• Proceedings of the Korean Vacuum Society Conference
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• 2007.08a
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• pp.264-264
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• 2007

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.482-486
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies, such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper presents that the recent development and our research goals in FIB nano machining technology are given. The emphasis will be on direct milling, or chemical vapor deposition techniques (CVD), and this can distinguish the FIB technology from the contemporary photolithography process and provide a vital alternative to it. After an introduction to the technology and its FIB principles, the recent developments in using milling or deposition techniques for making various high-quality devices and high-precision components at the micro/nano meter scale are examined and discussed. Finally, conclusions are presented to summarize the recent work and to suggest the areas for improving the FIB milling technology and for studying our future research.

• Journal of the Korean Society of Clothing and Textiles
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• v.27 no.5
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• pp.554-559
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• 2003

A newly developed contact angle measurement instrument by laser beam projection allows for rapid and direct determination of contact angles. The instrument may have a possibility to characterize newly developed nano-fibers. When the laser beam impinges on an edge of an interface of liquid and solid, projected beam were split across and made two straight lines on a tangent screen. From the result, it could measure the contact angle directly by reading the angle between two split beams. The purpose of this study was to prove reliability and reproducibility of the contact angle measurement instrument by laser beam projection compare to the conventional one by microscope through the comparative experiment and questionnaire. Test samples were selected by consideration of hydrophilic and hydrophobic, such as nylon 6 and polypropylene, respectively. The laser contact angle measurement has accurate, fast and convenient method to measure contact angle, and it can be a unique method to characterize nano-fibers.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.6
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• pp.7-13
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• 2009

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.385-385
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• 2011

Ion beam Sputtering (IBS)를 이용한 물질 표면의 pattern 형성은 물리적 변수 조절로 손쉽게 nano structure의 크기와 형태를 조절할 수 있어 관심을 받고 있다. 본 연구발표에서는 massless Dirac Fermion behavior로 인한 highly carrier mobility와 같은 특성으로 인해 차세대 device material로 각광받고 있는 Graphene의 layered compound (층상구조) 형태인 HOPG (Highly Ordered Pyrolysis Graphite)에 IBS (Ion beam Sputtering)를 이용해 nano structure가 형성 가능함을 보이고 그 특징에 대해 소개하려 한다. HOPG(0001)를 Sputter 했을 때, 표면에 잘 정렬된 nano ripple pattern이 형성 가능함을 확인하였으며 sputter하는 시간을 변화하면 약 10 nm에서 80 nm까지 wavelength를 조절할 수 있다. 또한 이전의 IBS를 이용한 연구들에서 확인할 수 있는 다른 물질의 곧게 뻗은 nano ripple과는 다르게 ripple의 끝에 nano swab이 생기는 것을 AFM (Atomic Force Microscope)으로 확인할 수 있었다. 이러한 Graphite에서만 나타나는 Sputter에 의한 표면의 변화의 원인을 규명하고자 Sputter가 지속됨에 따라 나타나는 mopology의 roughness와 wavelength의 시간에 따른 dynamic scaling behavior를 확인하였고 그 얼개를 알기 위해 simulation을 수행 하였다.

• Journal of Magnetics
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• v.12 no.1
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• pp.12-16
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• 2007

Magnetic excitation and reversal by a spin polarized current via spin transfer have been a central research topic in spintronics due to its application potential. Special techniques are required to fabricate nano-scale magnetic layers in which the effect can be observed and studied. This work discusses the possibility of using electron-beam resists, the nano-scale patterning media, as ion milling mask in a subtractive fabrication method. The possibility is demonstrated by two resists, one positive tone, the ZEP 520A, and one negative tone, the ma-N2403. The advantage and the key points for success of this process will be also addressed.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2006.10a
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• pp.665-666
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• 2006

• Journal of the Korean Vacuum Society
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• v.22 no.5
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• pp.262-269
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• 2013

Though focused ion beam (FIB) is one of the candidates to fabricate the nanoscale patterns, precision milling of nanoscale structures is not straightforward. Thus this poses challenges for novice FIB users. Optimal determination in FIB parameters is a crucial step to fabricate a desired nanoscale pattern. There are two main FIB parameters to consider, beam current (beam size) and dose (beam duration) for optimizing the milling condition. After fixing the dose, the proper beam current can be chosen considering both total milling time and resolution of the pattern. Then, using the chosen beam current, the metal nano hole structure can be perforated to the required depth by varying the dose. In this experiment, we found the adequate condition of $0.1nC/{\mu}m^2$ dose at 1 pA Ga ion beam current for 100 nm thickness perforation. With this condition, we perforated the periodic square array of elliptical nano holes.

• Smart Structures and Systems
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• v.22 no.1
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• pp.105-120
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• 2018

In this paper, the nonlinear free and forced vibration responses of sandwich nano-beams with three various functionally graded (FG) patterns of reinforced carbon nanotubes (CNTs) face-sheets are investigated. The sandwich nano-beam is resting on nonlinear Visco-elastic foundation and is subjected to thermal and electrical loads. The nonlinear governing equations of motion are derived for an Euler-Bernoulli beam based on Hamilton principle and von Karman nonlinear relation. To analyze nonlinear vibration, Galerkin's decomposition technique is employed to convert the governing partial differential equation (PDE) to a nonlinear ordinary differential equation (ODE). Furthermore, the Multiple Times Scale (MTS) method is employed to find approximate solution for the nonlinear time, frequency and forced responses of the sandwich nano-beam. Comparison between results of this paper and previous published paper shows that our numerical results are in good agreement with literature. In addition, the nonlinear frequency, force response and nonlinear damping time response is carefully studied. The influences of important parameters such as nonlocal parameter, volume fraction of the CNTs, different patterns of CNTs, length scale parameter, Visco-Pasternak foundation parameter, applied voltage, longitudinal magnetic field and temperature change are investigated on the various responses. One can conclude that frequency of FG-AV pattern is greater than other used patterns.

• Structural Engineering and Mechanics
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• v.69 no.4
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• pp.439-455
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• 2019

This research deals with thermo-electro-mechanical buckling analysis of the sandwich nano-beams with face-sheets made of functionally graded carbon nano-tubes reinforcement composite (FG-CNTRC) based on the nonlocal strain gradient elasticity theory (NSGET) considering various higher-order shear deformation beam theories (HSDBT). The sandwich nano-beam with FG-CNTRC face-sheets is subjected to thermal and electrical loads while is resting on Pasternak's foundation. It is assumed that the material properties of the face-sheets change continuously along the thickness direction according to different patterns for CNTs distribution. In order to include coupling of strain and electrical field in equation of motion, the nonlocal non-classical nano-beam model contains piezoelectric effect. The governing equations of motion are derived using Hamilton principle based on HSDBTs and NSGET. The differential quadrature method (DQM) is used to calculate the mechanical buckling loads of sandwich nano-beam as well as critical voltage and temperature rising. After verification with validated reference, comprehensive numerical results are presented to investigate the influence of important parameters such as various HSDBTs, length scale parameter (strain gradient parameter), the nonlocal parameter, the CNTs volume fraction, Pasternak's foundation coefficients, various boundary conditions, the CNTs efficiency parameter and geometric dimensions on the buckling behaviors of FG sandwich nano-beam. The numerical results indicate that, the amounts of the mechanical critical load calculated by PSDBT and TSDBT approximately have same values as well as ESDBT and ASDBT. Also, it is worthy noted that buckling load calculated by aforementioned theories is nearly smaller than buckling load estimated by FSDBT. Also, similar aforementioned structure is used to building the nano/micro oscillators.