• Title/Summary/Keyword: ozone concentration

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Evaluation of Ozone Concentration for the Oxide Thin Film Growth

  • Park, No-Bong;Iim, Jung-Kwan;Park, Yong-Pil;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2003.11a
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    • pp.579-582
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    • 2003
  • Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.

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Effects of Operating Parameters on Dissolved Ozone and Phenol Degradation in Ozone Contact Reactor (오존 접촉 반응기의 용존 오존 농도 및 페놀 분해에 미치는 운전변수의 영향)

  • Chung, Jae-Woo;Park, Jeong-Wook;Lee, Chun-Sik
    • Journal of Korean Society of Environmental Engineers
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    • v.32 no.3
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    • pp.241-247
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    • 2010
  • The Effects of operating parameters such as initial pH, gaseous ozone concentration, supplied gas flow rate on dissolved ozone concentration and phenol degradation in ozone contact reactor were investigated. Dissolved ozone concentrations were saturated to constant values after a certain ozone contact time. The saturation values were influenced by experimental parameters. Dissolved ozone concentration decreased with the increase of initial pH because the ozone is unstable in high pH regions. The gaseous ozone concentration in a constant gas supply affected the saturation concentration of dissolved ozone and the injection rate of gas with a constant ozone concentration determined the rate to reach dissolved ozone saturation. Effects of operating parameters on phenol degradation were closely related with those of parameters on dissolved ozone concentration. Phenol degradation was enhanced by the increase of initial pH, because the degradation of dissolved ozone gave birth to free radicals which have much higher reactivity with phenol. Increase of gaseous ozone concentration and gas flow rate promoted the phenol degradation through the generation of dissolved ozone which plays the role in phenol degradation. The injection of methanol deteriorated the phenol degradation through the scavenging effect on OH radicals.

Indication of Photochemical Air Pollution in the Greater Seoul Area, 1990 to 1995 (1990~1995 서울ㆍ수도권 지역의 광화학 오염현상)

  • 김영성
    • Journal of Korean Society for Atmospheric Environment
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    • v.13 no.1
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    • pp.41-49
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    • 1997
  • Status of photochemical air pollution in the Greater Seoul Area (GSA) between 1990 and 1995 was assessed in terms of frequency distributions, number of days exceeding standards, average concentration and meteorological effects. In Seoul compared with other areas in Korea, daily maximum concentration was higher but average concentration was not so high due to lower daily minimum from April to October. The top 5th percentile was high especially in summer season. Average number of days exceeding 100 ppb at monitoring stations in GSA was highest in 1994, the hottest year, but it was only 4 days a year. Mean meteorological pattern of high ozone days could be summarized as low wind speeds, high temperatures, strong solar radiation, and low precipitation. Westerlies were more frequent on high ozone days and at Pangi station located in the eastside of GSA, both number of high ozone days and average concentration were high. Effect of precursor transport on the rise of ozone concentration was, however, not consistently important on the whole in GSA.

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Characteristics of Residual Ozone Decomposition with Commercial Ozone Decomposition Catalyst (ODC) and Photo catalyst (상업용 오존촉매와 광촉매를 이용한 오존제거특성)

  • Byeon, Jeong-Hoon;Park, Jae-Hong;Hwang, Jung-Ho
    • Proceedings of the KSME Conference
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    • 2004.04a
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    • pp.1255-1260
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    • 2004
  • Decomposition of ozone at room temperature was investigated comparatively with commercial monolithic ozone decomposition catalyst (ODC, $MnO_2$) and monolithic photo catalyst ($TiO_2$). The effects of residence time, UV (ultraviolet) light dependence and ozone concentration on the conversion was presented. UV ray was irradiated using BLB (black light blue) lamp ($315{\sim}400$ nm), supplied with a constant intensity in the reactor. The concentration of ozone in the square-shape reactor can be controlled by combining the DBD (dielectric barrier discharge) reactor with an AC high voltage supply system. The catalytic performance, in presence of UV irradiation did not show significant changes for $MnO_2$ catalyst. $TiO_2$ catalyst was the different case, which showed higher decomposition activity in presence of UV irradiation. Deactivation of catalyst detected by real-time ozone monitor for 120 hours with a constant inlet ozone concentration.

