• 한국정밀공학회:학술대회논문집
• /
• 한국정밀공학회 1991년도 춘계학술대회 논문집
• /
• pp.176-194
• /
• 1991

A study on the Manufactiring of High-Precision Linear Scale by the Use of He-Ne Laser Interference Of late, along with the advancement of procision machining technology, the reauirement of super-precision measurement increases as time goes on, and the precision and accuracy of standard scale which is a basis of procision measurement has been cognized as a oriterion of industrial development in a nation. Up to now, mechanical and chemical methods have been widely employed to carve scale lines on linear scale, and it is impossible for the linear scale manufactured by means of those methods to guarantee the measurement with sub-micron level owing to errors attended with various problems. And the measuring length also bears errors subjected to the influence of surroundings condition, and shows inefficient circumstances in measurement on the ground of the complexity of measuring procedure as well as massive measuring apparatus. Hence in this paper, we described on technology by which we can carve scale lines thru optical method under the condition of laboratory by using rhcoherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurment of lengrh. In this researchin the case of setting scale interval to 20 .mu. m, we employed super-precision scale-carving device associated by Ar larser and acoustic optical modulator in lieu of flsahing lamp scale-carving device, and we consequently obtained superior linear scales carved with precision and accuracy of .+-. 0.3 .mu. m.

• 융합신호처리학회논문지
• /
• 제2권3호
• /
• pp.86-92
• /
• 2001

미소 단위로 이동하는 물체의 이동 거리를 측정하기 위한 정밀 측정기기, 반도체 제조 장치, 공작기계 등의 위치 제어는 매우 중요한 요건이며, 이러한 장치들의 이동거리 측정에 대한 정확도는 전체 시스템의 성능을 좌우하게 된다. 따라서 정밀기기에서 이동 거리를 고정밀도로 측정할 수 있는 센싱 디바이스가 요구되며, 여기에는 레이저 간섭계의 분해능에 준하는 분해능을 갖고, 경제성 및 디지털 인터페이스에 대한 장점을 갖는 광학식 엔코더가 사용될 수 있다. 본 논문에서는 이동 거리를 측정하기 위해 회절 원리를 기초로한 고분해능 및 디지털 인터페이스가 용이한 간섭계형 리니어 스케일을 실험적으로 구성하였다. 그리고 이 리니어 스케일에서 발생된 간섭 신호는 제작된 광 검출기와 신호처리 회로를 통해 디지털화하였다. 그 결과 실험적으로 구성된 간섭계형 리니어 스케일은 스케일의 이동에 대하여 어떠한 분주 회로도 추가하지 않고, 단지 쉬운 광학적 구성으로 0.5$\mu\textrm{m}$의 분해능을 얻었다.

• 한국공작기계학회:학술대회논문집
• /
• 한국공작기계학회 1999년도 춘계학술대회 논문집
• /
• pp.170-174
• /
• 1999

The main scale of linear scale greatly affects on the precision of displacement measurement. Especially when needing the long range measurement, the length of main scale should be increased accordingly. In this paper, we propose a linear scale that uses laser interference pattern as main scale for long range measurement. The linear scale is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase differences of 0, $\pi$ /4, $\pi$ /2, 3 $\pi$ /4 are arranged on the panel. The experimental results show that signals of - quadratic photo diode, A, B,$\overline{A}$ and $\overline{B}$ are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.

• 한국생산제조학회지
• /
• 제8권4호
• /
• pp.130-135
• /
• 1999

The main scale of linear encoder greatly effects on the precision of displacement measurement. Especially when needing the long range measurement the length of main scale should be increased accordingly. In this paper we propose a linear encoder that uses laser interference pattern as main scale for long range measurement. The linear encoder is similar to Michelson interferometer excepting that the reference mirror is tilted so as to obtain interference fringe pattern and a grating panel is attached on a quadratic photo diodes. Four kinds of grating having phase difference of 0. $\pi$/4, $\pi$/2, 3$\pi$/4 are arranged on the panel. The experimental results show that signals of quadratic photo diode A, B, {{{{ {-}atop {A } }}}} and {{{{ {- } atop {B } }}}} are cosine wavelike and successive signals have phase difference of $\pi$/4 each other. So the proposed method can achieve improved measurement resolution.

• 한국정밀공학회지
• /
• 제8권3호
• /
• pp.82-92
• /
• 1991

A study on the manufacturing of High Precision Linear Scalr using He-Ne Laser interference Of late, along with the advancement of precision machining technology, the requirement of super precision measurement increases as time goes on, and the accuracy of standard scale which is a basis of precision measurement has been cognized as a criterion of industrial development in a nationl. In this paper, we described on technology by which we could carve scale lines thru optical method under the condition of laboratory by using the coherence of He-Ne two-mode stabilized laser and in turn, put it to practical use as linear scale for the measurement of length. Hence in this research in the case of setting scale interval to 20 ${\mu}m$, we employed super precision scale-carving device associated with Ar laser and acousto optic modulator in lieu of flashing lamp scale-carving device, and we obtained as experimental result superior linear scales carved within the accuracy of ${\pm}$0.3${\mu}m$.

