• Title/Summary/Keyword: nano-pattern

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Fabrication of Anodic Aluminum Oxide on Si and Sapphire Substrate (실리콘 및 사파이어 기판을 이용한 알루미늄의 양극산화 공정에 관한 연구)

  • Kim Munja;Lee Jin-Seung;Yoo Ji-Beom
    • Korean Journal of Materials Research
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    • v.14 no.2
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    • pp.133-140
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    • 2004
  • We carried out anodic aluminum oxide (AAO) on a Si and a sapphire substrate. For anodic oxidation of Al two types of specimens prepared were Al(0.5 $\mu\textrm{m}$)!Si and Al(0.5 $\mu\textrm{m}$)/Ti(0.1 $\mu\textrm{m}$)$SiO_2$(0.1 $\mu\textrm{m}$)/GaN(2 $\mu\textrm{m}$)/Sapphire. Surface morphology of Al film was analyzed depending on the deposition methods such as sputtering, thermal evaporation, and electron beam evaporation. Without conventional electron lithography, we obtained ordered nano-pattern of porous alumina by in- situ process. Electropolishing of Al layer was carried out to improve the surface morphology and evaluated. Two step anodizing was adopted for ordered regular array of AAO formation. The applied electric voltage was 40 V and oxalic acid was used as an electrolyte. The reference electrode was graphite. Through the optimization of process parameters such as electrolyte concentration, temperature, and process time, a regular array of AAO was formed on Si and sapphire substrate. In case of Si substrate the diameter of pore and distance between pores was 50 and 100 nm, respectively. In case of sapphire substrate, the diameter of pore and distance between pores was 40 and 80 nm, respectively

Fabrication of Thick Film Capacitors with Printing Technology (인쇄기법을 이용한 후막 캐패시터 제작)

  • Lee, Hye-Mi;Shin, Kwon-Yong;Kang, Hyung-Tae;Kang, Heui-Seok;Hwang, Jun-Young;Park, Moon-Soo;Lee, Sang-Ho
    • Proceedings of the KIEE Conference
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    • 2007.11a
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    • pp.100-101
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    • 2007
  • Polymer thick film capacitors were successfully fabricated by using ink-jet printing and screen printing technology. First, a bottom electrode was patterned by ink-jet printing of a nano-sized silver ink. Next, a dielectric layer was formed by the screen printing, then a top electrode was pattern by ink-jet printing of a nano-sized silver ink. The printed area of the dielectric layers were changed into $2{\times}2m^2$and $4{\times}2m^2$, and also the area of the electrodes were patterned with $1{\times}1mm^2$ and $1{\times}3mm^2$. The thickness of the printed dielectric layer was ranged from 1.1 to $1.4{\mu}m$. The analysis of capacitances verified that the capacitances was proportional to the area of the printed electrode. The capacitances of the fabricated capacitors resulted in one third of the calculated capacitances.

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A Study of the Silicon Mold Surface Treatment Using CHF3 Plasma for Nano Imprint Lithography (나노임프린트 리소그래피 적용을 위한 CHF3 플라즈마를 이용한 실리콘 몰드 표면 처리 특성)

  • Kim, Young-Keun;Kim, Jae-Hyun;You, Ban-Seok;Jang, Ji-Su;Kwon, Kwang-Ho
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.24 no.10
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    • pp.790-793
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    • 2011
  • In this study, the surface modification for a silicon(Si) mold using $CHF_3$ inductively coupled plasma(ICP). The conditions under that plasma was treated a input ICP power 600 W, an operating gas pressure of 10 mTorr and plasma exposure time of 30 sec. The Si mold surface became hydrophobic after plasma treatment in order to $CF_x$(X= 1,2,3) polymer. However, as the de-molding process repeated, it was investigated that the contact angle of Si surface was decreased. So, we attempted to investigate the degradation mechanism of the accurate pattern transfer with increasing the count of the de-molding process using scanning electron microscope (SEM), contact angle, and x-ray photoelectron spectroscopy (XPS) analysis of Si mold surface.

