• 한국재료학회:학술대회논문집
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• 한국재료학회 2003년도 추계학술발표강연 및 논문개요집
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• pp.65-65
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• 2003

Chemical mechanical polishing (CMP) is one of the most important processes in recent ULSI (Ultra Large Scale Integrated Circuit) manufacturing technology. Recently, ceria slurries with surfactant have recently been used in STI-CMP,[1] became they have high oxide-to-nitride removal selectivity and widen the processing margin The role of the abrasives, however, on the effect of planarization on STI-CMP is not yet clear. In this study, we investigated how the crystal characteristic affects the planarization efficiency of wafer surface with controlling crystallite size and poly crystalline abrasive size independently.

• Advances in nano research
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• 제8권1호
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• pp.13-24
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• 2020

In this paper, for the first time based on the nonlocal strain gradient theory the effect of size dependency in torsional vibration of bi-direction functionally graded (FG) nonlinear nano-cone is study. The material properties were assumed to vary according to the arbitrary function in radial and axial directions. The Navier equation and boundary conditions of the size-dependent bidirectional FG nonlinear nano-cone were derived by Hamilton's principle. These equations were solved by employing the generalized differential quadrature method (GDQM). The presented model can turn into the classical model if the material length scale parameters are taken to be zero. The effects of some parameters, such as inhomogeneity constant, cross-sectional area parameter and small-scale parameters, were studied. As an essential result of this study can be stated that an FG nano-cone model based on the nonlocal elasticity theory behaves softer and based on the strain gradient theory behaves harder.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 추계학술대회 논문집
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• pp.492-497
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• 2005

In this study, we propose an advanced nanoindentaion test, Nano Pillar Compression Test (NPCT) to measure a stress-strain relation for micro scale polymer structures. Firstly, FEM analysis is performed to research behavior of micro polymer pillars in several specimen aspect ratios and different friction conditions between specimen and tip. Based on the FEM results, micro scale UV-curable polymer pillars are fabricated on a substrate by Nano Stereo Lithography (NSL). To measure their mechanical properties, uniaxial compression test is performed using nanoindentation apparatus with flat-ended diamond tip. In addition, the dependency of compression properties on loading condition and specimen size are discussed.

• Smart Structures and Systems
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• 제25권4호
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• pp.501-514
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• 2020

This article presents a comprehensive model to investigate a free vibration and resonance frequencies of nanostructure perforated beam element as nano-resonator. Nano-scale size dependency of regular square perforated beam is considered by using nonlocal differential form of Eringen constitutive equation. Equivalent mass, inertia, bending and shear rigidities of perforated beam structure are developed. Kinematic displacement assumptions of both Timoshenko and Euler-Bernoulli are assumed to consider thick and thin beams, respectively. So, this model considers the effect of shear on natural frequencies of perforated nanobeams. Equations of motion for local and nonlocal elastic beam are derived. After that, analytical solutions of frequency equations are deduced as function of nonlocal and perforation parameters. The proposed model is validated and verified with previous works. Parametric studies are performed to illustrate the influence of a long-range atomic interaction, hole perforation size, number of rows of holes and boundary conditions on fundamental frequencies of perforated nanobeams. The proposed model is supportive in designing and production of nanobeam resonator used in nanoelectromechanical systems NEMS.

• Advances in materials Research
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• 제8권4호
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• pp.259-274
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• 2019

Flexoelectric effect has a major role on mechanical responses of piezoelectric materials when their dimensions become submicron. Applying differential quadrature (DQ) method, the present article studies dynamic characteristics of a small scale beam made of piezoelectric material considering flexoelectric effect. In order to capture scale-dependency of such piezoelectric beams, nonlocal elasticity theory is utilized and also surface effects are included for better structural modeling. Governing equations have been derived by utilizing Hamilton's rule with the assumption that the scale-dependent beam is subjected to thermal environment leading to uniform temperature variation across the thickness. Obtained results based on DQ method are in good agreement with previous data on pizo-flexoelectric beams. Finally, it would be indicated that dynamic response characteristics and vibration frequencies of the nano-size beam depends on the existence of flexoelectric influence and the magnitude of scale factors.

• Advances in materials Research
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• 제7권1호
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• pp.1-16
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• 2018

Thermal bifurcation buckling behavior of fully clamped Euler-Bernoulli nanobeam built of a through thickness functionally graded material is explored for the first time in the present paper. The variation of material properties of the FG nanobeam are graded along the thickness by a power-law form. Temperature dependency of the material constituents is also taken into consideration. Eringen's nonlocal elasticity model is employed to define the small-scale effects and long-range connections between the particles. The stability equations of the thermally induced FG nanobeam are derived via the principal of the minimum total potential energy and solved analytically for clamped boundary conditions, which lead for more accurate results. Moreover, the obtained buckling loads of FG nanobeam are validated with those existing works. Parametric studies are performed to examine the influences of various parameters such as power-law exponent, small scale effects and beam thickness on the critical thermal buckling load of the temperature-dependent FG nanobeams.

