• 반도체디스플레이기술학회지
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• 제22권4호
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• pp.131-135
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• 2023

Neural network-based time series models called time series neural networks (TSNNs) are trained by the error backpropagation algorithm and used to predict process shifts of parameters such as gas flow, RF power, and chamber pressure in reactive ion etching (RIE). The training data consists of process conditions, as well as principal components (PCs) of optical emission spectroscopy (OES) data collected in-situ. Data are generated during the etching of benzocyclobutene (BCB) in a SF₆/O₂ plasma. Combinations of baseline and faulty responses for each process parameter are simulated, and a moving average of TSNN predictions successfully identifies process shifts in the recipe parameters for various degrees of faults.

• 한국광학회:학술대회논문집
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• 한국광학회 1998년도 제15회 광학 및 양자전자 학술발표회 논문집
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• pp.138-139
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• 1998

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 하계학술발표회
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• pp.10-11
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• 2001

• 한국광학회:학술대회논문집
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• 한국광학회 2001년도 하계학술발표회
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• pp.30-31
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• 2001

• 한국광학회:학술대회논문집
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• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.70-70
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• 1997

• 한국광학회:학술대회논문집
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• 한국광학회 1997년도 Advance Program of 14th optics andquantum Electronics conference, 1997제14 회 광학 및 양자전자 학술 발표회 논문 요약집
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• pp.29-29
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• 1997

• 한국진공학회:학술대회논문집
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• 한국진공학회 2013년도 제44회 동계 정기학술대회 초록집
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• pp.587-587
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• 2013

ZnS is well-known direct band gap II-VI semiconductor, and it attracts intense interest due to its excellent properties of luminescence which enable ZnS to have promising materials for optical, photonic and electronic devices. Especially, the emission wavelength of ZnS falls in the UV absorption band of most organic compoundsand biomolecules, thus it is envisaged that ZnS based devices may find applications in increasingly important fluorescence sensing. We have developed a facile and effective one-step process for the fabrication of single-crystalline and pure-wurtzite ZnS nanostructures possessing sharp band-edge emission at room-temperature having diverse length-to-width ratios. Each of nanostructures was composed of chemically pure, structurally uniform, single-crystalline, and defect-free ZnS. These features not only suppress trap or surface states emission centered at 420 nm, but also enhance UV band-edge emission centered at 327 nm, which give as-synthesized our ZnS nanostructures possible sharp UV emission at room temperature. The reaction medium consisting of mixed solvents such as hydrazine, ethylenediamine, and water as well as proper reaction time and temperature have played an important role in the crystallinity and optical properties of ZnS nanostructures. As-synthesized our ZnS nanostructures possessing sharp UV emission guarantee high potential for both fundamental research and technological applications.

• 천문학회보
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• 제44권2호
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• pp.36.2-36.2
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• 2019

Fe II emission is a prominent and ubiquitous feature in the spectra of broad-line Active Galactic Nuclei (AGN) by producing a pseudo-continuum from UV to optical with complex and strong blends of the numerous emission lines themselves, other emission lines, and continuum. Since theoretical modeling of such intricate Fe II emission is very difficult and still far from able to reproduce observed data in detail, an empirical iron emission template, derived from observations of a narrow-line Seyfert 1 galaxy, is an essential and practical tool to obtain accurate measurements of all the emission lines and continuum in AGN spectra. However, the existing iron templates, based on the single prototypical strong Fe II emitter I Zw 1, are suffering from inadequate S/N and non-simultaneous, inconsistent data with limited wavelength coverage, which consequently limit the accuracy of all the spectral measurements. To overcome the limitations and construct an improved iron template with wide spectral coverage, high-quality UV and optical spectra for the new and better identified template galaxy, Mrk 493, were successfully obtained from our HST STIS program (GO-14744). We will show the preliminary results for multicomponent spectral decomposition of the data and template construction with application tests to various AGN spectra and comparison with previous templates.

• Journal of the Optical Society of Korea
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• 제19권5호
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• pp.437-443
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• 2015

In this paper, we analyze the performance of the all-optical multihop radio over a free space optical (RoFSO) communication system with amplify-and-forward (AF) relays under varying weather conditions. The proposed channel model considers the propagation loss, attenuation and atmospheric fading modeled by the Gamma-Gamma (GG) distribution. Both the amplified spontaneous emission (ASE) noise in the all-optical relays and the background noise projected onto receiver apertures have been considered in the analysis. The lower bound analytical expressions for the end-to-end bit error rate (BER) and outage probability are derived for the multihop system employing the all-optical relays with the full channel state information (CSI). Meanwhile, the exact results for BER and outage probability are obtained via Monte Carlo simulation. Results indicate the performance of the proposed system will be improved by the multihop transmission technology. For a fixed number of relays, the BER and outage probability will be increased with the deterioration of the weather conditions.

• 세라미스트
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• 제10권3호
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• pp.28-33
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• 2007

The structural and optical properties of Ni-doped transparent glass-ceramics are reviewed. The quantum efficiencies of ceramics were examined to explore suitable crystalline phase for Ni-doping in glass-ceramics. Inverse spinel $LiGa_5O_8$ have the quantum efficiency of almost 100 % at room temperature. Transparent glass ceramics containing $LiGa_5O_8$ was successfully synthesized by heat treatment of $Li_2O-Ga_2-O_3-SiO_2-NiO$ glass. Most of $Ni^{2+}$ ions in glass-ceramic were incorporated into $LiGa_5O_8$ nanocrystals. The near-infrared emission covering from the O-band to L-band (1260-1625 nm) was observed from the Ni-doped $Li_2O-Ga_2O_3-SiO_2$ glass-ceramic though it was not observed from the as-cast glass. The lifetime of the emission was about $580\;{\mu}sec$ even at 300K. The emission quantum efficiency was evaluated as about 10 % that is enough high for practical usage as gain media of optical fiber amplifiers. The figure of merit (the product of the stimulated emission cross section and lifetime) was as high as that of rare-earth-doped glasses. The broad bandwidth, high quantum efficiency and high figure of merit show that transparent glass-ceramics containing $Ni^{2+}:LiGa_5O_8$ nanocrystals are promising candidates as novel ultra-broadband gain media.