• Steel and Composite Structures
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• v.36 no.3
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• pp.293-305
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• 2020

This article presented a nanoscale modified continuum model to investigate the free vibration of functionally graded (FG) porous nanobeam by using finite element method. The main novelty of this manuscript is presenting effects of four different porosity models on vibration behaviors of nonlocal nanobeam structure including size effect, that not be discussed before The proposed porosity models are, uniform porosity distribution, symmetric with mid-plane, bottom surface distribution and top surface distribution. The nano-scale effect is included in modified model by using the differential nonlocal continuum theory of Eringen that adding the length scale into the constitutive equations as a material parameter constant. The graded material is distributed through the beam thickness by a generalized power law function. The beam is simply supported, and it is assumed to be thin. Therefore, the kinematic assumptions of Euler-Bernoulli beam theory are held. The mathematical model is solved numerically using the finite element method. Results demonstrate effects of porosity type, material gradation, and nanoscale parameters on the free vibration of nanobeam. The proposed model is effective in vibration analysis of NEMS structure manufactured by porous functionally graded materials.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1121-1126
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• 2014

To compensate location error of ultrasonic horn, the laser scanning system based on the galvanometer scanner is developed. It consists of the 3-Axis linear stage and the 2-Axis galvanometer scanner. To measure surface shape of three-dimensional free form surface, the dynamic focusing unit is adopted, which can maintain consistent focal plane. With combining the linear stage and the galvanometer scanner, the scanning area is enlarged. The scanning CAD system is developed by stage motion teaching and NURBS method. The laser scanning system is tested by marking experiment with the semi-cylindrical sample. Scanning accuracy is investigated by measured laser marked line width with various scanning speed.

• 한국금형공학회:학술대회논문집
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• 2008.06a
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• pp.35-38
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• 2008

A pattern master and a Ni stamper for 50nm class of patterns are fabricated through e-beam lithography and Ni electroforming process. A model pattern set is designed, which is based on unit patterns of 50nm, 100nm, 150nm and 200nm in length and 50nm in width. The e-beam process is optimized to fabricate designed patterns with some parameters including dose, accelerating voltage, focal distance and developing time. For Ni electroforming to fabricate Ni stamper, a seed layer, a conducting layer, is deposited first on the pattern master fabricated by an e-beam lithography process. Ni, Ti/Ni and Cr are first tested to find optimal seed layer process. Currently the best result is obtained when adopting Cr deposited to be 100nm thick with continuous tilting motion of the master substrate during the deposition process.

• Advances in nano research
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• v.4 no.3
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• pp.229-249
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• 2016

In this paper, buckling characteristics of nonhomogeneous functionally graded (FG) nanobeams embedded on elastic foundations are investigated based on third order shear deformation (Reddy) without using shear correction factors. Third-order shear deformation beam theory accounts for shear deformation effects by a parabolic variation of all displacements through the thickness, and verifies the stress-free boundary conditions on the top and bottom surfaces of the FG nanobeam. A two parameters elastic foundation including the linear Winkler springs along with the Pasternak shear layer is in contact with beam in deformation, which acts in tension as well as in compression. The material properties of FG nanobeam are supposed to vary gradually along the thickness and are estimated through the power-law and Mori-Tanaka models. The small scale effect is taken into consideration based on nonlocal elasticity theory of Eringen. Nonlocal equations of motion are derived through Hamilton's principle and they are solved applying analytical solution. Comparison between results of the present work and those available in literature shows the accuracy of this method. The obtained results are presented for the buckling analysis of the FG nanobeams such as the effects of foundation parameters, gradient index, nonlocal parameter and slenderness ratio in detail.

• Advances in nano research
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• v.10 no.3
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• pp.281-293
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• 2021

This paper presents a new nonlocal Hyperbolic Shear Deformation Beam Theory (HSDBT) for the free vibration of porous Functionally Graded (FG) nanobeams. A new displacement field containing integrals is proposed which involves only three variables. The present model incorporates the length scale parameter (nonlocal parameter) which can capture the small scale effect and its account for shear deformation by a hyperbolic variation of all displacements through the thickness without using the shear correction factor. It has been observed that during the manufacture of Functionally Graded Materials (FGMs), micro-voids and porosities can occur inside the material. Thus, in this work, the investigation of the free vibration analysis of FG beams taking into account the influence of these imperfections is established. Four different porosity types are considered for FG nanobeam. Material characteristics of the FG beam are supposed to vary continuously within thickness direction according to a power-law scheme which is modified to approximate material characteristics for considering the influence of porosities. Based on the nonlocal differential constitutive relations of Eringen, the equations of motion of the nanobeam are derived using Hamilton's principle. The effects of nonlocal parameter, aspect ratio, and the porosity types on the dynamic responses of the nanobeam are discussed.

