• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.3 no.2
• /
• pp.53-59
• /
• 2004

In this paper, we propose a new multi-purpose Scanning Force Microscope (SFM) system. The system can be used for nano/micro-scratching, in-process profile measurement, and observation of potential surface defects which occur during the scratching in air or liquid. Experimental results of nano/micro-scratching show that the smallest scratching depth can be controlled to be 10nm, which corresponds to the stability of the SFM system. Profile measurements of nano/micro-scratching surfaces have also been performed by the method of on-machine measurement and in-process measurement. Two measurement results were in good agreement with each other. The maximum difference was approximately 10 nm, which was mainly caused by the sampling repeatability error that influences the measurement accuracy Also, micro-defects on the micro-scratching surface were successfully detected by the SFM system. It was confirmed that the number of micro-defects increases when the surface is subjected to a cyclic bending load. The maximum depth was less than 100nm.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2010.06a
• /
• pp.351-351
• /
• 2010

Nanoscale patterning using an atomic force microscope tip induced scratching was systematically investigated in AI thin film on 4H-SiC. To identify the effects of the scratch parameters, including the tip loading force, scratch speed, and number of scratches, we varied each parameters and evaluated the major parameter which has intimate relationship with the scale of patterns. In this work, we present the successful demonstration of nano patterning of Al thin film on a 4H-SiC substrate using an AFM scratching and evaluated the scratch parameters on Al/4H-SiC.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2005.10a
• /
• pp.268-271
• /
• 2005

Etch resistance of mask layer on silicon substrate modified by AFM-based Tribo-Nanolithography (TNL) in Aqueous Solution in an aqueous solution was demonstrated. n consists or sequential processes, nano-scratching and wet chemical etching. The simple scratching can form a mask layer on the silicon substrate, which acting as an etching mask. For TNL, a specially designed cantilever with diamond tip, allowing the formation of mask layer on silicon substrate easily by a simple scratching process, has been applied instead of conventional silicon cantilever fur scanning. This study demonstrates how the TNL parameters can affect the etch resistance of mask layer, hence introducing a new process of AFM-based maskless nanolithography in aqueous solution.

• Journal of the Korean Society of Manufacturing Process Engineers
• /
• v.2 no.1
• /
• pp.75-84
• /
• 2003

In this paper, a new nano/micro-mechanical processing test machine was developed. This new test machine, which is based on the principle of the scanning force controlled probe microscope, can realize nano/micro-mechanical machining and in-process profile measurement. Experimental results of nano/micro indentation and scratching show that the controllable cutting depth of the test machine can be controlled by PZT actuator. Profile measurement of the machined surface has also been performed by using the test machine and a conventional AFM(Atomic Force Microscopy). A good agreement of the two measurement results have been achieved.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.3
• /
• pp.139-146
• /
• 2004

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation scratch test was studied with numerical method by ABAQUS S/W. Brittle materials (Si, Pyrex glass 7740) were used as specimens, and forming conditions to reduce the elastic recovery and pile-up were proposed. The indenter was modeled as a rigid surface. Minimum mesh sizes of specimens are 1-l0nm. Variables of the nanoindentation scratch test analysis are scratching speed, scratching load, tip radius and tip geometry. The nano-indentation scratch tests were performed by using the Berkovich pyramidal diamond indenter. Comparison between the experimental data and numerical result demonstrated that the FEM approach can be a good model of the nanoindentation scratch test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2003.10a
• /
• pp.89-92
• /
• 2003

Nano-scratch tests were performed on PMMA thin films spin-coated on a Si substrate using an atomic force microscopy (AFM) with loads ranging from 10nN to 100nN. At low applied loads, a ridge pattern was formed on the PMMA surface. No wear particles were observed during the pattern-forming mild wear. At high applied loads, severe wear occurred accompanied by wear particles. The film with the highest hardness showed the highest wear resistance. Friction force generated during the Scratching was closely related with surface deformation of the film.

• Transactions of Materials Processing
• /
• v.13 no.1
• /
• pp.59-64
• /
• 2004

Nano-scratch tests were performed on PMMA thin films spin-coated on a Si substrate using an atomic force microscopy (AFM) with loads ranging form 10nN to 100nN. At low loads, a ridge pattern was formed on the PMMA thin film surface. No wear particles were observed during the pattern-forming mild wear. At high loads, severe wear by plowing occurred, accompanied by wear particles. The film with the highest hardness showed the highest wear resistance. Friction force generated during the scratching was measured, which was closely related with surface deformation of the film. A simple empirical equation to deduce scratch hardness of the film from a linear fixed-distance scratch test was proposed, and scratching-speed dependency of the scratch hardness was displayed.

• Tribology and Lubricants
• /
• v.20 no.3
• /
• pp.125-131
• /
• 2004

Nano-wear behavior of amorphous carbon films was studied by Atomic Force Microscopy. The a-C films are deposited on Si(100) substrate by DC magnetron sputtering method. The influences of different surface roughness on the nano-wear are investigated. Nano-wear tests were carried out using a very sharp diamond coated tip. Its spring constant was 1.6 N/m and radius of curvature was 110 nm. Normal force used in the wear tests ranged 0 to 400 nN. It was found that surface depression occurred during scratching because of plastic deformation and abrasive wear (cutting St ploughing). Wear depth increased linearly with normal force. Changing the surface roughness variables according to the bias pulse control, the less surface roughness decreased the wear depth. The thickness did not affect the wear resistance.

• Journal of The Korean Society of Agricultural Engineers
• /
• v.55 no.3
• /
• pp.113-121
• /
• 2013

Recently, it has been studied for the application of nano-materials in the concrete. Applied a small amount of nano-materials can achieve the goal of high strength, high performance and high durability. The small addition of nano clay improves strength, thermal stability, and durability of concrete because of the excellent dispersion. The present study has investigated the effectiveness, when varying with the contents of nano clay, influencing the pull-out behavior of macro synthetic fibers in nano materials cement mortar. Pullout tests conducted in accordance with the Japan Concrete Institute (JCI) SF-8 standard for fiber-reinforced concrete test methods were used to evaluate the pullout performance of the different nano clay. Nano clay was added to the 0, 1, 2, 3, 4 and 5 % of cement weight. The experimental results demonstrated that the addition of nano clay led to improve the pull-out properties as of the load-displacement curve in the precracked and debonded zone. Also, the compressive strength, flexural strength and pullout performance and of Mix No. 1 and No. 2 increased up to the point when nano clay used increased by 2 and 3 % contents, respectively, but decreased when the exceeded 3 and 4 %, respectively. It was proved by verifying increase of the scratching phenomenon in macro synthetic fiber surface through the microstructure analysis on the surface of macro synthetic fiber.

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2009.05a
• /
• pp.294-297
• /
• 2009

The frictional behaviors of Cermets/Cr-Ceramics and Cu-Al coatings of piston ring were investigated. Friction tests were carried out by pin-on-disk test and materials properties of coating layer were analyzed by nano indentation tester. Higher friction coefficient was obtained at harder coating with rougher surface. In case of hard-coating, the scratch depth, width and pile-up height had close relationship with indentation hardness. So the scratch width, depth and pile-up height increases with decreasing friction coefficient. But in case of soft-coating, the friction coefficients are strongly dependent on the morphological characteristics after nano scratching more than indentation hardness.