• Journal of the Optical Society of Korea
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• 제19권6호
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• pp.705-710
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• 2015

The fabrication process of thin boron-doped nanocrystalline diamond (B-NCD) microelectrodes on fused silica single mode optical fiber cladding has been investigated. The B-NCD films were deposited on the fibers using Microwave Plasma Assisted Chemical Vapor Deposition (MW PA CVD) at glass substrate temperature of 475 ℃. We have obtained homogenous, continuous and polycrystalline surface morphology with high sp³ content in B-NCD films and mean grain size in the range of 100-250 nm. The films deposited on the glass reference samples exhibit high refractive index (n=2.05 at λ=550 nm) and low extinction coefficient. Furthermore, cyclic voltammograms (CV) were recorded to determine the electrochemical window and reaction reversibility at the B-NCD fiber-based electrode. CV measurements in aqueous media consisting of 5 mM K₃[Fe(CN)₆] in 0.5 M Na₂SO₄ demonstrated a width of the electrochemical window up to 1.03 V and relatively fast kinetics expressed by a redox peak splitting below 500 mV. Moreover, thanks to high-n B-NCD overlay, the coated fibers can be also used for enhancing the sensitivity of long-period gratings (LPGs) induced in the fiber. The LPG is capable of measuring variations in refractive index of the surrounding liquid by tracing the shift in resonance appearing in the transmitted spectrum. Possible combined CV and LPG-based measurements are discussed in this work.

• 한국광학회:학술대회논문집
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• 한국광학회 2000년도 제11회 정기총회 및 00년 동계학술발표회 논문집
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• pp.182-187
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• 2000

빛은 공간상에서 전파되는 특성상 전자기파(electromagnetic wave)로 규정될 수 있다. 빛의 파동성은 여러 형태의 간섭을 유발한다. 이중 정밀 길이측정에는 광위상간섭(phase measuring interferometry)의 원리가 대표적으로 이용된다. 그림1은 광위상간섭의 기본원리를 Michelson 광학계를 이용하여 설명하고 있다. 하나의 동일한 광원으로부터 출발된 광속(optical beam)은 광분할기(beam splitter)에 의해 두 개로 별도 광속으로 분활 된다. (중략)

• Journal of the Optical Society of Korea
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• 제19권6호
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• pp.649-657
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• 2015

We present a surface color measurement including quantities of surface color, methods, and uncertainty evaluation. Based on a relation between spectral reflectance and surface color, we study how an uncertainty of spectral reflectance propagates to surface color. In analyzing the uncertainty propagation, we divide the uncertainty into uncorrelated components, fully correlated components, and correlated components with spectrally varying correlations. As an experimental example, we perform spectro-reflectometric measurements for ceramic color plates. With measured spectral reflectance and its uncertainty evaluation, we determine surface color and analyze uncertainties of the ceramic color plates.

• Journal of the Optical Society of Korea
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• 제8권1호
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• pp.34-52
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• 2004

Over the past decade the experimental technique of THz time domain spectroscopy (㎔- TDS) has proved to be a versatile method for investigating a wide range of phenomena in the ㎔ or far infrared spectral region from 100 ㎓ to 5 ㎔. This paper reviews some recent results of the Ultrafast ㎔ Research Group at Oklahoma State University using ㎔-TDS as a characterization tool. The experimental technique is described along with recent results on ㎔ beam propagation and how ㎔ beam profiles arise from propagation of pulse fronts along caustics. To illustrate how spatio-temporal electric field measurements can determine material properties over a wide spectral range, propagation of ㎔ pulses through systems exhibiting frustrated total internal reflection (FTIR) are reviewed. Finally two potential metrology applications of ㎔-TDS are discussed, thin film characterization and non-destructive evaluation of ceramics. Although ㎔-TDS has been confined to the research laboratory, the focus on application may stimulate the adoption of ㎔- TDS for industrial or metrology applications.

• 한국전자파학회논문지
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• 제24권3호
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• pp.253-258
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• 2013

본 논문에서는 W-band(75~110 GHz) 자유공간 물질상수 측정법을 논의하였다. 우선 자유공간에서 주위 환경에 영향을 덜 받으면서 피측정물(MUT: Material Under Test)에 의한 산란계수를 정확하게 측정하기 위한 W-band quasi-optical 기술 기반 자유공간 물질상수 측정시스템을 논의하고, 관련 측정시스템의 GRL(Gated Reflect Line) 교정법을 기술하였다. 그리고 공기를 피측정물로 하여 제안된 측정법의 타당성을 보이고, 두께가 1.1 mm, 2 mm, 2.75 mm, 5 mm인 arystal 평판에 대한 측정 결과를 제시하였다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.464-464
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• 2010

