• Title/Summary/Keyword: multilayer structure

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A Study on Cu(B)/Ti/SiO2/Si Structure for Application to Advanced Manufacturing Process (차세대 공정에 적용 가능한 Cu(B)/Ti/SiO2/Si 구조 연구)

  • Lee Seob;Lee Jaegab
    • Korean Journal of Materials Research
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    • v.14 no.4
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    • pp.246-250
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    • 2004
  • We have investigated the effects of boron added to Cu film on the Cu-Ti reaction and microstructural evolution of Cu(B) alloy film during annealing of Cu(B)/Ti/$SiO_2$/Si structure. The result were compared with those of Cu(B)/$SiO_2$ structure to identify the effects of Ti glue layers on the Boron behavior and the result grain growth of Cu(B) alloy. The vacuum annealing of Cu(B)/Ti/$SiO_2$ multilayer structure allowed the diffusion of B to the Ti surface and forming $TiB_2$ compounds at the interface. The formed $TiB_2$ can act as a excellent diffusion barrier against Cu-Ti interdiffusion up to $800^{\circ}C$. Also, the resistivity was decreased to $2.3\mu$$\Omega$-cm after annealing at $800^{\circ}C$. In addition, the presence of Ti underlayer promoted the growth Cu(l11)-oriented grains and allowed for normal growth of Cu(B) film. This is in contrast with abnormal growth of randomly oriented Cu grains occurring in Cu(B)/$SiO_2$ upon annealing. The Cu(B)/Ti/$SiO_2$ structure can be implemented as an advanced metallization because it exhibits the low resistivity, high thermal stability and excellent diffusion barrier property.

Short-Term Electrical Load Forecasting using Neuro-Fuzzy Models (뉴로-퍼지 모델을 이용한 단기 전력 수요 예측시스템)

  • Park, Yeong-Jin;Sim, Hyeon-Jeong;Wang, Bo-Hyeon
    • The Transactions of the Korean Institute of Electrical Engineers A
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    • v.49 no.3
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    • pp.107-117
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    • 2000
  • This paper proposes a systematic method to develop short-term electrical load forecasting systems using neuro-fuzzy models. The primary goal of the proposed method is to improve the performance of the prediction model in terms of accuracy and reliability. For this, the proposed method explores the advantages of the structure learning of the neuro-fuzzy model. The proposed load forecasting system first builds an initial structure off-line for each hour of four day types and then stores the resultant initial structures in the initial structure bank. Whenever a prediction needs to be made, the proposed system initializes the neuro-fuzzy model with the appropriate initial structure stored and trains the initialized model. In order to demonstrate the viability of the proposed method, we develop an one hour ahead load forecasting system by using the real load data collected during 1993 and 1994 at KEPCO. Simulation results reveal that the prediction system developed in this paper can achieve a remarkable improvement on both accuracy and reliability compared with the prediction systems based on multilayer perceptrons, radial basis function networks, and neuro-fuzzy models without the structure learning.

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Analysis of Magnetic Isotropy Property using Magnetoresistance Curve of CoFe/Cu/CoFe/PtMn Multilayer Film (CoFe/Cu/CoFe/PtMn 다층박막의 자기저항 곡선을 이용한 자기 등방성 특성 분석)

  • Choi, Jong-Gu;Kim, Su-Hee;Choi, Sang-Heon;Lee, Sang-Suk;Rhee, Jang-Roh
    • Journal of the Korean Magnetics Society
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    • v.27 no.4
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    • pp.123-128
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    • 2017
  • The magnetic isotropy property from the magnetoresistance (MR) curve and magnetization (MH) loop for the PtMn based spin valve (SV) multilayer films fabricated with different the bottom structure after post-annealing treatment was investigated. The exchange biased coupling field ($H_{ex}$), coercivity ($H_c$), and MR ratio of Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/Ta(4 nm) SV multilayer film without antiferromagnetic PtMn layer are 0 Oe, 25 Oe, and 3.3 %, respectively. MR curve for the Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/PtMn(6 nm)/Ta(4 nm) SV multilayer film showed $H_{ex}=2Oe$, $H_c=316Oe$, and MR (%) = 4.4 % with one butterfly MR curve having by the effect of antiferromagnetic PtMn layer. MR curve for the dualtype Glass/Ta(10 nm)/CoFe(6 nm)/Cu(2.5 nm)/CoFe(3 nm)/PtMn(6 nm)/CoFe(3 nm)/Cu(2.5 nm)/CoFe(6 nm)/Ta(4 nm) SV multilayer film showed $H_c=37.5Oe$ and 386 Oe, MR = 3.5 % and 6.5 % with two butterfly MR curves and square-like hysteresis MH loops. The anisotropy property in CoFe spin valve-PtMn multilayer is neglected by the effects of a very small value of $H_{ex}$ and a very slightly shape magnetic anisotropy. This result is possible to explain the effect of magnetization configuration spin array of the bottom SV film and the top SV film of PtMn layer.

