• 제목/요약/키워드: multilayer structure

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빗각 증착으로 제조한 Al 박막의 특성 (Characteristics of Al Films Prepared by Oblique Angle Deposition)

  • 박혜선;양지훈;정재훈;송민아;정재인
    • 한국표면공학회지
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    • 제45권3호
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    • pp.111-116
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    • 2012
  • Oblique angle deposition (OAD) is a physical vapor deposition method which utilizes non-normal angles between the substrate and the vaporizing source. It has been known that tilting the substrate changes the properties of the film deposited on it, which was thought to be a result of morphological change of the film. In this study, OAD has been applied to prepare single and multilayer Al films by magnetron sputtering. The magnetron sputtering source of 4 inch diameter was used to deposit the films. Al films have been deposited on Si wafers and cold-rolled steel sheets. The multilayer films were prepared by changing the tilting angle upside down at each layer interval, which means that when the first layer was deposited at an angle of $+45^{\circ}$, the second layer was deposited at an angle of $-45^{\circ}$, and vice versa. The microstructure, surface roughness and reflectance of the films were investigated using a scanning electron microscope, a surface profiler and a spectrophotometer, respectively. The corrosion resistance was measured and compared using the salt spray test. The single layer film prepared at an oblique angle of $60^{\circ}$ prepared at other angles. However, for the multilayer films, the film prepared at an oblique angle of $45^{\circ}$ showed the most compact and featureless structure. The multilayer films were found to exhibit higher corrosion resistance than the single layer films.

시스템의 정밀 모델링을 위한 자율분산 신경망 (Self-organized Distributed Networks for Precise Modelling of a System)

  • 김형석;최종수;김성중
    • 전자공학회논문지B
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    • 제31B권11호
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    • pp.151-162
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    • 1994
  • 다차원 시스템(multidimensional system)에 대한 정확한 모델링을 위해 “자율 분산 신경망(Self-organized Distirbuted Networks, SODN)”을 제안하였다. 제안한 신경망은 자율 신경망(Self-organized Networks)과 다수의 소규모 다층 신경망(Multilayer Neural Networks)이 조합되어 지역적 병렬 학습을 수행하는 부분 학습망으로서 학습 속도가 빠르고 학습의 정밀도를 높일 수 있으며 타 부분망 학습에서 문제가 되는 과다한 학습 메모리 소요와 학습되니 않은 영역에 대한 낮은 일반화능력 등의 문제가 보완된 새로운 신경망이다. 학습 실험 결과, 제안한 신경망은 기존의 다층 신경망과 RBF(Radial Basis Function) 신경망에 비해서 우수한 성능을 보였다.

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PDMS와 고분자 전해질 표면을 이용한 간편한 세포 패터닝 방법 (Facile Cell Patterning Based on Selectively Patterned Polydimethylsiloxane (PDMS) and Polyelectrolyte Surface)

  • 정헌호;송환문;황예진;황택성;이창수
    • KSBB Journal
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    • 제24권6호
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    • pp.515-520
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    • 2009
  • This study presented facile method of cell patterning using fabricated PDMS patterns on polyelectrolyte coated surface. This basic principle is the fabrication of functional surface presenting two orthogonal surfaces such as cell adhesive and repellent properties. Cell adhesive surface was firstly fabricated with simple coating of polyelectrolyte multilayer. And then, the desired patterns of PDMS for the prevention of nonspecific binding of cells were transferred onto the previously formed thin film of polyelectrolyte multilayer. Thus, we could prepare novel functional surface simultaneously containing PDMS and polyelectrolyte region. As expected, the PDMS regions showed effective prevention of nonspecific binding of cell and the other region, exposed polyelectrolyte area, provided cell adhesive environment. The height of formed PDMS structure was about 100 nm. Based on this method, cell patterning can be successfully obtained with various pattern shapes and sizes. Therefore, we expect that this simple method will be useful platform technology for the development of cell chip, cell based assay system, and biochip.

