• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.5
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• pp.570-577
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• 2007

A micromachined convective accelerometer is a recently developed device. Typical micromachined accelerometers use a solid proof mass for measuring acceleration. But a micromachined convective accelerometer does not use a solid proof mass. A micromachined convective accelerometer is composed of a heating resistor and temperature sensors. This device measures acceleration by using convective heat transfer phenomenon. Therefore characteristics of a micromachined convective accelerometer are different as compared with typical micromachined accelerometer. In this research, we analyze the convective accelerometer by using transient convective heat transfer analysis. Based on the results of a convective accelerometer, we propose a new model which has improved performance.

• The Transactions of the Korean Institute of Electrical Engineers D
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• v.49 no.3
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• pp.124-132
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• 2000

In this paper, presented are an active surface-micromachined silicon accelerometer, force rebalance loop using parametric robust control method, and experimental results with a real micromachined accelerometer. And finally, a robust controller of the form of PID compensator was designed to construct force rebalance loop. Through the frequency response analysis, it is shown that the loop guarantees appropriate stability and robustness. Experiments with a real accelerometer demonstrated that the proposed loop effectively controls the position of the accelerometer's proof mass. It also demonstrated that the resolution of the fabricated accelerometer is better than 1mg. Compared with a commercial accelerometer the proposed force rebalance silicon accelerometer showed better performances.

• Proceedings of the KIEE Conference
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• 2004.11a
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• pp.275-277
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• 2004

This paper presents design and fabrication of micromachined accelerometer using $100{\mu}m$ thick SiOG substrate. The proposed accelerometer has a resonant frequency, 6kHz. To reduce the off-axis sensitivity of the accelerometer, the mode characteristic of the accelerometer is investigated using ANSYs modal analysis. Because the accelerometer is fabricated using an SiOG substrate, it is expected to be integrated as one-chip IMU sensor with a gyroscope using an SiOG substrate.

• International Journal of Control, Automation, and Systems
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• v.5 no.1
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• pp.35-42
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• 2007

This paper presents an INS(Inertial Navigation System) grade, surface micro-machined differential resonant accelerometer(DRXL) manufactured by an epitaxially grown thick poly silicon process. The proposed DRXL system generates a differential digital output upon an applied acceleration, in which frequency transition is measured due to gap dependent electrical stiffness change. To facilitate the resonance dynamics of the electromechanical system, the micromachined DRXL device is packaged by using the wafer level vacuum sealing process. To test the DRXL performance, a nonlinear self-oscillation loop is designed based on the extended describing function technique. The oscillation loop is implemented using discrete electronic elements including precision charge amplifier and hard feedback nonlinearity. The performance test of the DRXL system shows that the sensitivity of the accelerometer is 24 Hz/g and its long term bias stability is about 2 mg($1{\sigma}$) with dynamic range of ${\sigma}70g$.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.10
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• pp.499-503
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• 2006

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method with respect to the offset voltage and sensitivity of a accelerometer. Experimental results on the developed clinometer show that the proposed clinometer can provide useful information on the tilt angle and direction of an inclined plane.

• 제어로봇시스템학회:학술대회논문집
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• 1996.10b
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• pp.56-60
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• 1996

This paper presents the initial results of development of a inertial navigation grade silicon pendulous accelerometer. This effort focused on developing a bulk-micromachined silicon pendulum and designing a PI-servo controller. Performance data presented in this paper includes threshold, bias short term stability and nonlinearity of scale factor. This accelerometer developed is demonstrated the feasibility of meeting one-nautical-mile-per-hour accuracy.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.9
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• pp.456-460
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• 2006

This paper deals with a novel autocalibration method of three-axis micromachined accelerometers applied to a new digital intelligent putter for golfers. This putter can help golfers monitor and analyze their putting posture and therefore modify their putting action to get better score and enjoy their lives through golf. The micromachined accelerometers to get information of the motion are the essential part of the putter to measure the three-axis acceleration as accurately as possible. This paper presents an efficient autocalibration algorithm to find the offset and sensitivity of accelerometers by only using the static measurement data at six different positions. The experimental results on the developed putters show the validity of the proposed algorithm for the new smart putter.

• Proceedings of the KIEE Conference
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• 2006.07c
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• pp.1619-1620
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• 2006

This paper deals with a new two dimensional clinometer based on dual axis micromachined accelerometers. The clinometer is a small and low-cost product, which is mainly developed to help golfers read easily the tilt of a putting green. First, this paper proposes the principle of two dimensional clinometer and also a calibration method to improve accuracy with respect to the offset voltage and sensitivity of a accelerometer. Experimental results show that the proposed clinometer can provide useful information on the tilt of an inclined plane.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.25 no.3
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• pp.529-536
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• 2001

We investigate a surface-micromachined capacitive accelerometer with the grid-type electrodes surrounded by a perforated proof-mass frame. An electromechanical analysis of the microaccelerometer has been performed to obtain analytical formulae for natural frequency and output sensitivity response estimation. A set of prototype devices has been designed and fabricated based on a 4-mask surface-micromachining process. The resonant frequency of 5.8$\pm$0.17kHz and the detection sensitivity of 0.28$\pm$0.03mV/g have been measured from the fabricated devices. The parasitic capacitance of the detection circuit with a charge amplifier has been measured as 3.34$\pm$1.16pF. From the uncertainty analysis, we find that the major uncertainty in the natural frequency of the accelerometer comes from the micromachining error in the beam width patterning process. The major source of the sensitivity uncertainty includes uncertainty of the parasitic capacitance, the inter-electrode gap and the resonant frequency, contributing to the overall sensitivity uncertainty in the portions of 75%, 14% and 11%, respectively.

• Journal of the Korea Institute of Military Science and Technology
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• v.14 no.1
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• pp.132-138
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• 2011

A micromachined silicon accelerometer capable of surviving and detecting very high accelerations(up to 200,000 times the gravitational acceleration) is necessary for a high impact accelerometer for earth-penetration weapons applications. We adopted as a reference model a piezoresistive type silicon micromachined high-shock accelerometer with a bonded hinge structure and performed structural analyses such as stress, modal, and transient dynamic responses and sensor sensitivity simulation for the selected device using piezoresistive-structural coupled-field analysis. In addition, structural optimization was introduced to improve the performances of the accelerometer against the initial design of the reference model. The design objective here was to maximize the sensor sensitivity subject to a set of design constraints on the impact endurance of the structure, dynamic characteristics, the fundamental frequency and the transverse sensitivities by changing the dimensions of the width, sensing beams, and hinges which have significant effects on the performances. Through the optimization, we could increase the sensor sensitivity by more than 70% from the initial value of $0.267{\mu}V/G$ satisfying all the imposed design constraints. The suggested simulation and optimization have been proved very successful to design high impact microaccelerometers and therefore can be easily applied to develop and improve other piezoresistive type sensors and actuators.