• Title/Summary/Keyword: monitoring and control

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Real-time In-situ Plasma Etch Process Monitoring for Sensor Based-Advanced Process Control

  • Ahn, Jong-Hwan;Gu, Ja-Myong;Han, Seung-Soo;Hong, Sang-Jeen
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.11 no.1
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    • pp.1-5
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    • 2011
  • To enter next process control, numerous approaches, including run-to-run (R2R) process control and fault detection and classification (FDC) have been suggested in semiconductor manufacturing industry as a facilitation of advanced process control. This paper introduces a novel type of optical plasma process monitoring system, called plasma eyes chromatic system (PECSTM) and presents its potential for the purpose of fault detection. Qualitatively comparison of optically acquired signal levels vs. process parameter modifications are successfully demonstrated, and we expect that PECSTM signal can be a useful indication of onset of process change in real-time for advanced process control (APC).

Architecture of Web-Based Real-Time Monitoring Systems (웹 기반 실시간 모니터링 시스템의 구조)

  • Park, Hong-Seong;Jeong, Myeong-Sun;Kim, Bong-Sun
    • Journal of Institute of Control, Robotics and Systems
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    • v.7 no.7
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    • pp.632-639
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    • 2001
  • This paper proposes an improved architecture of web-based monitoring systems for monitor of processes in plants from the soft real-time point of view. The suggested model is designed to be able to guarantee the temporal and spatial consistency and transmit the monitoring data periodically via the intranet and the Internet. The model generates one thread for monitoring management, one DB thread, one common memory, and corresponding monitoring threads to clients. The monitoring thread is executed during the smaller time than the execution time of the process used in the conventional methods such as CGI and servlet method. The Java API for the server API, VRML, EAI(External Authoring Interface) and Java Applets for efficient dimensional WEB monitoring are used. The proposed model is implemented and tested for a FMS plant, Some examples show that the proposed model is useful one.

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Development of VR Monitoring System for Gas Plant (가상현실을 이용한 가스플랜트의 VR Monitoring System 개발)

  • Suh, Myung-Won;Cho, Ki-Yang;Park, Dae-You
    • Proceedings of the KSME Conference
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    • 2001.06c
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    • pp.213-218
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    • 2001
  • VR (Virtual reality) technologies have given engineers the ability to design, test, and evaluate engineering systems in a virtual environment. The virtual plant is the highlight of the application of the VR technology to plant engineering. Plant design, maintenance, control, management, operation are integrated in the virtual plant. The VR monitoring system including the concept of the virtual plant is developed to replace a current control room that has number of gages and warning lamps in two-dimensional panels which shows the operating status of a plant. The operating status of the plant is displayed in the VR monitoring system through the realistic computer graphics. Sophisticated, realistic and prompt control becomes possible. The VR monitoring system consists of advanced visualization, walk-through simulation and navigation. In the virtual environment, a user can navigate and interact with each component of a plant. In addition, the user can access the information by just clicking interesting component. The VR monitoring system is operated with various modules, such as (1) virtual plant constructed with Graphic Management System (GMS), (2) Touch & Tell System, and (3) Equipment DB System of Part. In order to confirm the usefulness of the VR monitoring system, a pilot gas plant which is currently being used for plant operator training is taken as application. The end of the paper gives an outlook on the future work and a brief conclusion.

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Development of a Greenhouse Monitoring System Using Network (네트워크를 이용한 온실 감시 시스템의 개발)

  • 임정호;류관희;진제용
    • Journal of Biosystems Engineering
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    • v.28 no.1
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    • pp.53-58
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    • 2003
  • This study was carried out to design, construct, and test a greenhouse monitoring system fur the environment and status of control devices in a greenhouse from a remote site using internet. The measuring items selected out of many environmental factors were temperature, humidity, solar radiation, CO$_2$, SOx, NOx concentration, EC, pH of nutrient solution, the state of control devices, and the image of greenhouse. The developed greenhouse monitoring system was composed of the network system and the measuring module. The network system consists of the three kinds of monitors named the Croup Monitor. the Client Monitor and the Server Monitor. The results of the study are summarized as follows. 1. The measuring module named the House Monitor. which is used to watch the state of the control device and the environment of the greenhouse, was developed to a embedded monitoring module using one chip microprocessor 2. For all measuring items. the House Monitor showed a satisfactory accuracy within the range of ${\pm}$0.3%FS. The House Monitors were connected to the Croup Monitor by communication method of RS-485 type and could operate under power and communication fault condition within 10 hours. The Croup Monitor was developed to receive and display measurement data received from the House Monitors and to control the greenhouse environmental devices. 3. The images of the plants inside greenhouse were captured by PC camera and sent to the Group Monitor. The greenhouse manager was able to monitor the growth state of plants inside greenhouse without visiting individual greenhouses. 4. Remote monitoring the greenhouse environment and status of control devices was implemented in a client/server environment. The client monitor of the greenhouse manager at a remote site or other greenhouse manager was able to monitor the greenhouse environment and the state of control devices from the Server Monitor using internet.

