• 한국진공학회지
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• 제20권2호
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• pp.106-113
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• 2011

본 논문은 마이크로히터표면의 실시간 온도분표측정을 위한 마하젠더 간섭계 기반의 off-axis 디지털홀로그래피기술에 대한 것이다. 제안된 방법은 재료표면의 온도분포에 직접적인 함수인 2차원 위상 분포를 측정하고, 이를 통해 실시간으로 재료표면의 온도 map을 측정할 수 있다. 본 논문에서는 섭씨 20도에서 60도 사이의 온도구간에서 마이크로히터 표면의 위상변화와 실제표면온도가 선형적인 관계가 있음을 실험적으로 보였다. 제안된 방법은 재료표면의 온도분포를 실시간으로 측정하고자 하는 다양한 응용분야에 적용될 수 있을 것으로 기대된다.

• 마이크로전자및패키징학회지
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• 제10권2호
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• pp.1-5
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• 2003

기존 형상의 미세 가열기를 이용한 마이크로 시스템 패키징의 문제점을 해결하기 위해 새로운 형상의 미세 가열기를 제작하여 패키징 실험을 시행하였다. 기존 형상의 미세 가열기와 새로운 미세 가열기의 형상을 각각 제작하여 접합시에 미세 가열기에 발생하는 열분포를 IR카메라를 이용하여 실험하였다. 기존 형상의 미세 가열기가 불균일하게 가열되는 반면, 새로운 형상의 미세 가열기는 매우 균일하게 가열되는 형상을 나타내었고, IR 카메라를 이용한 실험 결과를 바탕으로 각기 다른 형상의 미세 가열기를 이용하여 접합 실험을 실시하였다. 접합 실험시 사용한 미세 가열기는 폭 $50{\mu}m$, 두께 $2{\mu}m$로 제작하였으며, 0.2Mpa 의 압력을 Pyrex glass cap에 가한 상태에서 150mA의 전류를 공급하여 접합을 완료하였다. 접합이 완료된 시편들에 대해서 IPA를 통한 leakage check실험을 실시하였으며, 기존 형상의 미세 가열기를 이용한 시편들은 66%가 테스트를 통과한 반면 새로운 형상의 미세 가열기를 이용한 시편들은 85%이상이 테스트를 통과하였다. Leakage 실험을 통과한 각각의 시편들에 대해서 접합력 측정을 실시한 결과, 기존 형상의 미세 가열기를 이용한 시편들은 15∼21Mpa의 접합력을 나타내었고, 새로운 형상의 미세 가열기를 이용한 시편들은 25∼30Mpa의 우수한 접합력을 나타내었다.

• 한국가시화정보학회지
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• 제14권1호
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• pp.57-61
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• 2016

We report a finding of fast(exceeding 2,000 K/s) heating of polydimethylsiloxane(PDMS), one of the most commonly-used microchannel materials, under cyclic loadings at high(~MHz) frequencies. A microheater was created based on the finding. The heating mechanism utilized vibration damping of sound waves, which were generated and precisely manipulated using a conventional surface acoustic wave(SAW) microfluidic system, in PDMS. The penetration depths were measured to range from $210{\mu}m$ to $1290{\mu}m$, enough to cover most microchannel heights in microfluidic systems. The energy conversion efficiency was SAW frequency-dependent and measured to be the highest at around 30 MHz. Independent actuation of each interdigital transducer(IDT) enabled independent manipulation of SAWs, permitting spatiotemporal control of temperature on the microchip. All the advantages of this microheater facilitated a two-step continuous flow polymerase chain reaction(CFPCR) to achieve the billion-fold amplification of a 134 bp DNA amplicon in less than 3 min. In addition, a technique was developed for establishing dynamic free-form temperature gradients(TGs) in PDMS as well as in gases in contact with the PDMS.

• 대한기계학회논문집A
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• 제29권1호
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• pp.67-73
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• 2005

