• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.20 no.11
• /
• pp.977-982
• /
• 2007

The realization of the photoresist(PR) removal method with vaporized water and ozone gas mixture has been studied for the LCD TFT array manufacturing. The developed PR stripper uses the water boundary layer control method based on the high concentration ozone production technology. We develop the prototype of PR stripper and experiment to find the optimal process parameter condition like as the ozone gas flow/concentration, process reaction time and thin boundary layer formation. As a results, we realize the LCD PR strip rate over the 0.4 ${\mu}m/min$ and this PR removal rate is more than 5 times higher than the conventional immersion type ozonized water process.

• Journal of Korean Society for Atmospheric Environment
• /
• v.15 no.4
• /
• pp.441-455
• /
• 1999

Meteorological characteristics of three high-ozone episodes in the Greater Seoul Area, selected on the basis of morning-average wind direction and speed for the 1990~1997 period, were investigated. Three high-ozone episodes thus selected were seven days of July 3~9, 1992, nine days of July 21~29, 1994, and three days of August 22~24, 1994. Along with surface meteorological data from the Seoul Weather Station, surface and 850-hPa wind fields over the Northest Asia around the Korean Peninsula were used for the analysis. In the July 1992 episode, westerly winds were most frequent as a result of the influence of a high-pressure system in the west behind the trough. In contrast, in the July 1994 episode, easterly winds were most frequent due to the effect of a typhoon moving north from the south of Japan. Despite different prevailing wind directions in the two episodes, the peak ozone concentration of each episode always occurred when a sea-land breeze developed in association with weak synoptic forcing. The August 1994 episode, selected as being representative of calm conditions, was another typical example in which peak ozone concentration rose to 322 ppb under the well-developed sea-land breeze. All three high-ozone episodes were terminated by precipitation, and subsequent rises in ozone concentrations were also suppressed by a series of precipitation afterwards. In particular, two heavy rainfalls were the main reason why the August 1994 episode, with the highest and second-highest ozone concentrations during the 1990~1997 period, lasted for only a few days.

• Advances in environmental research
• /
• v.4 no.3
• /
• pp.155-172
• /
• 2015

In this study, a complete set of recirculating cooling water system and the required instruments were built in a semi-industrial-scale and a 50 g/h ozone generation plant and a chlorine system were designed for cooling water treatment. Both chlorination and ozonation treatment methods were studied and the results were analyzed during two 45-days periods. The concentrations of ozone and chlorine in recirculating water were constant at 0.1 mg/lit and 0.6 mg/lit, respectively. In ozone treatment, by increasing the concentration cycle to 33%, the total water consumption decreased by 26% while 11.5% higher energy efficiency achieved thanks to a better elimination of bio-films. In case of Carbon Steel, the corrosion rate reached to 0.012 mm/yr and 0.025 mm/yr for the ozonation and chlorination processes, respectively. Furthermore, consumptions of the anti-corrosion and anti-sedimentation materials in the ozone cooling water treatment were reduced about 60% without using any oxidant and non-oxidant biocides. No significant changes in sediment load were seen in ozonation compared to chlorination. The Chemical Oxygen Demand of the blow-down in ozonation method decreased to one-sixth of that in the chlorination method. Moreover, the soluble iron and water turbidity in the ozonation method were reduced by 97.5% and 70%, respectively. Although no anaerobic bacteria were seen in the cooling water at the proper concentration range of ozone and chlorine, the aerobic bacteria in chlorine and ozone treatment methods were 900 and 200 CFU/ml, respectively. The results showed that the payback time for the ozone treatment is about 2.6 years.

• Journal of IKEEE
• /
• v.23 no.2
• /
• pp.431-437
• /
• 2019

This work was carried out ozone generation and TCE decomposition characteristics using dielectric ball materials filled barrier discharge reactor and catalyst's reactor for ozone decomposition. Ozone concentration generated from $Al_2O_3$ or $TiO_2$ filled barrier discharge reactor was so high compared with non-filled discharge reactor. This reactor is good discharge structure for generating the high ozone concentration. In addition, TCE decomposition rate and COx conversion rate increased using $MnO_2$ filled discharge reactor, because ozone was decomposed at the same discharge space on the surface of $MnO_2$ catalysts. To identify the $MnO_2$ catalytic effects, TCE decomposition rate reached to 100[%] by the decomposition of ozone at $MnO_2$ catalyst's reactor by the arrangement of $Al_2O_3$ filled discharge reactor and $MnO_2$ catalyst reactor. Finally, $MnO_2$ catalyst is good materials for the decomposition of ozone and this process will be useful for decomposing VOCs such as TCE.

