• Journal of the Korean institute of surface engineering
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• v.47 no.2
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• pp.68-74
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• 2014

The seed step-coverage enhancement process (SSEP) using Pd/Cu/PVP colloids was investigated for the filling of through silicon via (TSV) without void. TEM analysis showed that the Pd/Cu nano-particles were well dispersed in aqueous solution with the average diameter of 6.18 nm. This Pd/Cu nano-particles were uniformly deposited on the substrate of Si/$SiO_2$/Ti wafer using electrophoresis with the high frequency Alternating Current (AC). After electroless Cu deposition on the substrate treated with Pd/Cu/PVP colloids, the adhesive property between deposited Cu layer and substrate was evaluated. The Cu deposit obtained by SSEP with Pd/Cu/PVP colloids showed superior adhesion property to that on Pd ion catalyst-treated substrate. Finally, by implementing the SSEP using Pd/Cu/PVP colloids, we achieved 700% improvement of step coverage of Cu seed layer compared to PVD process, resulting in void-free filling in high aspect ratio TSV.

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.11a
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• pp.143-143
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• 2003

최근 생활수준 및 생활환경의 향상에 힘입어 청결 및 쾌적을 추구하는 것이 사회적 현상으로 나타나고 있다. 요즘처럼 현대화된 시대에 '왜 항균제가 필요한 것일까' 라는 자연스러운 의문이 발생하게 되지만 현실은 항균제를 이용한 다양한 항균제품, 항균가전제품, 항균가공 내ㆍ건자재 및 항상 신선한 선도를 유지할 수 있는 제품 등이 호황을 누리고 있는 것이 현실이며 그 시장 규모는 3,000억원을 상회하고 있다. 이러한 항균 가공제품이 호평을 받는 사회적 배경은 우리를 둘러싼 주변 삶의 경제환경 신장에 따른 쾌적성 추구와 밀접한 관련이 있을 것이다. 이처럼 항균기능이 부여된 제품이 호평을 받고 있음에도 불구하고 국내에서는 항균제품의 주 기능 역할을 하는 항균제에 대한 개발은 초기단계로 국내 시장에서 많은 연구가 이루어지고 있는 실정이다. 국내의 경우, 유기 항균제의 사용이 전체 사용량의 80%를 차지하고 있고, 제올라이트나 인산염을 무기 담체로 항균성 금속 이온(Ag, Zn)을 물리적으로 결합시킨 무기 항균제가 개발된 것이 최근의 기술 수준이다. 이러한 유기 항균제는 미생물의 번식을 억제 또는 사멸시키기 위한 것이지만, 생체의 피부 세포에도 영향을 줄 수 있는 피부 자극원의 하나로 그 사용이 점차로 제한되고 있다. 무기 항균제는 안정성이나 항균력에서는 유기항균제 보다는 뛰어나지만 가격(경제성)이나 색(Color), 사용성 (Application)측면에서는 여러 가지 문제를 나타내고 있다. 귀금속이므로 가격이 고가이며, 금속고유의 색으로 회귀하려는 플라즈몬 효과에 의해 색(Color)의 조절이 불가능, 분말형태이므로 지류에 첨가시키는 방법 등이 큰 문제로 부각되고 있다. 이 러한 문제점을 해결할 수 있는 기술이 나노기술이다 나노기술(Nano-Technology)은 물질을 분자, 원자단위에서 규명하고 제어하는 기술로서 원자, 분자를 적절히 결합시킴으로서 기존 물질의 변형, 개조는 물론 신물질의 창출을 가능케 하는 기술이다. 나노기술은 여러분야로 세분화되지만 그중 산업화에 가장 접목이 용이한 기술이 나노입자(Nano-Particle)제어 기술이며, 나노입자는 통상적으로 입자크기가 수 nm에서 100nm이하 크기의 넓은 표면적을 가진 콜로이드 상의 불균일 분산입자를 말한다. 나노입자(Nano-Particle)는 기존의 입자($\mu\textrm{m}$)보다 물리적 및 광학적 성질이 우수하고 그 자체의 기능면에서도 탁월하기 때문에 국내외의 여러 산업에서도 기존제품의 품질 향상 및 기능성부여, 기존 공정의 개선 및 생산 원단위 절감 등 경제적, 생산적인 측면을 고려하여 적합한 나노입자를 채택, 적용하고자 하는데 많은 노력을 기울이고 있다. 이에 천연 항생제로 알려진 Ag, 즉 항균 및 탈취, 전기적 기능이 우수한 은(silver, Ag)을 나노(nm) 입자희 제조하고 이와 더불어 이산화티탄(TiO2) 복합 분체를 제조하여 제조된 나노 입자 및 복합 분체를 사용함으로써 환경 친화적이며 다양한 용도로 활용 가능한 소재 개발에 연구 내용을 두고 있다. 본 연구를 통한 기대 효과로서 환경성 측면에서는 환경 친화적인 나노 입자의 제조로 기능성 나노 입자에 친 환경성을 부여하여 유기계 항균제 대체 효과를 발현하고 이를 제품에 적용함으로써 다양한 기능을 가진 신소재 제조에 있다. 또한 경제적인 측면에서도 고부가 가치의 제품 개발에 따른 새로운 수요 창출과 수익률 향상, 기존의 기능성 안료를 나노(nano)화하여 나노 입자를 제조, 기존의 기능성 안료에 대한 비용 절감 효과등을 유도 할 수 있다. 역시 기술적인 측면에서도 특수소재 개발에 있어 최적의 나노 입자 제어기술 개발 및 나노입자를 기능성 소재로 사용하여 새로운 제품의 제조와 고압 기상 분사기술의 최적화에 의한 기능성 나노 입자 제조 기술을 확립하고 2차 오염 발생원인 유기계 항균제를 무기계 항균제로 대체할 수 있다. 이와 더불어 안료의 형상 균일화 기술을 확보하여 가격 경쟁력 및 부가가치 향상을 기대할 수 있다.

