• Title/Summary/Keyword: motor current (MC)

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Signal Analysis of Motor Current for End Point Detection in the Chemical Mechanical Polishing of Shallow Trench Isolation with Reverse Moat Structure

  • Park, Chang-Jun;Kim, Sang-Yong;Seo, Yong-Jin
    • KIEE International Transactions on Electrophysics and Applications
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    • v.2C no.5
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    • pp.262-267
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    • 2002
  • In this paper, we first studied the factors affecting the motor current (MC) signal, which was strongly affected by the systematic hardware noises depending on polishing such as pad conditioning and arm oscillation of platen and recipe, head motor. Next, we studied the end point detection (EPD) for the chemical mechanical polishing (CMP) process of shallow trench isolation (STI) with reverse moat structure. The MC signal showed a high amplitude peak in the fore part caused by the reverse meal. pattern. We also found that the EP could not be detected properly and reproducibly due to the pad conditioning effect, especially when conventional low selectivity slurry was used. Even when there was no pad conditioning effect, the EPD method could not be applied, since the measured end points were always the same due to the characteristics of the reverse moat structure with an open nitride layer.

Condition Monitoring and Fault Diagnosis System of Rotating Machinery (회전기기의 상태감시 및 결함탐지 시스템)

  • Jeong, Sung-Hak;Lee, Young-Dong
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2016.10a
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    • pp.819-820
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    • 2016
  • Electrical power distribution is consists of high voltage, low voltage and motor control center(MCC). Motor control centers involves turning the motor on and off, it is configured electronic over current relay to detect a motor overcurrent flows. Existing electronic over current relay detects electrical fault such as overcurrent, undercurrent, phase sequence, negative sequence current, current unbalance and earth fault. However, it is difficult to detect mechanical fault such as locked rotor, motor stator and rotor and bearing fault. In this paper, we propose a condition monitoring and fault diagnosis system for electrical and mechanical fault detection of rotating machinery. The proposed system is designed with signal input and control part, system interface part and data acquisition board for condition monitoring and fault diagnosis, it was possible to detect electrical fault and mechanical fault through measurement and control of insulation resistance, locked rotor, MC counter and bearing temperature.

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A Study on the Speed Calculation and Speed Control Based on the Induction Motor Terminal Quantities (유도 전동기 단자전압 전류에 의한 속도계산 및 속도제어에 관한 연구)

  • 박민호;설승기
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.35 no.10
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    • pp.445-451
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    • 1986
  • The speed control system of induction motor without speed sensor is proposed in this paper. The speed of induction motor is calculated by motor terminal voltages and currents. The equations for speed calculation are derived and they are implemented on 16bit micro-processor Mc68000. The software and hardware for the Mc 68000 is developed. To prove the validity of the proposed method, the calculated speed is compared with the measured speed. The maximum speed error is nearly 1% in the overall range. The proposed speed calculation method is applied to the Current Source Inverter(CSI) fed induction motor drive system. The experimental results show the good dynamics and the resonable speed control accuracy.

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A New Study on Indirect Vector AC Current Control Method Using a Matrix Converter Fed Induction Motor

  • Lee Hong-Hee;Nguyen Hoang M.
    • Journal of Power Electronics
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    • v.6 no.1
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    • pp.67-72
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    • 2006
  • This paper introduces two different types of AC current control methods for an indirect vector controlled induction motor using a matrix converter. The proposed methods combine the advantages of matrix converters with the advantages of the indirect vector AC current control methods. The first proposed method explains the basic idea of the hysteresis current control method for matrix converters and shows its capability and stability in comparison to the conventional method usually used for VSI. With the aid of the special configuration of the matrix converter, we also propose another current method which is modified from the first one in order to reduce both current ripple and torque ripple. Simulation results have verified the feasibility and the effectiveness of the proposed methods.

A Study on Time Optimal Position Control of A CSI Fed Induction Motor (전류형 인버터에 의해 구동되는 유도전동기의 시간최적 위치제어에 관한 연구)

  • 박민호;원충연
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.36 no.8
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    • pp.529-538
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    • 1987
  • The time optimal position control scheme based on the Pontryagin's minimum principle is proposed in the current source inverter(CSI) fed induction motor system. The field oriented induction motor system is modelled with a second order plant and a switching curve is obtained by solving Hamiltonian equation. The validity of time optimal control solution has been verified by experimental tests carried out with a prototype MC68000 based microcomputer system, and 5Hp induction motor. Experimental results are in a close agreement with those the digital simulation ones.

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A Study on Position Control of a Current Source Inverter Fed Induction Motor by Field Oriented Control (자속 기준 제어에 의한 전류형 인버터 구동 유도전동기의 위치제어에 관한 연구)

  • 박민호;원충연;나승호
    • The Transactions of the Korean Institute of Electrical Engineers
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    • v.36 no.4
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    • pp.267-272
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    • 1987
  • In this paper, field oriented control is applied to a 16 bit micro-processor Mc68000 controlled CSI fed induction motor servo drive. The control of induction motor using the principle of its is able to have the transient performance nearly to that of DC motors in the position control. The software and hardware for the Mc68000 is developed. The position control scheme consists of the field oriented control loop and te speed reference pattern generator. The digital computer simlation and experimental results are provided, close agreement between them is obtained.

