• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 추계학술대회 논문집 Vol.21
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• pp.123-123
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• 2008

In this work, amorphous carbon thin films were deposited for hard mask applications by a reactive particle beam (RPB) assisted sputtering system at room temperature. The depositing characteristics of the films were investigated as functions of operating parameters such as reflector bias voltage and RF plasma power. It was confirmed that the deposition rate increased with increasing the reflector bias voltage and RF plasma power. By an atomic force microscope (AFM), it was revealed that the surface roughness was also increased. The total stress in films was determined by the use of the substrate curvature and its result will be discussed.

• Journal of Korean Society for Atmospheric Environment
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• 제20권E1호
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• pp.35-41
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• 2004

Aerosol wall loss is an important factor affecting smog chamber experiments, especially with chambers made of Teflon film. In this work, the aerosol wall loss was investigated in 2.5 and $5.8-m^3$ cubic-shaped Teflon film chambers filled with ambient air. The natural change in the particle size distribution was measured using a scanning mobility particle sizer in a dark environment. The rate of aerosol wall loss was obtained from the deposition theory suggested by Crump and Seinfeld (1981). The measured rates of aero-sol wall loss were In a good agreement with the theoretical and experimental values given by McMurry and Rader (1985), implying that the electrostatic effect enhances particle deposition on the chamber wall. The significance of aerosol wall loss correction was demonstrated with the photochemical reaction experiments using the ambient air.

• 한국세라믹학회지
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• 제44권3호
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• pp.169-174
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• 2007

TRISO coated fuel particle is one of the most important materials for hydrogen production using HTGR (high temperature gas cooled reactors). It is composed of three isotropic layers: inner pyrolytic carbon (IPyC), silicon carbide (SiC), outer pyrolytic carbon (OPyC) layers. In this study, TRISO coated fuel particle layers were deposited through CVD process in a horizontal hot wall deposition system. Also the computational simulations of input gas velocity, temperature profile and pressure in the reaction chamber were conducted with varying process variable (i.e temperature and input gas ratios). As deposition temperature increased, microstructure, chemical composition and growth behavior changed and deposition rate increased. The simulation showed that the change of reactant states affected growth rate at each position of the susceptor. The experimental results showed a close correlation with the simulation results.

• 한국연소학회:학술대회논문집
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• 한국연소학회 2007년도 제34회 KOSCO SYMPOSIUM 논문집
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• pp.19-24
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• 2007

The deposition behavior of soot particles in a diffusion flame along a solid wall was examined experimentally by getting rid of the effect of natural convection utilizing microgravity environment. The microgravity environment was realized by using a drop tower facility. The fuel for the flame was an ethylene ($C_2H_4$) and the surrounding oxygen concentration 35% with the surrounding air velocity of $V_a$=2.5, 5, and 10 cm/s. Laser extinction method was adopted to measure the soot volume fraction distribution between the flame and burner wall. The results show that observation of soot deposition in normal flame was difficult from buoyancy and the relative position of flame and solid surface changes with time. The soot particle distribution region moves closer to the surface of the wall as the surrounding air velocity is increased. And the experiments determined the trace of the maximum soot concentration line. It was found that the distance between soot line and flame line is around 5 mm. That is, the soot particle near the flame zone tends to move away from flame zone because of thermophoretic force and to concentrate at a certain narrow area inside of the flame, finally, to adhere the solid wall.

• Environmental Engineering Research
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• 제12권3호
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• pp.118-127
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• 2007

Between June and November 2002, the atmospheric concentrations and dry deposition fluxes of polycyclic aromatic hydrocarbons (PAHs) in Chonju were measured four times each over five days. The total concentration of PAHs in ambient air was $84\;ng/m^3$, with about 90% existing in the vapor phase. Plots of log ($K_p$) vs. log (${P_L}^0$) indicated that PAHs partitioning was not in equilibrium and the particulate characteristics did not change with seasonal variations. The PAHs fluxes to a water surface sampler (WSS) and a dry deposition plate (DDP) were about 14.15 and $1.92\;{\mu}g/m^2/d$, respectively. The flux of the gaseous phase, acquired by subtracting the DDP from the WSS results, was about $12.23\;{\mu}g/m^2/d$. A considerable correlation was shown between the atmospheric concentrations and deposition fluxes in the gaseous phase, but not in the particulate phase, as the fluxes of the particulate phase were dependent on the physical velocity differences of the particulates based on the particle diameter.

• 한국입자에어로졸학회지
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• 제9권3호
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• pp.127-132
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• 2013

Recently, Aerosol Deposition method has attracted considerable attention because of its advantages to produce ceramic coatings on various substrates at room temperature. This method is strongly dependent on the raw powder, which should have high mobility with carrier gas and moderate mechanical strength to be crushed onto the substrate. In this report, the effects of the ceramic granules' compressive strength on the ceramic coating formation are discussed. The ceramic granules were prepared by spray-drying method and heat treated at various temperatures. It was found that at the moderate mechanical strength of ceramic granules gave more effective film formation behavior during Aerosol Deposition method.