• Advances in nano research
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• v.10 no.3
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• pp.235-251
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• 2021

In the current study, the free vibrational behavior of a Porous Micro (PM) beam which is integrated with Functionally Graded Piezoelectric (FGP) layers with initial curvature is considered based on the two trigonometric shear deformation theories namely SSDBT and Tan-SDBT. The structure's mechanical properties are varied through its thicknesses following the given functions. The curved microbeam is exposed to electro-mechanical preload and also is rested on a Pasternak type of elastic foundation. Hamilton's principle is used to extract the motion equations and the MCST is used to capture the size effect. Navier's solution method is selected as an analytical method to solve the motion equations for a simply supported ends case and by validating the results for a simpler state with previously published works, effects of different important parameters on the behavior of the structure are considered. It is found that although increasing the porosity reduces the natural frequency, but enhancing the volume fraction of CNTs increasing it. Also, by increasing the central angle of the curved beam the vibrations of the structure increases. Designing and manufacturing more efficient smart structures such as sensors and actuators are of the aims of this study.

• Advances in nano research
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• v.12 no.3
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• pp.231-251
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• 2022

Dynamic behavior of temperature-dependent Reddy functionally graded (RFG) nanobeam subjected to thermomagnetic effects under the action of moving point load is carried out in the present work. Both symmetric and sigmoid functionally graded material distributions throughout the beam thickness are considered. To consider the significance of strain-stress gradient field, a material length scale parameter (LSP) is introduced while the significance of nonlocal elastic stress field is considered by introducing a nonlocal parameter (NP). In the framework of the nonlocal strain gradient theory (NSGT), the dynamic equations of motion are derived through Hamilton's principle. Navier approach is employed to solve the resulting equations of motion of the functionally graded (FG) nanoscale beam. The developed model is verified and compared with the available previous results and good agreement is observed. Effects of through-thickness variation of FG material distribution, beam aspect ratio, temperature variation, and magnetic field as well as the size-dependent parameters on the dynamic behavior are investigated. Introduction of the magnetic effect creates a hardening effect; therefore, higher values of natural frequencies are obtained while smaller values of the transverse deflections are produced. The obtained results can be useful as reference solutions for future dynamic and control analysis of FG nanobeams reinforced nanocomposites under thermomagnetic effects.

• Structural Engineering and Mechanics
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• v.90 no.1
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• pp.1-18
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• 2024

The present study conducts a thorough analysis of thermal vibrations in functionally graded porous nanocomposite beams within a thermal setting. Investigating the temperature-dependent material properties of these beams, which continuously vary across their thickness in accordance with a power-law function, a finite element approach is developed. This approach utilizes a nonlocal strain gradient theory and accounts for a linear temperature rise. The analysis employs four different patterns of porosity distribution to characterize the functionally graded porous materials. A novel two-variable shear deformation beam nonlocal strain gradient theory, based on trigonometric functions, is introduced to examine the combined effects of nonlocal stress and strain gradient on these beams. The derived governing equations are solved through a 3-nodes beam element. A comprehensive parametric study delves into the influence of structural parameters, such as thicknessratio, beam length, nonlocal scale parameter, and strain gradient parameter. Furthermore, the study explores the impact of thermal effects, porosity distribution forms, and material distribution profiles on the free vibration of temperature-dependent FG nanobeams. The results reveal the substantial influence of these effects on the vibration behavior of functionally graded nanobeams under thermal conditions. This research presents a finite element approach to examine the thermo-mechanical behavior of nonlocal temperature-dependent FG nanobeams, filling the gap where analytical results are unavailable.

• Advances in nano research
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• v.17 no.1
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• pp.9-18
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• 2024

This paper presents the development of an educational management model for analyzing the dynamic instability of nanocomposite sandwich beams. The model aims to provide a comprehensive framework for understanding the behavior of sandwich micro beams with foam cores, featuring top and bottom layers made of smart and porous functionally graded materials (FGM) nanocomposites. The bottom layer is influenced by an external electric field, and the entire beam is supported by a visco-Pasternak foundation, accounting for spring, shear, and damping constants. Using the Kelvin-Voigt theory to model structural damping and incorporating size effects based on strain gradient theory, the model employs the parabolic shear deformation beam theory (PSDBT) to derive motion equations through Hamilton's principle. The differential quadrature method (DQM) is applied to solve these equations, accurately identifying the improvement in student understanding (ISU) of the beams. The impact of various parameters, including FGM properties, external voltage, geometric constants, and structural damping, on the DIR is thoroughly examined. The educational model is validated by comparing its outcomes with existing studies, highlighting the increase in ISU with the application of negative external voltage to the smart layer. This model serves as a valuable educational tool for engineering students and researchers studying the dynamic stability of advanced nanocomposite structures.

• Journal of the Microelectronics and Packaging Society
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• v.14 no.2 s.43
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• pp.17-21
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• 2007

Dense and periodic arrays of holes and Si nano dots were fabricated on silicon substrate. The nanopatterned holes were approximately $15{\sim}40nm$ wide, 40 nm deep and $40{\sim}80\;nm$ apart. To obtain nano-size patterns, self?assembling diblock copolymer were used to produce layer of hexagonaly ordered parallel cylinders of polymethylmethacrylate (PMMA) in polystyrene(PS) matrix. The PMMA cylinders were degraded and removed with acetic acid rinse to produce a PS. $100\;{\AA}-thick$ Au thin film was deposited by using e-beam evaporator. PS template was removed by lift-off process. Arrays of Au nano dots were transferred by using Fluorine-based reactive ion etching(RE). Au nano dots were removed by sulfuric acid. Si nano dots size and height were $30{\sim}70\;nm$ and $10{\sim}20\;nm$ respectively.