• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.650-650
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• 2013

Although imprinted nanopatterns of organic polymer can be modified by the heat treatment [1], it generally requires high process temperatures and is material-dependent since the heat-induced mass loss of the organic polymer is greatly affected by its chemical characteristics. When oxygen is added during the annealing process, one can reduce the process temperature as well as the dependence of the materials. With the oxygen, line width reduction of a polymer (SU-8) patterns could be accomplished at temperature of as low as $250^{\circ}C$ which was not possible in the heat only process. This oxidative line width reduction can be dramatically promoted with the introduction of oxygen plasma. The oxygen plasma, with its highly-reactive oxygen species, vigorously etches away the organic materials, proven to be extremely effective line with reduction method. It is, however, very hard to control the extent and homogeneity of the etching, particularly of very fine patterns. Here, we report an effective and reliable line width reduction method of imprinted nanopatterns by combined plasma and heat treatment. The merits of this process include the reduction of process temperature, time and material-dependence.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.457-458
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• 2009

In this work, transparent conducting Al-doped zinc oxide (AZO) films were prepared on Coming glass substrate by RF magnetron sputtering using an Al-doped ZnO target (Al: 2 wt.%) at room temperature and all films were deposited with athickness of 150 nm. We investigated the effects of the post-annealing temperature and the annealing ambient on structural, electrical and optical properties of AZO films. The films were annealed at temperatures ranging from 300 to $500^{\circ}C$ in steps of $100^{\circ}C$ using rapid thermal annealing equipment in oxygen. The thickness of the film was observed by field emission scanning electron microscopy (FE-SEM) and grain size was calculated from the XRD spectra using the Scherrer equation and their electrical properties were investigated using a hole measurement and the reflectance of AZO films was investigated by UV-VIS spectrometry.

• Korean Journal of Materials Research
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• v.13 no.7
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• pp.442-446
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• 2003

Tin dioxide ($SnO _2$) thin films were deposited at $375^{\circ}C$ on alumina substrate by metal-organic chemical vapor deposition. A few hillocks like a cauliflower were observed and the number of hillock on thin film surface increased with annealing temperature in air atmosphere. The oxygen content and the binding energy during air annealing at$ 500^{\circ}C$ came to close the stoichiometric $SnO_2$. The cauliflower hillocks seem to be the result of the continuous migration of the tiny grains to release the stress of an expanded grain. Sensitivity of CO gas depended on annealing temperature and increased with increasing annealing temperature.

• Carbon letters
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• v.11 no.3
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• pp.184-191
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• 2010

Carbon nanotubes are unique tubular structures of nanometer diameter and large length/diameter ratio. The nanotubes may consist of one up to tens and hundreds of concentric shells of carbons with adjacent shells separation of ~0.34 nm. Multiwalled carbon nanotubes were synthesized by arc-discharge technique. MWCNTs were formed at the cathode deposit along with other carbonaceous materials like amorphous carbon, graphite etc. However, to get the best advantage of carbon nanotubes in various advanced applications, these undesired carbonaceous materials to be removed which is a challenging task. In the present study, various techniques were tried out for purifying MWCNTs such as physical filtration, chemical treatment and thermal annealing. SEM, FTIR, TGA and BET techniques were used to characterize the CNTs at various stages. Results shows that suitable chemical treatment followed by thermal annealing under controlled flow of oxygen gives the better route for purification of carbon nanotubes.

• 한국방재학회:학술대회논문집
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• 2008.02a
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• pp.815-818
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• 2008

Titanium was oxidized with oxygen plasma and calcinated with rapid thermal annealing for degradation of humic acid dissolved in water. Titania photocatalytic plate was produced by titanium surface oxidized with oxygen plasma by Plasma Enhanced Chemical Vapor Deposition(PECVD). RF-power and deposition condition is controlled under 100 W, 150 W, 300 W and 500 W. Treatment time was controlled by 5 min and 10 min. The film properties were evaluated by the X-ray Photoelectron Spectroscopy (XPS) and X-Ray Diffraction (XRD). From the experimental results, we found the optimal condition of titania film which exhibited good performance. Moreover photocatalytic capacity was about twice better than thermal spray titania film, and also as good as titania powder.

• Journal of the Korean Society for Heat Treatment
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• v.29 no.6
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• pp.264-271
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• 2016

The effect of the oxygen content and the annealing temperature on the tensile behavior of the Ti-1.5Al-3Fe-0.25Si-(0.1~0.5)O alloy was investigated. The tensile properties were dependent on the volume fraction of the microstructure constituents, i.e. the equixed ${\alpha}$, equixed ${\beta}$ and lamellar ${\alpha}$. The results showed that the O-partitioned equixed ${\alpha}$ had a much higher strength compared to the equixed ${\beta}$. The strength of the lamellar ${\alpha}$ increased with increasing the annealing temperature because the O content of the lamellar ${\alpha}$ increased. Ti-1.5Al-3Fe-0.25Si-0.3O alloy annealed to $900^{\circ}C$ where the volume fraction of lamellar ${\alpha}$ was the highest exhibited an excellent combination of the strength (1198.5 MPa) and ductility (27.5%). The effect of the lamellar ${\alpha}$ on the ductility was discussed.

