• 제목/요약/키워드: nitridation

검색결과 192건 처리시간 0.036초

GaOOH로부터 GaN 분말 형성의 반응역학에 관하여 (On the Reaction Kinetics of GaN Particles Formation from GaOOH)

  • 이재범;김선태
    • 한국재료학회지
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    • 제15권5호
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    • pp.348-352
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    • 2005
  • Gallium oxyhydroxide (GaOOH) powders were heat-treated in a flowing ammonia gas to form GaN, and the reaction kinetics of the oxide to nitride was quantitatively determined by X-ray diffraction analysis. GaOOH turned into intermediate mixed phases of $\alpha-\;and\;\beta-Ga_2O_3$, and then single phase of GaN. The reaction time for full conversion $(t_c)$ decreased as the temperature increased. There were two-types of rapid reaction processes with the reaction temperature in the initial stage of nitridation at below $t_c$, and a relatively slow processes followed over $t_c$ does not depends on temperatures. The nitridation process was found to be limited by the rate of an interfacial reaction with the reaction order n value of 1 at $800^{\circ}C$ and by the diffusion-limited reaction with the n of 2 at above $1000^{\circ}C$, respectively, at below $t_c$. The activation energy for the reaction was calculated to be 1.84 eV in the temperature of below $830^{\circ}C$, and decreased to 0.38 eV above $830^{\circ}C$. From the comparative analysis of data, it strongly suggest the rate-controlling step changed from chemical reaction to mass transport above $830^{\circ}C$.

여러 질소 플라즈마 상태에서 성장한 wurtzite GaN의 결정특성 (Crystal properties of wurtzite GaN grown under various nitrogen plasma conditions)

  • 조성환;김순구;유연봉
    • 한국진공학회지
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    • 제6권4호
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    • pp.354-358
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    • 1997
  • 다양한 질소 압력, 플라즈마 파워 상태에서 사파이어 기판위에 전자 사이클로트론 공명 MBE로 제작한 wurtzite GaN의 결정특성을 XRD의 반치폭, 주사전자 현미경으로 조 사하였다. 질소 압력은 XRD의 반치폭에 커다란 영향을 미치고 있으며 최적 질소 압력에서 제작한 시료에는 높은 dislocation density를 포함하고 있음을 알았다. 이러한 결과들은 갈륨 질소의 결정질(crystal quality)은 플라즈마 상태에 매우 민감하며 또한 스트레스 완화는 V/ III비에 의존하고 있음을 나타낸다. 그렇지만 사파이어 기판의 nitridation은 스트레스 완화에 커다란 영향을 미치지 않고 있었다.

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Growth of Nano- and Microstructured Indium Nitride Crystals by the Reaction of Indium Oxide with Ammonia

  • Jung, Woo-Sik;Ra, Choon-Sup;Min, Bong-Ki
    • Bulletin of the Korean Chemical Society
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    • 제26권9호
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    • pp.1354-1358
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    • 2005
  • Nano- and microstructured indium nitride crystals were synthesized by the reaction of indium oxide ($In_2O_3$) powder and its pellet with ammonia in the temperature range 580-700 ${^{\circ}C}$. The degree of nitridation of $In_2O_3$ to InN was very sensitive to the nitridation temperature. The formation of zero- to three-dimensional structured InN crystals demonstrated that $In_2O_3$ is nitridated to InN via two dominant parallel routes (solid ($In_2O_3$)-to-solid (InN) and gas ($In_2O$)-to-solid (InN)). The growth of InN crystals with such various morphologies was explained by the vapor-solid (VS) mechanism where the degree of supersaturation of In vapor determines the growth morphology and the vapor was mainly by the reaction of $In_2O$ with ammonia and partially by sublimation of solid InN. The pellet method was proven to be useful to obtain homogeneous InN nanowires.