합플라즈마를 이용해 실리콘 웨이퍼를 식각시키는 기술을 말한다. 보쉬 공정에 사용되는 플라즈마 기체는 $SF_6$$C_4F_8$인데, 이 두 가지 기체를 번갈아가면서 사용하여 실리콘 웨이퍼를 이방성 식각하는 것이 그 특징이다. 보쉬 공정에는 다양한 변수가 존재하며 이를 적절히 통제하면 마이크로노즐에 적합한 프로파일을 실리콘 웨이퍼 내에 형성시킬 수 있다. 본 연구에서는 보쉬 공정을 이용하여 3차원 마이크로 노즐을 제작하였다. 기존에 반응성이온식각(deep reactive ion etching, DRIE) 공정을 통해 마이크로노즐을 제작한 사례가 많이 보고되었지만 이들은 모두 2차원적으로 마이크로노즐을 제작하였다. 2차원적으로 제작한 마이크로노즐은 마이크로 로켓에 주로 사용되었지만, 초음속으로 가속된 분말이 노즐의 형상으로 인한 유체 흐름의 불안정성 때문에 NPDS에서는 오래도록 사용할 수 없다는 문제점이 있다. 그러므로 본 연구에서는 마이크로노즐을 3차원 형상으로 제작함으로써 이러한 문제점을 해결하고자 하였다.

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막 오염 저항성이 우수한 나노 소재 정밀 여과막의 특성 연구 (Characterization of the Nano-material U Membranes with Excellent Fouling Resistance)

  • 최정환;이정빈;김인철
    • 멤브레인
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    • 제15권4호
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    • pp.289-296
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    • 2005
  • MBR 공정에서 가장 문제시되는 부분은 실제 공정상에서 막 표면에 오염이 발생하는 문제이다. 일반적으로 막 오염은 활성 슬러지들이 막 표면에 퇴적되어서 일어나며 이로 인해 심각한 투과 유량의 감소를 야기하게 된다. 본 연구에서는 막 오염 저항성이 뛰어난 나노 입자를 분리막 표면에 함침시켜 MBR 막을 제작하였으며 이 입자들은 막 표면에서 활성 슬러지들이 쉽게 달라 붙지 못하는 역할을 수행하게 된다. 즉, 뛰어난 투수량을 지닌 정밀여과막에 나노 입자를 첨가함으로서 실제 MBR 공정에서 막 오염을 저감시킴으로서 투수량을 보전할 수 있게 하였다. 이들을 이용하여 MBR 공정에서 막 오염이 휠씬 적게 일어나는 것을 확인하였으며 이를 바탕으로 현장에 적용하여 막 오염 저항성을 확인하였다.

흑연-금속동 복합분말제조에 관한 연구 (A Stydy on the Preparation of Cu-Graphite Composite Powders)

  • 오종기;김택훈;이화영
    • 한국재료학회지
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    • 제3권2호
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    • pp.103-110
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    • 1993
  • 금속동-흑연복합분말을 제조하기 위하여 염화동을 흑연주위에서 수소환원시킴으로써 흑연표면에 금속동을 석출시키는 새로운 방법으로 흑연-금속동 복합재료를 제조하고자 하였으며, 이를 위해 325 mesh이하의 KISH및 천연흑연을 모재로 하여 350-50$0^{\circ}C$의 환원온도에서 염화동을 환원시키는 실험을 실시하였다. 금속동의 분산도는 환원온도가 낮을수록 양호한 것으로 나타났으며, 금속동의 분산도를 높이기 위해서는 가능한한 환원온도를 낮게하는 것이 유리한 것으로 나타났다.

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$Al_2O_3$로 피복시킨 세라믹 복합분체의 제조 및 특성: (III) $Al_2O_3-ZrO_2$ 복합분체 (Preparation and Characteristics of Ceramic Composite Powders Coated with $Al_2O_3$: (III) Composite Powders of $Al_2O_3-ZrO_2$)

  • 현상훈;이지현;송원선
    • 한국세라믹학회지
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    • 제29권8호
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    • pp.667-673
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    • 1992
  • The alumina-zirconia composite powders of core particle ZrO2 coated with Al2O3 were prepared by the hydrolysis-deposition of the mixed aluminum salt solution of Al2(SO4)3-Al(NO3)3-Urea. The effects of hydrolysis reaction and coating parameters on characteristics of coated powders and composites were also investigated. The degree of coating could be estimated from the ratio of tetra-/mono-ZrO2 present at the room temperature after heat-treating coated powders at 120$0^{\circ}C$ and the result of TEM observations. When the content of ZrO2 in the dispersed coating system, the coating time, and the volume ratio of water/solution were 50 mg/g, 180 min, and 5, respectively the coating efficiency was maximum (the ratio of tetra-/mono-ZrO2 was 87/13). The relative densities of coated Al2O3-ZrO2 composites sintered at 1$650^{\circ}C$ for 4 hrs were about 91~98% and the maximum ratio of tetra-/mono-ZrO2 in Al2O3-20wt% ZrO2 composites was 62/38.

