• Title/Summary/Keyword: parameters back analysis

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Wafer state prediction in 64M DRAM s-Poly etching process using real-time data (실시간 데이터를 위한 64M DRAM s-Poly 식각공정에서의 웨이퍼 상태 예측)

  • 이석주;차상엽;우광방
    • 제어로봇시스템학회:학술대회논문집
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    • 1997.10a
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    • pp.664-667
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    • 1997
  • For higher component density per chip, it is necessary to identify and control the semiconductor manufacturing process more stringently. Recently, neural networks have been identified as one of the most promising techniques for modeling and control of complicated processes such as plasma etching process. Since wafer states after each run using identical recipe may differ from each other, conventional neural network models utilizing input factors only cannot represent the actual state of process and equipment. In this paper, in addition to the input factors of the recipe, real-time tool data are utilized for modeling of 64M DRAM s-poly plasma etching process to reflect the actual state of process and equipment. For real-time tool data, we collect optical emission spectroscopy (OES) data. Through principal component analysis (PCA), we extract principal components from entire OES data. And then these principal components are included to input parameters of neural network model. Finally neural network model is trained using feed forward error back propagation (FFEBP) algorithm. As a results, simulation results exhibit good wafer state prediction capability after plasma etching process.

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The method to estimate 3-D coordinates of lower trunk muscles using orientation angles during a motion (몸통 운동시 지향각(Orientation angles)을 이용한 허리 근육의 3차원 위치 좌표 추정 기법)

  • Lim, Young-Tae
    • Korean Journal of Applied Biomechanics
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    • v.12 no.1
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    • pp.125-133
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    • 2002
  • The purpose of this study was to develop a method for estimating 3-D coordinates of lower trunk muscles using orientation angles during a motion. Traditional 3-D motion analysis system with DLT technique was used to track down the locations of eight reference markers which were attached on the back of the subject. In order to estimate the orientations of individual lumbar vertebrae and musculoskeletal parameters of the lower trunk muscle, the rotation matrix of the middle trunk reference frame relative to the lower trunk reference frame was determined and the angular locations of individual lumbar vertebrae were estimated by partitioning the orientation angles (Cardan angles) that represent the relative angles between the rotations of the middle and lower trunks. When the orientation angles of individual intervertebral joints were known at a given instant, the instantaneous coordinates of the origin and insertion for all selected muscles relative to the L5 local reference frame were obtained by applying the transformation matrix to the original coordinates which were relative to a local reference frame (S1, L4, L3, L2, or L1) in a rotation sequence about the Z-, X- and Y-axes. The multiplication of transformation matrices was performed to estimate the geometry and kinematics of all selected muscles. The time histories of the 3-D coordinates of the origin and insertion of all selected muscles relative to the center of the L4-L5 motion segment were determined for each trial.

Process and Performance Analysis of a-Si:H/c-Si Hetero-junction Solar Sells Prepared by Low Temperature Processes (저온 공정에 의한 a-Si:H/c-Si 이종접합 태양전지 제조 및 동작특성 분석)

  • Lim, Chung-Hyun;Lee, Jeong-Chul;Jeon, Sang-Won;Kim, Sang-Kyun;Kim, Seok-Ki;Kim, Dong-Seop;Yang-Sumi;Kang-Hee-Bok;Lee, Bo-young;Song-Jinsoo;Yoon-Kyung-Hoon
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.06a
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    • pp.196-200
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    • 2005
  • In this work, we investigated simple Aㅣ/TCO/a-Si:H(n)/c-Si(p)/Al hetero-junction solar cells prepared by low temperature processes, unlike conventional thermal diffused c-Si solar cells. a-Si:H/c-Si hetero-junction solar cells are processed by low temperature deposition of n-type hydrogenated amorphous silicon (a-Si:H) films by plasma-enhanced chemical vapor deposition on textured and flat p-type silicon substrate. A detailed investigation was carried out to acquire optimization and compatibility of amorphous layer, TCO (ZnO:Al) layer depositions by changing the plasma process parameters. As front TCO and back contact, ZnO:Al and AI were deposited by rf magnetron sputtering and e-beam evaporation, respectively. The photovoltaic conversion efficiency under AMI.5 and the quantum efficiency on $1cm^2$ sample have been reported. An efficiency of $12.5\%$ is achieved on hetero-structure solar cells based on p-type crystalline silicon.