• Geomechanics and Engineering
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• 제28권5호
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• pp.477-491
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• 2022

In the present study, the effects of thermal loading on the buckling and resonance frequency of graphene platelets (GPL) reinforced nano-composites are examined. Functionally graded (FG) material properties are considered in thickness direction for the thermal responses of the composite. The equivalent material properties are obtained using Halphin-Tsai nano-mechanical model for composite layers. Moreover, the effects of nano-scale sizes are taken into account, employing functionally modified couple stress (FMCS) parameter. In this regard, for the first time, it is demonstrated that at certain values of GPL weight fraction, thermal buckling occurs. In obtaining results of vibrational behavior, both analytical solution and deep neural network (DNN) methods are used. The DNN method needs low computational costs to predict the resonance behavior. A comprehensive parametric study is conducted to indicate the effects of several geometrical, material, and loading conditions on the vibrational and buckling behavior of cylindrical shell structures made of GPL-nanocomposites. It is shown that the effect of temperature change on the occurrence of buckling is vital while it has a negligible impact on the resonance frequency of the structure. Moreover, the size-dependency of the results is demonstrated, and it cannot be neglected in nano-scales.

• Advances in nano research
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• 제4권3호
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• pp.197-228
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• 2016

In the present study, thermo-electro-mechanical vibration characteristics of functionally graded piezoelectric (FGP) Timoshenko nanobeams subjected to in-plane thermal loads and applied electric voltage are carried out by presenting a Navier type solution for the first time. Three kinds of thermal loading, namely, uniform, linear and non-linear temperature rises through the thickness direction are considered. Thermo-electro-mechanical properties of FGP nanobeam are supposed to vary smoothly and continuously throughout the thickness based on power-law model. Eringen's nonlocal elasticity theory is exploited to describe the size dependency of nanobeam. Using Hamilton's principle, the nonlocal equations of motion together with corresponding boundary conditions based on Timoshenko beam theory are obtained for the free vibration analysis of graded piezoelectric nanobeams including size effect and they are solved applying analytical solution. According to the numerical results, it is revealed that the proposed modeling can provide accurate frequency results of the FGP nanobeams as compared to some cases in the literature. In following a parametric study is accompanied to examine the effects of several parameters such as various temperature distributions, external electric voltage, power-law index, nonlocal parameter and mode number on the natural frequencies of the size-dependent FGP nanobeams in detail. It is found that the small scale effect and thermo-electrical loading have a significant effect on natural frequencies of FGP nanobeams.

• Advances in nano research
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• 제6권4호
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• pp.377-397
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• 2018

In the present investigation, thermal buckling and free vibration characteristics of functionally graded (FG) Timoshenko nanobeams subjected to nonlinear thermal loading are carried out by presenting a Navier type solution. The thermal load is assumed to be nonlinear distribution through the thickness of FG nanobeam. Thermo-mechanical properties of FG nanobeam are supposed to vary smoothly and continuously throughout the thickness based on power-law model and the material properties are assumed to be temperature-dependent. Eringen's nonlocal elasticity theory is exploited to describe the size dependency of nanobeam. Using Hamilton's principle, the nonlocal equations of motion together with corresponding boundary conditions based on Timoshenko beam theory are obtained for the thermal buckling and vibration analysis of graded nanobeams including size effect. Moreover, in following a parametric study is accompanied to examine the effects of the several parameters such as nonlocal parameter, thermal effect, power law index and aspect ratio on the critical buckling temperatures and natural frequencies of the size-dependent FG nanobeams in detail. According to the numerical results, it is revealed that the proposed modeling can provide accurate frequency results of the FG nanobeams as compared some cases in the literature. Also, it is found that the small scale effects and nonlinear thermal loading have a significant effect on thermal stability and vibration characteristics of FG nanobeams.

• Steel and Composite Structures
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• 제34권5호
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• pp.657-670
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• 2020

In this paper, vibration analysis of functionally graded nanoshell is studied based on the sinusoidal higher-order shear and normal deformation theory to account thickness stretching effect. To account size-dependency, Eringen nonlocal elasticity theory is used. For more accurate modeling the problem and corresponding numerical results, sinusoidal higher-order shear and normal deformation theory including out of plane normal strain is employed in this paper. The radial displacement is decomposed into three terms to show variation along the thickness direction. Governing differential equations of motion are derived using Hamilton's principle. It is assumed that the cylindrical shell is made of an arbitrary composition of metal and ceramic in which the local material properties are measured based on power law distribution. To justify trueness and necessity of this work, a comprehensive comparison with some lower order and lower dimension works and also some 3D works is presented. After presentation of comparative study, full numerical results are presented in terms of significant parameters of the problem such as small scale parameter, length to radius ratio, thickness to radius ratio, and number of modes.