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Development on the High Concentration Ozone Generator System for the Semiconductor Photoresist Strip Process (반도체 감광막 제거공정 적용을 위한 고농도 오존발생장치 개발)

  • Son, Young-Su;Ham, Sang-Yong
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.12
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    • pp.591-596
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    • 2006
  • we have been developed on the ultra high concentration ozone generator system which is the core technology in the realization of the semiconductor photoresist strip process using the ozone-vapor chemistry. The proposed ozone generator system has the structure of the surface discharge type which adopt the high purity ceramic dielectric tube. We investigate the performance of the proposed ozone generator system experimentally and the results show that the system has very high ozone concentration characteristics of $19.7[wt%/O_2]$ at the flow rate of $0.3[{\ell}/min]$ of each discharge cell. As a result of the silicon wafer photoresist strip test, we obtained the strip rate of about 400[nm/min] at the ozone concentration of $16[wt%/O_2]$ and flow rate of $8[{\ell}/min]$. So, we confirmed that it's possible to use the proposed high concentration ozone generator system for the ozone-vapor photoresist strip process in the semiconductor and FPD industry.

Disinfection Properties and Variation in the Ozone Concentration in Seawater Generated Using a Low-Temperature Dielectric Barrier Discharge Plasma Reactor (저온 유전체장벽 플라즈마로 생성된 해수중의 오존농도 변동과 살균 특성)

  • Lee, Young Sik;Kim, Yoonbin;Kim, Kwang Seog;Han, Hyung-Gyun
    • Journal of Environmental Science International
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    • v.21 no.10
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    • pp.1181-1186
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    • 2012
  • We studied the ozone concentrations generated by low-temperature dielectric barrier discharge plasma reactor after adding air and phytoplankton to control the ozone concentrations in seawater. We also examined the numbers of bacteria and Vibrio spp. after treatment using the plasma reactor. As the airflow rate was increased, more ozone was removed. Although marked variation in the ozone decrease was observed with and without airflow, the rate of ozone removal did not increase proportionately with the airflow rates. The ozone concentration decreased with increasing organic matter and time. The amount of organic matter seems to be an important factor decreasing the dissolved ozone concentration in liquid. The ozone concentration was 0.07, 0.32, 1.28, and 2.3 mg/L when operating the plasma reactor for 30, 60, 180, and 300 s, respectively; i.e., the ozone concentration increased with the reactor operating time. The initial numbers of bacteria and Vibrio spp. were 800 and 480 CFU/mL, respectively. After operating the plasma reactor at a flow rate of 6 L/min for 30 s, no bacteria or Vibrio spp. were detected. The disinfection effect of this plasma reactor seems to be superior to that of a conventional ozone generator.

Development of a Short-term Model for Ozone Using OPI (오존최대농도지표를 이용한 오존단기예측모형 개발)

  • 전의찬;김정욱
    • Journal of Korean Society for Atmospheric Environment
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    • v.15 no.5
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    • pp.545-554
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    • 1999
  • We would like to develop a short-term model to predict the time-related concentration of ozone whose reaction mechanism is complex. The paper targets Seoul where an ozone alert system has recently been employed. In order to develop a short-term prediction model for ozone, we suggested the Ozone Peak Indicator(OPI), an equivalent of the potential daily maximum ozone concentration, with precursors being the only limiting factor, and we calculated the Ozone Peak Indicarot as OPI={$ rac{(O_3)_{max}cdot(H_{eH})_{max}(Rad)_{max}$ to preclude the influence of mixing height and solar radiation on the daily maximum ozone concentration. The OPI on the day of the prediction is to be calcultated by using the relation between OPI and the initial value of precursors. The basic prediction formula for time-related ozone concentration was established as $O_3(1)={(OPI)cdot Rad(t-2)H_{eH}}$, using the OPI, solar radiation two hours before prediction and mixing height. We developed, along with the basic formula for predicting photochemical oxidants, "SEOM"(Seoul Empirical Oxidants Model), a Fortran program that helps predict solar radiation and mixing height needed in the prediction of ozone pollution. When this model was applied to Seoul and an analysis of the correlation between the observed and the predicted ozone concentrations was made through SEOM, there appeared a very high correlation, with a coefficient of 0.815. SEOM can be described as a short-term prediction model for ozone concentration in large cities that takes into account the initial values of precursors, and changes in solar radiation and mixing height. SEOM can reflect the local characteristics of a particular and region can yield relatively good prediction results by a simple data input process.t process.