• 한국화재소방학회논문지
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• 제21권2호
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• pp.64-73
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• 2007

호흡기 내에서 유해물질의 체내흡수 및 방어특성은 영역별로 다르며 흡입연기의 장 단기 인체 유해성은 연기의 호흡기 내 침착위치 및 침착밀도와 밀접한 관계를 가지고 있다. 이 연구에서는 미소부피 위치 추적법을 이용한 입자침착율 계산 기법을 사용하여 휴식 및 가벼운 운동에 해당하는 호흡조건별로 또한 구강 및 비강 호흡별로 각 입자크기에 대하여 호흡기 각 영역별로 단위 면적당 침착분율 등 침착 특성을 구하였다. 이 결과는 연기에 흡착된 유해물질의 체내 흡수량 산정 등에 이용되어 연기의 인체 유해성 판정에 도움을 줄 수 있을 것으로 판단된다.

• 한국전기전자재료학회논문지
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• 제26권1호
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• pp.6-12
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• 2013

Aerosol deposition(AD) coating that enable fabricate films at low temperature have begun to be widely researched for the integration of ceramics as well to realize high-speed deposition rates. For application of ceramic thick film by AD to display and electronic ceramic industry, fabrication of dense structure with a no cracking is required. In this study, to fabricate dense ceramic thick film, the effect of crystal phase of starting powder was investigated. For this study, amorphous and crystalline $SiO_2$ powders were used as starting powders. Two types of $SiO_2$ powders were deposited on glass substrate by AD. In the case of amorphous $SiO_2$ powder, the deposited films had extremely incompact and opaque layer, irrespective of particle size. In contrast to amorphous powder, in the case of crystalline powder, porous structure layer and dense microstructure with no cracking layer were fabricated depending on the particle size. The optimized starting powder size for dense coating layer was $1{\sim}2{\mu}m$. The transmittance of film reached a maximum of 76% at 800 nm.

• 한국대기환경학회지
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• 제28권3호
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• pp.294-305
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• 2012

The objective of this study is to estimate the chemical compositions and to identify qualitative sources of fall-out particles in study area. Also, this study used a spatial analysis to estimate spatial distributions and average deposition flux. In this study, the chemical compositions of fall-out particle samples collected at Muncheon lake from May 2010 to January 2011 were analyzed by ICP and IC. The monthly trend of deposition fluxes for fall-out particles showed highest in June ($107.61kg/km^2/day$) and lowest in October ($22.22kg/km^2/day$). The average fluxes of Fe, Si, Al, Zn and Ba are 0.44, 0.24, 0.20, 0.17, $0.09kg/km^2/day$, respectively. Also, the average fluxes of $NO_3^-$, $SO_4^{2-}$, $NH_4^+$, $Ca^{2+}$, and $Na^+$ are 6.48, 5.01, 4.96, 1.75, $1.37kg/km^2/day$, respectively. A Factor analysis identified four sources such as 1) nonferrous metal, motor vehicle, and agriculture, 2) soil, 3) field burning, incineration, and 4) road dust and oil burning. The IDW (inverse distance weighting) spatial analysis method was used to estimate spatial distribution and average deposition flux for fall-out particles. A total average deposition fluxes estimated in Muncheon lake were 936.15 kg/month. The spatial distribution trend of deposition flux showed higher at site 1 and 2 than at site 3, 4 because local road is adjacent to the site 1 and 2.

• 한국분말재료학회지
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• 제21권6호
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• pp.434-440
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• 2014

Silicon carbide(SiC) layer is particularly important tri-isotropic (TRISO) coating layers because it acts as a miniature pressure vessel and a diffusion barrier to gaseous and metallic fission products in the TRISO coated particle. The high temperature deposition of SiC layer normally performed at $1500-1650^{\circ}C$ has a negative effect on the property of IPyC layer by increasing its anisotropy. To investigate the feasibility of lower temperature SiC deposition, the influence of deposition temperature on the property of SiC layer are examined in this study. While the SiC layer coated at $1500^{\circ}C$ obtains nearly stoichiometric composition, the composition of the SiC layer coated at $1300-1400^{\circ}C$ shows discrepancy from stoichiometric ratio(1:1). $3-7{\mu}m$ grain size of SiC layer coated at $1500^{\circ}C$ is decreased to sub-micrometer (< $1{\mu}m$) $-2{\mu}m$ grain size when coated at $1400^{\circ}C$, and further decreased to nano grain size when coated at $1300-1350^{\circ}C$. Moreover, the high density of SiC layer (${\geq}3.19g/cm^3$) which is easily obtained at $1500^{\circ}C$ coating is difficult to achieve at lower temperature owing to nano size pores. the density is remarkably decreased with decreasing SiC deposition temperature.