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RIE기반 저결함 결정질실리콘 표면 Texturing패턴 연구

  • Jeong, Ji-Hui;Yun, Gyeong-Sik;Lee, Byeong-Chan;Park, Gwang-Muk;Lee, Myeong-Bok
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.283-283
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    • 2010
  • 17~18% 대역의 고효율 결정질실리콘 태양전지를 양산하기 위하여 국내외에서 다양한 연구개발이 수행되고 있으며 국내 다결정실리콘 태양전지 양산에서도 새로운 구조와 개념에 입각한 공정기술과 관련 장비의 국산화에 집중적인 투자를 진행하고 있다. 주지하는 바와 같이, 태양전지의 광전효율은 표면에 입사되는 태양광의 반사를 제외하면 흡수된 광자에 의해 생성되는 전자-정공쌍의 상대적인 비율인 내부양자효율에 의존하게 된다. 실제 생성된 전자-정공쌍은 기판재료의 결정상태와 전기광학적 물성 등에 의해 일부가 재결합되어 2차적인 광자의 생성이나 열로서 작용하고 최종적으로 전자와 정공이 완전히 분리되고 전극에 포집되어 실질적인 유효전류로 작용한다. 16% 이상의 고효율 결정질 실리콘 태양전지 양산이 요구되고 있는 현실에서 광전효율 개선 위해 가장 우선적으로 고려되어야 할 변수는 입력 태양광스펙트럼에 대한 결정질 실리콘 표면반사율을 최소화하여 광흡수를 극대화하는 것이라 할 수 있다. 현재까지 다결정 실리콘 표면을 화학적으로 혹은 플라즈마이온으로 50-100nm 직경의 바늘형 피라미드형상으로 texturing 함으로 단파장대역에서 광반사율의 감소를 기대할 수 있기 때문에 결정질실리콘 태양전지효율 개선에 긍정적인 영향을 미치는 것으로 알려져 있다. 고효율 다결정실리콘 태양전지 양산공정에 적용하기 위해 마스크를 사용하지 않는, RIE기반 건식 저반사율 결정질실리콘 표면 texturing 패턴연구를 수행하였다. 마스크없이 표면 texturing이 완료된 시료들에 대하여 A1.5G 표준태양광스펙트럼의 300-1100nm 파장대역에서 반사율과 minority carrier들의 life time 분포를 측정하고 검토하여 공정조건을 최적화 하였다. 저반사율의 건식 결정질실리콘 표면 texturing에 가장 적합한 플라즈마파워는 100W 내외로 낮았고 $SF_6/O_2$ 혼합비율은 0.8~0.9 범위엿다. 본 연구에서 확인된 최적의 texturing을 위한 플라즈마공정 조건은 이온에 의한 Si표면원자들의 스퍼터링과 화학반응에 의한 증착이 교차하는 상태로서 확인된 최저 평균반사율은 ~14% 내외였고 p-형 결정질실리콘 표면 texturing 패턴과 minority carrier의 life time 상관는 단결정이 16uS대역에서 14uS대역으로 감소하는 반면에서 다결정은 1.6uS대역에서 1.7uS대역으로 오히려 미세한 증가를 보여 다결정 웨이퍼생산과정에서 발생하는 saw-damage 제거의 긍정적 효과와 texturing공정의 표면 결함발생에 의한 부정적 효과가 상쇄되어 큰 변화를 보이지 않는 것으로 해석된다.

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Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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Adenosine A3 Receptor Mediates ERK1/2- and JNK-Dependent TNF-α Production in Toxoplasma gondii-Infected HTR8/SVneo Human Extravillous Trophoblast Cells

  • Ye, Wei;Sun, Jinhui;Li, Chunchao;Fan, Xuanyan;Gong, Fan;Huang, Xinqia;Deng, Mingzhu;Chu, Jia-Qi
    • Parasites, Hosts and Diseases
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    • v.58 no.4
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    • pp.393-402
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    • 2020
  • Toxoplasma gondii is an intracellular parasite that causes severe disease when the infection occurs during pregnancy. Adenosine is a purine nucleoside involved in numerous physiological processes; however, the role of adenosine receptors in T. gondii-induced trophoblast cell function has not been investigated until now. The goal of the present study was to evaluate the intracellular signaling pathways regulated by adenosine receptors using a HTR-8/SVneo trophoblast cell model of T. gondii infection. HTR8/SVneo human extravillous trophoblast cells were infected with or without T. gondii and then evaluated for cell morphology, intracellular proliferation of the parasite, adenosine receptor expression, TNF-α production and mitogen-activated protein (MAP) kinase signaling pathways triggered by adenosine A3 receptor (A3AR). HTR8/SVneo cells infected with T. gondii exhibited an altered cytoskeletal changes, an increased infection rate and reduced viability in an infection time-dependent manner. T. gondii significantly promoted increased TNF-α production, A3AR protein levels and p38, ERK1/2 and JNK phosphorylation compared to those observed in uninfected control cells. Moreover, the inhibition of A3AR by A3AR siRNA transfection apparently suppressed the T. gondii infection-mediated upregulation of TNF-α, A3AR production and MAPK activation. In addition, T. gondii-promoted TNF-α secretion was dramatically attenuated by pretreatment with PD098059 or SP600125. These results indicate that A3AR-mediated activation of ERK1/2 and JNK positively regulates TNF-α secretion in T. gondii-infected HTR8/SVneo cells.

