• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2007.10a
• /
• pp.166-167
• /
• 2007

본 연구에서는 Anodic Aluminum Oxide(AAO)-Nano Template 제조 시 알루미늄의 결정방위가 AAO 미세공 형성에 미치는 영향을 연구하였다. 시료는 직경 20mm 두께 2mm의 (200), (220), (111) 세가지 알루미늄 단결정 시편을 사용 하였으며 이는 XRD 장비로 단결정임을 확인 하였다. 양극산화에 앞서 평활한 면을 얻기 위해 다이아몬드 콤파운드($1{\mu}m$)로 미세연마 하였으며 양극산화는 세가지 시편에 대해 모두 동일한 조건에서 2단계 양극산화까지 하였다. 결과는 주사전자현미경(FE-SEM)으로 제조된 AAO 표면의 세공형태와 단면을 모두 관찰 하였으며 그 결과 (200) 결정방위가 (220), (111) 결정 방위보다 세공 형태 균일도 및 단면 정열도와 직진성이 우수함을 관찰 할 수 있었다.

• Proceedings of the KIEE Conference
• /
• 2002.11a
• /
• pp.161-163
• /
• 2002

Siver nanowires have been obtained by electrodepositon in the porous anodic alumina that plays a role as a template in the constant current mode using DC power supply. The diameter and the length of the silver nanowires are about 55 nm and 13 ${\mu}m$ corresponding to them of the template respectively. The aspect ratio of the silver nanowires is more or less 200. The rate of the filling of the alumina pores is approximately 10%.

• Proceedings of the Korean Institute of Surface Engineering Conference
• /
• 2008.11a
• /
• pp.128-128
• /
• 2008

본 연구에서는 나노 임프린트 리소그래피 래피 공정과 PVA(Poly-Vinyl-Alcohol), PDMS(Poly-Dimethyl-Siloxane) template 등의 flexible template를 사용하여 평면 기판 뿐만 아니라 곡면 렌즈 위에 moth-eye 구조를 성공적으로 형성시켰으며 처리 되지 않은 렌즈에 비해 투과율이 향상되는 것을 확인하였다.

• JSTS:Journal of Semiconductor Technology and Science
• /
• v.7 no.3
• /
• pp.133-139
• /
• 2007

Future MEMS systems will be composed of larger varieties of devices with very different functionality such as electronics, mechanics, optics and bio-chemistry. Integration technology of heterogeneous devices must be developed. This article first deals with the current development trend of new fabrication technologies; those include self-assembling of parts over a large area, wafer-scale encapsulation by wafer-bonding, nano imprinting, and roll-to-roll printing. In the latter half of the article, the concept towards the heterogeneous integration of devices and functionality into micro/nano systems is described. The key idea is to combine the conventional top-down technologies and the novel bottom-up technologies for building nano systems. A simple example is the carbon nano tube interconnection that is grown in the via-hole of a VLSI chip. In the laboratory level, the position-specific self-assembly of nano parts on a DNA template was demonstrated through hybridization of probe DNA segments attached to the parts. Also, bio molecular motors were incorporated in a micro fluidic system and utilized as a nano actuator for transporting objects in the channel.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2002.05a
• /
• pp.25-25
• /
• 2002

• Proceedings of the Korean Vacuum Society Conference
• /
• 2002.06a
• /
• pp.117-117
• /
• 2002

• Proceedings of the Korean Magnestics Society Conference
• /
• 2009.12a
• /
• pp.247-249
• /
• 2009

• Proceedings of the Korean Vacuum Society Conference
• /
• 2003.08a
• /
• pp.161-161
• /
• 2003

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2011.05a
• /
• pp.37.1-37.1
• /
• 2011

Miniaturization of lenses has been widely researched by various scientific and engineering techniques. As a result, micro scaled lens structure could be easily achieved from various fabrication techniques; nevertheless it is still challenging to make nano scaled lenses. This paper reports a novel fabrication method of silicon nanotemplate for nanolens array. The inverse structure of nanolens array was fabricated on silicon substrate by reactive ion etching (RIE) process. This technique has a flexibility to produce different tip shapes using different pattern masks. Once the silicon nano-tip array structure is well-defined using an optimized recipe, it is followed by polymer molding to duplicate nanolens array from the template. Finally, the nanostructures formed on silicon nanotemplate and polymer replica were investigated using FE-SEM and AFM measurements. The nano scaled lens can be manufactured from the same template, also using other replication techniques such as imprinting, injection molding and so on.

• Journal of the Korean Electrochemical Society
• /
• v.4 no.2
• /
• pp.47-52
• /
• 2001

AAO template having nano scale pores of high aspect ratio has been prepared through anodizing of aluminum foil in sulfuric acid electrolyte. The effect of anodizing parameters on the pore size and distribution was also examined to obtain the proper AAO as a template material of nanowire. The surface of AAO template prepared was observed by SEM to examine the mean size and distribution of pores generated by the anodizing and Fe nanowires obtained by AC electroforming using AAO template were also observed with TEM to determine the length and shape of them. From the results of work, it was found that the mean size or distribution of pores was influenced significantly by the anodizing parameters such as voltage and temperature of electrolyte. Mean length and aspect ratio of Fe nanowires prepared in the work were found to be $10{\mu}m\;and\;300\;to\;1,000$, respectively.