• Journal of Electrical Engineering and Technology
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• v.2 no.2
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• pp.263-266
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• 2007

We report a nickel optical MEMS switch, being able to rotate through a large angle and to accommodate multiple channels. The proposed optical switch consists of a thin nickel mirror and two torsion springs supporting the mirror. The torsion springs are designed using a finite element method (FEM) such that plastic deformation of the thin nickel is avoided during the large torsion actuation. For switching speed improvement, transient vibration of the released mirror is suppressed by optimizing the mirror design and a fast switching response of $200\;{\mu}s\;(pull-down)/300\;{\mu}s\;(pull-up)$ is demonstrated.

• Applied Chemistry for Engineering
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• v.23 no.1
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• pp.65-70
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• 2012

Structural changing materials which can induce the physical deformation of materials are interesting research topics with various potential applications. Particularly, light among many driving mechanisms is a non-contact energy source, hence the light-responsive system can be used where non-destructive, local irradiation, and remote control is needed. Here, a mainchain azobenzene polymer is synthesized and its physical and optical properties are observed and compared to that of a polymer having a light-responsive azobenzene moiety on its side chain. Further dispersion onto polyvinylalcohol hydrogel is made and its dual stability and actuation are observed upon UV-visible light irradiation. Extended azobenzene polymer blend films show an anisotropic light-actuation with non-polarized UV light at room temperature. This physical shape change is quite reversible and occurs at lower temperature than that of any other reported systems including liquid crystalline elastomers. It is successfully demonstrated that the simple physical azobenzene/polymer blending has a very good actuation compared to that of LCEs which need an elaborate chemical design and it can be further used in the areas requiring a dimensional shape change.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.10 s.175
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• pp.195-201
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• 2005

A laterally driven electromagnetic microactuator (LaDEM) is presented, and a micro-optical switch is designed and fabricated as a possible application. LaDEM provides parallel actuation of the microactuator to the silicon substrate surface (in-plane mode) by the Lorentz force. Poly-silicon-on-insulator (Poly-SOI) wafers and a reactive ion etching (RIE) process were used to fabricate high-aspect-ratio vertical microstructures, which allowed the equipment of a vertical micro mirror. A fabricated arch-shaped leaf spring has a thickness of $1.8{\mu}m$, width of $16{\mu}m$, and length of $800{\mu}m$. The resistance of the fabricated structure fer the optical switch was approximately 5$\Omega$. The deflection of the leaf springs increases linearly up to about 400 mA and then it demonstrates a buckling behavior around the current value. Owing to this nonlinear phenomenon, a large displacement of $60{\mu}m$ could be measured at 566 mA. The displacement-load relation and some dynamic characteristics are analyzed using the finite element simulations.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.65-69
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• 2004

The small form factor optical data storage devices are developing rapidly nowadays. Since it is designed for portable and compatibility with flash memory, its components such as disk, head, focusing actuator, and spindle motor should be assembled within 5 m thickness. The thickness of focusing actuator is within 2 mm and the total working range is $+/-100{\mu}m$, with the resolution of less than $1{\mu}m$. Since the thickness is limited tightly, it is hard to place the yoke that closes the magnetic circuit and hard to make strong flux density without yoke. Therefore, Halbach array is adopted to increase the magnetic flux of one side without yoke. The proposed Halbach array type focusing actuator has the advantage of thin actuation structure with sacrificing less flux density than conventional magnetic array. The optical head unit is moved on the swing arm type tracking actuator. Focusing coil is attached to swing arm, and Halbach magnet array is positioned at the bottom of deck along the tracking line, and focusing actuator exerts force by the Fleming's left hand rule. The working range and resolution of focusing actuator are analyzed with FEM and experiment.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.2
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• pp.203-209
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• 2004

Compliant bi-stable mechanism allows two stable states within its operation range staying at one of the local minimum states of the potential energy. Energy storage characteristics of the bi-stable mechanism offer two distinct and repeatable stable states, which require no power input to maintain it at each stable state. This paper suggests an equivalent model of the chevron-type bi-stable microactuator using the equivalent spring stiffness in the rectilinear and the rotational directions. From this model the range of spring stiffness where the bi-stable mechanism can be operated is analyzed and compared with the results of the FEA (Finite Element Analysis) using ANSYS for the buckling analysis, both of which show a good agreement. Based on the analysis, a newly designed chevron-type bi-stable MEMS actuator using hinges is suggested for the latch-up operation. It is found that the experimental response characteristics of around 36V for the bi-stable actuation for the 60$mu extrm{m}$ stroke correspond very well to the results of the equivalent model analysis after the change in cross-sectional area by the fabrication process is taken into account. Together with the resonance frequency experiment where 1760Hz is measured, it is shown that the chevron-type bi-stable MEMS actuator using hinges is applicable to the optical switch as an actuator.

