• Journal of Electrical Engineering and Technology
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• v.5 no.2
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1613-1616
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• 2007

A microgripper using thermal actuator and SU-8 polymer was designed and fabricated to manipulate cells and microparts. A chip size of a microgripper was 3 mm ${\times}$ 5 mm. The thermally actuated microgripper consisted of two couples of hot and cold arm actuators. The high thermal expansion coefficient, 52 $ppm/^{\circ}C$, of SU-8 compared to silicon and metals, allows the actuation of the microgripper. Thickness and width of SU-8 as an end-effector were 26 ${\mu}m$ and 80 ${\mu}m$, respectively. Initial gap between left jaw and right jaw was 120 ${\mu}m$. The ANSYS program as FEM tool was introduced to analyze the thermal distribution and displacement induced by thermal actuators. $XeF_2$ gas was used for isotropic silicon dry etching process to release SU-8 end-effector. Mechanical displacements of the fabricated microgripper were measured by optical microscopy in the range of input voltage from 0 V to 2.5 V. The maximum displacement between two jaws of a microgripper Type OG 1_1 was 22.4 ${\mu}m$ at 2.5 V.

• Journal of the korean society of oceanography
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• v.34 no.4
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• pp.200-206
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• 1999

Seawater sampling is the primary task for the study of the marine environmental parameters that require shipboard or laboratory experiments for their analyses, and is also required for the calibration of some instruments for in situ measurement. A new automatic bottle (AUTTLE) is developed for seawater sampling at any desired time and water depth by self-triggering. Both any type of single or assembled mooring for 15 days and manual actuation by using a remote messenger as existing instantaneous single point water samplers are possible. Its sampling capacity and the resolution of time setting are 2 liters and 1 second, respectively. The result of a field experiment with an optical backscattering sensor (OBS) and a total of 14 AUTTLES for the in situ calibration of the OBS shows that the AUTTLE must improve our understanding on the behavior of the sand/mud mixtures in the environments with high waves and strong tides. The AUTTLE will serve as a valuable instrument in the various fields of oceanography, especially where synchronized seawater sampling at several sites is required and/or the information in storm period is important.

• International Journal of Aeronautical and Space Sciences
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• v.4 no.1
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• pp.75-87
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• 2003

The primary objective of this study is to demonstrate ground-based experiment for the attitude control of spacecraft. A two-axis rotational simulator with a flexible ann is constructed with on-off air thrusters as actuators. The simulator is also equipped with payload pointing capability by simultaneous thruster and DC servo motor actuation. The azimuth angle is controlled by on-off thruster command while the payload elevation angle is controlled by a servo-motor. A thruster modulation technique PWM(Pulse Width Modulation) employing a time-optimal switching function plus integral error control is proposed. An optical camera is used for the purpose of pointing as well as on-board rate sensor calibration. Attitude control performance based upon the new closed-loop control law is demonstrated by ground experiment. The modified switching function turns out to be effective with improved pointing performance under external disturbance. The rate sensor calibration technique by Kalman Filter algorithm led to reduction of attitude error caused by the bias in the rate sensor output.

• 정보저장시스템학회:학술대회논문집
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• 2005.10a
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• pp.190-194
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• 2005

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile camera phones. However, conventional magnetic coils of electromagnetic motors are a major obstacle for miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM (ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 1.52 mm/s at 10 kHz input signal in 5 V.

• Transactions of the Society of Information Storage Systems
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• v.2 no.4
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• Aerospace Engineering and Technology
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• v.10 no.2
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• pp.121-127
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• 2011

In the attitude and orbit control subsystem design, the moment of inertia of the satellite is the major contributor to be considered. Satellites equipped with large solar arrays need to measure the moment of inertia accurately to avoid the interference of the thruster actuation period with its flexible mode. In this paper, the in-orbit tests of COMS to measure the moment of inertia are described. Then, the differences between the measured through in-orbit test and the predicted are compared. Finally, it is verified that the differences are below uncertainty bounds considered in the critical design of COMS attitude and orbit control subsystem.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.36 no.5
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• pp.481-486
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• 2012

We discuss the design, fabrication, and testing of a large-displacement electromagnetic actuator with the meander springs partially exposed to a magnetic field. We compared two prototypes: a prototype (F) of the conventional actuator with the meander springs fully exposed to a magnetic field and a prototype (P) of the proposed actuator with the meander springs partially exposed to a magnetic field. For a 5 Hz square input current varying from 10.40 mA, P showed an increase of $16.9{\pm}1.2%$ in the amplitude, which was greater than the increase in the case of F. Thus, we experimentally demonstrated the large-displacement actuation performance of the proposed actuator in a small volume and at low currents (below 40 mA). The proposed electromagnetic actuator can be used for low-power and large-displacement manipulation of optical switches and optical choppers.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.5
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• pp.557-560
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• 2010

We have designed a digital variable-focal-length liquid lens by using 4-bit actuators. Each bit actuator consists of 1, 2, 4, and 8 unit actuators, squeezes discrete fluidic volume of $2^4$ different levels into the lens The 4-bit digital actuation mode ($b_4b_3b_2b_1$) affords $2_4$ different lens curvatures and focal lengths. The on/off control of the bit actuators helps in solving the main problem associated with analog liquid lenses, i.e., precise control of the pressure or volume of the fluid for changing the lens curvature and focal length. Experimentally, it has been found that the 4-bit actuators allow 0.074 nl (${\pm}0.02\;nl$) of the given fluid per bit to enter the lens and help in increasing the focal length from 3.63 mm to 38.6 mm in $2^4$ different levels; no high-cost controllers are required for precise control of the pressure or volume in this case. Therefore, the present digital liquid lens is more suitable to integrated optical systems by reducing additional component for pressure and volume control.