Han River Pollution Studies (한강의 오염도)

  • Choe, Sang
    • 한국해양학회지
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    • v.7 no.1
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    • pp.24-45
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    • 1972
  • The Han River is an important water source in Seoul and neighbouring districts, for public and industrial supply, and for agriculture and fishery. Nowadays, more than six million inhabitants are supplied withe water from this river. The total length of the river is 470km, and has 17 10$\^$9/㎥ an average annual flow. The hydrographic characteristics at Seoul are 653㎥/sec in an average flow, 4,608㎥/sec in the maximum average flow, and 201㎥/sec in the minimum average flow. These are influenced in some degree by snowmelt in early spring, and greatly by the flood during summer. For the pollution problems, the periods of low flow are critical ones. As a rule they occur around the months November through June. Nowadays, most of the sewage from towns and industries is discharged untreated. Apart from domestic and industrial sewages, there are some discharges of mineral matter by mines in the upriver region. In general, water quality of the Han River is kept very clean and healthy until Kwangnaru of the upper region of Seoul. A large pollution, however, is received in the downstream by the domestic and industrial sewages of Seoul. It can be seen that dissolved oxygen, COD and BOD$\sub$5/ diminish markedly, and the intensity of almost every water parameter of the river continues to increase. Comparison of the figures for 1971 derived from a sampling point 40km downstream of Kwangnaru leads to the conclusion that hardness, Ca and Mg were no changed; alkalinity, Si and soluble- Fe were slightly increased; CO$\sub$2/, acidity, Cl, NO$\sub$2/-N, Cu, Zn and Al were increased in 2 and 3 times; total residue, total ignitious residue, COD, BOD$\sub$5/, NH$\sub$4/-N, PO$\sub$4/-P, Mn, Pb and total-Fe were increased in 4 to 7 times; and SO$\sub$4/, particulate-Fe and Cd were increased in 10 to 11 times. On the other hand, coliforms were increased in 650 times; fecal coliforms in 365 times; enterococci and total plate counts in 30 times, respectively. In view points of water quality standards, the down Han River water is now leveling out in Cd, coliforms and fecal coliforms for the agricultural use; in dissolved oxygen and some trace elements (Cu, Zn, Pb and Cd) for the fishery use; in ammonia, COD, BOD$\sub$5/, and Cd for the drinking use.

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Antioxidative Effects of Mugwort (Artemisia vulgaris L.) Extracts Diet on ICR Mouse Skin (애엽 추출물 섭취가 ICR 마우스의 피부조직에 미치는 항산화 효과)

  • Park, Si-Hyang;Cho, Duck-Moon;Choi, Gyeong-Lim;Choi, Yeung-Joon;Choi, Jin-Ho
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.36 no.12
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    • pp.1523-1528
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    • 2007
  • The feeding effects of mugwort (Artemisia vulgaris L.) extracts (ME) on the anti-oxidative actions of ICR mouse skin was investigated. To study the antioxidative effects of ME on ICR mouse skin, female ICR mice were grouped into basic diet group (control), ascorbic acid diet group (AA-2.5, AA-5.0, AA-10.0 and AA-20.0 mg/kg BW/day) as a positive control and experimental diet group (mugwort extract; ME-25, ME-50, ME-100, and ME-200 mg/kg BW/day) and fed for 10 weeks. Protein contents in ME-50, ME-100, and ME-200 feeding group were increased ($3.1%{\sim}11.1%$) and hydroxyl radical contents were significantly decreased ($10.4%{\sim}17.4%$) compared to control group. Oxidative stress signals and oxidized protein contents were significantly reduced to the range of 15.3 to 17.1% in ME-100 and ME-200 groups. Also, superoxide dismutase (SOD) activity was significantly increased to the range of 15.0% to 23.3% in ME-100 and ME-200 groups. Catalase activities were significantly increased ($14.0%{\sim}36.9%$) in all groups in a dose-dependent pattern. Antioxidative ability of ME showed similarity to that of ascorbic acid.

