• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.326-329
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• 2005

As a flexible method to fabricate sub-micrometer patterns, Focused Ion Beam (FIB) instrument and Self-Assembled Monolayer (SAM) resist are introduced in this work. FIB instrument is known to be a very precise processing machine that is able to fabricate micro-scale structures or patterns, and SAM is known as a good etch resistance resist material. If SAM is applied as a resist in FIB processing fur fabricating nano-scale patterns, there will be much benefit. For instance, low energy ion beam is only needed for machining SAM material selectively, since ultra thin SAM is very sensitive to $Ga^+$ ion beam irradiation. Also, minimized beam spot radius (sub-tens nanometer) can be applied to FIB processing. With the ultimate goal of optimizing nano-scale pattern fabrication process, interaction between SAM coated specimen and $Ga^+$ ion dose during FIB processing was observed. From the experimental results, adequate ion dose for machining SAM material was identified.

• Advances in nano research
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• v.4 no.1
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• pp.51-64
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• 2016

This paper investigates the effects of thermal load and shear force on the buckling of nanobeams. Higher-order shear deformation beam theories are implemented and their predictions of the critical buckling load and post-buckled configurations are compared to those of Euler-Bernoulli and Timoshenko beam theories. The nonlocal Eringen elasticity model is adopted to account a size-dependence at the nano-scale. Analytical closed form solutions for critical buckling loads and post-buckling configurations are derived for proposed beam theories. This would be helpful for those who work in the mechanical analysis of nanobeams especially experimentalists working in the field. Results show that thermal load has a more significant impact on the buckling behavior of simply-supported beams (S-S) than it has on clamped-clamped (C-C) beams. However, the nonlocal effect has more impact on C-C beams that it does on S-S beams. Moreover, it was found that the predictions obtained from Timoshenko beam theory are identical to those obtained using all higher-order shear deformation theories, suggesting that Timoshenko beam theory is sufficient to analyze buckling in nanobeams.

• Smart Structures and Systems
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• v.25 no.4
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• pp.501-514
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• 2020

This article presents a comprehensive model to investigate a free vibration and resonance frequencies of nanostructure perforated beam element as nano-resonator. Nano-scale size dependency of regular square perforated beam is considered by using nonlocal differential form of Eringen constitutive equation. Equivalent mass, inertia, bending and shear rigidities of perforated beam structure are developed. Kinematic displacement assumptions of both Timoshenko and Euler-Bernoulli are assumed to consider thick and thin beams, respectively. So, this model considers the effect of shear on natural frequencies of perforated nanobeams. Equations of motion for local and nonlocal elastic beam are derived. After that, analytical solutions of frequency equations are deduced as function of nonlocal and perforation parameters. The proposed model is validated and verified with previous works. Parametric studies are performed to illustrate the influence of a long-range atomic interaction, hole perforation size, number of rows of holes and boundary conditions on fundamental frequencies of perforated nanobeams. The proposed model is supportive in designing and production of nanobeam resonator used in nanoelectromechanical systems NEMS.

• Advances in nano research
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• v.2 no.4
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• pp.199-210
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• 2014

Carbon nanotubes have exceptional mechanical, thermal and electrical properties, and are considered for high performance structural and multifunctional composites. In the present study, the natural frequencies of aligned single walled carbon nanotube (CNT) reinforced composite beams are obtained using shear deformable composite beam theories. The Ritz method with algebraic polynomial displacement functions is used to solve the free vibration problem of composite beams. The Mori-Tanaka method is applied to find the composite beam mechanical properties. The continuity conditions are satisfied among the layers by modifying the displacement field. Results are found for different CNT diameters, length to thickness ratio of the composite beam and different boundary conditions. It is found that the use of smaller CNT diameter in the reinforcement element gives higher fundamental frequency for the composite beam.

• Advances in nano research
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• v.12 no.3
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• pp.281-290
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• 2022

In the current research, the thermal buckling characteristics of the bi-directional functionally graded nano-scale tapered beam on the basis of a couple of nonlocal Eringen and classical beam theories are scrutinized. The nonlocal governing equation and associated nonlocal boundary conditions are constructed using the conservation energy principle, and the resulting equations are solved using the generalized differential quadrature method (GDQM). The mechanical characteristics of the produced material are altered along both the beam length and thickness direction, indicating that it is a two-dimensional functionally graded material (2D-FGM). It is thought that the nanostructures are defective because to the presence of porosity voids. Finally, the obtained results are used to design small-scale sensors and make an excellent panorama of developing the production of nanostructures.

• Transactions of Materials Processing
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• v.14 no.7 s.79
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• pp.624-627
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by I-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50nm in diameter, 150nm in pitch, and 50nm in depth.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2005.05a
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• pp.60-63
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by E-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50 nm in diameter, 150 nm in pitch, and 50 nm in depth.

• 한국전자현미경학회:학술대회논문집
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• 2005.05a
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• pp.147-153
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• 2005

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2003.10a
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• pp.367-370
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• 2003

In this study, application of SAM (self-assembled monolayer) to nano replication process as an anti-adhesion layer was presented to reduce the surface energy between the nano mold and the replicated polymeric nano patterns. The electron beam lithography was used for master nano patterns and the electorforming process was used to fabricate the nickel nano stamper. Alkanethiol SAM as an anti-adhesion layer was deposited on metallic nano stamper using solution deposition method. To analyze wettability and adhesion force of SAM, contact angle and LFM (Lateral Force Microscopy) were measured at the actual processing temperature and pressure for the case of nano compression molding and at the actual UV dose for the case of nano UV molding. It was found that the surface energy due to SAM deposition on the nickel nano stamper markedly decreased and the quality of SAM on the nickel stamper maintained under the actual molding environments.

• Structural Engineering and Mechanics
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• v.69 no.2
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• pp.205-219
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• 2019

This paper analyzes nonlinear free vibration of the circular nano-tubes made of functionally graded materials in the framework of nonlocal strain gradient theory in conjunction with a refined higher order shear deformation beam model. The effective material properties of the tube related to the change of temperature are assumed to vary along the radius of tube based on the power law. The refined beam model is introduced which not only contains transverse shear deformation but also satisfies the stress boundary conditions where shear stress cancels each other out on the inner and outer surfaces. Moreover, it can degenerate the Euler beam model, the Timoshenko beam model and the Reddy beam model. By incorporating this model with Hamilton's principle, the nonlinear vibration equations are established. The equations, including a material length scale parameter as well as a nonlocal parameter, can describe the size-dependent in linear and nonlinear vibration of FGM nanotubes. Analytical solution is obtained by using a two-steps perturbation method. Several comparisons are performed to validate the present analysis. Eventually, the effects of various physical parameters on nonlinear and linear natural frequencies of FGM nanotubes are analyzed, such as inner radius, temperature, nonlocal parameter, strain gradient parameter, scale parameter ratio, slenderness ratio, volume indexes, different beam models.