• 한국가시화정보학회:학술대회논문집
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• 한국가시화정보학회 2004년도 추계학술대회 논문집
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• pp.48-51
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• 2004

Chemical Mechanical Polishing(CMP) is popularly used in production of semiconductor because of large area polishing ability probability of improvement for more integrated circuit. However, present CMP processing causes some non-uniformity errors which can be critical for highly integrated circuit. Previous studies predict that flow-field of slurry during CMP can create non-uniformity, but no quantitative measurement has conducted. In this study, using PIV, slurry velocity flow-field during CMP is measured by changing the ratio of RPM of pad and carrier with tuned PIV system adequate for small room in CMP machine and Cabot's non-groove pad Epad-A100. The result show that velocity of slurry is majorly determined by pad-rpm and the ratio of between carrier and pad rpm make some changes in streamlines.

• Molecular & Cellular Toxicology
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• 제1권4호
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• pp.268-274
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• 2005

Bromobenzene (BB) is well known hepatotoxicant. Also, BB is an industrial solvent that arouses toxicity predominantly in the liver where it causes centrilobular necrosis. BB is subjected to Cytochrome P450 mediated epoxidation followed by either conjugation with glutathione, enzymatic hydrolysis or further oxidation. In this study, we focused on BB-induced gene expression at non-hepatotoxic dose. Mice were exposed to two levels of BB, sampled at 24 h, and hepatic gene expression levels were determined to evaluate dose dependent changes. When examining the toxic dose of BB treated group in other previous studies, genes related to heat shock protein, oxidative stress, and drug metabolism are expressed. Compared to these results, our study, in which non-toxic dose of BB was administrated, showed similar patterns as the toxic conditions above. The purpose of the study was to select genes that showed changes in relation to the differing dose through confirmation of the difference within transcriptomic boundaries, but those that are not detected by the existing classic toxicology tools in non-hepatotoxic dose.

• Bulletin of the Korean Chemical Society
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• 제32권10호
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• pp.3551-3552
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• 2011

• 한국유기농업학회:학술대회논문집
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• 한국유기농학회 2009년도 하반기 학술대회
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• pp.284-284
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• 2009

EFA production systems have through necessity resulted in the development of innovative practices for weed, pest and diseases control, for example, using ducks and snails for weed control in paddy fields. These practices began to be introduced in the early 1990's and the techniques have become more popular and have been adapted to suit regional conditions. In this study, the production practices, productivity and economic performances of organic and non-chemical rice farming adopting ducks and snails for weed control were compared. In the production practices, Korean organic and non-chemical farming seem to have several concerns in terms of sustainability. It comprises lack of resistant variety use and rotational cropping system as well as high dependency upon external inputs such as organic fertilizer and farming materials for pest control. The production level of organic farming is approximately similar level but 20% higher income than non-chemical farming, while, when it was compared with conventional farming organic farming showed 20% lower productivity but 20% higher income. Organic farming shows 15% to 18% higher profits than non-chemical farming as the snail-using organic farming tends to have higher income and lower input costs than duck-using organic farming. This may encourage more farmers to convert to organic production using these techniques than simply non-chemical farming in the future. This organic conversion could be more promoted by policy intervention. However, it may result in increased supply and therefore decreased prices for organic rice in the long term unless further market demand occurs. Balanced policy measures considering production as well as marketing and consumption are urgently required for the sustainable development of organic farming.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.1068-1071
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• 2001

Recently, the minimum line width shows a tendancy to decrease and the multi-level to increase in semiconductor. Therefore, a planarization technique is needed, which chemical polishing(CMP) is considered as one of the most important process. CMP accomplishes a high polishing performance and a global planarization of high quality. But there are several defects in CMP such as microscratches, abrasive contaminations, and non-uniformity of polished wafer edges. Spin Etching can improve the defects of CMP. It uses abrasive-free chemical solution instead of slurry. Wafer rotates and chemical solution is simultaneously dispensed on a whole surface of the wafer. Thereby chemical reaction is occurred on the surface of wafer, material is removed. On this study, TEOS film is removed by CMP and Spin Etching, the results are estimated at a viewpoint of material removal rate(MRR) and within wafer non-uniformity(WIWNU).

• Bulletin of the Korean Chemical Society
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• 제30권2호
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• pp.389-396
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• 2009

MFI structural zeolite (ZSM-5 or Sililcalite) was treated with HF solution to introduce mesoporous channels in the microporous crystals. Inner mesopore size could be controlled from 2.5 to 3.5 nm by changing the concentration of HF solution. The pore structure of HF-treated MFI zeolite was studied by instrumental analysis. The active Co (III) salen complex monomers were successfully anchored non-covalently on the surfaces of mesoporous MFI-type zeolite. These heterogeneous catalysts could be applied in asymmetric ring opening of terminal epoxides by phenol derivatives. It showed very high enantioselectivity and yield up to 95% in the catalytic synthesis of optically active $\alpha$-aryloxy alcohol compounds.