Dependence of Coercivity and Exchange Bias by Thickness and Materials of Inserted Layer in [Pd/Co]5/X/FeMn Multilayer with Out-of-plane Magnetic Anisotropy (수직자기이방성을 갖는 [Pd/Co]5/X/FeMn 다층박막에서 삽입층 물질과 두께에 따른 교환바이어스와 보자력의 의존성)

  • Heo, Jang;Park, Dong-Hun;Kang, Wang-Son;Ji, Sang-Hun;Lee, Ky-Am
    • Journal of the Korean Magnetics Society
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    • v.18 no.5
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    • pp.185-189
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    • 2008
  • We observe the change of coercivity and exchange bias, depending on inserting material and thickness in a [Pd(0.6 nm)/$Co(0.2)]_5$/ FeMn(10) multilayer structure with perpendicular anisotropy. When 0.78 and 1.28 nm thick NiFe substitutes for Co in a $[Pd(0.6 nm)Co(0.2)]_4$/Pd(0.6)/NiFe(t)/FeMn(10) structure, we obtain the exchange bias of 360 Oe. In addition, when $Co_8Fe_2$ and $Co_9Fe_1$ are inserted for Co/FeMn interface, we obtain the exchange bias of 380 nm for a 0.68 nm thick $Co_8Fe_2$ and 580 Oe for a 0.52 nm thick $Co_9Fe_1$.

Regional Distribution of Isotropy Magnetic Property of Dual-type Giant Magnetoresistance-Spin Valve Multilayer (이중구조 거대자기저항-스핀밸브 박막의 자기등방성 영역분포에 관한 연구)

  • Khajidmaa, Purevdorj;Lee, Sang-Suk
    • Journal of the Korean Magnetics Society
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    • v.23 no.6
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    • pp.193-199
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    • 2013
  • The regional distribution of magnetic isotropy depending on the post annealing condition for the dual-type structure GMR-SV (giant magnetoresistance-spin valve) of NiFe/Cu/NiFe/IrMn/NiFe/Cu/NiFe multilayer was investigated. The rotation of in-plane ferromagnetic layer induced by controlment of the post annealing temperature inside of the vacuum chamber. The magnetoresistive curves of a dual-type IrMn based GMR-SV depending on the direction of the magnetization easy axis of the free layer and the pinned layer are measured by between $0^{\circ}$ and $360^{\circ}$ angles for the applied fields. The optimum annealing temperature having a steady and isotropy magnetic sensitivity of 1.52 %/Oe was $107^{\circ}C$ in the rotational section of $0{\sim}90^{\circ}$. By investigating the switching process of magnetization for an arbitrary measuring direction, the in-plane orthogonal magnetization for the dual-type GMR-SV multilayer can be used by a high sensitive biosensor for detection of magnetized micro-beads.

Electromagnetic Modeling of High Altitude Electromagnetic Pulse Coupling into Large-Scale Underground Multilayer Structures (다층 지하 구조물로의 고고도 전자기파(HEMP) 커플링 현상에 대한 전자기적 모델링)

  • Kang, Hee-Do;Oh, Il-Young;Kim, Jung-Ho;Yook, Jong-Gwan
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.23 no.3
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    • pp.392-401
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    • 2012
  • This paper gives a electromagnetic coupling mechanism of the high altitude electromagnetic pulse (HEMP) into large- scale underground multilayer structures using analytic and numerical methods. The modeling methods are firstly addressed to the HEMP source which can be generated by intentional nuclear explosion. The instantaneous and intense electromagnetic pulse of the HEMP source is concerned from DC to 100 MHz band, because the power spectrum of the HEMP is rapidly decreased under -30 dB over the 100 MHz band. Through this range, a penetrated electric field distribution is computed within the large-scale underground multilayer structures. As a result, the penetrated electric field intensities at 0.1 and 1 MHz are about 10 and 5 kV/m, respectively. Therefore, additional shielding techniques are introduced to protect buried structures within the large-scale underground structures such as high-lossy material and filtering structures (wire screen).

