• Journal of Mechanical Science and Technology
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• 제20권1호
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• pp.51-58
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• 2006

To compensate for the motion errors in hydrostatic tables, a method to actively control the clearance of a bearing corresponding to the amount of error using actively controlled capillaries is introduced in this paper. The design method for an actively controlled capillary that considers the output rate of a piezo actuator and the amount of error that must be corrected is described. The basic characteristics of such a system were tested, such as the maximum controllable range of the error, micro-step response, and available dynamic bandwidth when the capillary was installed in a hydrostatic table. The tests demonstrated that the maximum controllable range was $2.4\;{\mu}m$, the resolution was 27 nm, and the frequency bandwidth was 5.5 Hz. Simultaneous compensation of the linear and angular motion errors using two actively controlled capillaries was also performed for a hydrostatic table driven by a ballscrew and a DC servomotor. An iterative compensation method was applied to improve the compensation characteristics. Experimental results showed that the linear and angular motion errors were improved to $0.12{\mu}m$ and 0.20 arcsec, which were about $1/15^{th}$ and $1/6^{th}$ of the initial motion errors, respectively. These results confirmed that the proposed compensation method improves the motion accuracy of hydrostatic tables very effectively.

• 한국정밀공학회지
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• 제14권12호
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2001년도 춘계학술대회 논문집
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• pp.114-118
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• 2001

HP Laser Interferometer Measurement System[HP5529A] is one of the most powerful equipment for measurement of the motion accuracy. The straightness measurement system of the HP5529A is composed of wollastone prism and reflector. In this system, straightness error is measured by relative lateral motion between prism and reflector. But rotating motion of prism or reflector as moving optic causes not real straightness error but additive straightness error. Especially unwanted straightness error as this becomes very large when reflector is used as moving optic and an interval between reflector and prism is distant. In this paper, the compensation method is proposed for removing additive error and experiment is carried out for theoretical verification.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2005년도 ICCAS
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• pp.1199-1201
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• 2005

In the synthetic aperture radar (SAR) system, the motion error is the main phase error sources and the motion compensation is very important. The phase gradient autofocus (PGA) is a state of art technique for phase error correction of SAR. It exploits the redundancy of the phase-error information among range bins by selecting the strongest scatter for each range bin and synthesizes them. The motivation of this paper is based on the observation that the redundancy of phase error is also among the cross-range direction. Moreover, the proposed method applies the weighting function to better utilize the phase error information. The validity of the proposed scheme for PGA is tested with some numerical simulation.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 춘계학술대회 논문집
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• pp.250-256
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clarance of table is actively controlled corresponding to the amount of error with the nariable capillary,anmed as ACC. In previous paper,through the basic test, it was confirmed that by the use of ACC,the error motion within 2.7 .mu.m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the freqency bandwidth of 5.5Hz structurally. In this paper,we performed practital compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy,iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error,the linear and angular motion error are improved upto 0.25 .mu.m and 0.4arcsec,which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.

• 한국정밀공학회지
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• 제22권9호
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• pp.69-76
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• 2005

The laser interferometer system such as HP5529A is one of the most powerful equipment fur measurement of the straightness error in precision stages. The straightness measurement system, HP5529A is composed of a Wollaston prism and a reflector. In this system, the straightness error is defined as relative lateral motion change between the prism and the reflector and computed from optical path difference of two polarized laser beams between these optics. However, rotating motion of the prism or the reflector used as a moving optic causes unwanted straightness error. In this paper, a compensation method is proposed for removing the unwanted straightness error generated by rotating the moving optic and an experiment is carried out for theoretical verification. The result shows that the unwanted straightness error becomes very large when the reflector is used as the moving optic and the distance between the reflector and the prism is far. Therefore, the prism must be generally used as the moving optic instead of the reflector so as to reduce the measurement error. Nevertheless, the measurement error must be compensated because it's not a negligible error if a rotating angle of the prism is large. In case the reflector must be used as the moving optic, which is unavoidable when the squareness error is measured between two axes, this compensation method can be applied and produces a better result.

• 제어로봇시스템학회논문지
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• 제13권5호
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• pp.507-512
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• 2007

This paper presents a tracking filter with ship's motion compensation for a ship-borne radar tracking system. The ship's maneuver is described by displacement and rotational motions in the ship-centered east-north frame. The first order Taylor series approximation of the measurement error covariance of the converted measurement is derived in the ship-centered east-north frame. The ship's maneuver is compensated by incorporating the measurement error covariance of the converted measurement and displacement of the position state in the tracking filter. The simulation results via 500 Monte-Carlo runs show that the proposed method follows the target successfully and provides consistent tracking performance during ship's maneuvers while the conventional tracking filter without ship motion compensation fails to track during such periods.

• 정보처리학회논문지B
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• 제13B권6호
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• pp.607-614
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• 2006

본 논문에서는, 복합 에러은닉 알고리즘을 이용하는 비디오 코더를 제안한다. 알고리즘은 먼저 정보숨김을 적용하여 손실된 블록의 움직임 벡터를 복원한다. 만일 은닉정보가 손실된 경우 손실된 블록의 움직임 벡터는 주위 정상 블록들의 움직임 벡터들의 적응적 선택을 이용하여, 손실된 블록의 새로운 움직임 벡터로 할당하고, OBMC (Overlapped Block Motion Compensation)를 통해 최종적으로 손실영역을 은닉하게 된다. 이 방법은 연속된 GOB의 손실에 있어서 좀 더 효과적임을 알 수 있었다. 실험 결과 제안한 방법의 결과가 정보숨김만을 이용하거나. 주변 움직임 벡터만을 이용하는 기존의 방법에 비하여 향상된 결과를 얻을 수 있음을 알 수 있었다.

• 한국군사과학기술학회지
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• 제8권3호
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• pp.56-63
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• 2005

The radome boresight error degrades the microwave seeker ability and the missile guidance performance. It increases the miss distance, also. This paper propose a method of radome boresight error measurement and compensation. The compensation method consist of radome analysis and radome compensation. In the radome analysis stage, we can know that the electromagnetic characteristics distorted by radome. In the compensation stage, the look-up table is built and used for compensation. The test uses a FMS(Flight motion simulator) and adjusts the FMS setup error for more accuracy. The result shows that not using an elaborate radome measurement equipment, the radome boresight error is well compensated easily.