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Tumbling Bed에서 화학증착법에 의해 증착되는 열분해탄소의 특성에 미치는 Silicon-Alloying의 효과 (The Effect of Silicon-Alloying on the Characteristics of the Pyrolytic Carbonds Deposited in Tumbling Bed by CVD)

  • 윤영진;이재영
    • 한국세라믹학회지
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    • 제20권2호
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    • pp.166-172
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    • 1983
  • In this study the sillicon-alloyed isotropic pyrolytic carbon was deposited in the tumbling bed from the pyrolysis of propane and silicon tetrachloride and investigated whether the silicon-alloyed isotropic pyrolytic carbon deposited in this study was usable as bionaterial or not. The silicon-allyed isotropic pyrolytic carbon was varied by controlling the process variables such as propane con-concentration and the argon flow rate flowing in to the silicon tetrachloride bubbler at a fixed reaction bed tempera-ture of 120$0^{\circ}C$ a rotation of reaction tube of 40 rpm a bed particle weight of 7.5 g and a total flow rate of 21/min; the propane concentration was varied from 10 to 70 and the argon flow rate flowing into the silicon tetrachloride bubble from 0 to 1000 cc/min. The results show that the silicon-alloyed isotropic pyrolytic carbon was obtained at all conditions investigated, . And then the alloyed silicon content is rangion from 7 to 14.5 wt%. The density and deposition rate of deposited silicon-alloyed isotropic carbon increased axxording to silicon content and propane concentration. And the apparent crystal-size(Lc) of pyrolytic carbon is not changed with silicon content. The density and apparant crystallite size are respec-tively in the range of 1.94 to 2.06 and 20 to 25$\AA$ It is shown that the silicon-alloyed isotropic pyrolytic carbon ob-tained in this experiment is usable as biomaterial.

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국산동판을 사용한 리드프레임 도금기술에 관한 연구 (Electroplating on the Lead Frames Fabricated from Domestic Copper Plate)

  • 장현구;이대승
    • 한국표면공학회지
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    • 제19권3호
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    • pp.92-108
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    • 1986
  • An electroplating on the lead frame fabricated from domestic copper plate was studied experimentally. In this study, nickel was plated on the thin copper lead frame and silver layer was coated on the nickel film in the cyanide electrolyte. The effect of process variables such as current density, plating time, coating thickness and flow rate of electrolytic solution on the properties of coating was investigated. Some samples on each step were fabricated during electroplating. The results obtained from polarization measurement, observation of SEM photograph, adhesion test of coating and microhardness test are as follows. On silver plating, polarization resistance of potentiostatic cathodic polarization curve is reduced as the flow rate of Ag electrolytic solution increases. And above resistance is also reduced when the minor chemicals of sodium cyanide and sodium carbonate are added in potassium silver cyanide bath. The reduced polarization resistance makes silver deposition on the cathode easy. An increase in the current density and the coating thickness causes the particle size of deposit to coarsen, and consequently the Knoop microhardness of the coating decreases. On selective plating an increase in the flow rate of plating solution lead to do high speed plating with high current density. In this case, the surface morphology of deposit is of fine microstructure with high Knoop hardness. An increasing trend of the adhesion of coating was shown with increasing the current density and flow rate of electrolytic solution.

