• Title/Summary/Keyword: oxygen annealing

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Microstructure and Electrical Resistivity of Ink-Jet Printed Nanoparticle Silver Films under Isothermal Annealing (잉크젯 프린팅된 은(Ag) 박막의 등온 열처리에 따른 미세조직과 전기 비저항 특성 평가)

  • Choi, Soo-Hong;Jung, Jung-Kyu;Kim, In-Young;Jung, Hyun-Chul;Joung, Jae-Woo;Joo, Young-Chang
    • Korean Journal of Materials Research
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    • v.17 no.9
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    • pp.453-457
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    • 2007
  • Interest in use of ink-jet printing for pattern-on-demand fabrication of metal interconnects without complicated and wasteful etching process has been on rapid increase. However, ink-jet printing is a wet process and needs an additional thermal treatment such as an annealing process. Since a metal ink is a suspension containing metal nanoparticles and organic capping molecules to prevent aggregation of them, the microstructure of an ink-jet printed metal interconnect 'as dried' can be characterized as a stack of loosely packed nanoparticles. Therefore, during being treated thermally, an inkjet-printed interconnect is likely to evolve a characteristic microstructure, different from that of the conventionally vacuum-deposited metal films. Microstructure characteristics can significantly affect the corresponding electrical and mechanical properties. The characteristics of change in microstructure and electrical resistivity of inkjet-printed silver (Ag) films when annealed isothermally at a temperature between 170 and $240^{\circ}C$ were analyzed. The change in electrical resistivity was described using the first-order exponential decay kinetics. The corresponding activation energy of 0.44 eV was explained in terms of a thermally-activated mechanism, i.e., migration of point defects such as vacancy-oxygen pairs, rather than microstructure evolution such as grain growth or change in porosity.

Effects of Heat Treatment on Choke Core Properties in $Fe_{78}Si_9B_{13}$ Amorphous Alloys ($Fe_{78}Si_9B_{13}$ 비정질 합금의 초크 코어 특성에 미치는 열처리 효과)

  • 노태환;장완희
    • Journal of the Korean Magnetics Society
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    • v.10 no.5
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    • pp.191-195
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    • 2000
  • With the object of developing a non-gap choke core, effects of annealing in oxygen atmosphere on magnetic properties for Fe$_{78}$Si$_{9}$B$_{13}$ amorphous alloy were investigated. After annealing for 2 hrs at 440 $^{\circ}C$, optimum magnetic properties for choke core were obtained, where the effective permeability was 180 and was almost constant up to several MHz, and the decrease in permeability upon large DC bias current of 12 A or DC bias magnetic field of 8,000 A/m was very little. Moreover the AC magnetic loss was very low as compared to the conventional choke cores. Upon the optimum annealing, the magnetic hysteresis loop was inclined accompanying the increase of coercive force and the appearance of fine crystallites of $\alpha$-Fe phase. The good choke core properties was considered to be due to the suppression of domain boundary motion and domain refinement by the crystallites.

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Low-temperature crystallization of high-dielectric (Ba,Sr)$TiO_3$ thin films for embedded capacitors

  • Cho, Kwang-Hwan;Kang, Min-Gyu;Kang, Chong-Yun;Yoon, Seok-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2010.03a
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    • pp.21-21
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    • 2010
  • (Ba,Sr)$TiO_3$ (BST) thin film with a perovskite structure has potential for the practical application in various functional devices such as nonvolatile-memory components, capacitor, gate insulator of thin-film transistors, and electro-optic devices for display. Normally, the BST thin films derived from sol-gel and sputtering are amorphous or partially crystalline when processed below $600^{\circ}C$. For the purpose of integrating BST thin film directly into a Si-based read-out integrated circuit (ROIC), it is necessary to process the BST film below $400^{\circ}C$. The microstructural and electrical properties of low-temperature crystallized BST film were studied. The BST thin films have been fabricated at $350^{\circ}C$ by UV-assisted rapidly thermal annealing (RTA). The BST films are in a single perovskite phase and have well-defined electrical properties such as high dielectric constant, low dielectric loss, low leakage current density, and high breakdown voltage. Photoexcitation of the organics contained in the sol-gel-derived films by high-intensity UV irradiation facilitates elimination of the organics and formation of the single-crystalline phase films at low temperatures. The amorphous BST thin film was transformed to a highly (h00)-oriented perovskite structure by high oxygen pressure processing (HOPP) at as low as $350^{\circ}C$. The dielectric properties of BST film were comparable to (or even better than) those of the conventionally processed BST films prepared by sputtering or post-annealing at temperature above $600^{\circ}C$. When external pressure was applied to the well-known contractive BST system during annealing, the nucleation energy barrier was reduced; correspondingly, the crystallization temperature decreased. The UV-assisted RTA and HOPP, as compatible with existing MOS technology, let the BST films be integrated into radio-frequency circuit and mixed-signal integrated circuit below the critical temperature of $400^{\circ}C$.