• Korean Journal of Materials Research
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• v.21 no.4
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• pp.236-241
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• 2011

Polysilazane and silazane-based precursor films were deposited on stacked TiN/Ti/TEOS/Si-substrate by spin-coating, then annealed at $150{\sim}400^{\circ}C$, integrated further to form the top electrode and pad, and finally characterized. The precursor solutions were composed of 20% perhydro-polysilazane ($SiH_2NH$)n, and 20% hydropolymethyl silazane ($SiHCH_3NH$)n in dibutyl ether. Annealing of the precursor films led to the compositional change of the two chemicals into silicon (di)oxides, which was confirmed by Fourier transform infrared spectroscopy (FTIR) spectra. It is thought that the different results that were obtained originated from the fact that the two precursors, despite having the same synthetic route and annealing conditions, had different chemical properties. Electrical measurement indicated that under 0.6MV/cm, a larger capacitance of $2.776{\times}10^{-11}$ F and a lower leakage current of 0.4 pA were obtained from the polysilazane-based dielectric films, as compared to $9.457{\times}10^{-12}$ F and 2.4 pA from the silazane-based film, thus producing a higher dielectric constant of 5.48 compared to 3.96. FTIR indicated that these superior electrical properties are directly correlated to the amount of Si-O bonds and the improved chemical bonding structures of the spin-on dielectric films, which were derived from a precursor without C. The chemical properties of the precursor films affected both the formation and the electrical properties of the spin-on dielectric film.

• Corrosion Science and Technology
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• v.23 no.1
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• pp.41-53
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• 2024

Titanium alloy is gaining attention in the medical industry due to its excellent biocompatibility and osteoconductivity. However, the natural oxide film on the titanium surface is insoluble, resulting in inadequate bone adhesion. Therefore, it is necessary to optimize the contact between biological tissues and implant surfaces, and alter the chemical composition and morphological characteristics of the implant surface. In this study, the anodization method was applied to titanium surface treatment to form a uniform and robust oxide film. Subsequently, a chemical process, pore-widening, was employed to change the morphological characteristics of the oxide film. The concentration of the pore-widening solution was varied at 2, 4, 6, and 8 wt% and the process time was set at 30 and 60 minutes. As the concentration of the pore-widening solution increased the pore diameter of the oxide film increased. Notably, at 6 wt% for 60 minutes, the oxide film exhibited a coexistence of pillars and pores. Based on this, it was determined that surface roughness increased with higher concentration and longer process time. Additionally, the presence of pillars and pores structures maximized hydrophilicity. This study provides insights into enhancing the surface properties of titanium for improved performance in medical implants.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.215-220
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• 2012

Miniature ultrasonic and tactile sensors on Si substrate have been proposed, fabricated and characterized to detect objects for a dexterous robot. The ultrasonic sensor consists of piezoelectric PZT thin film on a Pt/Ti/$SiO_2$ and/or Si diaphragm fabricated using a micromachining technique; the ultrasonic sensor detects the piezoelectric voltage as an ultrasonic wave. The sensitivity has been enhanced by improving the device structure, and the resonant frequency in the array sensor has been equalized. Position detection has been carried out by using a sensor array with high sensitivity and uniform resonant frequency. The tactile sensor consists of four or three warped cantilevers which have NiCr or $Si:B^+$ piezoresistive layer for stress detection. Normal and shear stresses can be estimated by calculation using resistance changes of the piezoresitive layers on the cantilevers. Gripping state has been identified by using the tactile sensor which is installed on finger of a robot hand, and friction of objects has been measured by slipping the sensor.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.3
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• pp.224-228
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• 2012

