• Title/Summary/Keyword: multilayered film

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Study on the Thermal Properties of the Electroless Copper Interconnect in Integrated Circuits (집적회로용 무전해도금 Cu배선재료의 열적 특성에 관한 연구)

  • 김정식;이은주
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.1
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    • pp.31-37
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    • 1999
  • In this study, the thermal property and adhesion of the electroless-deposited Cu thin film were investigated. The multilayered structure of Cu /TaN /Si was fabricated by electroless-depositing the Cu thin layer on the TaN diffusion barrier which was deposited by MOCVD on the Si substrate. The thermal stability was investigated by measuring the resistivity as post-annealing temperature for the multilayered Cu /TaN /Si specimen which was annealed at atmospheres of $H_2$and Ar gases, respectively. The adhesion strength of Cu films was evaluated by the scratch test. The adhesion of the electroless-deposited Cu film was compared with other deposition methods of thermal evaporation and sputtering. The scratch test showed that the adhesion of electroless plated Cu film on TaN was better than that of sputtered Cu film and evaporated Cu film.

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Dissolution Characteristics and Regenerated Miscanthus Sinensis Holocellulose Film Prepared by Dissolving the LiBr Solution (LiBr 수용액으로 용해시켜 제조한 거대억새 홀로셀룰로오스 용해 및 재생 필름특성)

  • Yang, Ji-Wook;Kwon, Gu-Joong;Hwang, Kyo-Jung;Hwang, Won-Jung;Hwang, Jae-Hyun;Kim, Dae-Young
    • Journal of Korea Technical Association of The Pulp and Paper Industry
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    • v.47 no.6
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    • pp.89-97
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    • 2015
  • In this study, dissolution characteristics of 60% LiBr aqueous solution for Miscanthus sinensis holocellulose in accordance with heating time and characteristics of regenerated films were analyzed. Miscanthus sinensis holocellulose was made by peracetic acid method. During the dissolution of 60% LiBr solution for the holocellulose, the dissolution was started from the tip of the cellulose fiber after about 7 minutes, and proceeded as it swollen like a balloon. A lot of Si was identified by analyzing hollocellulose regenerated film through SEM/EDS. Cross section of regenerated film as dissolution time till 40 minutes of dissolution showed multilayered structure and fiber orientation. But after 40 minutes, multilayered structure and fiber orientation was not observed. The crystal structure of the holecellulose was transformed cellulose I into cellulose II. Therefore, dissolution for 20 minutes with 60% LiBr solution in the condition of $190^{\circ}C$ hot plate was shown as an optimum condition to manufacture the holocellulose regenerated film.

Effect of TiAIN-based Nanoscale Multilayered Coating on the Cutting Performance of WC-Co Insert (WC-CO 인써트의 절삭 성능에 미치는 TiAIN계 나노 다층막 코팅의 영향)

  • Lim Hee-Youl;Park Jong-Keuk;Kim Kyung-Bae;Choi Doo-Jin;Baik Young-Joon
    • Journal of the Korean Vacuum Society
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    • v.15 no.1
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    • pp.110-116
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    • 2006
  • The mechanical property and cutting performance of the cutting tools coated with nanoscale nyktukatered nitride film have been investigated. $Ti_{0.54}Al_{0.46}N-CrN$ and $Ti_{0.84}Al_{0.16}N-NlN$ systems, which showed super-lattice in nanoscale multilayered coating, were deposited on WC-Co insert by UBM sputtering, The superlattice coatings with different bilayer periods were manufactured by controlling deposition parameters. The superlattice formation and hardness of the nanoscale multilayered nitride film and the cutting performance of the insert coated with the film were examined. The hardness and cutting performance were dependent on the bilayer periods of the coatings. The flank wear of the inserts with superlattice coatings were decreased over $20\%$, compared to those of commonly used cutting tools coated with TiAIN single phase.