• 제목/요약/키워드: nano-morphology

검색결과 681건 처리시간 0.029초

기계적 가공과 무전해 선택적 증착기술을 이용한 나노/마이크로 금속패턴 제작에 관한 연구 (A Study on Nano/micro Pattern Fabrication of Metals by Using Mechanical Machining and Selective Deposition Technique)

  • 조상현;윤성원;강충길
    • 한국정밀공학회:학술대회논문집
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    • 한국정밀공학회 2005년도 춘계학술대회 논문집
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    • pp.1507-1510
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    • 2005
  • This study was carried out as a part of the research on the development of a maskless and electroless process for fabricating metal micro/nanostructures by using a nanoindenter and an electroless deposition technique. $2-\mu{m}-deep$ indentation tests on Ni and Cu samples were performed. The elastic recovery of the Ni and Cu was 9.30% and 9.53% of the maximum penetration depth, respectively. The hardness and the elastic modulus were 1.56 GPa and 120 GPa for Ni and 1.49 GPa and 100 GPa for Cu. The effect of single-point diamond machining conditions such as the Berkovich tip orientation (0, 45, and $90^{\circ}$) and the normal load (0.1, 0.3, 0.5, 1, 3, and 5 mN), on both the deformation behavior and the morphology of cutting traces (such as width and depth) was investigated by constant-load scratch tests. The tip orientation had a significant influence on the coefficient of friction, which varied from 0.52-0.66 for Ni and from 0.46-0.61 for Cu. The crisscross-pattern sample showed that the tip orientation strongly affects the surface quality of the machined area during scratching. A selective deposition of Cu at the pit-like defect on a p-type Si(111) surface was also investigated. Preferential deposition of the Cu occurred at the surface defect sites of silicon wafers, indicating that those defect sites act as active sites for the deposition reaction. The shape of the Cu-deposited area was almost the same as that of the residual stress field.

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식물잎의 표면형상 및 마이크로-스케일에서의 마찰 특성 (Surface Characteristics and Micro-Scale Friction Property of Natural Surface)

  • 윤의성;김홍준;아르빈드싱;김진석
    • Tribology and Lubricants
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    • 제22권5호
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    • pp.237-242
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    • 2006
  • Surfaces found in nature, including biological surfaces have been providing inspiration to modify/fabricate artificial surfaces as solutions for tribological applications. As an example, the concept of 'lotus-effect' has motivated tribologists world wide to modify/fabricate surfaces for enhanced tribological performance. These was done by creating nano/micro-scale asperities on various surfaces using ion beam milling and ion-beam assisted roughening. In order to understand the attributes of natural surfaces, which are inspirational to tribologists, we characterized the surface of two natural surfaces-Nelumbo nucifera (lotus) and Colocasia esculenta leaves. Further, we evaluated their micro-scale friction property, both in their fresh and dried conditions. The characterization of surfaces was conducted using a confocal microscope and SEM, which involved the evaluation of size and distribution of protuberances. The micro-scale friction property was evaluated using a ball-on-flat type micro-tribo tester, under reciprocating motion. A soda lime glass ball (2 mm diameter) was used in these tests. Tests were conducted at the applied normal load of $3000{\mu}N$, at a sliding speed of 1 mm/sec for a scan length of 3 mm. All experiments were conducted at ambient temperature ($24{\pm}1^{\circ}C}$) and relative humidity ($45{\pm}5%$). It was observed that the friction behaviour of the natural surfaces was influenced by their surface characteristics (morphology and distribution of protuberances) and also by the condition (fresh or dried) in which they were tested.