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Development of Precise Point Positioning Method Using Global Positioning System Measurements

  • Choi, Byung-Kyu;Back, Jeong-Ho;Cho, Sung-Ki;Park, Jong-Uk;Park, Pil-Ho
    • Journal of Astronomy and Space Sciences
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    • v.28 no.3
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    • pp.217-223
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    • 2011
  • Precise point positioning (PPP) is increasingly used in several parts such as monitoring of crustal movement and maintaining an international terrestrial reference frame using global positioning system (GPS) measurements. An accuracy of PPP data processing has been increased due to the use of the more precise satellite orbit/clock products. In this study we developed PPP algorithm that utilizes data collected by a GPS receiver. The measurement error modelling including the tropospheric error and the tidal model in data processing was considered to improve the positioning accuracy. The extended Kalman filter has been also employed to estimate the state parameters such as positioning information and float ambiguities. For the verification, we compared our results to other of International GNSS Service analysis center. As a result, the mean errors of the estimated position on the East-West, North-South and Up-Down direction for the five days were 0.9 cm, 0.32 cm, and 1.14 cm in 95% confidence level.

THE QUALITY PROPERTIES FOR FLY ASH OF COMBINED HEAT POWER PLAINT AND MECHANANICAL PROPERTIES IN CONCRETE (열병합발전소 플라이애쉬 품질 및 콘크리트의 역학적 특성)

  • Lee, Sang-Soo;Back, Myung-Jong;Won, Cheol;Ahn, Jae-Hyen;Park, Chil-Lim
    • Proceedings of the Korea Concrete Institute Conference
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    • 1995.10a
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    • pp.69-74
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    • 1995
  • The primary purpose of this study is to investigate reusal techniques of fly ash of combined heat power plant in the construction field, which may contribute to the saving of construction materials and conservating environment. Firstly chemical and physical characteristics of fly ash is analysed. And then, the usability of the concrete is tested by investigating the flowablility and stength development through parameters of various replacement ratios with respect to different mixing conditions. Finally, the durability and mechanical properties(elastic modulus) of the concrete is tested. As the result of the study, the following conclusions are derived : (1) the quantity of the CaO in the fly ash is relatively high based on the chemical analysis, (2)the compressive strength ratio of the mortar is satisfied with the specification, but the unit water ratio increased, (3)high strength concrete of more than 400kg/$\textrm{cm}^2$ can be developed in the ranges of FA 30%, W/B 40%, (5)the slump loss with the elapsed time due to the delivery is decreased as the replacement ratio of the fly ash is increased, (6)the modulus of the elasticity is matched withn the specification of the Architectural Institute of Korea.

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Elastic buckling of end-loaded, tapered, cantilevered beams with initial curvature

  • Wilson, James F.;Strong, Daniel J.
    • Structural Engineering and Mechanics
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    • v.5 no.3
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    • pp.257-268
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    • 1997
  • The elastic deflections and Euler buckling loads are investigated for a class of tapered and initially curved cantilevered beams subjected to loading at the tip. The beam's width increases linearly and its depth decreases linearly with the distance from the fixed end to the tip. Unloaded, the beam forms a circular are perpendicular to the axis of bending. The beam's deflection responses, obtained by solving the differential equations in closed form, are presented in terms of four nondimensional system parameters: taper ratio ${\kappa}$, initial shape ratio ${\Delta}_0$, end load ratio f, and load angle ${\theta}$. Laboratory measurements of the Euler buckling loads for scale models of tapered initially straight, corrugated beams compared favorably with those computed from the present analysis. The results are applicable to future designs of the end structures of highway guardrails, which can be designed to give the appropriate balance between the capacity to deflect a nearly head-on vehicle back to its right-of-way and the capacity to buckle sufficiently that penetration of the vehicle may be averted.

The LAE Burn Strategy Planning for Geostationary Satellite (정지궤도 위성의 LAE Burn Strategy Planning)

  • Kim, Bang-Yeop;Lee, Ho-Hyoung
    • Aerospace Engineering and Technology
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    • v.6 no.2
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    • pp.96-103
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    • 2007
  • A program for LAE (liquid Apogee Engine) firing strategy calculation was developed. This program can be used as the first stage of transfer orbit analysis, which process receives input parameters as like initial orbit elements, ground TT&C stations positions, satellite performances and makes firing user-selectable strategies. The developed program is dedicated to GEO satellites which using LAE generally and it can calculate six back-up strategies and deals situation its maximum firing number is six. The MS-EXCEL software was used for the input and output process. And the numerical calculation part was embodied with MATLAB functions.