The paper presents a single-heater microfluid injector, whose ejected droplet volume is adjusted by digital current path control for a single microheater. The previous droplet volume adjustable methods have used the digital current control for multiple heaters or the analog current control for a single heater, while the present method uses the digital current control for a single microheater. Two different microinjectors, having a rectangular heater and a circular hearter, are designed and fabricated in the chip area of $7.64\;mm{\times}5.26\;mm$. The fabricated microinjectors have been tested and characterized for the number, size, shape and lifetime of the generated bubbles as well as for the volume and velocity of the ejected droplets. The input power for the rectangular heater and the circular heater has been varied in the ranges of $8.7{\sim}24.9{\mu}W\;and\;8.1{\sim}43.8{\mu}W$, respectively. The projected area of the generated bubble has been changed in the ranges of $440{\sim}l,3600{\mu}m^2\;and\;800{\sim}3,300{\mu}m^2$ for the rectangular heater and the circular heater, respectively. The microinjector with the rectangular heater ejects three discrete levels of the droplet in the volume range of $9.4{\sim}20.7pl$ with the velocity range of $0.8{\sim}1.7m/s$, while the microinjector with the circular heater achieves five discrete levels of the droplet in the volume range of $7.4{\sim}27.4pl$ with the velocity range of $0.5{\sim}2.8m/s$.

• ETRI Journal
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• 제27권5호
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• pp.585-594
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• 2005

A small electronic nose (E-Nose) system has been developed using an 8-channel vapor detection array and personal digital assistant (PDA). The sensor array chip, integrated on a single microheater-embedded polyimide substrate, was made of carbon black-polymer composites with different kinds of polymers and plasticizers. We have successfully classified various volatile organic compounds such as methanol, ethanol, i-propanol, benzene, toluene, n-hexane, n-heptane, and c-hexane with the aid of the sensor array chip, and have evaluated the resolution factors among them, quantitatively. To achieve a PDA-based E-Nose system, we have also elaborated small sensor-interrogating circuits, simple vapor delivery components, and data acquisition and processing programs. As preliminary results show, the miniaturized E-Nose system has demonstrated the identification of essential oils extracted from mint, lavender, and eucalyptus plants.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회B
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• pp.1870-1875
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• 2007

The microchannel heat sink is promising heat dissipation method for high heat flux source. Contrary to conventional circular channel, MEMS based microchannel had rectangular or trapezoidal cross-sectional shape. In our study, we conducted three dimensional conjugate heat transfer calculation for rectangular shape microchannel. First, we simulated that channel was completely drained with known heating power. As a result we obtained calibration line, which indicates heat loss was function of temperature. Second, we simulated single phase heat transfer with various mass flux, 100-400 $kg/m^2s$. In conclusion, the single phase test verified that the present heat loss evaluation method is applicable to micro scale heat transfer devices. Heat fluxes from each side wall shows difference due to non-uniform heating. However those ratios were correlated with supplied total heat. Finally, we proposed effective area correction factor to evaluate appropriate heat flux.

• 한국전산유체공학회지
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• 제16권2호
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• pp.88-93
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• 2011

A numerical study of subcooled onset of nucleate boiling (ONB) in a micro-channel under pulsed heating using volume of fluids (VOF) model was conducted. The VOF simulation adopting the existing experimental condition is compared to the experimental data. The time to ONB was determined when the void fraction at the microheater surface first appeared. The theoretical superheat for homogeneous nucleation relatively predicts the transient ONB results of convective flow of water well based on local temperature distribution. It was found that once heat load increases at the heater, transient flow boiling starts to occur faster.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1225-1230
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• 2004

The effects of substrate material on the local heating performance of microheaters are studied by both numerical analysis and experiment. Transient conduction analysis shows that the substrate material with low thermal conductivity is critical to the local heating and fast response. A measurement technique for surface temperature field in microscale is newly proposed, which uses temperature sensitive fluorescent dye coated on the surface. The measured surface temperature fields on microheater arrays fabricated on different substrates are presented.

• 대한의용생체공학회:학술대회논문집
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• 대한의용생체공학회 1997년도 춘계학술대회
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• pp.338-341
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• 1997

The current consumption and the heat produced in the printhead of thermal printer are mainly governed by total printing dots and printing time for each line. Simple algorithm is proposed to optimize the performance of a thermal printhead, which use variable division according to bit-mapped data of its 1 line. And, for protecting the thermal printhead from exceeding heat, I control the heat energy of each microheater(dots) on the thermal printhead through changes in the applied pulse width.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2008년도 International Meeting on Information Display
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• pp.1233-1236
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• 2008

This study presents the fabrication process and display characteristics of a flexible organic polymer display device that consists of a thin substrate of Polyether Sulfone, a multilayer serpentine-type microheater array that is fabricated on the substrate, and a UV-sensitive polydiacetylene (PDA)-polyvinyl alcohol (PVA) composite film. A retention time of one second is achieved with cell sizes of $500{\mu}m$ and $700{\mu}m$ with cell-to-cell distances of $100{\mu}m$ and $200{\mu}m$, respectively.