${CH_4}-{H_2}-{N_2}$ 기체계에서 MW-PACVD를 이용한 결정상 합성 (Synthesis of Crystalline film from ${CH_4}-{H_2}-{N_2}$ gases with MW-PACVD)

  • 김도근;백영준;성태연
    • 한국재료학회지
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    • 제10권9호
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    • pp.648-655
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    • 2000
  • 다이아몬드 합성 조건에서 질소 첨가량은 0%에서 95%까지 변화하였을 때의 합성 거동을 조사하였다. 질소 첨가량이 증가함에 따라 합성된 상은 {100} 성장면으로 이루어진 다이아몬드 막에서 고유의 결정면이 사라지고 나조 크기의 결정들로 이루어진 다이아몬 막으로 변화하였다. 심지어 수소가 없어 메탄과 질소만의 경우에서도 다이아몬드 막 합성이 가능함을 보여주었다. 또한 다이아몬드 구조를 갖는 개별적 입자의 형태는 30%∼80% 질소 첨가범위에서 정팔면체의 결정모양을 가졌고, 이 범위에서 기판온도가 증가함에 따라 육방정 모양의 새로운 결정상을 관찰하였다. 다이아몬드 막의 경우 질소, 첨가량에 무관하게 질소 혼입향은 측정되지 않을 만큼 적었지만, 육방정 결정상은 Si, C 그리고 N으로 이루어진 SiCN화합물임을 확인하였다.

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초음파 분무 열 분해법을 통해 제조된 불소 도핑 된 주석 산화물 나노 입자의 전기화학적 특성 (Electrochemical Properties of Fluorine-Doped Tin Oxide Nanoparticles Using Ultrasonic Spray Pyrolysis)

  • 이도영;이정욱;안건형;류도형;안효진
    • 한국재료학회지
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    • 제26권5호
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    • pp.258-265
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    • 2016
  • Fluorine-doped tin oxide (FTO) nanoparticles have been successfully synthesized using ultrasonic spray pyrolysis. The morphologies, crystal structures, chemical bonding states, and electrochemical properties of the nanoparticles are investigated. The FTO nanoparticles show uniform morphology and size distribution in the range of 6-10 nm. The FTO nanoparticles exhibit excellent electrochemical performance with high discharge specific capacity and good cycling stability ($620mAhg^{-1}$ capacity retention up to 50 cycles), as well as excellent high-rate performance ($250mAhg^{-1}$ at $700mAg^{-1}$) compared to that of commercial $SnO_2$. The improved electrochemical performance can be explained by two main effects. First, the excellent cycling stability with high discharge capacity is attributed to the nano-sized FTO particles, which are related to the increased electrochemical active area between the electrode and electrolyte. Second, the superb high-rate performance and the excellent cycling stability are ascribed to the increased electrical conductivity, which results from the introduction of fluorine doping in $SnO_2$. This noble electrode structure can provide powerful potential anode materials for high-performance lithiumion batteries.

Improved Conductivities of SWCNT Transparent Conducting Films on PET by Spontaneous Reduction

  • 민형섭;김상식;이전국
    • 한국재료학회:학술대회논문집
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    • 한국재료학회 2011년도 추계학술발표대회
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    • pp.43.2-43.2
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    • 2011
  • Single-walled carbon nanotubes (SWCNT) are transparent in the visible and show conductivity comparable to copper, and are environmentally stable. SWCNT films have high flexibility, conductivity and transparency approaching that indium tin oxide (ITO), and can be prepared inexpensively without vacuum equipment. Transparent conducting Films (TCF) of SWCNTs has the potential to replace conventional transparent conducting oxides (TCO, e.g. ITO) in a wide variety of optoelectronic devices, energy conversion and photovoltaic industry. However, the sheet resistance of SWCNT films is still higher than ITO films. A decreased in the resistivity of SWCNT-TCFs would be beneficial for such an application. We fabricated SWCNT sheet with $KAuBr_4$ on PET substrate. Arc-discharge SWCNTs were dispersed in deionized water by adding sodum dodecyl sulfate (SDS) as surfactant and sonicated, followed by the centrifugation. The dispersed SWCNT was spray-coated on PET substrate and dried on a hotplate at $100^{\circ}C$. When the spray process was terminated, the TCF was immersed into deionized water to remove the surfactant and then it was dried on hotplate. The TCF film was then treated with AuBr4-, rinsed with deionized water and dried. The surface morphology of TCF was characterized by field emission scanning electron microscopy. The sheet resistance and optical transmission properties of the TCF were measured with a four-point probe method and a UV-visible spectrometry, respectively. $HNO_3$ treated SWCNT films with Au nano-particles have the lowest 61 ${\Omega}$/< sheet resistance in the 80% transmittance. Sheet resistance was decreased due to the increase of the hole concentration at the washed SWCNT surface by p-type doping of $AuBr_4{^-}$.

