• 한국공작기계학회논문집
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• 제17권2호
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• pp.30-37
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• 2008

An object transport system is driven by a conveyor belt system or a magnetic levitation system. It is an indispensable device in many fields and especially it is very important in the factory automation. However, the conventional transport system can damage precision optical components by the contact force and destroy the inner structure of semiconductor by the magnetic field. The new transport system for transporting without damage is required. The ultrasonic transport system is a device that transports objects on the elastic body using ultrasonic wave. In this paper, an object transport system using the ultrasonic wave is developed for transporting precision elements without damage. Traveling waves are generated by the ultrasonic wave generator fixed in both ends of the beam. The traveling wave of the ultrasonic transport system is theoretically analyzed. Transport direction of the object is examined according to phase difference and frequency. The theoretical results are verified by experiments.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2007년도 추계학술대회논문집
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• pp.1241-1246
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• 2007

In recent years, the semiconductor industry and the optical industry are developed rapidly. The recent demands have expanded for optical components such as the optical lens, the optical semiconductor and the measuring instrument. Object transport systems are driven typically by the magnetic field and the conveyer belt. Recent industry requires more faster and efficient transport system. However, conventional transport systems are not adequate for transportation of optical elements and semiconductors. The conveyor belts can damage precision optical elements by the contact force and magnetic systems can destroy the inner structure of semiconductor by the magnetic field. In this paper, the levitation transport system using ultrasonic wave is developed for transporting precision elements without damages. The steady state flexural vibration of the beam is expressed using Euler-Bernoulli beam theory. The transport direction of an object is examined according to phase difference and frequency. The theoretical results are verified by experiments.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.1170-1173
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches, the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. the experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of amplification voltage is verified. In addition, the system performance for actual use is evaluated

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2003년도 춘계학술대회논문집
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• pp.956-959
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the common system is required. The common systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system solve these problem. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave get orators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 춘계학술대회 논문집
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• pp.371-375
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• 2003

In recent years, as the semiconductor and the optical industry grows, the necessity of the transporting system for semiconductor and precision optical lens without damage increases. The transport system using ultrasonic wave is very suitable for this area. In this paper the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The effect of transporting speed according to the change of weight and amplification voltage are verified. In addition, the system performance for actual use is evaluated.

• 한국정밀공학회지
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• 제22권8호
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• pp.151-158
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• 2005

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding systems is required. The sliding systems are driven by the magnetic field and conveyer belts. The magnetic field nay damage semiconductor and the contact force may scratch the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, an object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal progressive frequency and the phase-differences between two ultrasonic wave generators are performed. The relationships between transportation speed and the excitation frequency, flexural beam shapes and amplification voltage are investigated.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2003년도 추계학술대회
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• pp.25-29
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• 2003

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phase-difference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified and the system performance for practical use is evaluated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.1608-1613
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• 2003

In the semiconductor and the optical industry, a new transport system which can replace the conventional sliding system is required. These systems are driven by the magnetic field and the conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problems. In this paper, the object transport system using the excitation of ultrasonic wave is proposed. The experiments for finding the optimal excitation frequency, finding phasedifference between two ultrasonic wave generators are performed. The relationship of transporting speed according to the change of flexural beam shape is verified. In addition, the system performance for practical use is evaluated.

• 한국공작기계학회논문집
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• 제15권6호
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• pp.8-14
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• 2006

The object transport system is used in many industry field such as the conveyor belt, which transports huge goods in container harbor, the magnetic levitation system, and the indexing system which transports precision components such as semiconductor and optical components. In conventional transport system, the magnetic field may damage semiconductor and the contact force may scratch on the optical lens. So ultrasonic wave transport system has been proposed to replace the previous transport system. In this paper, the good transport condition of optical lens is obtained according to the flexural beam shapes. The working frequency and transport speed are measured and the vibration characteristics of the flexural beams are investigated by Laser Scanning Vibrometer.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.149-154
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• 2004

In the semiconductor and the optical industry a new transport system which can replace the conventional sliding system is required. These systems are driven by magnetic field and conveyer belt. The magnetic field damages semiconductor and contact force scratches the optical lens. The ultrasonic wave driven system can solve these problem. In this paper, the relationship of transporting speed according to the change of flexural beam shape and the effect of transporting speed according to the change of weight and amplification voltage are verified. The vibration behavior of flexural beam in the ultrasonic transport system is experimented using Laser Scanning Vibrometer.