• Journal of Sensor Science and Technology
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• v.1 no.2
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• pp.173-181
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• 1992

Tantalum pentoxide($Ta_{2}O_{5}$) thin films on p-type (100) silicon wafer were fabricated by RF reactive sputtering. Physical properties and structure of the specimens were examined by XRD and AES. From the C-V analysis, the dielectric constant of $Ta_{2}O_{5}$ films was in the range of 10-12 in the reactive gas atmosphere in which 10% of oxygen gas is mixed. The ratio of Ta : 0 was 1 : 2 and 1 : 2.49 by AES and RBS examination, respectively. The heat-treatment at $700^{\circ}C$ in $O_{2}$ ambient led to induce crystallization. When the heat-treatment temperature was $1000^{\circ}C$, the dielectric constant was 20.5 in $O_{2}$ ambient and 23 in $N_{2}$ ambient, respectively. The crystal structure of $Ta_{2}O_{5}$ film was pseudo hexagonal of ${\delta}-Ta_{2}O_{5}$. The flat band voltage shift(${\Delta}V_{FB}$) of the specimens and the leakage current density were decreased for higher oxygen mixing ratio. The maximum breakdown field was 2.4MV/cm at the oxygen mixing ratio of 10%. The $Ta_{2}O_{5}$ films will be applicable to hydrogen ion sensitive film and gate oxide material for memory device.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.19 no.9
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• pp.536-542
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• 2018

Tin dioxide, $SnO_2$, is a well-known n-type semiconductor that shows change in resistance in the presence of gas molecules, such as $H_2$, CO, and $CO_2$. Considerable research has been done on $SnO_2$ semiconductors for gas sensor applications due to their noble property. The nanomaterials exhibit a high surface to volume ratio, which means it has an advantage in the sensing of gas molecules. In this study, SnO nanoplatelets were grown densely on Si substrates using a thermal CVD process. The SnO nanostructures grown by the vapor transport method were post annealed to a $SnO_2$ phase by thermal CVD in an oxygen atmosphere at $830^{\circ}C$ and $1030^{\circ}C$. The pressure of the furnace chamber was maintained at 4.2 Torr. The crystallographic properties of the post-annealed SnO nanostructures were investigated by Raman spectroscopy and XRD. The change in morphology was confirmed by scanning electron microscopy. As a result, the SnO nanostructures were transformed to a $SnO_2$ phase by a post-annealing process.

• Journal of Sensor Science and Technology
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• v.32 no.3
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• pp.140-146
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• 2023

Water quality is crucial for human health and the environment. Accurate measurement of the quantity of organic carbon in water is essential for water quality evaluation, identification of water pollution sources, and appropriate implementation of water treatment measures. Total organic carbon (TOC) analysis is an important tool for this purpose. Although other methods, such as chemical oxygen demand (COD) and biochemical oxygen demand (BOD) are also used to measure organic carbon in water, they have limitations that make TOC analysis a more favorable option in certain situations. For example, COD requires the use of toxic chemicals, and BOD is time-consuming and can produce inconsistent and unreliable results. In contrast, TOC analysis is rapid and reliable, providing accurate measurements of organic carbon content in water. However, common methods for TOC analysis can be complex and energy-intensive because of the use of high-temperature heaters for liquid-to-gas phase transitions and the use of acid, which present safety risks. This study focuses on a TOC analysis method using TiO₂ photocatalysis, which has several advantages over conventional TOC analysis methods, including its low cost and easy maintenance. For TiO₂, rutile and anatase powders are mixed with an inorganic binder and spray-coated onto a glass fiber substrate. The TiO₂ powder and inorganic binder solutions are adjusted to optimize the photocatalytic reaction performance. The TiO₂ photocatalysis method is a simple and low-power approach to TOC analysis, making it a promising alternative to commonly used TOC analysis methods. This study aims to contribute to the development of more efficient and cost-effective approaches for water quality analysis and management by exploring the effectiveness and reliability of the developed equipment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.231-234
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• 2001

OBD-II regulations are already effective in many countries. The California Air Resources Board(CARB) first issued regulations in 1985 for the 1988 model year, known as OBD-I, and required the vehicle's engine management computer to warn the driver by means of a dash-mounted light if a malfunction occurred in either the oxygen sensor, the exhaust gas recirculation(EGR) valve or the evaporative emission system purge solenoid, and to store information on troubles that have no recurrent characteristics. This paper presents two methods of wireless monitoring OBD signal, which is one of the ECU output for self diagnostic measurement. RF module is used to monitor ECU's Self diagnostic signal remotely. Two kinds of measurement systems which are based on micro-controller(80C196KC) for portable detection and PC for sever are considered for receiving the RF signal. Therefore, possibility of real-time monitoring of ECU's self diagnostic signal remotely is verified on this paper.

• Journal of Sensor Science and Technology
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• v.31 no.4
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• pp.214-217
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• 2022

The effect of inductively coupled plasma (ICP) treatment with O₂ gas on the surface properties of poly(ether sulfone) (PES) was investigated. X-ray photoelectron spectroscopy (XPS) was used to analyze the chemical characteristics of the O₂ plasma-treated PES films. The surface roughness of the pristine and O₂ plasma-treated PES films for different RF powers of the ICP was determined using an atomic force microscope (AFM). The contact angles of the PES films were also measured, using which the surface free energies were calculated. The O1s XPS spectra of the PES films revealed that the number of polar functional groups increased following the O₂ plasma treatment. The AFM analysis showed the average surface roughness increased from 1.01 to 4.48 nm as the RF power of the ICP was increased. The contact angle measurements revealed that the PES films became more hydrophilic as the RF power of the ICP was increased. The total surface energy increased with the RF power of the ICP, resulting from the increased polar energy component.

