• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2008년도 춘계학술대회 논문집
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• pp.693-694
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• 2008

• 한국광학회지
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• 제10권4호
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• pp.283-288
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• 1999

위상측정 간섭계(phase-measuring interferometer)를 이용한 표면조도(surface roughness) RMS값 수십 $\AA$급과 sub $\AA$급 반사경 기판의 조도 평가 특성이 조사되었다. 위상측정 간섭계의 조도 측정오차에 대한 위상 및 강도 데이터 평균의 영향이 조사되었으며, 이를 근거로 조도 측정오차를 최소화하는 최적의 위상 평균횟수와 강도 평균횟수가 도출되었다. 수십 $\AA$급 샘플의 경우, 조도 측정값은 데이터 평균의 영향을 적게 받은 반면, sub $\AA$급 반사경 기판 조도 측정시에 위상 평균 30회, 강도 평균20회에서 안정적이고, 신호 대 잡음비가 최대인 조도 측정값을 얻을 수 있었다. 이때의 조도 측정값은 광학적 heterodyne 간섭계에 의한 조도 측정결과와도 잘 일치하였다. 최적 데이터 평균횟수에서 표면조도 측정 반복도 역시 0.01$\AA$이하의 양호한 측정오차를 보였다.

• Journal of the Optical Society of Korea
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• 제10권1호
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• pp.48-54
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• 2006

White-light scanning interferometry (WLI) and phase shifting interferometry (PSI) are increasingly used for surface topography measurements, particularly for areal measurements. In this paper, we compare surface profiling results obtained from above two optical methods with those obtained from stylus instruments. For moderately rough surfaces ($Ra{\approx}500\;nm$), roughness measurements obtained with WLI and the stylus method seem to provide close agreement on the same roughness samples. For surface roughness measurements in the 50 nm to 300 nm range of Ra, discrepancies between WLI and the stylus method are observed. In some cases the discrepancy is as large as 109% of the value obtained with the stylus method. By contrast, the PSI results are in good agreement with those of the stylus technique.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 1997년도 추계학술대회 논문집
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• pp.254-259
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• 1997

The measurement of surface roughness and waviness by means of noncontact method is an important area to be developed for GAC(Geometrical Adaptive Control) system. This paper deal with the design of noncontact in-process measurement system which measures the surface roughness and waviness during cylindrical grinding. This measuring system is simple and the apparatus proposed is composed of a laser unit, photodetector and optical system. During operation, the surface of a workpiece is continuously scanned by a laser beam. This method makes it possible to detect the surface roughness and waviness along the feed direction by control the spot diameter of laser beam. The experimental results show that the presence of chattering, loading and glazing can be detected sensitively along the feed directions.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2006년도 춘계학술대회 논문집
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• pp.47-48
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• 2006

A roughness measuring system which comprises an integrating sphere and a stabilized laser has been fabricated with the aim of measuring the roughness correction value which is necessary in gauge block measurement by optical interferometry. To calibrate the system, a Newton's ring interferometer has been introduced. The method how to calibrate the roughness measurement system has been described.

• Current Optics and Photonics
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• 제1권6호
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• pp.604-612
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• 2017

An effective and precise method using a scanning white-light interferometer (SWLI) for three-dimensional surface measurements, in particular for roughness measurements, has been proposed. The measurement of a microscopically sloped area using an interferometer has limitations, due to the numerical aperture of the lens. In particular, for roughness measurements, it is challenging to obtain accurate height data for a sloped area using the interferometer, due to diffraction of the light. Owing to these optical limitations of the interferometer for roughness measurements, the Ra measurements performed using an interferometer contain errors. To overcome the limitations, we propose a method consisting of the following two steps. First, we evaluate the height data and set the invalid height area to be blank, using the characteristics of the modulus peak, which has a low peak value for signals that have low reliability in the interferogram. Next, we interpolate the blank area using the adjacent reliable area. Rubert roughness standards are used to verify the proposed method. The results obtained by the proposed method are compared to those obtained with a stylus profilometer. For the considered sinusoidal samples, Ra ranges from $0.053{\mu}m$ to $6.303{\mu}m$, and we show that the interpolation method is effective. In addition, the method can be applied to a random surface where Ra ranges from $0.011{\mu}m$ to $0.164{\mu}m$. We show that the roughness results obtained using the proposed method agree well with profilometer results. The $R^2$ values for both sinusoidal and random samples are greater than 0.995.

• 한국광학회:학술대회논문집
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• 한국광학회 2006년도 동계학술발표회 논문집
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• pp.209-210
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• 2006

• 한국정밀공학회지
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• 제21권4호
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• pp.79-87
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• 2004

The light pattern reflected from a machined surface contains some information like roughness and profile on the projected surface as expected in the Beckmann-Spizzichino model. In applying the theory into a real reliable measuring device, many parameters such as incident light power, wave length, spot size should be kept a constant optical value. However, the reflected light power is likely to change with the environmental noise, the variations of the light source, the reflectivity of the surface, etc. even though the incident light power is constant. In this study, a method for adjusting the incident light power to keep the reflected light power projected on a CMOS image sensor constant was proposed and a simple adjustment algorithm based on PI digital control was examined. Experiments verified that the proposed method made the surface roughness measurement better and more reliable even under variations of the height of light source.

• 한국전기전자재료학회논문지
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• 제26권3호
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• pp.194-197
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• 2013

We investigated the effect of etching time on the surface roughness, and electrical and optical properties of ZnO and 2 wt% Al-doped ZnO (AZO) films. The ZnO and AZO films were deposited on glass substrates by RF magnetron sputtering technique. The etching experiment was carried out using a solution of 5% HCl at room temperature. The surface roughness was characterized by Atomic Force Microscopy. The electrical property was measured by Hall measurement system and 4-point probe. The optical property was characterized by UV-vis spectroscopy. After the wet chemical etching, the surface textures were obtained on the surface of the ZnO and AZO films. With the increase of etching time, the surface roughness (RMS) of the films increased and the transmittance of the films was observed to decrease. For the AZO film, a low resistivity of $1.0{\times}10^{-3}\;{\Omega}{\cdot}cm$ was achieved even after the etching.

• 한국산학기술학회논문지
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• 제15권4호
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• pp.1844-1849
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• 2014

지금까지 금형의 표면관리를 위해 단순 현미경이나 표면 거칠기 측정기를 이용한 측정방법들은 구조적인 문제로 산업현장에서 적용하는 데 효율성이 떨어진다. 이에 따라 장소에 구별 없이 다양한 크기의 금형 측정과 품질관리 효율성을 높일 수 있는 측정시스템 및 분석시스템은 매우 필요하다. 본 연구는 이와 같은 필요성을 만족시키기 위한 현장맞춤형 이동식 표면측정 시스템 개발을 목표로 수행하였다. 측정시스템은 지지대(Base), 몸체(Body), 광학계(Opticalsystem)등 3부분으로 분리할 수 있도록 기구적으로 설계 및 제작하였다. 측정시스템의 실험결과 표면거칠기는 94.9~99.9%의 정확성을 나타냈으며, 원의 측정 값에 대한 편차는 $2{\mu}m$ 이내로 신뢰성을 확보하였다.