• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.52-52
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• 2002

Recently, nanoporous low-k materials using porogen (pore generating material) template method have gained much attraction due to the feasible advantage of dielectric constant decrease with the increase of porogen content, which is burning out and making air void by thermal curing. In nanoporous thin films, further, control of pore size and its distribution is very important to retain suitable thermal, mechanical and electrical properties. In this study, nanoporous low-k films were prepared with MTMS-BTMSE copolymer and porogen. The effect of interaction of copolymer matrix and porogen on pore size and distribution was comparatively to investigate with molecular structure and end functional group. The characterization of nanoporous thin film prepared was also performed using various techniques including NMR, GPC, Ellipsometer, FE-SEM, TGA, and FT-IR.

• Proceedings of the Korea Crystallographic Association Conference
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• 2002.11a
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• pp.48-48
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• 2002

It is generally accepted that ultra low dielectric interlayer dielectric materials (k < 2.2) will be necessary for ULSI advanced microelectronic devices after 2003, according to the International Technology Roadmap for Semiconductors (ITRS) 2000. A continuous reduction of dielectric constant is believed to be possible only by incorporating nanopores filled with air (k = 1.0) into electrically insulating matrices such as poly(methyl silsesquioxane) (PMSSQ). The nanopo.ous low dielectric films should have excellent material properties to survive severe mechanical stress conditions imposed during the advanced semiconductor processes such as chemical mechanical planarization process and multilayer fabrication. When air is incorporated into the films for lowering k, their mechanical strength has inevitably to be sacrificed. To minimize this effect, the nanopores are controlled to exist in the film as closed cells. The micromechanical properties of the nanoporous thin films are considered more seriously than ever, particularly for ultra low dielectric applications. In this study, three approaches were made to design and develop nanoporous low dielectric films with improved micromechanical properties: 1) wall density increase of nanoporous organosilicate film by copolymerization of carbon bridged comonomers; 2) incorporation of sacrificial phases with good miscibility; 3) selective surface modification by plasma treatment. Nanoporous low-k films were prepared with copolymerized PMSSQ and star-shaped sacrificial organic molecules, both of which were synthesized to control molecular weight and functionality. The nanoporous structures of the films were observed using field emission scanning electron microscopy, cross-sectional transmission electron microscopy, atomic force microscopy, and positronium annihilation lifetime spectroscopy(PALS). Micromechanical characterization was performed using a nanoindentor to measure hardness and modulus of the films.

• Journal of Adhesion and Interface
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• v.14 no.2
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• pp.82-87
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• 2013

Preliminary studies on the synthesis of magnetic nanoparticles including nanoporous carbon materials have been done via a direct carbonization process from resol, ferric nitrate and triblock copolymer F127. The results show that the nanoporous magnetite/carbon ($Fe_3O_4$/carbon) with a low $Fe_3O_4$ content (1 wt%) possesses an ordered 2-D hexagonal (p6mm) structure, uniform nanopores (3.6 nm), high surface areas (up to 635 $m^2/g$) and pore volumes (up to 0.48 $cm^3/g$). Magnetite nanoparticles with a small particle size (10.2 nm) were confined in the matrix of amorphous carbon frameworks with superparamagnetic property (7.7 emu/g). The nanoporous magnetite/carbon showed maximum adsorption amount (995 mg/g) of ibuprofen after 24 h at room temperature. The nanoporous magnetite/carbon was separated from solution easily by using a magnet. The nanoporous magnetite/carbon material is a good adsorbent for hydrophobic organic drug molecules, i.e. ibuprofen.

• Bulletin of the Korean Chemical Society
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• v.28 no.11
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• pp.2034-2040
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• 2007

Efficient catalytic systems, where Ni or Pd is introduced in a supporting material of nanoporous carbon, have been developed for a liquid-phase hydrogenation of carboxylic acids and ketones at room temperature. It has been found that the catalysts reliably show high activities and selectivities for the hydrogenation to alcohols even in acidic conditions, and the catalytic activities depend on the preparative method of catalysts, the hydrogen pressure, the agitation rate, and the catalytic species. The hydrogenation of carboxylic acids and ketones clearly shows that the reaction rate is affected by the electronic and the steric effects, and a plausible reaction mechanism using metal hydrides as catalytic species is proposed.