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An Approach to Ergonomics Evaluation of Grip Strength - Case by the Manual Lifting - (악력의 인간공학적 평가를 위한 접근 방법 -들기 작업 자세의 경우-)

  • Yang, S.H.;Kal, W.M.;Park, P.
    • Journal of the Korean Society of Safety
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    • v.12 no.4
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    • pp.209-213
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    • 1997
  • Manual lifting techniques are commonly defined in terms of the postures adopted at the start of the lift. Quantitative definition is problematic, however, because the absolute joint angles adopted to lift an object are influenced by task parameters, such as the initial height of the load. The main objective of this study is to investigate the grip strength of the both hands at the initial lifting points. The survey is conducted by measuring the compression force, anthropometric data and grip strength at the lifting postures for the subjects(n=50) who is assigned to their job as usual. The experiment is peformed at the four lifting postures which involving the combination of two horizontal factors(H1 : 35 cm, H2 : 55 cm) and two vertical factors(V1 : 20~80 cm, V2 : 47~102 cm). The analysis result of lifting posture indicated that each H1-V1, H2-V1 combinations are about 60$^{\circ}$ and each H1-V2, H2-V2 combinations are about $30^{\circ}$. There are significant differences on grip strength between $60^{\circ}$ and $30^{\circ}$ stooped posture. The results of this study can be provided a method defining lifting postures at the minimum grip strength. Also, it is eliminated a hazard of the injuries which are cumulative trauma disorders(CTDs) and back pain, increased a productivity and improved a welfare of workers.

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A Study of Estimation of the Arc Stability in Short-circuition Transfer Region of GMA Welding Using Multi-layer Perceptrons (다층 신경회로망을 이용한 GMA 용접 단락이행영역에서의 아크 안정성 평가)

  • 강문진;이세헌;엄기원
    • Journal of Welding and Joining
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    • v.17 no.5
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    • pp.98-106
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    • 1999
  • In GMAW, the spatters are generated according to the variation of the arc. Of the arc is stable, Few spatters are generated. But if unstable, too many spatters are generated. So, this means the spatters are dependent on the arc state. The aim of this study is to accurately estimate the arc state. To do this, the generated spatters were captured under the some welding conditions, and the waveforms of the arc voltage and welding current were collected. From the collected signals, the waveform factors and their standard deviations were extracted. Using these factors as input parameters of multi-layer artificial neural network, the learning for the weight of the generated spatters is performed and the estimation results to the real spatter are assessed. Obtained results are as follow: the linear correlation coefficient between the estimated result and the real spatters was 0.9986. And although the average convergence error was set 0.002, the estimated error to the real spatter was within 0.1 gr/min at each welding condition. In the estimation for the weight generated spatters, the result with multi-layer neural network was far better than with multiple regression analysis. Especially, even though under the welding condition which the arc state is unstable (the spatter is generated much more), very excellent estimation performance was shown.

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Hydrodynamics and parametric study of an activated sludge process using residence time distribution technique

  • Sarkar, Metali;Sangal, Vikas K.;Bhunia, Haripada
    • Environmental Engineering Research
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    • v.25 no.3
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    • pp.400-408
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    • 2020
  • Hydrodynamic study of Activated Sludge Process (ASP) is important to optimize the reactor performance and detect anomalies in the system. Residence time distribution (RTD) study has been performed using LiCl as tracer on a pilot scale aeration tank (AT) and ASP, treating the pulp and paper mill effluent. The hydraulic performance and treatment efficiency of the AT and ASP at different operating parameters like residence time, recycle rate was investigated. Flow anomalies were identified and based on the experimental data empirical models was suggested to interpret the hydrodynamics of the reactors using compartment modelling technique. The analysis of the RTD curves and the compartment models indicated increase in back-mixing ratio as the mean hydraulic retention time (MHRT) of the tank was increased. Bypassing stream was observed at lower MHRT. The fraction of dead zone in the tank increased by approximate 20-25% with increase in recycle rate. The fraction of the stagnant zone was found well below 5% for all performed experiments, which was under experimental error. The substrate removal of 91% for Chemical oxygen demand and 96% for Biochemical oxygen demand were observed for the ASP working at a hydraulic mean residence time 39 h MRT with a 20% recycling of activated sludge.