• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1997년도 추계학술대회 논문집
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• pp.94-97
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• 1997

We investigated the sheet resistance properties of tungsten nitride thin films deposited by RF and DC sputtering system. It deposited at various conditions that determine the sheet resistance. The properties of the sheet resistance of these films were measured under various conditions. Sheet resistance analysed under the flow rate of the argon gas and contents of nitrogen from nitrogen-argon gas mixtures. We found that these sheet resistance were largely depend on the temperature of substrate, gas flow rate and RF power. Very high and low sheet resistance of tungsten films obtained by DC sputtering. As the increase of contents of nitrogen gas obtained from nitrogen-argon gas mixture, tungsten nitride thin films deposited by the reactive DC sputtering and the sheet resistance of these films were increased.

• 열처리공학회지
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• 제13권5호
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• pp.337-345
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• 2000

As a case hardening process for stainless steels, nitriding is more preferred and widely used than carburizing which deterioates corrosion resistance severely. In order to add the nitrogen into the stainless steels, passive film on the surface must be removed effectively before nitriding. Conventional gas nitriding process is performed in the temperature range of 500 to $600^{\circ}C$ with $NH_3$ gas, which often leads to sensitization of stainless steels. In this study, we tried to activate passive film of austenitic stainless steels by heating at low pressure. ($900^{\circ}C$, $5{\times}10^{-2}$ Torr.) Nitriding was performed at the solution treatment temperature of $1100^{\circ}C$ with nitrogen molecules instead of $NH_3$ gas. An attainable nitrogen content in a case depends on the nitrogen gas pressure at constant nitriding temperature. A case depth is proportional to the square root of solution time, which suggests that inward diffusion of nitrogen follows the Fick's 2nd law. Surface nitrogen atoms are dissolved as interstitial solutes, or precipitated in the form of MN, $M_2N$ nitrides, which increase the case hardeness. Dissolved nitrogen in the case enhances the cavitation resistance of austenitic stainless steels dramatically.

• 한국진공학회지
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• 제8권2호
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• pp.165-171
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• 1999

Diamond-like carbon(DLC) films were synthesized using the rf-plasma CVD technique with the addition of small amounts of nitrogen and oxygen to a gas mixture of $CH_4$ and $H_2$. The gas flow ratio of $CH_4$ to $H_2$ was 2.4:1, and 3% , 13.6% of nitrogen were added to the gas mixture of $CH_4$ and $H_2$ for the deposition of DLC films. The film stress tended to decrease as the nitrogen concentration increased from 3% to 13.6%, probably due to the decrease of the number of the interlink between carbon atoms. The residual stress tended to slightly decrease when 3% of oxygen was added. Scratch tests were performed to investigate the adhesion between the DLC films and the Ti intelayer after pretreating the TiN surface with direct hydrogen plasma. The adhesion was enhanced by adding nitrogen and oxygen to the $CH_4$ and $H_2$ gas mixture. The adhesion for the 3% nitrogen addition was better than that for the 13.6% nitrogen addition. The Vicker's hardness of the DLC films was measured to be 1100Hv.

• 한국표면공학회지
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• 제29권5호
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• pp.549-555
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• 1996

Diamond Like Carbon film is amorphous film which is considered to consist of three coordinate graphite structure and tetrahedron coordinate diamond structure. Its hardness, thermal conductivity and chemical stability are nearly to one of diamond. It is well known to become semi-conductor by doping of inpurity. In this study Diamond Like Carbon film was synthesized by Microwave Plasma CVD in the gas mixture of hydrogen-methan-nitrogen and doped of nitrogen on the single-crystal silicon or silica glass. The temperature of substrate and nitrogen concentration in the gas mixture had an effect on the bonding state, structural properties and conduction mechanism. The surface morphology was observed by Scanning Electron Microscope. The strucure was analyzed by laser Raman spectrometry. The bonding state was evaluated by electron spectroscopy. Diamond Like Carbon film synthesized was amorphous carbon containing the $sp^2$ and $sp^3$ carbon cluster. The number of $sp^2$ bonding increased as nitrogen concentration increased from 0 to 40 vol% in the feed gas at 1233K substrate temperature and at $7.4\times10^3$ Pa. Increase of nitrogen concentration made Diamond Like Carbon to be amorphous and the doze of nitragen could be controlled by nitrogen concentration of feed gas.

• Journal of Welding and Joining
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• 제30권2호
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• pp.70-75
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• 2012

In this study, effect of nitrogen volume in the shielding gas of Ar-$N_2$ mixing gas on the bead shape, hardness and microstructure of GTA welds of 3mm thick Commercial Pure Ti was investigated. As the nitrogen volume increased, the welding current for full penetration was reduced and hardness in the fusion zone significantly increased compared with that of the base metal, but there is no difference in the hardness of HAZ. Microstructure in the fusion zone with pure Ar gas changed from equiaxed alpha of the base metal to serrated alpha. On the other hand, microstructure using Ar-$N_2$ mixing gas changed to acicular alpha. With the increasing of nitrogen content, the amount of acicular alpha increased and the size of that was fine.