A Conceptual Study of a Framework for Real-Time Railway Safety Monitoring and Control System Based on Safety Performance Monitoring Indicators (안전성과 모니터링지표 기반의 실시간 철도안전 감시제어 시스템의 프레임워크에 대한 개념 연구)

  • Lee, Donghoun;Tak, Sehyun;Kim, Sangahm;Yeo, Hwasoo
    • Journal of the Korean Society for Railway
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    • v.19 no.4
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    • pp.526-538
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    • 2016
  • The government of South Korea has made great efforts in the area of railway safety management by means of a railway safety law and an integrated railway safety plan established in 2004 after the Daegu subway fire accident. However, after certain railway incidents, a reactive railway safety management system has been implemented that has led to fatal accidents caused by the collision, derailment, and fire every year. Hence, this study is intended to propose a framework that integrates data from distributed detection devices into a real-time railway safety monitoring and control system for proactive safety management. Furthermore, we will provide a future development direction for safety performance monitoring indicators to determine whether the railway safety monitoring and control system works effectively. The proposed framework is expected to be a cornerstone for the real-time railway safety monitoring and control system to be implemented in the future.

The Integrated Cyber SRM(Security Risk Monitoring) System Based on the Patterns of Cyber Security Charts

  • Lee, Gang-Soo;Jung, Hyun Mi
    • Journal of the Korea Society of Computer and Information
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    • v.24 no.11
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    • pp.99-107
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    • 2019
  • The "Risk management" and "Security monitoring" activities for cyber security are deeply correlated in that they prepare for future security threats and minimize security incidents. In addition, it is effective to apply a pattern model that visually demonstrates to an administrator the threat to that information asset in both the risk management and the security system areas. Validated pattern models have long-standing "control chart" models in the traditional quality control sector, but lack the use of information systems in cyber risk management and security systems. In this paper, a cyber Security Risk Monitoring (SRM) system that integrates risk management and a security system was designed. The SRM presents a strategy for applying 'security control' using the pattern of 'control charts'. The security measures were integrated with the existing set of standardized security measures, ISMS, NIST SP 800-53 and CC. Using this information, we analyzed the warning trends of the cyber crisis in Korea for four years from 2014 to 2018 and this enables us to establish more flexible security measures in the future.

Economic Evaluation of Unmanned Aerial Vehicle for Forest Pest Monitoring (산림 병해충의 모니터링을 위한 무인 항공기의 경제성 평가)

  • Lee, Keun-Wang;Park, Joon-Kyu
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.20 no.1
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    • pp.440-446
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    • 2019
  • Pine wilt disease occurred for the first time in Busan in 1988 and the damage has since been increasing. In 2005, a special law was enacted for pine wilt disease by Korea Forest Service. Incidences relating to the forest pest had been frequent and chemical control as well as physical control techniques had been applied to control it. Therefore, there is a need to reduce the damage caused by the pine wilt disease through intensive management such as continuous monitoring, control, and monitoring based on active control as well as management measures. In this study, the UAV-based monitoring method was proposed as an economical way of monitoring the forest pest. The efficiency of the existing method and UAV method had been analyzed, and as a result the study suggested that UAV can be used for forest pest monitoring and indeed improve efficiency. The UAV-based forest pest monitoring method has a cost reduction of about 50% compared with the conventional method and will also help to reduce the area where the survey was omitted.

A Study on the Voltage Stability Control Scheme using Real-time Monitoring Data (실시간 감시 정보를 이용한 전압안정도 제어 방안에 대한 연구)

  • Lee, Yun-Hwan
    • The Transactions of the Korean Institute of Electrical Engineers P
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    • v.66 no.4
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    • pp.206-212
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    • 2017
  • In this paper, using the power system information obtained from real-time monitoring device, to analyze the voltage stability margin index and described the voltage stability control scheme for voltage stability enhancement. Based on the utilization of the voltage stability monitoring index based on local information provided by the PMU(Phasor Measurement Unit), the purpose of the plan is to control the system stably in real time. In order to apply the load control scheme, the voltage stability margin is calculated using the data acquired through the PMU installed in each load bus. If the voltage drops below a certain level, load control is performed for each. The effectiveness of the voltage stability control measures is applied to the actual KEPCO system to analyze the effectiveness.

A statistical quality control for the dispersion matrix

  • Jo, Jinnam
    • Journal of the Korean Data and Information Science Society
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    • v.26 no.4
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    • pp.1027-1034
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    • 2015
  • A control chart is very useful in monitoring various production process. There are many situations in which the simultaneous control of two or more related quality variables is necessary. When the joint distribution of the process variables is multivariate normal, multivariate Shewhart control charts using the function of the maximum likelihood estimator for monitoring the dispersion matrix are considered for the simultaneous monitoring of the dispersion matrix. The performances of the multivariate Shewhart control charts based on the proposed control statistic are evaluated in term of average run length (ARL). The performance is investigated in three cases, where the variances, covariances, and variances and covariances are changed respectively. The numerical results show that the performances of the proposed multivariate Shewhart control charts are not better than the control charts using the trace of the covariance matrix in the Jeong and Cho (2012) in terms of the ARLs.