• Journal of the Semiconductor & Display Technology
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• v.4 no.4 s.13
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• pp.19-26
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• 2005

The process optimization of ozone concentration and half life time was investigated in ultra pure water and alkaline solutions for the wet cleaning of silicon wafer surface at room temperature. In the ultra pure water,. the maximum concentration (35 ppm) of ozone was measured at oxygen flow rate of 3 liters/min and ozone generator power over 60%. The half life time of ozone increased at lower power of ozone generator. Additive gases such as $N_2$ and $CO_2$ were added to increase the concentration and half life time of ozone. Although the maximum ozone concentration was higher with the addition of $N_2$ gas, a longer half life time was observed with the addition of $CO_2$. When $NH_4OH$ of 0.05 or 0.10 vol% was added in DI water, the pH of the solution was around 10. The addition of ozone resulted in the half life time less than 1 min. In order to maintain high pH and ozone concentration, ozone was continuously supplied in 0.05 vol% ammonia solutions. 3 ppm of ozone was dissolved in ammonia solutions. The static contact angle of silicon wafer surface became hydrophilic. The particle removal was possible alkaline ozone solutions. The organic contamination can be removed by ozonated ultra pure water and then alkaline solution containing ozone can remove the particles on silicon surface at room temperature.

• Journal of the Korean Institute of Landscape Architecture
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• v.28 no.5
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• pp.87-92
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• 2000

The purpose of this study is to investigate Ozone which we have to contact in our daily lives. Recently Ozone becomes a serious pollutant in the inside and outside. To select th indicator plants or the purifier plants for air pollution caused by ozone, this stud has been conducted with interior landscape plant of 10 species. The results are as follows; 1) The visible demage by Ozone was firstly observed on Viburnum awabuki among 10 species, and it occurred after the lapse of 10, 8 and 4 hours on 0.5, 1.0 and 2.0 ppm ozone treatment, respectively. The first symptom of visible demage appeared on chlorosis or blotting of leaves, then progressed on necrosis of leaves. 2) On the other hand, Litsea japonica and Ardisia japonica were so resistant against Ozone fumigation that they were not demage independently of Ozone concentration till the lapse of 60 hours. 3) Chlorophyll contents were decreased by the increased Ozone concentration. At this time, grana destruction was observed. The most sensitive plant to ozone was Viburnum awabuki, and we suggest that Viburnum awabuki would be possible one to use for the indicator plant. The most resistance plant to Ozone was Litsea japonic and Ardisia japonica, we suggest that Litsea japonica and Ardisia japonica would be possible to use for the purifier plant for Ozone pollution.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2001.11a
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• pp.135-138
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• 2001

Recently, ozone is utilized In various fields and its needs are expanding. therefore, so many ozone generation methods have been reported in the latest years, its main purpose Is to get the high ozone concentration and to improve the ozone yield. One of them is a plate-type ozone generator. In this paper, the plate-type ozone generator is piled up many folds(3 and 5 electrodes). Ozone concentration and yield were investigated in accordance with power, quantity of supplied gas and gap spacing of plate electrodes.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2002.07b
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• pp.908-911
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• 2002

Recently deep interests and attraction have been paid on the generation of ozone, which is widely used to remove bed smell and to clear water. In this paper the silent discharge and ozone generation characteristics of various typed discharge chambers were investigated experimentally. Dielectric of $Al_2O_3$ was embedded in the cylindrical type of discharge chamber to improve the ozone generation rate and to stabilize the silent discharge mode of operation. Discharge current and ozone concentration depend strongly on the applied voltage and frequency.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2006.11a
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• pp.22-23
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• 2006

A process for removal of photoresist(PR) m semiconductor manufacturing using water vapor with ozone is presented. For the realization of the ozone/vapor mixture process, high concentration ozone generator and process facilities have developed. As a result of the silicon wafer PR strip test, we confirmed the high efficiency PR strip rates of 400nm/mm or more at the ozone concentration of 16wt%/$O_2$. The ozone/vapor mixture process is more effective than the ozonized water Immersion process.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2008.05a
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• pp.379-380
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• 2008