• Journal of Korean Society for Atmospheric Environment
• /
• v.18 no.5
• /
• pp.427-433
• /
• 2002

In this discussion, an optimum ozone control strategy for the city of Seoul is discussed based on the OZIPR simulation results for three cases. It is claimed that, for the periods we have simulated, it is best to decrease VOCs emissions and increase NO$_{x}$ emissions to reduce the ambient maximum ozone concentration.n.

• Proceedings of the KIEE Conference
• /
• 2000.07c
• /
• pp.2147-2149
• /
• 2000

The silent discharge is known to be one of the most effective methods for ozone generation. In this paper. in order to improve ozone concentration and energy yield, some kind of silent discharge-type reactors with different dielectric materials were prepared. Some silent discharge characteristics of these reactors were studied and discussed.

• Journal of Korean Society for Atmospheric Environment
• /
• v.18 no.4
• /
• pp.253-264
• /
• 2002

Surface ozone concentrations measured at 40 monitoring sites in three major cities (Seoul, Busan, and Daegu) of Korea during 1993~2000 were analyzed to understand the characteristics of temporal and spatial distributions. Trends were analyzed for annual mean, 95th percentiles of daily 8-hour maximum and days exceeding 8-h ozone standard of 60 ppb. Three indicators exhibited increasing trends (+0.75 ppb yr$^{-1}$ , +2.20 ppb yr$_{-1}$ , and +5.35 days yr$_{-1}$ on average) throughout the study period at all cities. Diurnal and seasonal variations were the largest in Seoul followed by Daegue and Busan, due to the high photochemical production and titration of ozone (Seoul), strong wind and constant supply of background ozone from the ocean (Busan). In the urban centers and industrial areas at all cities, scavenging of ozone by NO reduces the daily 8-hour maximum ozone by 10 ppb on average. High concentrations of ozone have frequently occurred in downwind eastern (Seoul and Daegu) or northern (Busan) sides of the territory. In particular, the coastal area of Busan had relatively high ozone level due to the local sea land breeze circulation. The results indicated that the temporal and spatial variations of ozone concentration were non -uniform and were closely related to the local environments; emission levels, climates, and geographic locations.

• Journal of Environmental Science International
• /
• v.22 no.8
• /
• pp.937-944
• /
• 2013

Ozone concentrations in water and air, and resulting disinfective properties, were measured following generation by either an ozone generator or a low-temperature dielectric barrier discharge plasma generator. In freshwater, ozone concentrations of 0.81 and 0.48 mg/L $O_3$ were observed after the ozone and plasma generators had been operated for five minutes, respectively. Higher levels of dissolved $O_3$ were attained more easily with the ozone generator. In seawater, both systems were capable of creating concentrations greater than 3.00 mg/L $O_3$ after 5minutes of operation. Higher ozone levels were attained more easily in seawater than in freshwater. Rates of bacterial sterilization in seawater after three minutes were 96% and 88%, using the plasma and ozone generators, respectively. In freshwater, higher concentrations of ozone were released into the atmosphere by the ozone generator than by the plasma generator. In creating equivalent levels of dissolved ozone in freshwater, the plasma generator released 4.5 times more ozone into the atmosphere than did the ozone generator. This shows that ozone generators are more effective than plasma generators for creating ozonated water. For the same concentration of dissolved ozone in seawater, more ozone was released into the atmosphere using the ozone generator than using the plasma generator. Therefore, with regard to air pollution, plasma generators seem to be less expensive than ozone generators.

• Proceedings of the Korea Air Pollution Research Association Conference
• /
• 2004.05a
• /
• pp.91-92
• /
• 2004

• Applied Microscopy
• /
• v.11 no.1
• /
• pp.29-38
• /
• 1981

Bacteriophage f2 were treated with ozone at various concentrations for 20 minutes. The inactivation kinetics of f2 phage were examined during ozonation. In order to study the mode of action of ozone on the phage f2, absorption of the phage to the host pili was meassured by utilyzing radioactivity of tritium incorporated into the phage RNA. Sucrose density gradient analysis and electron microscopy were also used to prove the mechanism of ozone inactivation of the phage. Strucural proteins of the phage were broken by ozonation into many protein subunits. The extent of phage breakage was proportional to ozone concentration and reaction time. Percent decrease of the phage absorption to the host pili was coincident with the rate of ozone inactivation of the phage. Ozone inactivation of bacteriophage f2 was shown to be caused by the breakage of the structural protein and blockage of the phage absorption to the host pili.