Three-Dimensional Self-Assembled Micro-Array Using Magnetic Force Interaction

  • Park, Yong-Sung;Kwon, Young-Soo;Eiichi Tamiya;Park, Dae-Hee
    • KIEE International Transactions on Electrophysics and Applications
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    • 제3C권5호
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    • pp.182-188
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    • 2003
  • We have demonstrated a fluidic technique for self-assembly of microfabricated parts onto substrate using patterned shapes of magnetic force self-assembled monolayers (SAMs). The metal particles and the array were fabricated using the micromachining technique. The metal particles were in a multilayer structure (Au, Ti, and Ni). Sidewalls of patterned Ni dots on the array were covered by thick negative photoresist (SU-8), and the array was magnetized. The array and the particles were mixed in buffer solution, and were arranged by magnetic force interaction. Binding direction of the metal particle onto Ni dots was controlled by multilayer structure and direction of magnetization. A quarter of total Ni dots were covered by the particles. The binding direction of the particles was controllable, and condition of particles was almost even with the Au surface on top. The particles were successfully arranged on the array.

Novolak 계열과 Epoxy 계열의 고분자를 이용한 새로운 multi layer 패턴 형성 방법 (Novel fabricated multi layer pattering using novolak and epoxy resin polymer.)

  • 김한형;양승국;유한석;이승용;오범환;이승걸;이일항;박세근
    • 대한전자공학회:학술대회논문집
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    • 대한전자공학회 2006년도 하계종합학술대회
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    • pp.549-550
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    • 2006
  • It has become topic continuously at MEMS or semiconductor process to form three-dimensional multilayer structure. In this paper, we devised the new polymer pattern method that has multilayer structure. This is method that uses different kind of polymeric material. Specially, polymers used in this study that we propose became all pattern by photolithography, prevented that process increases. Here, polymer that we use used polymer of epoxy order called "SU-8" and polymer of novolak resin called "AZ-1518". The result, "SU-8" was formed pattern to 3.5um thickness, and "AZ-1518" about pattern 3um thickness. Also, It was been 6um thickness at same pattern area.

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The Characteristics of Planar EMI Filter with Bi-Ground Layers Considering Impedance Mismatching

  • Wang, Shishang;Song, Zheng;Lou, Qianceng
    • Journal of Power Electronics
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    • 제16권3호
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    • pp.1200-1208
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    • 2016
  • Planar electromagnetic interference (EMI) filter has significant engineering significance to power electronic system integration and miniaturization. However, the value of differential mode capacitance cannot meet the demand of noise suppression because of the size limit of ceramics. In this case, the EMI filter of novel multilayers is recommended to address this issue. A novel integrated structure of EMI filter based on multilayer ceramic is proposed in this study. The inductance and capacitance of the new structure can be designed separately, which is an advantage in manufacturing. Insertion loss is measured more closely to the actual situation in this study, which is different from the condition where source and load impedances are both 50 Ω. In the process of designing a novel EMI filter, noise impedance is considered. Moreover, the prototype is created and applied to a small switching power supply, which verifies the effectiveness of the developed EMI filter.

다층 신경회로망과 가우시안 포텐샬 함수 네트워크의 구조적 결합을 이용한 효율적인 학습 방법 (Efficient Learning Algorithm using Structural Hybrid of Multilayer Neural Networks and Gaussian Potential Function Networks)

  • 박상봉;박래정;박철훈
    • 한국통신학회논문지
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    • 제19권12호
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    • pp.2418-2425
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    • 1994
  • 기울기를 따라가는 방식(gradient descent method)에 바탕을 둔 오류 역전파(EBP : Error Back Propagation) 방법이 가장 널리 사용되는 신경회로망의 학습 방법에서 문제가 되는 지역 최소값(local minima), 느린 학습 시간, 신경망 구조(structure), 그리고 초기의 연결 강도(interconnection weight) 등을 기존의 다층 신경 회로망에 지역적인 학습 능력을 가진 가우시안 포텔샵 네트워크(GPFN : Gaussian Potential Function Networks)를 병렬적으로 부가하여 해결함으로써 지역화된 오류 학습 패턴들이 나타내는 문제에 대하여 학습 성능을 향상시킬 수 잇는 새로운 학습 방법을 제시한다. 함수 근사화 문제에서 기존의 EBP 학습 방법과의 비교 실험으로 제안된 학습 방법이 보다 개선된 일반화 능력과 빠른 학습 속도를 가짐을 보여 그 효율성을 입증한다.

