• Journal of the Korean Society for Precision Engineering
• /
• v.32 no.10
• /
• pp.911-916
• /
• 2015

In the nano/micro scale, material properties are dependent on the size-scale of a structure. However, conventional micro-scale tensile tests have limitations to obtain reliable values of nano-scale material properties owing to residual stress and elastic slippage in the gripping/aligning process. The indenter-driven nano-scale tensile test provides prominent advantages simple testing device, high-quality nano-scale metallic specimen with negligible residual stress. In this paper, two-types of specimens (a specimen with multi-testing parts and a specimen with a single-testing part) are discussed. Focused ion beam (FIB) is employed to fabricate a nano-scale specimen from a thin nickel film. Using the specimen with a single-testing part, we obtained a nano-scale stress-strain curve of electroplated nickel film.

• Proceedings of the IEEK Conference
• /
• 2004.06b
• /
• pp.359-362
• /
• 2004

Electron beam on high energy acceleration, which travels deeply and sharply through photoresist, became to be used in e-beam lithography apparatus for nano-patterning in due to its high resolution. An advanced electron beam lithography simulation tool is currently undergoing development for nano-patterning. This paper will demonstrate such simulation efforts with experiments at 200 keV e-beam lithography processes on PMMA, ZEP520 of which photoresist parameters and characteristics will be explained with simulation results. Neureuther parameters was extracted from the contrast curve of the resist

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.7 no.6
• /
• pp.1047-1055
• /
• 2006

We patterned nano-width lines on a super hard bulk diamond substrate by varying the ion beam current and ion beam sources with a dual beam field ion beam (FIB). In addition, we successfully fabricated two-dimensional nano patterns and three-dimensional nano plate modules. We prepared nano lines on a diamond and a silicon substrate at the beam condition of 30 kV, 10 pA $\sim$ 5 nA with $Ga^+$ ion and $H_2O$ assisted ion sources. We measured each of the line-width, line-depth, etched line profiles, etch rate, and aspect ratio, and then compared them. We confirmed that nano patterning was possible on both a bulk diamond and a silicon substrate. The etch rate of $H_2O$ source can be enhanced about two times than that of Ga source. The width of patterns on a diamond was smaller than that on a silicon substrate at the same ion beam power The sub-100 nm patterns on a diamond were made under the charge neutralization mode to prevent charge accumulation. We successfully made a two-dimensional, 240 nm-width text of the 300-lettered Lord's Prayer on a gem diamond with 30 kV-30 pA FIB. The patterned text image was readable with a scanning electron microscope. Moreover, three dimensional nano-thick plate module fabrication was made successfully with an FIB and a platinum deposition, and electron energy loss spectrum (EELS) analysis was easily performed with the prepared nano plate module.

• Advances in nano research
• /
• v.8 no.4
• /
• pp.293-305
• /
• 2020

In the current research, the free vibrational behavior of the FG nano-beams integrated in the hygro-thermal environment and reposed on the elastic foundation is investigated using a novel integral Timoshenko beam theory (ITBT). The current model has only three variables unknown and requires the introduction of the shear correction factor because her uniformed variation of the shear stress through the thickness. The effective properties of the nano-beam vary according to power-law and symmetric sigmoid distributions. Three models of the hygro-thermal loading are employed. The effect of the small scale effect is considered by using the nonlocal theory of Eringen. The equations of motion of the present model are determined and resolved via Hamilton principle and Navier method, respectively. Several numerical results are presented thereafter to illustrate the accuracy and efficiency of the actual integral Timoshenko beam theory. The effects of the various parameters influencing the vibrational responses of the P-FG and SS-FG nano-beam are also examined and discussed in detail.

• KSTLE International Journal
• /
• v.3 no.1
• /
• pp.12-16
• /
• 2002

Micro/nano tribological and water wetting characteristics of ion beam treated PTFE (polytetrafluoroethylene) surfaces were experimentally studied. The ion beam treatment was performed with a hollow cathode ion gun at different argon ion dose conditions in a vacuum chamber to modify the topography of PTFE surface. Micro/nano tribological characteristics, water wetting angles and roughness were measured with a micro tribe tester, SPM (scanning probe microscope), contact anglemeter and profilometer, respectively. Results showed that surface roughness increased with the argon ion dose. Water wetting angle of the ion beam treated samples increased with the ion dose, so the surface shows an ultra-hydrophobic nature. Micro-adhesion and micro-friction depend on the wetting characteristics of the PTFE samples. However, nano-tribological characteristics showed different results. The scale effect of surface topography on tribological characteristics was discussed. Also, the water wetting characteristics of modified PTFE samples were discussed in terms of the surface topographic characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2004.05a
• /
• pp.243-243
• /
• 2004