• Carbon letters
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• v.19
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• pp.66-71
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• 2016

The development of nanostructured functional materials derived from biomass and/or waste is of growing importance for creating sustainable energy-storage systems. In this study, nanoporous carbonaceous materials containing numerous heteroatoms were fabricated from waste coffee grounds using a top-down process via simple heating with KOH. The nanoporous carbon nanosheets exhibited notable material properties such as high specific surface area (1960.1 m² g⁻¹), numerous redox-active heteroatoms (16.1 at% oxygen, 2.7 at% nitrogen, and 1.6 at% sulfur), and high aspect ratios (>100). These unique properties led to good electrochemical performance as supercapacitor electrodes. A specific capacitance of ~438.5 F g⁻¹ was achieved at a scan rate of 2 mV s⁻¹, and a capacitance of 176 F g⁻¹ was maintained at a fast scan rate of 100 mV s⁻¹. Furthermore, cyclic stability was achieved for over 2000 cycles.

• Journal of the Korean Ceramic Society
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• v.41 no.12 s.271
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• pp.900-906
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• 2004

Solid oxide fuel cells have a limitation in their low-temperature application due to the low ionic conductivity of electrolyte materials and difficulties in thin film formation on porous gas diffusion layer. These problems can be solved by improvement of ionic conductivity through controlled nanostructure of electrolyte and adopting nanoporous electrodes as substrates which have homogeneous submicron pore size and highly flattened surface. In this study, ultra-thin oxide films having submicron thickness without gas leakage are deposited on nanoporous substrates. By oxidation of metal thin films deposited onto nanoporous anodic alumina substrates with pore size of $20nm{\sim}200nm$ using dc-magnetron sputtering at room temperature, ultra-thin and dense ionic conducting oxide films with submicron thickness are realized. The specific material properties of the thin films including gas permeation, grain/gran boundaries formation, change of crystalline structure/microstructure by phase transition are investigated for optimization of ultra thin film deposition process.

• Korean Chemical Engineering Research
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• v.46 no.3
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• pp.465-472
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• 2008

Fabrication of nanostructured materials and synthesis of nanomaterials have intensively studied to realize electronic devices for nanotechnology. By using nanoporous alumina mask, nanostructured material can be fabricated in the form of uniform array. The size and the density of the nanostructured materials can be controllable by changing the pore diameter and the density of the alumina mask. This method is possible low cost and on large scale process, and feasible to contribute the fusion technology consisting of information technology, nanotechnology, and biotechnology. Therefore, these techniques provide alternative approaches for development of new electronic applications. In this paper, the fabrication technique and its applications of nanoporous alumina mask are described and nanostructured materials such as quantum dots, nanoholes, and nanorods are introduced.

• Proceedings of the Korean Vacuum Society Conference
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• 2009.08a
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• pp.88-88
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• 2009

• Applied Chemistry for Engineering
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• v.18 no.2
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• pp.99-110
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• 2007

Efficient and inexpensive hydrogen storage is an essential prerequisite for the utilization of hydrogen, one of the new and clean energy sources for $21^{st}$ century. In this review, several storage techniques are briefly reviewed and compared. Especially, adsorption/storage via physisorption at low temperature, by using nanoporous adsorbents, is reviewed and evaluated for further developments. The adsorption over a porous material at low temperature is currently investigated deeply to fulfill the storage target. In this review, several characteristics needed for the high hydrogen adsorption capacity are introduced. It may be summarized that following characteristics are necessary for high storage capacity over porous materials: i) high surface area and micropore volume, ii) narrow pore size, iii) strong electrostatic field, and iv) coordinatively unsaturated sites, etc. Moreover, typical results demonstrating high storage capacity over nanoporous materials are summarized. Storage capacity up to 7.5 wt% at liquid nitrogen temperature and 80 atm is reported. Competitive adsorbents that are suitable for hydrogen storage may be developed via intensive and continuous studies on design, synthesis, manufacturing and modification of nanoporous materials.

• Advances in nano research
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• v.7 no.1
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• pp.25-38
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• 2019

This research is aimed at studying the asymmetric thermal buckling of porous functionally graded (FG) annular nanoplates resting on an elastic substrate which are made of two different sets of porous distribution, based on nonlocal elasticity theory. Porosity-dependent properties of inhomogeneous nanoplates are supposed to vary through the thickness direction and are defined via a modified power law function in which the porosities with even and uneven type are approximated. In this model, three types of thermal loading, i.e., uniform temperature rise, linear temperature distribution and heat conduction across the thickness direction are considered. Based on Hamilton's principle and the adjacent equilibrium criterion, the stability equations of nanoporous annular plates on elastic substrate are obtained. Afterwards, an analytical solution procedure is established to achieve the critical buckling temperatures of annular nanoplates with porosities under different loading conditions. Detailed numerical studies are performed to demonstrate the influences of the porosity volume fraction, various thermal loading, material gradation, nonlocal parameter for higher modes, elastic substrate coefficients and geometrical dimensions on the critical buckling temperatures of a nanoporous annular plate. Also, it is discussed that because of present of thermal moment at the boundary conditions, porous nanoplate with simply supported boundary condition doesn't buckle.