Estimation of Sensitivity Enhancements on Localized Surface Plasmon Resonance Sensor Using Dielectric Multilayer (유전체 다중층을 이용한 국소 표면 플라즈몬 공명 센서의 감도 향상에 관한 연구)

  • Ahn, Heesang;Kang, Tae Young;Oh, Jin-Woo;Kim, Kyujung
    • Korean Journal of Optics and Photonics
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    • v.28 no.1
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    • pp.28-32
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    • 2017
  • In this research, we designed an LSPR sensor based on a thin-film multilayer comprising $TiO_2$ and $SiO_2$. The thickness of the overall substrate layer of the suggested multilayer LSPR sensor is limited to 100 nm, and the number of repeating $TiO_2$ and $SiO_2$ thin films is 1-4 within a limited thickness. Additionally, a nanowire structure with a gold thin film of 40 nm, height of 40 nm, period of 600 nm, and line width of 300 nm was formed on the multilayer. To design the variable wavelength-type SPR, the angle was fixed at $75^{\circ}$ and the wavelength was changed. We then simulated the system with the finite-element method (FEM) using Maxwell's equations. It was confirmed that the resonance wavelength became shorter as the number of multilayers increased when the refractive index was fixed. We found that the wavelength changes were more sensitive. However, no changes were observed when the number of the multilayers was three or higher.

Displacement Properties of Nano Structure Dendrimer (나노구조 덴드리머의 변위특성)

  • Song, Jin-Won;Lee, Kyung-Sup
    • Proceedings of the KIEE Conference
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    • 2004.07c
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    • pp.1724-1726
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    • 2004
  • Monolayers of lipids on a water surface have attracted much interest as models of biological membranes, but also as precursors of multilayer systems promising many technical applications. Until now, many methodologies have been developed in order to gain a better understand. Photoisomerization in monolayers of a novel azobenzene compound, azobenzene dendrimer, was investigated for the first time by means of the absorption spectrum and Maxwell displacement current (MDC) technique. Dendrimers are well-defined macromolecules exhibiting a tree-like structure, first derived by the cascade molecule approach. According to the absorption spectrum, trans-to-cis conversion ratio was estimated to the third generation of azobenzene dendrimer deposited onto a glass substrate. Temperature-dependent induced charge with trans-cis isomerization was also measured by means of MDC technique.

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Modeling of High-speed 3-Disional Embedded Inductors (고속 3차원 매립 인덕터에 대한 모델링)

  • 이서구;최종성;윤일구
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2001.07a
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    • pp.139-142
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    • 2001
  • As microeletronics technology continues to progress, there is also a continuous demand on highly integration and miniaturization of systems. For example, it is desirable to package several integrated circuits together in multilayer structure, such as multichip modules, to achieve higher levels of compactness and higher performance. Passive components (i.e., capacitors, resistors, and inductors) are very important for many MCM applications. In addition, the low-temperature co-fired ceramic (LTCC) process has considerable potential for embedding passive components in a small area at a low cost. In this paper, we investigate a method of statistically modeling integrated passive devices from just a small number of test structures. A set of LTCC inductors is fabricated and their scattering parameters (5-parameters) are measured for a range of frequencies from 50MHz to 5GHz. An accurate model for each test structure is obtained by using a building block based modeling methodology and circuit parameter optimization using the HSPICE circuit simulator.

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Structural properties of PZT multilayer thick films of improved densification (PZT 후막의 치밀성 향상에 따른 PZT 다층 후막의 구조적 특성)

  • Yun, Sang-Eun;Lee, Sung-Gap;Park, Sang-Man;Lee, Young-Hie
    • Proceedings of the KIEE Conference
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    • 2006.07d
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    • pp.2211-2212
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    • 2006
  • Ferroelectric PZT (70/30) thick films were fabricated by the screen printing method. And the PZT (30/70) precusor solution were infiltrated by the spin-coating method on the PZT thick films to obtain a densification. All PZT thick films were sintered at $1050^{\circ}C$ for 10 min. Structural properties, such as crystalline structure, microstructures and compositional ratio, of PZT thick films were investigated with the variation of the number of sol coatings using XRD, SEM and EDS, respectively. All PZT thick films exhibited a perovskite polycrystalline structure without a pyrochloer phase. The thickness of PZT thick films, 4-times screen-printed, was approximately $60{\mu}m$. And the densification of the PZT thick films increased with increasing the number of sol coatings.

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