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Hybridized dragonfly, whale and ant lion algorithms in enlarged pile's behavior

  • Ye, Xinyu;Lyu, Zongjie;Foong, Loke Kok
    • Smart Structures and Systems
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    • 제25권6호
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    • pp.765-778
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    • 2020
  • The present study intends to find a proper solution for the estimation of the physical behaviors of enlarged piles through a combination of small-scale laboratory tests and a hybrid computational predictive intelligence process. In the first step, experimental program is completed considering various critical influential factors. The results of the best multilayer perceptron (MLP)-based predictive network was implemented through three mathematical-based solutions of dragonfly algorithm (DA), whale optimization algorithm (WOA), and ant lion optimization (ALO). Three proposed models, after convergence analysis, suggested excellent performance. These analyses varied based on neurons number (e.g., in the basis MLP hidden layer) and of course, the level of its complexity. The training R2 results of the best hybrid structure of DA-MLP, WOA-MLP, and ALO-MLP were 0.996, 0.996, and 0.998 where the testing R2 was 0.995, 0.985, and 0.998, respectively. Similarly, the training RMSE of 0.046, 0.051, and 0.034 were obtained for the training and testing datasets of DA-MLP, WOA-MLP, and ALO-MLP techniques, while the testing RMSE of 0.088, 0.053, and 0.053, respectively. This obtained result demonstrates the excellent prediction from the optimized structure of the proposed models if only population sensitivity analysis performs. Indeed, the ALO-MLP was slightly better than WOA-MLP and DA-MLP methods.

Epitaxial Growth and Characterization of Zinc-blende CrAs/GaAs/MnAs/GaAs Multilayers

  • Wang W.H.;Manago T.;Akinaga H.
    • Journal of Magnetics
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    • 제11권1호
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    • pp.1-4
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    • 2006
  • We report on the growth, structural and transport properties of zinc-blende CrAs/GaAs/MnAs/GaAs multilayers on GaAs(001) substrates. Structural analyses using in-situ reflection high-energy electron diffraction and exsitu cross-sectional transmission electron microscopy confirmed the realization of a zinc-blende crystal structure. Room temperature Hall measurements reveal that the as-grown multilayer exhibits p-type conductivity with a very low resistivity of $0.052\;\omega{cm}$, a high carrier concentration of $6.2X10^{19}\;cm^{-3}$ and a Hall mobility of $1.8\;cm^2/Vs$. We also observed a clear decrease of the resistivity in samples after low temperature annealing.

접착층에서 반사된 초음파 신호의 가시도 개선 (Visibility Enhancement of the Ultrasonic Signal Reflected from Adhesive Layers)

  • 신진섭;이정일
    • 한국인터넷방송통신학회논문지
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    • 제8권6호
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    • pp.153-157
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    • 2008
  • 최근 산업사회에서 널리 쓰이는 전자소자들은 다층구조로 제작되고 있는 실정이며 이러한 소자의 보이지 않는 층에 대한 해석은 비파괴 검사에서 중요한 일이다. 따라서 본 논문에서는 접착층이 존재하는 다층구조물에 초음파를 입사시켰을 때 반사되는 신호를 디지털 신호처리하여 가시도를 개선하였다. 이를 위하여 다층구조물에서 반사된 신호를 전력 켑스트럼 처리하여 각층에서 나타난 첫 번째 피크와 두 번째 피크를 구할 수 있었다. 실험을 위하여 일정한 두께를 갖는 에폭시층이 존재하는 다층구조물을 형성하였고 초음파 펄스-에코 방법에 의하여 얻어진 반사신호의 가시도를 개선하기 위해 전력 켑스트럼 처리하였다.

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