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The Influences of 5ea Breeze on Surface Ozone Concentration in Pusan Coastal Area, Korea (부산 연안역의 오존 농도에 미치는 해풍의 영향)

  • 김유근;이화운
    • Journal of Environmental Science International
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    • v.5 no.3
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    • pp.265-275
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    • 1996
  • Air pollution characteristics and the influence of sea breeze on surface ozone concentration were studied using the data measured at 7 air quality continuous monitoring stations from June to September using 3 years (1990, 1993, 1994) in Pusan coastal area. Among the 246 sea breeze days for research Period, there were approximately 89 sea breeze days (36%) from lune to September, And there were 120 the episode days (68%) of ozone greater than or equal to 60 ppb in summer season. In 89 sea breeze days, the episode day was highly marked as 56 days (63%). So, we knew that the sea breeze greatly affects the occurence of ozone episode day. the ozone concentration under the condition of the sea breeze increase about 40% in the daytime. Frequencies distribution of $O_3$ concentration for sea breeze moved toward high concentration class. The characteristics of ozone concentration in relation to meteorological conditions of sea breeze is significant because we can discover major weather factors for eastablishing an air pollution- weather forecast system. For further. study about meterological approach method for photochemical air pollution, it is necessary to explain the characteristics of atmosphere below 1, 000 m, especially concerning the formation mechanism of inversion layers. And finally, we will study the relationships to synoptic weather conditions and vertical structure and diurnal variation of local wind systems including sea breeze, and the vertical movements of atmosphere in the city.

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Evaluation of Ozone for Metal Oxide Thin Film Fabrication

  • Lim, Jung-Kwan;Park, Yong-Pil;Jang, Kyung-Uk;Lee, Hee-Kab
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.675-678
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    • 2004
  • Ozone is usually generated from oxygen gas using a silent discharge apparatus and its concentration is less then 10 mol%. An ozone condensation system is constructed for metal oxide thin film fabrication. Ozone is condensed by the adsorption method, which is widely used for the growth of oxidation thin films such as superconductor. Highly condensed ozone is analyzed by three methods; ultraviolet absorption, thermal decomposition and Q-mass analyzing methods. Thermal decomposition method is most effective in the highly condensed ozone region and its method is superior to Q-mass analyzer for determining ozone concentration because of the simplicity of the method.

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Neuro-Fuzzy Approaches to Ozone Prediction System (뉴로-퍼지 기법에 의한 오존농도 예측모델)

  • 김태헌;김성신;김인택;이종범;김신도;김용국
    • Journal of the Korean Institute of Intelligent Systems
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    • v.10 no.6
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    • pp.616-628
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    • 2000
  • In this paper, we present the modeling of the ozone prediction system using Neuro-Fuzzy approaches. The mechanism of ozone concentration is highly complex, nonlinear, and nonstationary, the modeling of ozone prediction system has many problems and the results of prediction is not a good performance so far. The Dynamic Polynomial Neural Network(DPNN) which employs a typical algorithm of GMDH(Group Method of Data Handling) is a useful method for data analysis, identification of nonlinear complex system, and prediction of a dynamical system. The structure of the final model is compact and the computation speed to produce an output is faster than other modeling methods. In addition to DPNN, this paper also includes a Fuzzy Logic Method for modeling of ozone prediction system. The results of each modeling method and the performance of ozone prediction are presented. The proposed method shows that the prediction to the ozone concentration based upon Neuro-Fuzzy approaches gives us a good performance for ozone prediction in high and low ozone concentration with the ability of superior data approximation and self organization.

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