A study on Creep of Plate PMMA in Thermal-Nanoindentation Process for Hyperfine pit structure Fabrication (극미세 점 구조체 제작을 위한 열간나노압입 공정에서의 평판형 PMMA의 크립현상에 관한 연구)

  • Lee, E.K.;Jung, Y.N.;Kang, C.G.
    • Proceedings of the Korean Society for Technology of Plasticity Conference
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    • 2008.05a
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    • pp.273-276
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    • 2008
  • Thermoplastic resin takes place stress relaxation and creep according to temperature and time. In room temperature, time dependent deformation (TDD) of polymer was carried out at previous study. In this study, it evaluates time dependent deformation to relate temperature. Nanoscale indents can be used as cells for molecular electronics and drug delivery, slots for integration into nanodevices, and defects for tailoring the structure and properties. Therefore, it is important to control pattern depth for change of indent depth by creep when using Nanoindenter. For evaluating TDD at high temperature, it is occurred thermal-nanoindentation test by changing hold time at maximum load. Temperature is putted at $90^{\circ}C$, hold time at maximum loads are putted at 1, 10, 50, 100, 200, 300 and 500s.

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The Characterization of Nano-Nickel Catalyst with High Activity by Mechanochemical (MC) Method I. Microstructure of MA Ni-50wt% Al and Preparation of Nano-Ni (기계.화학적 방법으로 제조된 고활성 나노-니켈 촉매의 특성 I. MA된 Ni-50wt% Al 합금의 미세구조 및 나노 촉매 제조)

  • Lee, Chang-Rae;Choe, Jae-Ung;Gang, Seong-Gun
    • Korean Journal of Materials Research
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    • v.9 no.6
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    • pp.615-621
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    • 1999
  • The new process in order to fabricate of Ni catalyst with high activity by the mechanochemical(MC) method which was combined the mechanical alloying(MA) and the chemical treatment process. The microstructure and characterization of mechanically alloyed Ni-5-wt% Al powder and Ni catalyst gained by alkali leaching were investigated byt he various analysis such as XRD, SEM-EDS, HRTEM and laser particle analyzer. The steady state powder with 1~2$\mu\textrm{m}$ mean particle size was obtained after 30hr milling with the PCA of 2 wt% stearic acid under the condition of grinding stainless steel ball to powder ratio of 60:1 and rotating speed fo 300rpm. According to result of HRTEM diffraction pattern, MA powder of the steady state was nanocrystalline $Al_3$$Ni_2$ intermetallic compound. Ni catalyst was obtained after KOH leaching of the steady state powder was about 20nm nanocrystalline which contained about 8 wt % Al.

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Effect of $Ga^+$ Ion Beam Irradiation On the Wet Etching Characteristic of Self-Assembled Monolayer ($Ga^+$ 이온 빔 조사량에 따른 자기 조립 단분자막의 습식에칭 특성)

  • Noh Dong-Sun;Kim Dea-Eun
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.326-329
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    • 2005
  • As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

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Employing GDQ method for exploring undamped vibrational performance of CNT-reinforced porous coupled curved beam

  • Moein A. Ghandehari;Amir R. Masoodi
    • Advances in nano research
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    • v.15 no.6
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    • pp.551-565
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    • 2023
  • Coupled porous curved beams, due to their low weight and high flexibility, have many applications in engineering. This study investigates the vibration behavior of coupled porous curved beams in different boundary conditions. The system consists of two curved beams connected by a mid-layer of elastic springs. These beams are made of various materials, such as homogenous steel foam, and composite materials with PMMA (polymethyl methacrylate) and SWCNT (single-walled carbon nanotube) used as the matrix and nanofillers, respectively. To obtain equivalent material properties, the role of mixture (RoM) was employed, followed by the implementation of the porosity function. The system's governing equations were obtained by employing FSDT and Hamilton's law. To investigate thermal vibration, temperature was implemented as a load in the governing equations. The GDQ method was used to solve these equations. To demonstrate the applicability of the GDQ method in calculating the frequencies of the system and the correctness of the developed program, a validation study was conducted. After validation, numerous examples were presented to investigate the behavior of single and coupled curved beams in various material properties and boundary conditions. The results indicate that the frequencies of the curved beams and the system depend highly on the amount of porosity (n) and the distribution pattern. The system frequencies decreased with an increase in the porosity coefficient. The stiffness of the springs had no effect on the first mode frequency but increased frequencies of other modes in a specific range. The frequencies of the system decreased with an increase in environmental temperature.

