• 한국진공학회:학술대회논문집
• /
• 한국진공학회 2012년도 제43회 하계 정기 학술대회 초록집
• /
• pp.288-288
• /
• 2012

The oxidation characteristics of tungsten line pattern during the carbon-based mask layer removal process using oxygen plasmas and the reduction characteristics of the WOx layer formed on the tungsten line surface using hydrogen plasmas have been investigated for sub-50 nm patterning processes. The surface oxidation of tungsten line during the mask layer removal process could be minimized by using a low temperature ($300^{\circ}K$) plasma processing instead of a high temperature plasma processing for the removal of the carbon-based material. Using this technique, the thickness of WOx on the tungsten line could be decreased to 25% of WOx formed by the high temperature processing. The WOx layer could be also completely removed at the low temperature of $300^{\circ}K$ using a hydrogen plasma by supplying bias power to the tungsten substrate to provide an activation energy for the reduction. When this oxidation and reduction technique was applied to actual 40 nm-CD device processing, the complete removal of WOx formed on the sidewall of tungsten line could be observed.

• Bulletin of the Korean Chemical Society
• /
• 제20권12호
• /
• pp.1457-1463
• /
• 1999

Structure and their redox property of the vanadium oxides prepared by decomposing NH₄VO₃ at various temperatures were studied by XRD, SEM, XPS, and temperature programmed reduction/temperature programmed oxidation (TPR/TPO) experiment. All TPR profiles have two sharp peaks in the temperature range 650-750℃, and the area ratio of the two sharp peaks changed from sample to sample. There were three redox steps in TPR/TPO profiles. The oxidation proceeded in the reverse order of the reduction process, and both the reactions proceeded via quite a stable intermediates. The changes of the morphological factor $(I_{(101)}/I_{(010)})$, the ratio of $O_{1S}$ peak area (O$_{1S}$( α)/O$_{1S}$( β)) in the XPS results, and the ratio of hydrogen consumption in TPR profiles with various vanadium oxides showed the distinct relationship between the structural property and their redox property of vanadium oxides. The change of the specific yield of phthalic anhydride with various vanadium oxides showed a very similar trend to those of the peak area ratio in TPR profiles, which meant that the first reduction step related to the partial oxidation of o-xylene on the vanadium oxide catalyst.

• 대한화학회지
• /
• 제46권4호
• /
• pp.353-363
• /
• 2002

이 연구의 목적은 일반고와 과학고 학생들의 정신용량과 풀이 방법에 따른 산화 환원 반응식 완결 과정의 특성을 분석하여 산화 환원 단원의 교수학습 지도에 시사점을 얻고자 하는데 있다. 일반고 학생 79명과 과학고 학생 57명을 대상으로 하여 정신요량 검사, 산화 환원 반응식 완결 검사를 실시하였으며, 문항 유형별로 학생들의 문제 풀이 실패 유형과 성공 유형을 추출하여 분석틀을 개발하고 개발한 분석틀에 의하여 정신용량과 풀이 방법에 따라 실패 사례와 성공 사례를 분석하여 나타나는 특징을 알아보았다. 일반고 학생들과 과학고 학생들 모두 산화 환원 개념 이해 정도가 낮을수록 미정계수법을 많이 선택하였으며 미정계수법을 선택한 학생들은 정신용량이 클수록 문제 풀이의 성공률이 높았다. 또한, 산화 환원 개념 이해 정도가 높은 학생들은 산화수법이나 이온 자법을 더 많이 선택하였고 정신용량에 관계없이 문제 풀이의 성공률이 높게 나타났다. 학생들의 풀이 과정을 분석한 결과 성공 유형은 산화 환원의 개념 이해 정도가 높고 풀이 방법에 관계없이 풀이 단계 수를 줄이 학생들이었다. 실패 유형은 물이 방법에 따라 다르게 나타났다. 미정계수법을 선택한 학생들의 실패 유형은 계산 과정 중 틀린 경우, 미정방정식을 잘못 세운 경우 문제 풀이 과정중 고려해야 할 변인을 모두 고려하지 못한 경우 풀이 과정이 복잡하여 중단한 경우였다. 산화수법을 선택한 학생들의 실패 유형은 산화수를 잘못 결정한 경우 질량균형 또는 전하균형을 고려하지 않은 경우였다.

• 한국대기환경학회지
• /
• 제15권4호
• /
• pp.457-461
• /
• 1999

Recently, increasing usage of diesel vehicle, many countries try to reduce the pollutant materials by emission regulation standard. Particularly, in our country, the supplement ratio of diesel vehicle is high, and air pollution by particulate matter(PM) is very serious. So, in theoretical study wer analyzed the formation principle of gaseous emission and PM, the characteristics of CVS-75 mode. In experimental study, we tested exhaust gas reduction of emission and PM, the characteristics of CVS-75 mode. In experimental study, we tested exhaust gas reduction of disel oxidation catalyst(DOC) by CVS-75 mode in light duty diesel vehicle. In case of an automobiletest with the 2,956cc diesel engine which DOC was equipped, CVS-75 mode which is similar to driving conditions on the road was chosen as the restrictive mode of light duty diesel automobile in our country. According to the Pt, the reduction rate of exhaust emission was estimated with using 0.1% high sulfur fuel and 0.05% low sulfur fuel.

• 한국대기환경학회지
• /
• 제18권5호
• /
• pp.411-417
• /
• 2002

The purpose of this study is to evaluate the emission reduction characteristics depending on the formation of the catalyst which influences the development of the diesel oxidation catalyst (DOC) suitable for small-sized diesel engines. We also attempted to suggest the feasibility of it as an after-treatment device. The reduction efficiency of DOC for CO and HC was proportional to the contents of precious metals, and the particulate matter (PM) has been reduced as much as 53∼59%. The reduction rate of soluble organic fraction (SOF) by DOC attachment revealed 100%. The composition of sulfate in PM increased from 3%, 7∼11% by installation of DOC. It is described that increase of sulfate contributed to the production of PM. This result also showed that the SOF and sulfate have trade-off relationship.