Relief of Chronic Posterior Neck Pain Depending on the Type of Forest Therapy: Comparison of the Therapeutic Effect of Forest Bathing Alone Versus Forest Bathing With Exercise

  • Kang, Boram;Kim, Taikon;Kim, Mi Jung;Lee, Kyu Hoon;Choi, Seungyoung;Lee, Dong Hun;Kim, Hyo Ryoung;MA, Byol Jun;Park, Seen Young;Lee, Sung Jae;Park, Si-Bog
    • Annals of Rehabilitation Medicine
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    • v.39 no.6
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    • pp.957-963
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    • 2015
  • Objective To compare the pain-reducing effect of forest bathing alone versus forest bathing in combination with stretching and strengthening exercises in patients with chronic posterior neck pain. Methods Sixty-four subjects with posterior neck pain that had lasted more than 3 months were enrolled. They were randomly divided into a forest bathing alone (FBA) group and a forest bathing with exercise (FBE) group; each group included 32 subjects. All subjects from both groups walked every morning in the forest for about 2 hours for 5 days. In the afternoon, the FBE group did a stretching and strengthening exercise for about 4 hours; the FBA group had free time in the woods. Visual analog scale (VAS) on one day, VAS over the previous week, neck disability index (NDI), EuroQol 5D-3L VAS (EQ VAS) and index (EQ index), McGill pain questionnaire (MPQ), the number of trigger points in the posterior neck region (TRPs), and the range of motion of the cervical spine were evaluated on the first and last day of the program and compared between the two groups. Results The number of TRPs were significantly reduced in the FBE group compared with the FBA group (p=0.013). However, the other scales showed no significant difference between the two groups. Conclusion When patients with chronic posterior neck pain underwent a short-term forest bathing (less than 7 days) program, FBE was more effective in the reduction of the number of TRPs than FBA. However, all other pain measurement scales we evaluated showed no statistically significant difference between the two protocols.

Inhibition of an Inducible Nitric Oxide Synthase Expression by a Hexane Extract from Perilla frutescens cv. Chookyoupjaso Mutant Induced by Mutagenesis with Gamma-ray (방사선 유도 돌연변이 약용들깨 핵산 추출물의 Inducible Nitric Oxide Synthase 저해활성)

  • Park, Yong Dae;Kang, Min Ah;Lee, Hyo Jung;Jin, Chang Hyun;Choi, Dae Seong;Kim, Dong Sub;Kang, Si-Yong;Byun, Myung Woo;Jeong, Il Yun
    • Journal of Radiation Industry
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    • v.3 no.1
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    • pp.13-18
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    • 2009
  • In earlier investigations, seeds of Perilla frutescens(L.) Britt. cv. Chookyoupjaso were irradiated with 200 Gy gamma ray to generate mutagenesis. The aim of this study is to investigate the effects of a hexane extract from Perilla frutescens (L.) Britt. cv. Chookyoupjaso mutant 45 on the actions of anti-inflammatory activity on inducible nitric oxide synthase, and an identification of the major active compound. The hexane extract from P. frutescens exhibited activity of inhibition of a NO production ($IC_{50}$, $295.1{\mu}g\;ml^{-1}$). The hexane extract was further divided into subfractions by silica-gel chromatogarphy. Inhibition of the NO production by various fractions was assayed in LPS-stimulated RAW 264.7 cells. Among the seven fractions, the 5th fraction was the most effective ($IC_{50}$, $19.5{\mu}g\;ml^{-1}$). The 5th fraction suppressed the expression of protein of iNOS in LPS-induced RAW 264.7 cells, and GC/MS analyses showed that isoegomaketone is a major bio-active compound in the 5th fraction. The result indicated that isoegomaketone has a good potential to be developed as an anti-inflammation agent.

Influence of Diagnostic Fertilization and Subsoil Breaking on Soil physico-chemical Properties in Direct Seeding of Rice on Flooded Paddy Surface (벼 담수표면 직파재배시 진단시비와 심토파쇄가 토양이화학성 및 벼 생육에 미치는 영향)

  • Yoo, Chul-Hyun;Ryu, Jin-Hee;Yang, Chang-Hyu;Kim, Taek-Kyum;Kang, Seung-Weon;Kim, Jae-Duk;Jung, Kwang-Yong
    • Korean Journal of Soil Science and Fertilizer
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    • v.39 no.6
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    • pp.334-338
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    • 2006
  • This study was conducted to evaluate the effect of improvement of soil physical properties such as deep plowing, subsoil breaking and diagnostic fertilization on the yield of rice and nitrogen-use efficiency in direct seeding on flooded paddy surface of rice. The effects of deep plowing, subsoil breaking and diagnostic application of N, P, K fertilizers, Latex coated urea(LCU), compost, silicate were investigated. The soil physical properties, such as bulk density, hardness and porosity were improved and the content of organic matter and available $SiO_2$ were also increased by deep plowing and subsoil breaking. The amount of $NH_4-N$ in soil was highly increased by diagnostic fertilization and deep plowing at 5th leaf stage. The nitrogen-use efficiency was the highest at the diagnostic application of LCU 70% applied as basal dressing with subsoil breaking. The yield of rice increased by 8% under the diagnostic application of LCU 70% applied as basal dressing with subsoil breaking compared with the conventional application.