• 한국표면공학회지
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• 제55권4호
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• pp.231-235
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• 2022

As environmental pollution becomes more serious, the demand for electric vehicles (EVs) and lithium-ion batteries for electric vehicles is rapidly increasing worldwide. Accordingly, the amount of waste batteries is also increasing, and a technology for recycling and reusing them is required. In order to reuse a used battery, it is necessary to non-destructively diagnose the deterioration condition of the battery. Therefore, in this study, we investigate the diagnosis of degradation for parallel-connected lithium-ion battery cells through non-constructive electrochemical approach. As the number of parallel-connected cells increased, in addition to linear degradation, abrupt step-like degradation occurred, which is attributed to the predominant degradation of specific cells. In addition, it is confirmed that deteriorated cells among multiple cells can be distinguished through a simple measurement of open circuit voltage (OCV).

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 춘계학술대회 논문집 유기절연재료 전자세라믹 방전플라즈마 일렉트렛트 및 응용기술
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• pp.223-227
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• 2002

As the channel length of device shrinks below $0.13{\mu}m$, CMP(chemical mechanical polishing) process got into key process for global planarization in the chip manufacturing process. The removal rate and non-uniformity of the CMP characteristics occupy an important position to CMP process control. Especially, the post-CMP thickness variation depends on the device yield as well as the stability of subsequent process. In this paper, every wafer polished two times for the improvement of oxide CMP process characteristics. Then, we discussed the removal rate and non-uniformity characteristics of post-CMP process. As a result of CMP experiment, we have obtained within-wafer non-uniformity (WIWNU) below 4 [%], and wafer-to-wafer non-uniformity (WTWNU) within 3.5 [%]. It is very good result, because the reliable non-uniformity of CMP process is within 5 [%].

• Bulletin of the Korean Chemical Society
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• 제28권9호
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• pp.1579-1584
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• 2007

The efficient and concise synthesis of natural and non-natural pyranochalcones was achieved from readily available 2,4,5-trihydroxyacetophenone. The key steps in the synthetic strategy were ethylenediamine diacetate-catalyzed benzopyran formation and aldol reactions.

• 한국치위생학회지
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• 제7권4호
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• pp.455-470
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• 2007

The usage of appropriate disinfectants is essential for infection control in dental hospitals, dental clinics. Inadequate use of disinfectants is the cause of human or environmental toxicity and is a waste of cost. This study was aimed to assess the level of knowledge on the disinfection and chemical disinfectants among dental workers in dental hospitals, dental clinics. It's ultimately intended to serve as a basis for the preparation of more effective, appropriate educational programs on the disinfection and manuals on the use of disinfectants for dental workers. This study enforced a questionnaire with 184 dental workers employed in dental hospitals, dental clinics from 15 Aug. to 15 Sep. 2007, in the area of Daejeon. The obtained result were as follows; 1. The population sociological feature of dental hospital and dental clinic showed that significant differences of dental service career(pM0.039). Dental service career of dental workers shows; below 3 years 42.9%, 4~6 years 34.7%, more than 7 years 22.4% in dental hospitals, below 3 years 30.4%, 4~6 years 26.7%, more than 7 years 43.0% in dental clinics(pM0.039). 2. The average score of dental workers knowledge in 'Critical item soaks in high-level disinfectants for 20minutes was 2.73V0.49 point, got from knowledge of dental instrument is appropriate to immerse before sterilization in the dental device disinfection(pM0.002). 3. In the general disinfection which it follows in education experience of chemical disinfectants direction for use, 'Direction for use by Spaulding process classification' responded that the correct answer was the education experience dental workers 60.0%, the education non-experience dental workers 39.5%(p=0.026). 4. In the dental device disinfection which it follows in education experience of chemical disinfectants direction for use. 'High level disinfection is not applied for the non-critical items and equipment' responded that the education experience dental workers 49.2%, the education non-experience dental workers 31.9%(pM0.045), 'Semi-critical items is applied same method in presence of the infection disease which it acts responded that the education experience dental workers 44.6% answer back, the education non-experience dental workers 24.4%(pM0.017). 5. 'A hand disinfectants of anticeptics have effect' the education experience dental workers 78.5% answer back, the education non-experience dental workers 52.9%(pM0.003). 1t uses with hand disinfectants when the instruments which be imbrued and patient contact', the education experience dental workers 78.5% answer back, the education non-experience dental workers 62.2%(pM0.026), 'Boric acid solution uses for the skin disinfectants the education experience dental workers 52.3% answer back, the education non-experience dental workers is 37.0%(pM0.016), 'Gluconate have effective difference which it follows in chemical disinfectant consistency and the solution type' education experience dental workers 72.3% answer back, education non-experience dental workers 47.9%(pM0.004). 6. The education experience dental workers were appeared higher than the education non-experience dental workers in knowledge of the disinfection and chemical disinfectants. Consequently system and the specialty education which is standardized continuously must be provided to all dental workers.