• The Korean Journal of Ecology
• /
• 제7권2호
• /
• pp.85-90
• /
• 1983

There was a decrease in nitrate reductase activity (NRA) measured in vivo in rice roots (Oryza sativa cv. Tongil) grown in anaerobic culture solution. But it was reversed by addition of malonate to the in vivo nitrate reduction assay medium. Malonate increased the in vivo NRA during 2-5 hours incubation and decreased it in longer incubation hours. In vivo NRA was stimulated by addition of NaHCO3 to the assay medium, but not by Na2CO3. The stimulation of NRA by NaHCO3 was not observed in shoot removed rice roots. It is suggested that CO2 from NaHCO3 is carboxylated by phosphoenol pyruvate carboxylase, results in increasing the malate contents in the roots, and stimulates the in vivo NRA. NADH needed in nitrate reduction is supported by malate oxidation. In rice roots, it seems probable that malate oxidation in the mitochondria is more important to nitrate reduction than malae oxidation in cytoplasm.

• Applied Science and Convergence Technology
• /
• 제27권2호
• /
• pp.35-37
• /
• 2018

The redox reaction on graphene nanoribbon (GNR) field effect transistors(FET) has been studied. In detail, upon employing an electrolyte gating, we verified electron transport performance modulation of GNR FET by monitoring conductance variation under oxidation and reduction processes. The conductance enhancement of GNR via removal of PMMA residue on graphene surface during redox cycles was also observed.

• 자원리싸이클링
• /
• 제29권5호
• /
• pp.64-72
• /
• 2020

시멘트 산업의 질소산화물 배출량 감축을 위해 소성로에 다단연소공정을 적용할 경우, 질소산화물을 질소로 환원시키고 미연소 물질을 완전히 연소시켜 연소효율을 증대할 수 있는 산화/환원 구간이 필수적이다. 이에 본 연구에서는 시멘트 소성로 calciner에 산화/환원 구간 설정 시 최종 생산품인 시멘트 클링커의 품질안정성을 확보할 수 있는 최적 산화/환원 소성분위기를 거시적으로 관찰하고자 하였으며, 소성조건에 따른 원료물질의 질량변화, 탈탄산률, 소성완료율 등을 조사하였다. 실험결과, 대체로 환원분위기보다 산화분위기에서 원료물질의 열분해가 촉진되는 경향을 나타내며, 원료물질 자체 성분특성에 따라 비교적 CaO 함량이 높은 석회석의 열분해가 시멘트 조합원료보다 늦게 진행되는 것을 알 수 있었는데 이는 소성로 내 CO₂ 분압에 의한 현상으로 생각된다. 산화/환원 소성분위기에 따른 원료물질의 열분해 특성은 일반적인 석회석 열분해 온도보다 낮은 온도범위에서 비교적 큰 차이를 보였는데, 소성온도 750℃ 구간에 산화분위기 형성에 따라 원료물질의 열효율 향상을 기대할 수 있을 것으로 생각된다. 다만, 본 연구의 경우 실험실 규모의 연구로서 현장공정과는 차이가 있기 때문에, pilot plant 규모의 실검증결과가 필요한 것으로 판단된다.

• Journal of Mechanical Science and Technology
• /
• 제20권1호
• /
• pp.1-12
• /
• 2006

This work reviews the effects of catalyst formulation and exhaust gas composition on soot oxidation in CDPF (Catalytic Diesel Particulate Filter). DOC's (Diesel Oxidation Catalysts) have been loaded with Pt catalyst (Pt/$Al_{2}O_3$) for reduction of HC and CO. Recent CDPF's are coated with the Pt catalyst as well as additives like Mo, V, Ce, Co, Fe, La, Au, or Zr for the promotion of soot oxidation. Alkali (K, Na, Cs, Li) doping of metal catalyst tends to increase the activity of the catalysts in soot combustion. Effects of coexistence components are very important in the catalytic reaction of the soot. The soot oxidation rate of a few catalysts are improved by water vapor and NOx in the ambient. There are only a few reports available on the mechanism of the PM (particulate matter) oxidation on the catalysts. The mechanism of PM oxidation in the catalytic systems that meet new emission regulations of diesel engines has yet to be investigated. Future research will focus on catalysts that can not only oxidize PM at low temperature, but also reduce NOx, continuously self-cleaning diesel particulate filters, and selective catalysts for NOx reduction.

• 청정기술
• /
• 제6권1호
• /
• pp.79-84
• /
• 2000

반도체 세정공정에서 사용되는 화학약품의 소모량을 줄이기 위하여 소량의 전해질 혹은 초순수만을 전기분해 시켜 생성되는 전리수를 이용하여 금속 불순물들이 오염된 실리콘 웨이퍼를 습식세정을 하였다. 전리수는 다양한 범위의 pH 및 산화환원전위(oxidation-reduction potential, ORP)를 형성할 수 있으며, 전리수의 양극수는 pH 및 산화환원전위를 각각 4.7 및 +1000mV의 산화성 수용액을, 전리수의 음극수는 pH 및 산화환원전위가 각각 6.3 및 -550mV를 40분 이상 유지하고 있었다. 실리콘 웨이퍼 세정 전과 후의 금속 불순물 측정은 ICP-MS(Inductively coupled plasma spectroscopy)를 사용하였다. 전리수 가운데 양극수는 구리 불순물 제거에, 음극수는 철 불순물 제거에 효과적임을 확인하였다.