• Smart Structures and Systems
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• v.30 no.5
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• pp.433-446
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• 2022

Despite efforts to reduce unexpected accidents at confined construction sites, choking accidents continue to occur. Because of the poorly ventilated atmosphere, particularly in long, confined underground spaces, workers are subject to dangerous working conditions despite the use of artificial ventilation. Moreover, the traditional monitoring methods of using portable gas detectors place safety inspectors in direct contact with hazardous conditions. In this study, a long-range (LoRa)-based wireless safety monitoring system that features the network organization, fault-tolerant, power management, and a graphical user interface (GUI) was developed for underground construction sites. The LoRa wireless data communication system was adopted to detect hazardous gases and oxygen deficiency within a confined underground space with adjustable communication range and low power consumption. Fault tolerance based on the mapping information of the entire wireless sensor network was particularly implemented to ensure the reliable operation of the monitoring system. Moreover, a sleep mode was implemented for the efficient power management. The GUI was also developed to control the entire safety-monitoring system and to manage the measured data. The developed safety-monitoring system was validated in an indoor testing and at two full-scale water pipeline construction sites.

• Journal of Sensor Science and Technology
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• v.7 no.5
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• pp.319-326
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• 1998

Anodic half-reaction in the $Na^+$ ionic sensors using $Na_2CO_3$ and $MCO_3$ ($M=Cs_2,K_2,Li_2,Ca$) as a sensitive membrane is derived in continuous flow system to explain $CO_2$ sensing characteristics. For various gas-sensitive membranes, a well known overall reaction, $MCO_3\;=\;MO\;+\;CO_2$, cannot be applied for the EMF behaviors of these kinds of sensors. So, the anodic reaction is found to involve $Na_2CO_3$ and $M^{++}$-containing oxide phases by employing the ion exchange reaction at the interface of solid electrolyte and the sensitive membrane to maintain ionic balance in the whole cell. Based on the electrode reaction derived in flow system, differences of cell potentials between continuous and discontinuous flow systems were also discussed. These EMF differences were considerably caused by the partial pressures of oxygen and $CO_2$ as well as irreversible chemical reactions between electrode materials and $CO_2$ atmosphere.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.13 no.6
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• pp.297-303
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• 2003

Mn-Ni-Co type thin films were prepared at various conditions by a rf magnetron sputtering system. At the condition. or substrate temperature of $300^{\circ}C$ and $Ar/O_2$= 10/0, a cubic spinel phase was obtained. When oxygen was included in process gas, a cubic spinel phase was not formed even after the thermal annealing at $900^{\circ}C$. The thermistor thin film had no other elements except Mn, Ni and Co. The infrared reflection spectra of the thermistor thin films showed that the films had somewhat high reflectance for incoming infrared ray with some angle. The etch rate of the thermistor thin films was about 63nm/min at a condition of DI water : $HNO_3$: HCl = 60 : 30 : 10 vol%. The B constant and temperature coefficient of resistance of the thermistor thin films were 3500 K and -3.95 %/K, respectively. The voltage responsivity of the thermistor thin film infrared sensor was 108.5 V/W and its noise equivalent power and specific detectivity were $5.1\times 10^{-7}$ W/$Hz^{-1/2}$ and $0.2\times 10^6$cm $Hz^{1/2}$/W, respectively.

• The Journal of the Institute of Internet, Broadcasting and Communication
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• v.12 no.1
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• pp.245-248
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• 2012

In this paper, the optimized growing conditions of PZT thin films on low temperature co-fired ceramics (LTCC) substrates are studied. The LTCC technology is an emerging one in the fields of mesoscale (from 10 um to several hundred um) sensor and actuator against silicon based technology due to low cost, high yield, easy manufacturing of 3 dimensional structure, etc. The LTCC substrates with thickness of 400 um are fabricated by laminating 100 um green sheets using commercial power (NEG, MLS 22C). The Pt/Ti bottom electrodes are deposited on the LTCC substrates, then the growing conditions of PZT thin films using rf magnetron sputtering method are studied. The growing conditions are tested under various rf power and gas ratio of oxygen to argon. And the crystallization and ingredient of PZT films are analyzed by X-ray diffraction method (XRD) and energy dispersive spectroscopy (EDS). The optimized growing conditions of PZT thin films are rf power of 125W, Ar/O2 gas ratio of 15:5.

• Korean Journal of Applied Biomechanics
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• v.19 no.1
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• pp.179-186
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• 2009

This works studied to compare gas analyzer with accelerometer and the estimation of energy expenditure based on different attaching position of tri-axial accelerometer such as waist and top of the foot Based on the fact that oxygen intake increases more radically linearly during walking more than 8.0km/hr. 9 male subjects performed walking and running on the treadmill with speed of $1.5{\sim}8.5km$/hr and $4.5{\sim}13.0km$/hr, respectively. Commercially available Nike + iPod Sports kit was used to compare energy expenditure with sensor module attached to their foot. Actual energy expenditure was determined by a continuous direct gas analyzer and two multiple regression equations of walking and running mode for different attaching position were developed. Results showed that estimation accuracy of energy expenditure using waist mounted accelerometer was higher than that of the top of the foot and Nike + iPod Sports kit. Results of energy expenditure based on waist and top of the foot showed that the crossover state of energy expenditure occurred at 7.5km/hr. But Nike + iPod Sports kit could not find intersection of energy expenditure in all nine subjects. Therefore the sensor module attached to the waist and separate multi regression equation by walking and running mode was the best to estimate more accurate prediction.