• Korean Journal of Metals and Materials
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• v.49 no.1
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• pp.17-24
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• 2011

To investigate the relationship between heat treatment in zirconium alloy tubing process and metallurgical characteristics of Zr-1Nb-0.69Sn-0.11Fe alloy tubes, mechanical and oxidation behaviors of tubes heat treated at different temperatures after the final pilgering were investigated. The stress strain curves exhibited the saturation behaviors in all heat treatment conditions ($460{\sim}600^{\circ}C$) in this study with the onset strain of saturation increased with increase of post-pilgering annealing temperature. The strength fell off rapidly with increasing annealing temperature. The ultimate strength of the low tin Zr-1Nb-0.69Sn-0.11Fe alloy with slightly higher iron and oxygen contents in this study was found to be higher than Zr-1Nb-1Sn-0.1Fe alloy. The oxidation experiments in steam condition revealed that the corrosion resistance of low tin Zr-1Nb-0.69Sn-0.11Fe alloy was better than the Zr-1Nb-1Sn-0.1Fe alloy with a higher Sn content. The weight gain of low tin Zr-1Nb-0.69Sn-0.11Fe alloy tubes gradually increased with the increasing annealing temperature possibly due to the decreased Nb content in the matrix because of the formation of ${\beta}-Nb$ particles.

• Bulletin of the Korean Chemical Society
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• v.33 no.7
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• pp.2255-2259
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• 2012

Aggregation of titania nanotubes (TNTs) fabricated by hydrothermal method were calcined in air and dry nitrogen; Changes in morphology and crystallinity of the nanotubes were studied by means of TEM, EDX, and XPS. EDX patterns and XPS spectra proved that there were a certain densities of oxygen vacancies in TNTs annealed in $N_2$. The photocatalysis experiments revealed TNTs/$N_2$ possesses significantly higher photocatalytic efficiency than TNTs annealed in dry air to degrade methylene blue. The correlation between oxygen vacancies and photocatalytic property may be attributed to: 1) oxygen vacancies might have affected results on water molecules adsorption and increase of the hydroxyl concentration; and 2) oxygen vacancies resulted in some changes in electronic structure of TNTs/$N_2$ aggregation and Fermi level extends into the conducting band.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.35 no.11A
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• pp.1091-1096
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• 2010

Stiction in microelectromechanical systems (MEMS) has been a major failure mechanism. Especially, in RF MEMS switches, moving parts often suffered in-use and release related stiction problems. Some materials and methods have been used to prevent this problem. Diamond-like carbon (DLC) has not only been used as a protective material owing to its good mechanical properties but also has been used as a hydrophobic material. Its properties could be controlled by post annealing treatment in various conditions. We synthesized DLC films using a radio frequency plasma enhanced chemical vapor deposition (RF PECVD) method on silicon substrates using methane ($CH_4$) and hydrogen ($H_2$) gas. Then, the change of the hydrophobic property of the films was investigated undervarious annealing temperatures in nitrogen and in oxygen ambient. The films, that were annealed above $700^{\circ}C$ in nitrogen ambient, showed a high contact angle of water (> $90^{\circ}$) even though their mechanical property was sacrificed to some degree. The structural variation and the changes of the hydrophobic and mechanical properties of the DLC films were analyzed by Raman spectrum, contact angle measurement, surface profiler, and a nanoindentation test.

• Korean Journal of Materials Research
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• v.20 no.10
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• pp.550-554
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• 2010

This work presents a fabrication procedure to make large-area, size-tunable, periodically different shape metal arrays using nanosphere lithography (NSL) combined with ashing and annealing. A polystyrene (PS, 580 ${\mu}m$) monolayer, which was used as a mask, was obtained with a mixed solution of PS in methanol by multi-step spin coating. The mask morphology was changed by oxygen RIE (Reactive Ion Etching) ashing and temperature processing by microwave heating. The Au or Pt deposition resulted in size tunable nano patterns with different morphologies such as hole and dots. These processes allow outstanding control of the size and morphology of the particles. Various sizes of hole patterns were obtained by reducing the size of the PS sphere through the ashing process, and by increasing the size of the PS sphere through annealing treatment, which resulted in tcontrolling the size of the metallic nanoparticles from 30 nm to 230 nm.