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Electrochemical Characteristics of HA Film on the Ti Alloy Using Pulsed Laser Deposition

  • Jeong, Yong-Hoon;Shin, Seung-Pyo;Chung, Chae-Heon;Kim, Sang-Sub;Choe, Han-Cheol
    • 대한금속재료학회지
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    • 제50권5호
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    • pp.395-400
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    • 2012
  • In this study, we have investigated the surface morphology of hydroxyapatite (HA) coated Ti alloy surface using pulsed laser plating. The HA (tooth ash) films were grown by pulsed KrF excimer laser, film surfaces were analyzed for topology, chemical composition, crystal structure and electrochemical behavior. The Ti-6Al-4V alloy showed ${\alpha}$ and ${\beta}$ phase, Cp-Ti showed ${\alpha}$ phase and the HA coated surface showed HA and Ti alloy peaks. The HA coating layer was formed with $1-2{\mu}m$ droplets and grain-like particles, particles which were smaller than the HA target particle, and the composition of the HA coatings were composed of Ca and P. From the electrochemical test, the pitting potential (1580 mV) of HA coated Ti-6Al-4V alloy was higher than those of Cp-Ti (1060 mV) and HA coated Cp-Ti (1350 mV). The HA coated samples showed a lower current density than non-HA coated samples, whereas, the polarization resistance of HA coated samples showed a high value compared to non-HA coated samples.

Synthesis of Monodispersed and Spherical $SiO_2-coated Fe_2O_3$ Nanoparticle

  • 한양수;윤선미;김동국
    • Bulletin of the Korean Chemical Society
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    • 제21권12호
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    • pp.1193-1198
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    • 2000
  • The preparation of nanocrystalline hematite, ${\alpha}-Fe_2O_3$, paricles and their surface coating with silica layers are described. The hematite particles with the size of 30~60 nm are firstly prepared by thermal decomposition of trinuclear acetate-hydroxo iron (III) nitrate complex, $[Fe_3$(OCOCH_3)_7$OH${\cdot}$2H_2O]NO_3$, at $400^{\circ}C$. Subsequently the hematite surfaces are coated with siliva layers by a controlled hydrolysis and condensation reaction of TEOS with varying the TEOS concentration and pH. Monodispersed and spherical $SiO_2-coatedFe_2O_3$ particles with the average particle diameter of ~90 nm and extremely narrow size distribution can be obtained at the pH of 11 and the TEOS concentration of 0.68M, which are found to be the optimum conditions in the present study in achieving the homogeneous deposition of silica layers on hematite surfaces. Diffuse reflectance UV-Vis spectra reveal that the characteristic optical reflectance of ${\alpha}-Fe_2O_3$ particles is preserved almost constant even after coating the surfaces, suggesting that the $SiO_2$ layers can be regarded as protecting layers without degrading the optical properties of hematite particles.

SMG 유체를 이용한 전단형 댐퍼의 제어성능평가 (Control Performance Evaluation of Shear Type Damper using SMG Fluid)

  • 허광희;전승곤;서상구;김대혁
    • 한국지진공학회논문집
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    • 제23권2호
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    • pp.141-147
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    • 2019
  • This research focuses on developing the Smart material with Grease adopted as a base oil to overcome a particle deposition caused by the MR fluid consisting of a silicon, which maximizing the characteristics and advantage of the MR fluid. By adopting the SMG fluid to a shear damper, this paper aimed to evaluate the control performance of it according to the variation of intensity of electric current(0 A, 0.5 A, 1.0 A, 1.5 A, 2.0 A, 2.5 A) and frequency(0.5 Hz, 1 Hz, 2 Hz). Subsequently, the usability of the SMG damper was analyzed by comparing the dynamic model of it to that of the other types of dampers(Power(Involution) Model, Bingham Model). As a result, DR, the performance indicator of semi-active damper, shows approximately 5 in a condition of 2 Hz. Also while confirming the excellent performance like the Power and the Bingham model, it raises the possibility to exploit it as the semi-active damper.

탄소나노튜브 표면의 무전해 니켈입자 코팅 (Nickel Particle Coatings by Electroless Plating onto Carbon Nanotubes)

  • 조규섭;임정규;장훈;최경환
    • 대한금속재료학회지
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    • 제48권5호
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    • pp.462-468
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    • 2010
  • Carbon Nanotubes (CNTs) have recently emerged as a material with outstanding properties. It has shown promising potential for applications in many engineering fields as electronic devices, thermal conductors, and light-weight composites. Researchers have investigated their use as reinforcements in themetal matrix composites of CNTs. In the present work, we decorated CNTs with Ni particles by electroless plating. The CNTs were wet-ball milled for various milling times with a nickel sulfate solution. The precipitated Ni particles were observed mainly by FESEM. In this study, the dispersion of the CNTs and Ni particles was improved with the addition of the surfactant. Also, as the CNTs were shortened and widened by an increased ball milling time, the size of the precipitated Ni particles increased. It was estimated that the CNTs were deformed and caused some defects on their surface during the ball milling process. Those defects were assumed to be heterogeneous nucleation sites for the Ni particles.