• Journal of Electrical Engineering and Technology
• /
• v.12 no.5
• /
• pp.2007-2013
• /
• 2017

In order to give hydrophobic surface properties on carbon steel, the fluorinated amorphous carbon films were prepared by using linear 2.45GHz microwave PECVD device. Two different process approaches have been tested. One is direct deposition of a-C:H:F films using admixture of $Ar/CH_4/CF_4$ working gases and the other is surface treatment using $CF_4$ plasma after deposition of a-C:H film with $Ar/CH_4$ binary gas system. $Ar/CF_4$ plasma treated surface with high $CF_4$ gas ratio shows best hydrophobicity and durability of hydrophobicity. Nanometer scale surface roughness seems one of the most important factors for hydrophobicity within our experimental conditions. The properties of a-C:H:F films and $CF_4$ plasma treated a-C:H films were investigated in terms of surface roughness, hardness, microstructure, chemical bonding, atomic bonding structure between carbon and fluorine, adhesion and water contact angle by using atomic force microscopy (AFM), nano-indentation, Raman analysis and X-ray photoelectron spectroscopy (XPS).

• Journal of the Korean Vacuum Society
• /
• v.21 no.1
• /
• pp.36-40
• /
• 2012

We have developed the detection method of the resonance frequency of micro/nano mechanical resonator using optical method. The optical interferometery method enabled us to detect the displacement change of resonators within several nm scale. The micro mechanical resonator was produced by attaching a micro mechanical cantilever to a piezo ceramic. The mass of cantilever was increased by evaporating Au using electron beam evaporator and the mass variation was estimated by detecting the resonance frequency changes.

• Journal of the Microelectronics and Packaging Society
• /
• v.31 no.3
• /
• pp.18-23
• /
• 2024

Nanoimprint lithography (NIL) is widely used to form structures ranging from micro to nanoscale due to its advantage of generating high-resolution patterns at a low process cost. However, most NIL processes require the use of imprint resists and external elements such as ultraviolet light or heat, necessitating additional post-processes like etching or metal deposition to pattern the target material. Furthermore, patterning on flexible and/or non-planar films presents significant challenges. This study introduces an extreme pressure imprint lithography (EPIL) process that can form micro-/nano-scale patterns on the surface of a flexible rubber magnet composite (RMC) film at room temperature without an etching process. The EPIL technique can form ultrafine structures over large areas through the plastic deformation of various materials, including metals, polymers, and ceramics. In this study, we demonstrate the process and outcomes of creating a variety of periodic structures with diverse pattern sizes and shapes on the surface of a flexible RMC composed of strontium ferrite and chlorinated polyethylene. The EPIL process, which allows for the precise patterning on the surface of RMC materials, is expected to find broad applications in the production of advanced electromagnetic device components that require fine control and changes in magnetic orientation.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
• /
• v.35 no.6
• /
• pp.639-646
• /
• 2022

Energy harvesting technologies that can convert wasted various energy into usable electrical energy have been widely investigated to overcome the limitation of batteries for the powering of IoT sensors and small electronic devices. Hybrid energy harvesting is known as a technology that enhances the output power of single energy harvesting device by housing two or more various energy harvesting mechanisms. In this study, we introduce a hybrid MME (Magneto-Mechano-Electric) generator coupled with the triboelectric effect. Through FEA modeling, four triboelectric materials, including PI (Polyimide), PFA(Teflon), Cu, and Al, were selected and compared with the expected triboelectric potentials. The effect of surface morphology was investigated as well. Among various combination of triboelectric materials and surface morphologies, PFA-Al combination with the surface morphology having nano-scale square projections showed highest output potential under triboelectrification. It is also experimentally confirmed that output voltage and power of the hybrid MME generator with triboelectric material combinations.