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Crystallization Characteristics of Reactively Sputtered Titanium Oxide Thin Films (반응성 스퍼터링된 산화 티타늄 박막의 결정화 특성)

  • Lee, Pil-H.;Ko, Kyung-H.;Ahn, Jae-H.;Lee, Soon-I.
    • Korean Journal of Materials Research
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    • v.6 no.8
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    • pp.852-857
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    • 1996
  • Crystallization characteristics of titanium oxide thin film during post-annealing of reactive sputter deposition were studied. Amorphous phases of as-deposited films were crystallized into rutile after annealing at $900^{\circ}C$ and anatase at $500^{\circ}C$, respectively when $O_2$ concentration during sputtering was more than 15%. However, rutile was the only phase obtainable after annealing if %$O_2$ was less than 10%. For these films, Magneli phase($Ti_nO_{2n-1}$) were crystallized below $500^{\circ}C$ at first place due to slow oxidation of nonstoichiometric films but $500^{\circ}{\sim}600^{\circ}C$ anatase with nonstoichiometry was crystallized for a short period. It was, therefore, concluded that crystal growth can proceed without phase transition if stoichiometric phase is formed at the first stage of crystallization, and that rutile, the most stable phase, was resulted from any oxygen deficient nonstoichiometric films.

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A Study on the Microstructure and Physical Properties of Cold Sprayed Cu/CNT Composite Coating (저온 분사 코팅법으로 제조된 Cu/CNT 복합 코팅층의 미세조직 및 물성 연구)

  • Kwon, Seong-Hee;Park, Dong-Yong;Lee, Dae-Yeol;Euh, Kwang-Jun;Lee, Kee-Ahn
    • Korean Journal of Metals and Materials
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    • v.46 no.3
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    • pp.182-188
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    • 2008
  • Carbon nanotubes(CNTs) have outstanding mechanical, thermal, and electrical properties. Thus, by placing nanotubes into appropriate matrix, it is postulated that the resulting composites will have enhanced properties. Cold spray can produce thick metal-based composite coatings with very high density, low oxygen content, and phase purity, which leads to excellent physical properties. In this study, we applied cold spray coating process for the consolidation of Cu/CNT composite powder. The precursor powder mixture, in which CNTs were filled into copper particles, was prepared to improve the distribution of the CNT in copper matrix. Pure copper coating was also conducted by cold spraying as a reference. Annealing heat treatment was applied to the coating to examine its effect on the properties of the composite coating. The hardness of Cu/CNT composite coating represented similar value to that of pure copper coating. It was importantly found that the electrical conductivity of the Cu/CNT composite coating significantly increased from 53% for the standard condition to almost 55% in the optimized condition, taking annealed ($500^{\circ}C/1hr$.) copper coating as a reference (100%). The thermal conductivity of Cu/CNT composite coating layer was higher than that of pure Cu coating. It was also found that the electrical and thermal conductivities of Cu/CNT composite could be improved through annealing heat treatment. The microstructural evolution of Cu/CNT coating was also investigated and related to the macroscopic properties.

Electrical and Optical Properties of phosphorus doped ZnO Thin Films at Various Post-Annealing Temperatures (후열 처리 온도 변화에 따른 phosphorus doped ZnO 박막의 전기적 및 광학적 특성)

  • Han, Jung-Woo;Kang, Seong-Jun;Yoon, Yung-Sup
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.46 no.2
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    • pp.9-14
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    • 2009
  • The effects of post-annealing temperature on the optical and electrical properties of P-doped ZnO thin films grown on sapphire substrate have been investigated under oxygen ambient. The XRD shows that regardless of the post-annealing temperature, all P-doped ZnO thin films indicate the c-axis orientation. The results of hall effect measurements indicate the P-doped ZnO thin film annealed at $850^{\circ}C$ exhibits p-type behavior with hole concentration of $1.18{\times}1016cm^{-3}$ and hole mobility of $0.96cm^2/Vs$. The low-temperature (10K) Photoluminescence results reveal that the peak related to the neutral-acceptor exciton (A0X), free electrons to neutral acceptor (FA) and donor acceptor pair (DAP) at 3.351ev, 3.283eV and 3.201eV are observed in the films showing p-type behavior with acceptor. The optimization of deposition and post-annealing conditions will certainly make the P-doped ZnO thin films promising materials for the application to the next generation of optical devices.