Recently, ozone is utilized in various fields and its needs are expanding. In this paper, glass and ceramic plate tyre ozonizer have been fabricated to investigate discharge parameter(input power, flow rate of supplied gas, electrode form, etc.) effect to discharge. And the conditions of discharge parameter have been investigated for optimum ozone generation. Ozone concentration is continuously increased with increasing input power for same discharge space, and ozone yield is also increased until maximum point after that it is saturated. Ozone concentration is inversely proportional to flow rate of supplied gas but ozone generation and ozone vield characteristics are improved.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 2003.04a
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• pp.322-325
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• 2003

The feasibility of treating 2-chlorophenol (2CP) contaminated soils with ozone venting was investigated in this research. Adding ozone to the existing air-venting process provides an alternative to achieve a complete in-situ treatment by oxidizing the contaminant in the process. A column study with artificial soil was used to simulate the venting process. Ozone concentrations at 2.4, 7.6 and 19.4 mg/L, and flow rates at 100 and 150 mL/min were used. The reaction times were 10, 20, 50, and 60 minutes. Blank samples using air venting were also run for comparison. It is obvious that ozone-venting had a much faster removal rate than air-venting. As higher concentration of ozone is applied, the reaction rate increased significantly. As higher concentration was applied, the flux of ozone to the liquid film increased. This also increased the removal rate of 2CP and therefore the breakthrough curve came out earlier.

• Textile Coloration and Finishing
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• v.16 no.2
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• pp.34-40
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• 2004

This study was conducted to remove the reactive dyes by the Ozone demand flask method which are one of the main pollutants in dye wastewater, Ozone oxidation of three kinds of the reactive dyes was examined to investigate the reactivity of dyes with ozone, Trihalomethane formation potentials(THMFPs), competition reaction and ozone utilization on various conditions for single- and multi-solute dye solution. Concentration of dyes was decreased continuously with increasing ozone dosage in the single-solute dye solutions. THMFPs per unit dye concentration were gradually increased with increase of ozone dosage. By the result of THMFPs change with reaction time, THMFPs were rapidly decreased within 1 minute in single-solute dye solutions. Dey were increased after 1 minute of reaction time, and then they were consistently decreased again after longer reaction time. Competition quotient values were calculated to investigate the preferential oxidation of individual dyes in multi-solute dye solutions. Competition quotients$(CQ_i)$ and values of the overall utilization efficiency, no$_3$, were increased at 40mg/1 of ozone dosage in multi-solute dye solutions.

• Environmental Engineering Research
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• v.10 no.2
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• pp.71-78
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• 2005

A series of column experiments was conducted to develop a monitoring system for in-situ and realtime measurement of ozone transport in unsaturated porous media using a fiber optic sensor. The calibration of the fiber optic transflection dip probe (FOTDP) system was successfully carried out at various ozone concentrations using a column with length of 30 cm and diameter of 5 cm packed with glass beads, which don't react with gaseous ozone. The breakthrough curves (BTCs) of ozone were obtained by converting the normalized intensity into ozone concentration. The FOTDP system worked well for in-situ monitoring of gas phase ozone at various water saturations and in presence of soil organic matter (SOM). However, the FOTDP system did not measure the ozone concentration at more than 70% water saturation.

• The Journal of Natural Sciences
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• v.10 no.1
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• pp.103-109
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• 1998

We studied on the decoloring effect of viscose rayon by vapor type ozone processing using ozone's strong oxidation. When ozone is generated, it becomes high concentration in vapor state, but in the insolving process with water, there are a lot of lose of ozone. As a result, a study using ozone in vapor-high concentration state is needed. So, in this paper, vapor type ozone processing is used unlike previous ozone treatment method-an aqueous solution method-to get a good effect from shortening the processing time. When vapor type ozone processing was directly treated to fabrics, high concentration ozone was generated then in a short time oxidized a dye existed in fabrics and finally decolored it. As vapor type ozone did not directly response to an organic dye, viscose rayon's decolorization was to be studied by changing pick up ratio(60%, 50%, 40%, 30%, 20%) using water as a medium. When pick up ratio of water was 40%, fabric's whiteness was improved but tensile strength and elongation were reduced. So 60 minutes was assumed as the most adjust time to minimize the reduction of fabric's tensile strength and elongation moreover of maximize the improvement of whiteness.