A Precipitation Behavior of Nano-Oxide Particles in Mechanically Alloyed Fe-5Y2O3 Powders (기계적 합금화하여 제조한 Fe-5Y2O3 합금분말의 나노산화물 석출거동)

  • Kim, Ga Eon;Noh, Sanghoon;Choi, Ji Eun;Kim, Young Do;Kim, Tae Kyu
    • Journal of Powder Materials
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    • v.22 no.1
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    • pp.46-51
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    • 2015
  • A precipitation behavior of nano-oxide particle in Fe-$5Y_2O_3$ alloy powders is studied. The mechanically alloyed Fe-$5Y_2O_3$ powders are pressed at $750^{\circ}C$ for 1h, $850^{\circ}C$ for 1h and $1150^{\circ}C$ for 1h, respectively. The results of Xray diffraction pattern analysis indicate that the $Y_2O_3$ diffraction peak disappear after mechanically alloying process, but $Y_2O_3$ and $YFe_2O_4$ complex oxide precipitates peak are observed in the powders pressed at $1150^{\circ}C$. The differential scanning calorimetry study results reveal that the formation of precipitates occur at around $1054^{\circ}C$. Based on the transmission electron microscopy analysis result, the oxide particles with a composition of Y-Fe-O are found in the Fe-$5Y_2O_3$ alloy powders pressed at 1150oC. It is thus conclude that the mechanically alloyed Fe-$5Y_2O_3$ powders have no precipitates and the oxide particles in the powders are formed by a high temperature heat-treatment.

Nano-Composite's Mechanical and Radioactive Barrier Characteristics by Nano Size CNT & Graphite Particles Alignment (CNT와 Graphite 나노/마이크로 입자 배열에 의한 나노복합재의 제작과 기계적 강성 및 방사능 차폐 특성 평가)

  • Cho, Hee-Keun
    • Composites Research
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    • v.26 no.6
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    • pp.355-362
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    • 2013
  • Carbon particle based nanocomposites have been studied. Nanocomposites containing CNT and graphite particles were manipulated by aligning the micro/nano-size particles with electric field. Electric field is applied to the suspension of epoxy matrix and particulate inclusions in order to align them along the direction of the electric field. Particles aligned in a uniform direction act as a fiber in a CFRP composite. The mechanical strength and physical characteristics highly depend on particles' distribution pattern and amount. In this study, the characteristics of radioactive barrier are emphasized, which has been rarely discussed in the literature. A number of sample coupons were tested to verify their performance. The procedure of manufacturing nanocomposites by means of extremely small size particle alignment is presented in sequence. Several physical and structural performances of composites containing aligned and randomly distributed particles were compared. The results show particle alignment is very effective to enhance directional strength and radioactive barrier performance.

Synthesis and Characterization of Fe Doped TiO2 Nanoparticles by a Sol-Gel and Hydrothermal Process

  • Kim, Hyun-Ju;Jeong, Kwang-Jin;Bae, Dong-Sik
    • Korean Journal of Materials Research
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    • v.22 no.5
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    • pp.249-252
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    • 2012
  • Fe doped $TiO_2$ nanoparticles were prepared under high temperature and pressure conditions by mixture of metal nitrate solution and $TiO_2$ sol. Fe doped $TiO_2$ particles were reacted in the temperature range of 170 to $200^{\circ}C$ for 6 h. The microstructure and phase of the synthesized Fe doped $TiO_2$ nanoparticles were studied by SEM (FE-SEM), TEM, and XRD. Thermal properties of the synthesized Fe doped $TiO_2$ nanoparticles were studied by TG-DTA analysis. TEM and X-ray diffraction pattern shows that the synthesized Fe doped $TiO_2$ nanoparticles were crystalline. The average size and distribution of the synthesized Fe doped $TiO_2$ nanoparticles were about 10 nm and narrow, respectively. The average size of the synthesized Fe doped $TiO_2$ nanoparticles increased as the reaction temperature increased. The overall reduction in weight of Fe doped $TiO_2$ nanoparticles was about 16% up to ${\sim}700^{\circ}C$; water of crystallization was dehydrated at $271^{\circ}C$. The transition of Fe doped $TiO_2$ nanoparticle phase from anatase to rutile occurred at almost $561^{\circ}C$. The amount of rutile phase of the synthesized Fe doped $TiO_2$ nanoparticles increased with decreasing Fe concentration. The effects of synthesis parameters, such as the concentration of the starting solution and the reaction temperature, are discussed.