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갈륨비소-탄소나노튜브 복합체 제작과 전계방출특성 (GaAs-Carbon Nanotubes Nanocomposite: Synthesis and Field-Emission Property)

  • 임현철;찬드라세카;장동미;안세용;정혁;김도진
    • 한국재료학회지
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    • 제20권4호
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    • pp.199-203
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    • 2010
  • Hybridization of semiconductor materials with carbon nanotubes (CNTs) is a recent field of interest in which new nanodevice fabrication and applications are expected. In this work, nanowire type GaAs structures are synthesized on porous single-wall carbon nanotubes (SWCNTs) as templates using the molecular beam epitaxy (MBE) technique. The field emission properties of the as-synthesized products were investigated to suggest their potential applications as cold electron sources, as well. The SWCNT template was synthesized by the arc-discharge method. SWCNT samples were heat-treated at $400^{\circ}C$ under an $N_2/O_2$ atmosphere to remove amorphous carbon. After heat treatment, GaAs was grown on the SWCNT template. The growth conditions of the GaAs in the MBE system were set by changing the growth temperatures from $400^{\circ}C$ to $600^{\circ}C$. The morphology of the GaAs synthesized on the SWCNTs strongly depends on the substrate temperature. Namely, nano-crystalline beads of GaAs are formed on the CNTs under $500^{\circ}C$, while nanowire structures begin to form on the beads above $600^{\circ}C$. The crystal qualities of GaAs and SWCNT were examined by X-ray diffraction and Raman spectra. The field emission properties of the synthesized GaAs nanowires were also investigated and a low turn-on field of $2.0\;V/{\mu}m$ was achieved. But, the turn-on field was increased in the second and third measurements. It is thought that arsenic atoms were evaporated during the measurement of the field emission.

PAD법으로 제작된 산화코발트-산화주석 복합체의 가스 감응 특성 (Cobalt Oxide-Tin Oxide Composite: Polymer-Assisted Deposition and Gas Sensing Properties)

  • 안세용;이위;장동미;정혁;김도진
    • 한국재료학회지
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    • 제20권11호
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    • pp.611-616
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    • 2010
  • A cobalt oxide - tin oxide nanocomposite based gas sensor on an $SiO_2$ substrate was fabricated. Granular thin film of tin oxide was formed by a rheotaxial growth and thermal oxidation method using dc magnetron sputtering of Sn. Nano particles of cobalt oxide were spin-coated on the tin oxide. The cobalt oxide nanoparticles were synthesized by polymer-assisted deposition method, which is a simple cost-effective versatile synthesis method for various metal oxides. The thickness of the film can be controlled over a wide range of thicknesses. The composite structures thus formed were characterized in terms of morphology and gas sensing properties for reduction gas of $H_2$. The composites showed a highest response of 240% at $250^{\circ}C$ upon exposure to 4% $H_2$. This response is higher than those observed in pure $SnO_2$ (90%) and $Co_3O_4$ (70%) thin films. The improved response with the composite structure may be related to the additional formation of electrically active defects at the interfaces. The composite sensor shows a very fast response and good reproducibility.