Development of a multiplex qRT-PCR assay for detection of African swine fever virus, classical swine fever virus and porcine reproductive and respiratory syndrome virus

  • Chen, Yating;Shi, Kaichuang;Liu, Huixin;Yin, Yanwen;Zhao, Jing;Long, Feng;Lu, Wenjun;Si, Hongbin
    • Journal of Veterinary Science
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    • v.22 no.6
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    • pp.87.1-87.12
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    • 2021
  • Background: African swine fever virus (ASFV), classical swine fever virus (CSFV), and porcine reproductive and respiratory syndrome virus (PRRSV) are still prevalent in many regions of China. Co-infections make it difficult to distinguish their clinical symptoms and pathological changes. Therefore, a rapid and specific method is needed for the differential detection of these pathogens. Objectives: The aim of this study was to develop a multiplex real-time quantitative reverse transcription polymerase chain reaction (multiplex qRT-PCR) for the simultaneous differential detection of ASFV, CSFV, and PRRSV. Methods: Three pairs of primers and TaqMan probes targeting the ASFV p72 gene, CSFV 5' untranslated region, and PRRSV ORF7 gene were designed. After optimizing the reaction conditions, including the annealing temperature, primer concentration, and probe concentration, multiplex qRT-PCR for simultaneous and differential detection of ASFV, CSFV, and PRRSV was developed. Subsequently, 1,143 clinical samples were detected to verify the practicality of the assay. Results: The multiplex qRT-PCR assay could specifically and simultaneously detect the ASFV, CSFV, and PRRSV with a detection limit of 1.78 × 100 copies for the ASFV, CSFV, and PRRSV, but could not amplify the other major porcine viruses, such as pseudorabies virus, porcine circovirus type 1 (PCV1), PCV2, PCV3, foot-and-mouth disease virus, porcine parvovirus, atypical porcine pestivirus, and Senecavirus A. The assay had good repeatability with coefficients of variation of intra- and inter-assay of less than 1.2%. Finally, the assay was used to detect 1,143 clinical samples to evaluate its practicality in the field. The positive rates of ASFV, CSFV, and PRRSV were 25.63%, 9.36%, and 17.50%, respectively. The co-infection rates of ASFV+CSFV, ASFV+PRRSV, CSFV+PRRSV, and ASFV+CSFV+PRRSV were 2.45%, 2.36%, 1.57%, and 0.17%, respectively. Conclusions: The multiplex qRT-PCR developed in this study could provide a rapid, sensitive, specific diagnostic tool for the simultaneous and differential detection of ASFV, CSFV, and PRRSV.

Daily Variation of Size-Fractionated Chlorophyll a Concentrations and Water Conditions Associated with Freshwater Discharge during Summer in the Yeongsan River Estuary (영산강 하구의 하계 담수 방류와 연관된 크기별 Chlorophyll a와 수환경의 일간 변동)

  • Kim, Sehee;Shin, Yongsik
    • Journal of Marine Life Science
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    • v.5 no.2
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    • pp.72-80
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    • 2020
  • A sea dike in the Yeongsan River estuary was constructed in 1981 to supply water and reclaim tidal flats for agriculture, separating the estuary into the freshwater and seawater zones. However, the sluice gates are frequently opened and freshwater is discharged in summer when more rainfall is recorded than other seasons, then converting the estuary to brackish water system. In this study, the direct effect of freshwater discharge was investigated by monitoring daily variation in water properties and phytoplankton size structure before and after the freshwater discharge events from 2013 to 2015. Freshwater discharge resulted in a sharp decrease in salinity and dissolved oxygen (DO) at surface water whereas it increased the turbidity of water column. However, salinity did not decrease sharply in 2014 when freshwater was discharged one day before the monitoring and salinity remained low prior to the monitoring. Levels of nutrients especially dissolved inorganic nitrogen (DIN) increased after the discharge and this contributed to potential limitation of nutrients such as P or Si rather than N in the estuary. Freshwater discharge also caused the changes in phytoplankton biomass (chlorophyll a) and size structure although their responses were different between years. The changes may affect growth of grazers and thus structure of marine food web by alternating food availability in the Yeongsan River estuary.