We have developed new materials that lead to methyl meth acrylate monomer and styrene monomer to using polymerization method. The materials have a powder form and show liquid behavior. We call the "Electronic Bead". An our experiment, a positive-charged particle has $TiO_2$, polymer and CCA(-), while a negative-charged particle consists of carbon black, polymer and CCA(+). The charged particles have electrical characteristic of white -10 uC/g and black 10 uC/g, respectively. Also, these particles have good fluidity by additive of nano-sized silica. Using these materials, we demonstrated prototype displays that have $320{\times}320$ array of pixels and 6-in-diagonal viewable image size, driven by passive-matrix addressing. The reflectivity shows about 30% even though our experiment is at the beginning point. Also, the panel has contrast ratio 6:1. We think there are many chances to improve reflectivity through modifying components of particle resin, mixture ratio of each particle, panel structure and so on.

• Transactions on Electrical and Electronic Materials
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• v.6 no.5
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• pp.238-242
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• 2005

The Pt counter electrode of a dye-sensitized solar cell (DSSC) plays a role in helping redox reaction of iodine ions in electrolyte, also, transferring electrons into electrolyte. In this case, it is expected that characteristics of Pt electrodes strongly depend on fabrication process and its surface condition. In this study, Pt electrodes were prepared by a electro-deposition and a RF magnetron sputtering. Electrochemical behavior of Pt electrodes was compared using cyclic-voltammetry and impedance spectroscopy. Surface morphology of Pt electrodes was investigated by FE-SEM and AFM. I-V characteristics of DSSC were measured and discussed in association with the surface properties of counter electrode. As a result, electrochemical properties of electro-deposited Pt electrode were superior to that of sputtered Pt electrode. This is likely that enlarged area of surface in electro-deposited Pt electrode in comparison with the case of sputtered Pt electrode playa role in enhancing such electrochemical properties.

• Journal of Korean Society on Water Environment
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• v.31 no.1
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• pp.42-48
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• 2015

This study focused on effective decomposition methods for low concentrated organic compounds from the reuse of industrial wastewater, and confirmed the possibility through photocatalyst media. Photocatalyst immobilized media was developed to carry on this experiment which confirmed the removal possibility of low concentrated organic compounds. Considering the stability and efficiency of photocatalyst immobilization, inorganic support, hollow bead, and $TiO_2$ nano powder were used. As a result of the removal experiment, the removal efficiencies of acetonitrile, ethanol, IPA(Isopropyl alcohol), methanol were above 75% after 15 minutes while those of acetone, acetaldehyde, urea were 10%, 45%, 20%, respectively after 60 minutes. If further studies were made to increase the surface area of the photocatalyst immobilized media, the efficiency of the removal of low concentrated organic compounds can be improved and this solution can also be used in an actual treatment process.

• Journal of the Korean Institute of Intelligent Systems
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• v.26 no.5
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• pp.368-374
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• 2016

This paper presents an experimental study on an electrical circuit model of the TiO2-based nano-wired memristor device for neuromophic applications. The electrical circuit equivalent model of the proposed memristor device consists of several electronics components and some passive devices including operational amplifiers, multipliers, resistors and capacitors. In order to verify the proposed design, both of simulation (using PSPICE) as well as hardware implementation were performed for the analysis of the memristor circuit with time waveforms, frequency spectra, I-V curves and power curves. The gained results from the measured data showed a good agreement with the simulation result that confirm the proposed idea.

• Korean Journal of Materials Research
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• v.27 no.9
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• pp.507-511
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• 2017

An optimum route to fabricate oxide dispersion strengthened ferritic superalloy with desired microstructure was investigated. Two methods of high energy ball milling or polymeric additive solution route for developing a uniform dispersion of $Y_2O_3$ particles in Fe-Cr-Al-Ti alloy powders were compared on the basis of the resulting microstructures. Microstructural observation revealed that the crystalline size of Fe decreased with increases in milling time, to values of about 15-20 nm, and that an FeCr alloy phase was formed. SEM and TEM analyses of the alloy powders fabricated by solution route using yttrium nitrate and polyvinyl alcohol showed that the nano-sized Y-oxide particles were well distributed in the Fe based alloy powders. The prepared powders were sintered at 1000 and $1100^{\circ}C$ for 30 min in vacuum. The sintered specimen with heat treatment before spark plasma sintering at $1100^{\circ}C$ showed a more homogeneous microstructure. In the case of sintering at $1100^{\circ}C$, the alloys exhibited densified microstructure and the formation of large reaction phases due to oxidation of Al.