Synthesis and Properties of Exfoliated Poly(methyl methacrylate-co-acrylonitrile)/Clay Nanocomposites via Emulsion Polymerization

  • Mingzhe Xu;Park, Yeong-Suk;Wang, Ki-Hyun;Kim, Jong-Hyun;Chung, In-Jae
    • Macromolecular Research
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    • 제11권6호
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    • pp.410-417
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    • 2003
  • Poly(methyl methacrylate-co-acrylonitrile) [P(MMA-co-AN)]/Na-MMT nanocomposites were synthesized through emulsion polymerization with pristine Na-MMT. The nanocomposites were exfoliated up to 20 wt% content of pristine Na-MMT relative to the amount of MMA and AN, and exhibited enhanced storage moduli, E', relative to the neat copolymer. The exfoliated morphology of the nanocomposite was confirmed by XRD and TEM. 2-Acryla-mido-2-methyl-1-propane sulfonic acid (AMPS) widened the galleries between the clay layers before polymerization and facilitated the comonomers, penetration into the clay to create the exfoliated nanocomposites. The onset of the thermal decomposition of the nanocomposites shifted to a higher temperature as the clay content increased. By calculating areas of tan$\delta$ of the nanocomposites, we observed that the nanocomposites show more solid-like behavior as the clay content increases. The dynamic storage modulus and complex viscosity increased with clay content. The complex viscosity showed shear-thinning behavior as the clay content increased. The Young's moduli of the nano-composites are higher than that of the neat copolymer and they increase steadily as the silicate content increases, as a result of the exfoliated structure at high clay content.

리파아제가 함입된 락타이드-글리콜라이드 공중합체 나노입자의 제조 및 특성 (Formulation and Characterization of Lipase Loaded Poly(D,L - lactide-co-glycolide) Nanoparticles)

  • 김범수;ZEROUAL Y;이강민
    • 폴리머
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    • 제31권1호
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    • pp.20-24
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    • 2007
  • 제조과정에서 단백질 약물의 생물학적 활성의 보존은 약물의 성공적인 전달에 있어 여전히 중요한 과제이다. 이중에멀션 유기용매 증발법을 사용하여 나노입자를 제조하였고, 입자의 형태, 크기, 함입률 그리고 방출속도와 방출되는 효소의 활성을 살펴보았다. 입자의 크기는 고분자인 락타이드 글리콜라이드 공중합체의 농도가 증가할수록 커졌으며, 유화제의 농도에는 큰 차이가 없었으나, 4% PVA의 사용에서 가장 좁은 입자분포를 얻을 수 있었다. 최적의 조건에서 72.6%의 단백질 함입률과 $198.3{\pm}13.8 nm$ 크기의 나노입자를 얻었다. 입자로부터 효소의 방출은 첫 방출시기에 매우 빠르게 일어났으며 12일 내에 83%가 방출되었다. 이에 따른 방출되는 효소의 활성은 6일째까지 증가되었다.

CMP 공정에서 슬러리와 웨이퍼 형상이 SiC 웨이퍼 표면품질에 미치는 영향 (The Effect of Slurry and Wafer Morphology on the SiC Wafer Surface Quality in CMP Process)

  • 박종휘;양우성;정정영;이상일;박미선;이원재;김재육;이상돈;김지혜
    • 한국세라믹학회지
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    • 제48권4호
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    • pp.312-315
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    • 2011
  • The effect of slurry composition and wafer flatness on a material removal rate (MRR) and resulting surface roughness which are evaluation parameters to determine the CMP characteristics of the on-axis 6H-SiC substrate were systematically investigated. 2-inch SiC wafers were fabricated from the ingot grown by a conventional physical vapor transport (PVT) method were used for this study. The SiC substrate after the CMP process using slurry added oxidizers into slurry consisted of KOH-based colloidal silica and nano-size diamond particle exhibited the significant MRR value and a fine surface without any surface damages. SiC wafers with high bow value after the CMP process exhibited large variation in surface roughness value compared to wafer with low bow value. The CMPprocessed SiC wafer having a low bow value of 1im was observed to result in the Root-mean-square height (RMS) value of 2.747 A and the mean height (Ra) value of 2.147 A.