• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.925-928
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• 2004

The application of focused ion beam (FIB) technology in micro/nano machining has become increasingly popular. Its use in micro/nano machining has advantages over contemporary photolithography or other micro/nano machining technologies such as small feature resolution, the ability to process without masks and being accommodating for a variety of materials and geometries. This paper was carried out some experiments and verifications of mechanism on FIB-CVD using SMI8800 made by Seiko. FIB-CVD has in fact proved to be commercially useful for repair processes because the beam can be focused down to 0.05$\mu\textrm{m}$ dimensions and below and because the same tool can be used to sputter off material with sub-micrometer precision simply by turning off the gas ambient. Recently the chemical vapour deposition induced ion beam has been required more deposition rate and accurate pattern because of trying to manufacture many micro and nano parts. Therefore this paper suggested the optimization parameters and discussed some mechanism of chemical vapour deposition induced ion beam on FIB-CVD for simple pattern.

• Journal of the Korean Society for Precision Engineering
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• v.24 no.10
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• pp.109-116
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• 2007

Focused ion beams are a potential tool for micro/nano structure fabrication while several problems still have to be overcome. Redeposition of sputtered atoms limits the accurate fabrication of micro/nano structures. The challenge lies in accurately controlling the focused ion beam to fabricate various arbitrary curved shapes. In this paper a basic approach for the focused ion beam induced direct fabricate of fundamental features is presented. This approach is based on the topography simulation which naturally considers the redeposition of sputtered atoms and sputtered yield changes. Fundamental features such as trapezoidal, circular and triangular were fabricated with this approach using single or multiple pass box milling. The beam diameter(FWHM) and maximum current density are 68 nm and $0.8 A/cm^2$, respectively. The experimental investigations show that the fabricated shape is well suited for the pre-designed fundamental features. The characteristics of ion beam induced direct fabrication and shape formation will be discussed.

• Applied Microscopy
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• v.36 no.spc1
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• pp.25-33
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• 2006

Nanofabrication with finely focused ion and electron beams is reviewed, and position and size controlled fabrication of nano-metals and -semiconductors is demonstrated. A focused ion beam (FIB) interface attached to a column of 200keV transmission electron microscope (TEM) was developed. Parallel lines and dots arrays were patterned on GaAs, Si and $SiO_2$ substrates with a 25keV $Ga^+-FIB$ of 200nm beam diameter at room temperature. FIB nanofabrication to semiconductor specimens caused amorphization and Ga injection. For the electron beam induced chemical vapor deposition (EBI-CVD), we have discovered that nano-metal dots are formed depending upon the beam diameter and the exposure time when decomposable gases such as $W(CO)_6$ were introduced at the beam irradiated areas. The diameter of the dots was reduced to less than 2.0nm with the UHV-FE-TEM, while those were limited to about 15nm in diameter with the FE-SEM. Self-standing 3D nanostructures were also successfully fabricated.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.3
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• pp.383-388
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• 2011

The cold hollow cathode gas ion source is under development for multi aperture focused ion beam (FIB) system. In this paper, we describe the cold hollow cathode ion source design and the general ion source performance using Ar gas. The glow discharge characteristics and the ion beam current density at various operation conditions are investigated. This ion source can generate maximum ion beam current density of approximately 120 mA/$cm^2$ at ion beam potential of 10 kV. In order to effectively transport the energetic ions generated from the ion source to the multi-aperture focused ion beam(FIB) system, the einzel lens system for ion beam focusing is designed and evaluated. The ions ejected from the ion source can be forced to move near parallel to the beam axis by adjusting the potentials of the einzel lenses.

• Steel and Composite Structures
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• v.32 no.2
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• pp.157-171
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• 2019

In this research, the dynamic instability region (DIR) of the sandwich nano-beams are investigated based on nonlocal strain gradient elasticity theory (NSGET) and various higher order shear deformation beam theories (HSDBTs). The sandwich piezoelectric nano-beam is including a homogenous core and face-sheets reinforced with functionally graded (FG) carbon nanotubes (CNTs). In present study, three patterns of CNTs are employed in order to reinforce the top and bottom face-sheets of the beam. In addition, different higher-order shear deformation beam theories such as trigonometric shear deformation beam theory (TSDBT), exponential shear deformation beam theory (ESDBT), hyperbolic shear deformation beam theory (HSDBT), and Aydogdu shear deformation beam theory (ASDBT) are considered to extract the governing equations for different boundary conditions. The beam is subjected to thermal and electrical loads while is resting on Visco-Pasternak foundation. Hamilton principle is used to derive the governing equations of motion based on various shear deformation theories. In order to analysis of the dynamic instability behaviors, the linear governing equations of motion are solved using differential quadrature method (DQM). After verification with validated reference, comprehensive numerical results are presented to investigate the influence of important parameters such as various shear deformation theories, nonlocal parameter, strain gradient parameter, the volume fraction of the CNTs, various distributions of the CNTs, different boundary conditions, dimensionless geometric parameters, Visco-Pasternak foundation parameters, applied voltage and temperature change on the dynamic instability characteristics of sandwich piezoelectric nano-beam.