• 멤브레인
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• 제32권3호
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• pp.191-197
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• 2022

기체투과막 기술을 이용하여 가축분뇨 폐기물 등으로부터 암모니아성 질소를 효과적으로 회수할 수 있다. 이는 폐기물 내 암모니아 기체가 폐기물에 함침된 기체투과막의 미세공극을 투과하여 막반대편에 도달하게 된다. 투과된 암모니아 기체분자는 막 반대편에 존재하는 용액 내 황산 등 산에 의해 포획 및 회수된다. 막 유입부 내 암모니아성 질소 제거 효과를 높이기 위해서는 우선 유입 폐기물 내 pH를 높게 유지해야 하는데 pH 상승에 필요한 염기성 약품 투입비용이 문제가 될 수 있다. 기존 연구에서는 보다 저렴한 소석회 투입하거나 폭기 혹은 질산화억제를 통해 높은 pH를 효과적으로 유지시키는 방안이 거론되고 있다. 한편 암모니아성 질소 회수에 쓰이는 기체투과막의 재질은 적절한 내열성이나 내화학성 이외에도 소수성을 띈다는 특징이 있으며 이를 통해 막기공을 통해 암모니아 기체를 선택적으로 투과시킬 수 있다. 향후 연구에서는 다양한 성상을 가진 현장 폐기물을 이용하여 실증 Test를 수행하고 이를 기반으로 최적 설계/운전 조건 규명 및 경제성 제고 방안을 수립하여야 한다.

• 한국응용과학기술학회지
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• 제30권3호
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• pp.540-550
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• 2013

Various efforts have been explored to save the cost in many industrial fields. In order to recover the residual thermal energy from the flue gas, an extreme high efficiency heat exchanger is planning to install at a power plant. The gas temperature will be reduced to $40^{\circ}C$ from $115^{\circ}C$. Thus gas buoyancy decreases, and dispersion of nitrogen oxides is expected to deteriorate as increasing relative humidity. In this study, the conversion of nitrogen monoxide to nitrogen dioxide and dispersion regime are investigated through computational modeling. Nitrogen dioxide which indicates 0.1 ppm at 85 m from the ground could be propagated to 620 m at $115^{\circ}C$ of the flue gas, whilst when cooled down to $40^{\circ}C$, it expands up to 750 m. The ground level influence area showed more expansion of dispersion, approximately to 930 m.

• 한국산업융합학회 논문집
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• 제24권6_2호
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• pp.909-917
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• 2021

This study was carried out experimentally on the production and properties of silicon nanopowders characteristics using a transferred type arc plasma apparatus. To investigate the properties of silicon nanopowder, the purity of argon gas(99.999%, 99.9%) and the partial pressure ratio of nitrogen gas(0~90%) were varied. The total pressure in chamber is 400Torr and the silicon chunk amount used as raw material is 300g. The power supplied to the cathode to generate arc plasma was 9~12kW/h, and the electrode was made of tungsten and graphite with a diameter of 13mm. The particle size, impurity elements and powder evaporation rate of the silicon powder were analyzed using the XRD, FE-SEM, TEM and electronic scale. According to the purity of argon gas, the silicon evaporation rate and the particle size were similar, and impurities were generated more in the case of 99.9% purity than 99.999%. When argon gas and nitrogen gas were mixed in the chamber, the silicon evaporation rate and particle size increased as the partial pressure ratio of nitrogen gas increased. In particular, when the partial pressure ratio of nitrogen gas was 80%, the silicon evaporation rate 80g/h, and the particle size was about 80~100nm.

• Journal of Welding and Joining
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• 제33권3호
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• pp.68-74
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• 2015

Superduplex stainless steels are important materials to the oil and gas industry, especially for off-shore production. TIG welding of super duplex stainless steels to obtain the optimal phase balance between austenite and ferrite is mainly achieved by controlling the cooling rate and the weld chemistry. The latter depends on the filler wire chosen and the shielding gas used. If TIG welding of superduplex stainless steels is performed with argon shielding gas only, then nitrogen gets lost from the weld pool, which can result in a ferrite-rich weld metal, with an inferior corrosion resistance than parent metal. In the present study, nitrogen permeation model from the shield gas which gets into the weld metal in DCEN-TIG welding has suggested. This plasma stream model shows characteristics of permeation of nitrogen ions into the molten metal due to the strong physical effect of plasma stream which formed by the arc pressure rather than the permeation of nitrogen ions caused by electric effect.

• 한국자동차공학회논문집
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• 제16권5호
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• pp.171-178
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• 2008

The combustion and exhaust emission characteristics were investigated in an DME fueled HCCI engine. Carbon dioxide, nitrogen and mixed gas, which was composed of carbon dioxide and nitrogen, were used as control parameters of combustion and exhaust emission. As the oxygen concentration in induction air, which was occurred by carbon dioxide, nitrogen and mixed gas, was reduced, the start of auto-ignition was retarded and the burn duration was extended due to obstruction of combustion and reduction of combustion temperature. Due to these fact, indicated mean effective pressure was increased and indicated combustion efficiency was decreased by carbon dioxide, nitrogen and mixed gas. In case of exhaust emission, hydrocarbon and carbon monoxide was increased by reduction of oxygen concentration in induction air. Especially, partial burning was appeared at lower than about 18% of oxygen concentration by supplying carbon dioxide. However it was overcome by intake air heating.