상용화된 주사식 전자현미경(SEM)을 기본 구조로 하는 가공 시스템을 구축하여 전자빔(Electron beam)을 이용한 초미세 패턴(Nano pattern) 등 형상의 직접 성형, 혹은 직접 묘화(Direct writing) 가공을 수행하기 위해서는 크게 분류하여 연속적으로 스캐닝되는 전자빔을 요구에 따라 적절하게 극히 짧은 시간 내에 개폐하는 빔 블랭커(Beam blanker)와 효율적으로 초미세 패턴 등의 형상을 설계ㆍ가공하기 위한 전용 S/W의 두 가지 요소가 반드시 적용되어야 한다.(중략)

• Laser Solutions
• /
• v.16 no.4
• /
• pp.1-6
• /
• 2013

Femtosecond laser patterning of ITO on a touch screen panel with a shaped fs laser beam was investigated. A quasi flat-top beam was formed using a variable mask and a planoconvex lens. The spatial profile of the original Gaussian beam and the shaped beam were monitored by a CCD beam profiler. The laser patterned ITO film was examined using an optical microscope, Scanning Electron Microscope (SEM) with Energy Dispersive X-ray Spectroscopy (EDS), and Atomic Force Microscope (AFM). It turned out that the quality of the ITO pattern fabricated by a shaped beam is superior to that of the pattern without beam shaping in terms of debris generation, height of the craters, and homogeneity of the bottom. Optimum processing window was determined at the laser irradiance exhibiting 100% removal of Sn. The removal rate of In was measured to be 83%.

• Macromolecular Research
• /
• v.13 no.5
• /
• pp.435-440
• /
• 2005

This study describes a method where the match of two different length scales, i.e., the patterns from self-assembled block copolymer (<50 nm) and electron beam writing (>50 nm), allow the nanometer scale pattern mask. The method is based on using block copolymers containing a poly(methyl methacrylate) (PMMA) block, which is subject to be decomposed under an electron beam, as a pattern resist for electron beam lithography. Electron beam on self assembled block copolymer thin film selectively etches PMMA microdomains, giving rise to a polymeric nano-pattern mask on which subsequent evaporation of chromium produces the arrays of Cr nanoparticles followed by lifting off the mask. Furthermore, electron beam lithography was performed on the micropatterned block copolymer film fabricated by micro-imprinting, leading to a hierarchical self assembled pattern where a broad range of length scales was effectively assembled, ranging from several tens of nanometers, through submicrons, to a few microns.

• Advances in nano research
• /
• v.14 no.2
• /
• pp.141-154
• /
• 2023

Effects of viscoelastic foundation on vibration of curved-beam structure with clamped and simply-supported boundary conditions is investigated in this study. In doing so, a micro-scale laminate composite beam with two piezoelectric face layer with a carbon nanotube reinforces composite core is considered. The whole beam structure is laid on a viscoelastic substrate which normally occurred in actual conditions. Due to small scale of the structure non-classical elasticity theory provided more accurate results. Therefore, nonlocal strain gradient theory is employed here to capture both nano-scale effects on carbon nanotubes and microscale effects because of overall scale of the structure. Equivalent homogenous properties of the composite core is obtained using Halpin-Tsai equation. The equations of motion is derived considering energy terms of the beam and variational principle in minimizing total energy. The boundary condition is assumed to be clamped at one end and simply supported at the other end. Due to nonlinear terms in the equations of motion, semi-analytical method of general differential quadrature method is engaged to solve the equations. In addition, due to complexity in developing and solving equations of motion of arches, an artificial neural network is design and implemented to capture effects of different parameters on the inplane vibration of sandwich arches. At the end, effects of several parameters including nonlocal and gradient parameters, geometrical aspect ratios and substrate constants of the structure on the natural frequency and amplitude is derived. It is observed that increasing nonlocal and gradient parameters have contradictory effects of the amplitude and frequency of vibration of the laminate beam.

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.214-214
• /
• 2013

Ion beam sputtering (IBS) by collision of energetic ions at surfaces is one of the representative methods for physical self-assembly. It is in spotlight as an easy tool to make nano structures in various sizes and shapes by controlling physical variablesWe investigate nano patterning on graphite. We found well-ordered nano ripple patterns after sputtering under the oblique angle and mean wavelengths of these ripples could be controlled as ion fluence increases from sub-10 nm to 80 nm. Each nano ripple is terminated by nano buds, which look like a cotton bud. We also examined the formation of various patterns on graphite by sputtering during swinging the sample at a constant angular velocity that have been never reported.