• 한국정밀공학회지
• /
• 제17권10호
• /
• pp.147-154
• /
• 2000

A new hardware compensation method reducing displacement measurement errors, caused by tilt of index scale in moire linear encoders, has been developed. In conventional moire linear encoders, the detectors are aligned perpendicular to the line of moire fringes this structure is very sensitive to an unwanted tilt of the gratings. In this paper, a newly designed grating, called a phase-modulated grating, is developed to compensate for non-orthogonal errors. By using the phase-modulated grating instead of a conventional index, it is possible to reduce non-orthogonal errors of moire linear encoders.

• Radiation Oncology Journal
• /
• 제18권4호
• /
• pp.345-354
• /
• 2000

목적 : 방사선조사야를 확인하는 보편적인 방법인 linacgram은 저대조도(low contrast)의 영상을 보여주고 있어 정확한 영상을 확인하는데 문제점이 있다. 따라서 본 연구는 linacgram의 대조도를 높이는 저가형 확인방법을 모색하여 영상판독과 조사야 확인에 도움이 되고자 한다. 대상 및 방법: 인체모형을 사용하여 얻어진 필름 영상을 필름전용 스캐너(Diagnostic Pro)를 통해 Optical Density Scan, Histogram Equalized, Linear Histogram Based (HB), Linear Histogram Independent, Linear Optical Density (OD) Logarithmic 및 Power, Square Root scan 방식으로 디지털화 하였다. 각기 다른 방식으로 전산 입력된 영상의 신호분포도를 얻어 signal intensity를 비교한 후 pailette fitting 방식을 통해 영상을 재구성하였고 재구성된 영상을 비교 분석하였다. 실제 치료에서 얻어진 각 인체 부위별 linacgram도 동일한 방법으로 처리한 후 화질 개선도를 알아 보았다. 결과 : 인체모형을 통해 얻어진 영상의 신호 분포영역은 Logarlthmic 방식을 선택했을 때 최소값인 3192가 나왔고 Square Root방식을 사용했을 때 최대값인 21940가 나왔다. 이러한 값들을 모니터 상에서 구현할 수 있는 256 gray scale로 바꾸어 보았을 때 7$\~$30$\%$ 만 사용되어지고 있음을 알수 있었다. Pallette fitting 방식을 통하여 모니터의 최대표현 값인 256 계조도로 Gray Scale Expansion (GSE) 함으로써 모니터가 지원하는 8bit gray scale pallette의 전범위를 사용하여 대조도가 개선되었다. 임상에서 얻어진 각 인체 부위별 무릎관절, 두경부, 폐, 골반영상에서도 GSE 처리하여 얻어진 영상이 해부학적 구조를 판독하는데 도움이 죄었다. 결론 : GSE 영상의 재구성은 대조도를 증가 시킬뿐 아니라 인체내 관심부위의 농도분포를 별도로 재구성할 수 있으므로 이중방사선조사(double exposure)에 의해 발생되는 화질의 저하를 보정함으로써 화질 개선을 가능하게 하였다. Linacgram 화질 개선은 simulation image 및 치료계획에서 발생한 DRR과 multi-layer 중첩영상 분석에 사용할 수 있으며 영상 비교 시 치료부위의 신속하고 정밀한 확인을 가능하게 하였다.

• 융합신호처리학회 학술대회논문집
• /
• 한국신호처리시스템학회 2000년도 추계종합학술대회논문집
• /
• pp.145-148
• /
• 2000

Position-determining capacity is a very important condition in equipments for manufacturing semi-conductor or various instruments to measure physical displacement quantities of a moving object in submicron such as a distance of movement, direction, etc. and the accuracy of total system is influenced by detecting accuracy of these equipments. Therefore in this paper we have optically made up laser linear encoder based on optical diffraction principle to measure these displacement quantities and have processed optical signal using hardware-setup. In consequence we had acquired displacement for movement of scale using a diffraction grating by the accuracy of 0.5${\mu}{\textrm}{m}$ and had digitalized moving quantities of scale.

• 한국자기학회:학술대회 개요집
• /
• 한국자기학회 2002년도 동계연구발표회 논문개요집
• /
• pp.16-16
• /
• 2002

Granular metal-insulator alloys, consisting of nano-scale magnetic particles in an insulating matrix are of unique consideration for the technological application and fundamental physics. They display a wide variety of unusual both linear and nonlinear electric-transport, optical and magnetooptical properties, especially for compositions close to the percolation threshold. (omitted)

• 한국공작기계학회논문집
• /
• 제13권5호
• /
• pp.1-6
• /
• 2004

Measurements of circular motion accuracy of NC lathe have achieved with ball bar systems proposed by Bryan, but the ball bar systems have ifluenced on the measuring data by way of the accuracy of the balls and the contacts of balls and bar seats. Therefore in this study, error data during of circular motion of ATC(Automatic Tool Changer) of NC lathe will be acquired by reading zx plane coordinates using two optical linear scales. Two optical linear scales of measuring unit are fixed on z-x plane of NC lathe, and the moving part is fixed to ATC and then is made to receive data of coordinates of the ATC at constant time intervals using tick pulses comming out from computer. And then, error data files of radial direction of circular motion are calculated with the data read, and the aspect of circular motion are modeled to plots, and are analysed by means of statistical treatments of circularity, means, standard deviations etc.