Adsorbate-induced reconstructions of $\times$2 surface (다양한 흡착자에 대한Si(113) $\times$2 표면의 상변화 연구)

  • 김학수;황찬국;김용기;김정선;박죵윤;김기정;강태희;김봉수
    • Journal of the Korean Vacuum Society
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    • v.8 no.3B
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    • pp.269-275
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    • 1999
  • The phase transition on the surface which several adsorbates (K, Mg, etc.) are deposited was observed by Low Energy Electron Diffraction (LEED) and Reflection High Energy Electron Diffraction (RGEED). We took the photoelectron spectra from the valence and core level at several oxygen exposure. For oxygen adsorption, the surface state in valence spectra diminished concurrently with S1, S2 peaks in core level spectra and surface periodicity turned to 3$\times$2 by post-annealing. These results suggest that the phase transition from 3$\times$2 to 3$\times$ on the Si(113) at initial stage is induced by a rearrangement of atoms on the substrate, not by the formation of overlayer.

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Fabrication and Characterization of Carbon-Coated Cu Nanopowders by Pulsed Wire Evaporation Method (전기선폭발법에 의해 카본 코팅된 Cu 나노분말의 제조 및 특성 연구)

  • Lee, H.M.;Park, J.H.;Hong, S.M.;Uhm, Y.R.;Rhee, C.K.
    • Journal of Powder Materials
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    • v.16 no.4
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    • pp.243-248
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    • 2009
  • Carbon-coated Cu nanopowders with core/shell structure have been successfully fabricated by pulsed wire evaporation (PWE) method, in which a mixed gas of Ar/$CH_4$ (10 vol.%) was used as an ambient gas. The characterization of the samples was carried out using x-ray diffraction (XRD), scanning electron microscope (SEM), and high resolution transmission electron microscope (HRTEM). It was found that the nanoparticles show a spherical morphology with the size ranging of 10-40 nm and are covered with graphite layers of 2-4 nm. When oxygen-passivated Cu nanopowders were annealed under flowing argon gas (600 and 800$^{\circ}C$), the crystallinity of $Cu_2O$ phase and the particle size gradually increased. On the other hand, carbon-coated Cu nanopowders remained similar to as-prepared case with no additional oxide or carbide phases even after the annealing, indicating that the metal nanoparticles are well protected by the carbon-coating layers.

$SrTiO_3$ Single Crystal Growth by Verneuil Method (Verneuil법에 의한 $SrTiO_3$ 단결정 성장)

  • Choi, I.S.;Cho, H.;Choi, J.K.;Orr, K.K.
    • Journal of the Korean Ceramic Society
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    • v.29 no.9
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    • pp.689-694
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    • 1992
  • Strontium Titanate single crystal is grown by Verneuil method. Feed materials were prepared by coprecipitation method which started with Sr(NO3)2 and TiCl4. SrTiO3 can not be grown from feed materials having the stoichiometric components due to volatilization of SrO, when the powder added more 3 wt% SrO used, the crystal can be grown. Growth conditions that the pressure of oxygen and hydrogen gas was 5 psi, the flow rate of oxygen and hydrogen was 7.3 and 30ι/min respectively, the growth rate was 20 mm/hr were optimum. The grown single crystal has the diameter of 10~15 mm and its length is 30~40 mm. The grown crystal was deep brown color and somewhat transparent. The color of grown crystal was lightened after annealing.

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ZnO thin film Gas sensors for detection of TMA gas with Pt/Ti thin film heater (Pt/Ti 발열체가 내장된 TMA 가스 측정용 ZnO 박막 가스 센서)

  • 류지열;박성현;최혁환;권태하
    • Journal of the Korean Institute of Telematics and Electronics A
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    • v.33A no.6
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    • pp.127-135
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    • 1996
  • To increase the sensitivity and the selectivity of the sensors to TMA gas, the composition ratio and the growth conditions of the ZnO films are studied. Annealing of the ZnO films in the various time ranges and temperatures in the oxygen is carried out to enhance the stbility of the electrical resistance. Pt/Ti heater deposited on backside of the substrates in used to control the operating temperature of th esensor. The ZnO thin film sensors doped to 4.0 wt% $Al_{2}$O$_{3}$ 1.0wt.% TiO$_{2}$ and 0.2wt.% V$_{2}$O$_{5}$ exhibited a high sensitivity and an excellent selectivity for TMA gas. The sensors made with the thin films annealed at 700$^{\circ}$C for 60 minutes in the oxygen atmosphere had a good stability and linearity. The heater deposited in the ratio of 1 to 1 (Pt:Ti) had a good heating properties. The sensors fabricated using above conditions showed a good response to the actual gases of a mackerel at a step of deterioration after death.

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