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Implementation of Data Monitoring and Acquisition System for Real-time Rotating Machinery based on oneM2M (oneM2M 표준 기반 실시간 회전기기 센싱 데이터 수집 및 모니터링 시스템 구현)

  • Lee, Young-Dong
    • Journal of the Institute of Convergence Signal Processing
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    • v.20 no.1
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    • pp.57-62
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    • 2019
  • In this paper, oneM2M based data monitoring and acquisition system is designed and implemented to measure and transmit the voltage, current, temperature, acceleration and vibration of the motor. The proposed system can detect electrical faults (overcurrent, reverse phase, phase loss, ground fault) and mechanical faults (MC counter, motor operation time, bearing and winding temperature, motor speed, insulation resistance). The system consists of sensor data collection, web server, php, database, wired/wireless communication system. The insulation resistance and the motor speed were measured, and the experimental results were similar for both the test resistance value and the reference input value.

Filter wheel design for CQUEAN II

  • Kim, Sanghyuk;Pak, Soojong;Lee, Hye-In;Im, Myunshin;Shin, Sang-Kyo
    • The Bulletin of The Korean Astronomical Society
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    • v.39 no.1
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    • pp.51.2-51.2
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    • 2014
  • CQUEAN(Camera for QUasars in EArly uNiverse) has been used at the 2.1 m Otto Struve Telescope of the McDonald Observatory since 2010. This camera is optimized at 0.7 - 1.1 um for the survey of Lyman break of high redshift (z > 5) quasars in the early universe. The current system has a filter wheel consist of seven (g', r', I', z', Y, Iz and Is) broad-band filters. We are upgrading this filter wheel to have 20 narrow band filters, with which we can take spectral energy distributions of targets. The new filter wheel consists of interchangeable cartridges for 50 mm square filters, a speed reducer unit, and a step motor. This new design of the large size filter wheel can be applied to other large format CCD cameras.

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Development of the System Controller for Multi Functional Motor Protection (다기능 모터보호장치를 위한 시스템 제어기 구현)

  • Seo, Ji-Yun;Kim, Hyun-Su;Jung, Sung-Hak;Jeong, Do-Un
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • 2016.10a
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    • pp.830-832
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    • 2016
  • 본 연구에서는 일반 산업현장에서 동력원으로 가장 편리하게 사용하고 있는 장치인 모터의 결함을 사전에 모니터링하기위한 연구를 수행하였다. 기존의 EOCR(electronic over Current relays)을 통해 모터의 전기적 결함에 따른 모터보호 및 전기적 결함측정뿐만 아니라 모터의 절연저항, 구동시간, MC(magnet contactor) 접점횟수, 베어링온도측정, 모터회전수 측정 등 전기적 결함과 기계적 결함을 동시에 모니터링 할 수 있는 다기능 모터보호장치를 구현하고자 하였다. 이를 위하여 다기능 모터보호장치의 데이터입력 및 제어장치, 디스플레이 및 인터페이스 장치를 구현하였고, 실제 MCC시스템과의 연동을 통해 동작특성평가를 수행하였다. 인위적인 전기적 결함 및 기계적 결함을 유발시키고 이를 검출하는 모의실험을 수행한 결과 전기적 결함과 기계적 결함 각각에 대해 100% 검출 가능함을 확인하였다.

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The Effect of Transcranial Direct Current Stimulation over the Primary Somatosensory Cortex in Patients with Chronic Stroke on Somatosensory and Upper Limb Function for Improving Life Care (만성 뇌졸중 환자를 대상으로 한 일차 체성 감각 피질을 자극한 경두개 직류 전류 자극이 라이프 케어 증진을 위한 체성감각과 상지기능에 미치는 영향)

  • Kim, Sun-Ho
    • Journal of Korea Entertainment Industry Association
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    • v.14 no.6
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    • pp.269-277
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    • 2020
  • The purpose of this study is to investigate the recovery of sensation and the restoration of upper limb function according to transcranial direct current stimulation over the primary somatosensory cortex in patients with chronic stroke with sensory deficit. 20 patients with chronic stroke divided into 10 experimental groups and 10 control groups. Patients received transcranial direct current stimulations over the primary somatosensory cortex on the side of the stroke lesion, and The control group applied sham tDCS to the same location. Intervention was conducted 5 times a week, 20 minutes per session for a total of 2 weeks. Assessment was performed using the Erasmus MC modifications to the Nottingham Sensory Assessment(EmNSA), Semmes-Weinstein monofilament examination(SWME) for somatosensory, and Fugle-Meyer Assessment(FMA), Motor Activity Log(MAL), and accelerometer for upper extremity function. Assessment was conducted before and after the intervention. As a result of the study, the experimental group showed a significant improvement in the overall tactile sense, proprioception, cortical sense, and perception sensitivity than the control group, and showed a statistically significant difference in the usage amount of the upper limb. Based on the results of this study, it is thought that the possibility of effective clinical application of transcranial direct current stimulation for recovery of somatosensory and upper extremity function is thought to be increased.