Cu diffusion behavior in SiOC(-H) films with annealed Cu/SiOC(-H)/p-Si(100)/Al metal-insulator-semiconductor(MIS) structures

• Choi, Chi-Kyu;Lee, Heang-Seuk;Woo, Jong-Kwan;Kim, Chang-Young
• • Proceedings of the Korean Vacuum Society Conference
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  • 2009.08a
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  • pp.221-221
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  • 2009
• PDF

Leakage current and electrical breakdown in plasma enhanced chemical vapor deposited low dielectric constant SiOC(-H) films

• Lee, Heang-Seuk;Kim, Chang-Young;Woo, Jong-Kwan;Choi, Chi-Kyu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2009.08a
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  • pp.220-220
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  • 2009
• PDF

Chemically Exfoliated Graphene and Its Application (화학적 박리 그래핀 나노시트의 제조 및 응용)

• Han, Joong-Tark;Jeong, Seung-Yol;Jeong, Hee-Jin;Lee, Geon-Woong
• • Polymer Science and Technology
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  • v.22 no.2
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  • pp.137-145
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  • 2011
• PDF

Investigation of Trilayer Structure NiFe/Cu/IrMn for High Field-sensitivity Planar Hall Sensor

• Hung, Tran Quang;Oh, Sun-Jong;Jeong, Jong-Ryul;Kim, Cheol-Gi
• • Proceedings of the Korean Magnestics Society Conference
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  • 2009.12a
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  • pp.213-215
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  • 2009
• PDF

Study on the Synthesis Conditions of Magnesium Diboride by Ultrasonic Spray Pyrolysis

• Kim, G.T.;Park, S.C.;Lim, Y.J.;Kim, C.J.;Kim, C.J.
• • 한국초전도학회:학술대회논문집
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  • 2007.07a
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  • pp.77-77
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  • 2007
• PDF

Evaluation of ultra low dielectric constant SiOC(-H) thin films for advanced interconnects

• Navamathavan, R.;Kim, Chang-Young;Jung, An-Soo;Lee, Heon-Ju;Choi, Chi-Kyu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.02a
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  • pp.277-277
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  • 2008
• PDF

Plasma parameters of the low dielectric constant SiOC(-H) thin films during the PECVD process

• Jung, An-Soo;Kim, Chang-Young;Navamathavan, R.;Choi, Chi-Kyu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.02a
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  • pp.349-349
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  • 2008
• PDF

Structural and electronic properties of low dielectric constant SiOC(-H) films deposited by using PECVD from DMDMS/O$_2$ precursors

• Kim, Chang-Young;Jung, An-Soo;Navamathavan, R.;Choi, Chi-Kyu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.02a
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  • pp.304-304
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  • 2008
• PDF

Preparation of high permeable polysulfone hollow fiber membranes for gas separation (높은 투과성능을 갖는 Polysulfone 기체분리용 중공사막의 제조)

• Koh, Mi-Jin;Hwang, Hae-Young;Koh, Hyung-Chul;Ha, Seong-Yong;Nam, Sang-Yong
• • Proceedings of the Membrane Society of Korea Conference
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  • 2008.05a
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  • pp.228-230
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  • 2008
• PDF

Interface characterization and current conduction in low-k SiOC(-H) thin films

• Navamathavan, R.;Kim, Chang-Young;Lee, Heang-Seuk;Lee, Heon-Ju;Choi, Chi-Kyu
• • Proceedings of the Korean Vacuum Society Conference
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  • 2008.08a
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  • pp.155-155
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  • 2008
• PDF

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