• Title/Summary/Keyword: open edge crack

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Wafer Edge Defect Inspection Device R&D (웨이퍼 엣지 결함(Chip & Crack) 인식 장비 R&D)

  • Kim, Seong-Jin;Kwon, Hyeok-Min;O, Min-Seo
    • Proceedings of the Korea Information Processing Society Conference
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    • 2022.11a
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    • pp.881-883
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    • 2022
  • 고객사에 납품하는 웨이퍼의 안정적인 공급을 위한 웨이퍼 엣지의 결함 검출 장비다. 본 연구에서는 OpenCV와 임베디드 시스템, 머신러닝, 전자 회로 그리고 센서/카메라 기술을 핵심 기술로 R&D 한다. 고객사에서 불량 웨이퍼 발생에 대응하기 위한 장비의 데이터를 생산하여 고객과의 신뢰도 향상 및 유지를 할 수 있다. 그리고 결함이 특정 공정 지점에서 발생하는지 탐색할 수 있다.

Reconstruction of internal structures and numerical simulation for concrete composites at mesoscale

  • Du, Chengbin;Jiang, Shouyan;Qin, Wu;Xu, Hairong;Lei, Dong
    • Computers and Concrete
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    • v.10 no.2
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    • pp.135-147
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    • 2012
  • At mesoscale, concrete is considered as a three-phase composite material consisting of the aggregate particles, the cement matrix and the interfacial transition zone (ITZ). The reconstruction of the internal structures for concrete composites requires the identification of the boundary of the aggregate particles and the cement matrix using digital imaging technology followed by post-processing through MATLAB. A parameter study covers the subsection transformation, median filter, and open and close operation of the digital image sample to obtain the optimal parameter for performing the image processing technology. The subsection transformation is performed using a grey histogram of the digital image samples with a threshold value of [120, 210] followed by median filtering with a $16{\times}16$ square module based on the dimensions of the aggregate particles and their internal impurity. We then select a "disk" tectonic structure with a specific radius, which performs open and close operations on the images. The edges of the aggregate particles (similar to the original digital images) are obtained using the canny edge detection method. The finite element model at mesoscale can be established using the proposed image processing technology. The location of the crack determined through the numerical method is identical to the experimental result, and the load-displacement curve determined through the numerical method is in close agreement with the experimental results. Comparisons of the numerical and experimental results show that the proposed image processing technology is highly effective in reconstructing the internal structures of concrete composites.

Buckling delamination of the PZT/Metal/PZT sandwich circular plate-disc with penny-shaped interface cracks

  • Cafarova, Fazile I.;Akbarov, Surkay D.;Yahnioglu, Nazmiye
    • Smart Structures and Systems
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    • v.19 no.2
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    • pp.163-179
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    • 2017
  • The axisymmetric buckling delamination of the Piezoelectric/Metal/Piezoelectric (PZT/Metal/PZT) sandwich circular plate with interface penny-shaped cracks is investigated. The case is considered where open-circuit conditions with respect to the electrical displacement on the upper and lower surfaces, and short-circuit conditions with respect to the electrical potential on the lateral surface of the face layers are satisfied. It is assumed that the edge surfaces of the cracks have an infinitesimal rotationally symmetric initial imperfection and the development of this imperfection with rotationally symmetric compressive forces acting on the lateral surface of the plate is studied by employing the exact geometrically non-linear field equations and relations of electro-elasticity for piezoelectric materials. The sought values are presented in the power series form with respect to the small parameter which characterizes the degree of the initial imperfection. The zeroth and first approximations are used for investigation of stability loss and buckling delamination problems. It is established that the equations and relations related to the first approximation coincide with the corresponding ones of the three-dimensional linearized theory of stability of electro-elasticity for piezoelectric materials. The quantities related to the zeroth approximation are determined analytically, however the quantities related to the first approximation are determined numerically by employing Finite Element Method (FEM). Numerical results on the critical radial stresses acting in the layers of the plate are presented and discussed. In particular, it is established that the piezoelectricity of the face layer material causes an increase (a decrease) in the values of the critical compressive stress acting in the face (core) layer.