• Journal of Astronomy and Space Sciences
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• v.31 no.4
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• pp.341-346
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• 2014

A prototype of the GMT FSM has been developed to acquire and to enhance the key technology - mirror fabrication and tip-tilt actuation. The ellipsoidal off-axis mirror has been designed, analyzed, and fabricated from light-weighting to grinding, polishing, and figuring of the mirror surface. The mirror was tested by using an interferometer together with CGHs, which revealed the surface error of 13.7 nm rms in the diameter of 1030 mm. The SCOTS test was employed to independently validate the test results. It measured the surface error to be 17.4 nm rms in the diameter of 1010 mm. Both tests show the optical surface of the FSMP mirror within the required value of 20 nm rms surface error.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.04a
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• pp.856-860
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• 2008

Wire-suspensions in the conventional actuators mechanically support the moving part and guarantee the accuracy of the actuator without tangential tilt actuation. However, such a suspension configuration has considerable stiffness in the tangential tilt direction with two additional wire beams for the tangential tilt. Thus, we performed a design sensitivity analysis for the wire-suspension stiffness of 4-axis actuator and controlled the main parameters such as distance among wire-suspensions and wire-suspension length to allow tangential tilt flexibility. The elasticity of frame PCB that supports the moving part by wire-suspensions was also exploited to improve the flexibility of wire-suspension in the tangential tilt direction. A novel suspension structure was devised by establishing eight wire-suspensions at both sides of the moving part for electrical connection to coils. The magnetic circuit according to the proposed 4-axis actuator using multi-polar magnet and coils was also suggested for the generation of electromagnetic forces in the focusing, tracking, radial and tangential tilt directions.

• Macromolecular Research
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• v.12 no.6
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• pp.564-572
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• 2004

Modem applications could benefit from multifunctional materials having anisotropic optical, electrical, thermal, or mechanical properties, especially when coupled with locally controlled distribution of the directional response. Such materials are difficult to engineer by conventional methods, but the electric field-aided technology presented herein is able to locally tailor electroactive composites. Applying an electric field to a polymer in its liquid state allows the orientation of chain- or fiber-like inclusions or phases from what was originally an isotropic material. Such composites can be formed from liquid solutions, melts, or mixtures of pre-polymers and cross-linking agents. Upon curing, a 'created composite' results; it consists of these 'pseudofibers' embedded in a matrix. One can also create oriented composites from embedded spheres, flakes, or fiber-like shapes in a liquid plastic. Orientation of the externally applied electric field defines the orientation of the field-aided self-assembled composites. The strength and duration of exposure of the electric field control the degree of anisotropy created. Results of electromechanical testing of these modified materials, which are relevant to sensing and actuation applications, are presented. The materials' micro/nanostructures were analyzed using microscopy and X-ray diffraction techniques.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.4
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• pp.231-236
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• 2004

A normally open thermopneumaticc-actuated microvalve has been fabricated and their properties are investigated. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using polydimethylsiloxane (PDMS) and indium tin oxide (ITO) glass. The fabricated microvalves with in-channel configuration are easily integrated with other microfluidic devices on the same substrate. The fabrication process of thermopneumatic-actuated microvalvesusing PDMS is very simple and its performance is very suitable for a disposable lab-on-a-chip. The PDMS membrane deflection increases and the flow rates of the microchannel with microvalvels decrease as the applied power to the ITO heater increases. The powers at flow-off are dependent on the membrane thickness and the applied inlet pressure but are independent of the channel width of microvalves. The flow rate is well controlled by the switching function of ITO heater and the closing/opening times are around 20 sec and 25 sec, respectively.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.53 no.6
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• pp.342-346
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• 2004

A thermopneumatic-actuated polydimethylsiloxane (PDMS) micropump has been fabricated and their properties are characterized. The diffusers are used as a flow-rectifying element instead of passive check valves. The advantages of the proposed microvalve are of the low cost fabrication process and the transparent optical property using PDMS and indium tin oxide (ITO) glass. We presented the PDMS micropump that is easily integrated with the in-channel PDMS microvalves on the same substrate. The flowrate of the micropump increases linearly as the applied pulse voltage to the ITO heater increases. The fabricated ITO heater resistance is 6.54k$\Omega$. The peak of the flow rate is observed at the duty ratio of 10% for the applied pulse voltage of 55V at 6Hz and the maximum flow rate of 78nl/min is measured.