A few years ago, for maintaining high stability and production yield of production equipment in a semiconductor fab, on-line monitoring of wafers is required, so that semiconductor manufacturers are investigating a software based process controlling scheme known as virtual metrology (VM). As semiconductor technology develops, the cost of fabrication tool/facility has reached its budget limit, and reducing metrology cost can obviously help to keep semiconductor manufacturing cost. By virtue of prediction, VM enables wafer-level control (or even down to site level), reduces within-lot variability, and increases process capability, $C_{pk}$. In this research, we have practiced VM on $SiO_2$ etch rate with optical emission spectroscopy(OES) data acquired in-situ while the process parameters are simultaneously correlated. To build process model of $SiO_2$ via, we first performed a series of etch runs according to the statistically designed experiment, called design of experiments (DOE). OES data are automatically logged with etch rate, and some OES spectra that correlated with $SiO_2$ etch rate is selected. Once the feature of OES data is selected, the preprocessed OES spectra is then used for in-situ sensor based VM modeling. ICP-RIE using 葰.56MHz, manufactured by Plasmart, Ltd. is employed in this experiment, and single fiber-optic attached for in-situ OES data acquisition. Before applying statistical feature selection, empirical feature selection of OES data is initially performed in order not to fall in a statistical misleading, which causes from random noise or large variation of insignificantly correlated responses with process itself. The accuracy of the proposed VM is still need to be developed in order to successfully replace the existing metrology, but it is no doubt that VM can support engineering decision of "go or not go" in the consecutive processing step.

• 반도체디스플레이기술학회지
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• 제18권4호
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• pp.30-34
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• 2019

We analyzed how the features in plasma information based virtual metrology (PI-VM) for SiO₂ etching depth with variation of 5% contribute to the prediction accuracy, which is previously developed by Jang. As a single feature, the explanatory power to the process results is in the order of plasma information about electron energy distribution function (PI_EEDF), equipment, and optical emission spectroscopy (OES) features. In the procedure of stepwise variable selection (SVS), OES features are selected after PI_EEDF. Informative vector for developed PI-VM also shows relatively high correlation between OES features and etching depth. This is because the reaction rate of each chemical species that governs the etching depth can be sensitively monitored when OES features are used with PI_EEDF. Securing PI_EEDF is important for the development of virtual metrology (VM) for prediction of process results. The role of PI_EEDF as an independent feature and the ability to monitor variation of plasma thermal state can make other features in the procedure of SVS more sensitive to the process results. It is expected that fault detection and classification (FDC) can be effectively developed by using the PI-VM.

• 한국레이저가공학회지
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• 제17권4호
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• pp.1-6
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• 2014

Femtosecond laser induced shock generation in water and vitreous humor of enucleated porcine eyeball was investigated. When focusing the femtosecond laser into the liquid mediums, the acoustic waves with a frequency of about 15.6kHz could be observed by using wide-band microphone. The amplitude of the acoustic signals from water has attained a maximum under a laser power of about 5mW. Further increment of the power results in a decrement of the acoustic signals due to nonlinear optical process including filamentation of laser beam. We have further investigated the effect of femtosecond laser induced acoustic waves by applying the laser pulse into enucleated porcine eyeball. The comparative studies on both healthy and diseased eyeballs led us propose that the femtosecond laser pulses could be utilized as a novel tools for treatment of partially detached retina layers from their choroid structures.

• Journal of Magnetics
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• 제16권3호
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• pp.225-228
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• 2011

Magnetic properties and Rockwell hardness of 1Cr-0.5Mo steel have been investigated as a function of isothermal aging time. Our results showed that coercivity, hysteresis loss and Rockwell hardness in the aged samples decreased as aging time increased. This phenomenon was analyzed using optical microscopy and scanning electron microscopy. A significant diffusion of Cr and Mo atoms formed $M_2C$ and $M_7C$ carbides, lowering the matrix strength. $M_2C$ and $M_7C$ carbides partially segregated inside grains, diffused into grain boundaries, and finally resulted in a soft ferrite matrix and a hard grain boundary. The magnetic and mechanical softening of the matrix is likely to govern the properties of the sample more than the hardening of the grain boundary by carbide precipitations.

• 한국광학회지
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• 제34권5호
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• pp.202-209
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• 2023

절대복사온도계의 분광 복사 휘도 감응도를 교정하기 위해 압축된 polytetrafluoroethylene (PTFE)과 반사봉을 사용하여 높은 공간 복사 휘도 분포를 가진 KRISS형 소형 적분구를 제작하였다. 이 적분구의 공간 복사 휘도 균일도는 ±0.009%로 지금까지 국외 표준기관들이 보고한 최고값보다 5배 높았다. 또한, 상용 제품인 소결된 PTFE 적분구의 공간 복사 휘도 균일도를 10배 향상시켰다.