• Structural Engineering and Mechanics
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• v.67 no.4
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• pp.417-425
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• 2018

The main aim of this paper is to investigate the bending of Euler-Bernouilli nano-beams made of bi-directional functionally graded materials (BDFGMs) using Eringen's non-local elasticity theory in the integral form with compare the differential form. To the best of the researchers' knowledge, in the literature, there is no study carried out into integral form of Eringen's non-local elasticity theory for bending analysis of BDFGM Euler-Bernoulli nano-beams with arbitrary functions. Material properties of nano-beam are assumed to change along the thickness and length directions according to arbitrary function. The approximate analytical solutions to the bending analysis of the BDFG nano-beam are derived by using the Rayleigh-Ritz method. The differential form of Eringen's non-local elasticity theory reveals with increasing size effect parameter, the flexibility of the nano-beam decreases, that this is unreasonable. This problem has been resolved in the integral form of the Eringen's model. For all boundary conditions, it is clearly seen that the integral form of Eringen's model predicts the softening effect of the non-local parameter as expected. Finally, the effects of changes of some important parameters such as material length scale, BDFG index on the values of deflection of nano-beam are studied.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.11a
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• pp.615-616
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• 2008

• Advances in materials Research
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• v.9 no.1
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• pp.33-48
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• 2020

With the use of differential quadrature method (DQM), forced vibrations and resonance frequency analysis of functionally graded (FG) nano-size beams rested on elastic substrate have been studied utilizing a shear deformation refined beam theory which contains shear deformations influence needless of any correction coefficient. The nano-size beam is exposed to uniformly-type dynamical loads having partial length. The two parameters elastic substrate is consist of linear springs as well as shear coefficient. Gradation of each material property for nano-size beam has been defined in the context of Mori-Tanaka scheme. Governing equations for embedded refined FG nano-size beams exposed to dynamical load have been achieved by utilizing Eringen's nonlocal differential law and Hamilton's rule. Derived equations have solved via DQM based on simply supported-simply supported edge condition. It will be shown that forced vibrations properties and resonance frequency of embedded FG nano-size beam are prominently affected by material gradation, nonlocal field, substrate coefficients and load factors.

• Smart Structures and Systems
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• v.23 no.2
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• pp.141-153
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• 2019

This research deals with wave propagation of the functionally graded (FG) nano-beams based on the nonlocal elasticity theory considering surface and flexoelectric effects. The FG nano-beam is resting in Winkler-Pasternak foundation. It is assumed that the material properties of the nano-beam changes continuously along the thickness direction according to simple power-law form. In order to include coupling of strain gradients and electrical polarizations in governing equations of motion, the nonlocal non-classical nano-beam model containg flexoelectric effect is used. Also, the effects of surface elasticity, dielectricity and piezoelectricity as well as bulk flexoelectricity are all taken into consideration. The governing equations of motion are derived using Hamilton principle based on first shear deformation beam theory (FSDBT) and also considering residual surface stresses. The analytical method is used to calculate phase velocity of wave propagation in FG nano-beam as well as cut-off frequency. After verification with validated reference, comprehensive numerical results are presented to investigate the influence of important parameters such as flexoelectric coefficients of the surface, bulk and residual surface stresses, Winkler and shear coefficients of foundation, power gradient index of FG material, and geometric dimensions on the wave propagation characteristics of FG nano-beam. The numerical results indicate that considering surface effects/flexoelectric property caused phase velocity increases/decreases in low wave number range, respectively. The influences of aforementioned parameters on the occurrence cut-off frequency point are very small.

• Design & Manufacturing
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• v.15 no.3
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• pp.26-31
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• 2021

In this study, laser-induced periodic surface structure (LIPSS) was fabricated on Ni, Si, and GaAs samples using a flat-top beam with a uniform energy distribution that was fabricated using a Gaussian femtosecond laser with a mechanical slit and tube lens. Unlike the Gaussian beam, the flat-top beam has a uniform beam profile, therefore the center and the periphery of the fabricated LIPSS have similar line periodicity. In addition, LIPSS was obtained not only in metals but also in metalloids and metals and metalloid compounds by using the narrow pulse width characteristic of a femtosecond laser.