• 제목/요약/키워드: microfabricated membrane

검색결과 8건 처리시간 0.019초

MEMS 기반 생체모사 음향센서 제작 및 주파수 특성 분석 (Fabrication of Biomimetic MEMS Acoustic Sensor and Analysis of Its Frequency Characteristics)

  • 허신;정영도;이영화;송원준;김완두
    • 비파괴검사학회지
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    • 제31권5호
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    • pp.522-528
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    • 2011
  • 인간의 청각기능을 보조하거나 대체할 수 있는 차세대 인공와우기술의 개발은 기존 인공와우의 단점인 잦은 충전, 장애 노출 등을 극복하고 향상된 음감을 전달할 수 있는 기술로서 세계적으로 많은 연구를 수행하고 있다. 본 연구에서는 달팽이관의 기저막이 갖는 주파수 분리 기능 및 유모세포(haircell)의 이온채널 작용에 의한 생체 전기신호 발생 기능을 할 수 있는 PVDF(polyvinylidene fluoride) 압전 박막형 인공기저막을 설계, 제작 및 시험평가를 하고자 하였다. 생체 기저막과 유사한 주파수 분리 특성을 갖는 사다리꼴 형상의 인공기저막을 제작하고, MEMS 공정을 이용한 전극 증착 및 유체 유동이 가능한 챔버를 형성하였다. 또한 인공기저막의 거동을 측정하기 위하여 비접촉 LDV측정 장비, 스피커, 기준 마이크로폰 등을 사용하여 실험 장치를 구성하였다. 기계적 성능시험 결과, PVDF 압전박막형 인공기저막은 입사하는 음파의 주파수 분리를 잘 수행할 수 있음을 실험적으로 입증하였다.

Growth of Endothelial Cells on Microfabricated Silicon Nitride Membranes for an In Vitro Model of the Blood-brain Barrier

  • Harris, Sarina G.;Shuler, Michael L.
    • Biotechnology and Bioprocess Engineering:BBE
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    • 제8권4호
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    • pp.246-251
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    • 2003
  • The blood-brain barrier (BBB) is composed of the brain capillaries, which are lined by endothelial cells displaying extremely tight intercellular junctions. Several attempts at creating an in vitro model of the BBB have been met with moderate success as brain capillary endothelial cells lose their barrier properties when isolated in cell culture. This may be due to a lack of recreation of the in vivo endothelial cellular environment in these models, including nearly constant contact with astrocyte foot processes. This work is motivated by the hypothesis that growing endothelial cells on one side of an ultra-thin, highly porous membrane and differentiating astrocyte or astrogliomal cells on the opposite side will lead to a higher degree of interaction between the two cell types and therefore to an improved model. Here we describe our initial efforts towards testing this hypothesis including a procedure for membrane fabrication and methods for culturing endothelial cells on these membranes. We have fabricated a 1 $\mu\textrm{m}$ thick, 2.0 $\mu\textrm{m}$ pore size, and 55% porous membrane with a very narrow pore size distribution from low-stress silicon nitride (SiN) utilizing techniques from the microelectronics industry. We have developed a base, acid, autoclave routine that prepares the membranes for cell culture both by cleaning residual fabrication chemicals from the surface and by increasing the hydrophilicity of the membranes (confirmed by contact angle measurements). Gelatin, fibronectin, and a 50/50 mixture of the two proteins were evaluated as potential basement membrane protein treatments prior to membrane cell seeding. All three treatments support adequate attachment and growth on the membranes compared to the control.

용존 산소 측정용 초소형 Clark-type 센서에 대한 연구 (A Study on the Microfabricated Clark-type Sensor for Measuring Dissolved Oxygen)

  • 박정일;장종현;최명기;이동영;김영미;박정호
    • 전기학회논문지
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    • 제56권8호
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    • pp.1450-1454
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    • 2007
  • This paper presents a microfabricated Clark-type sensor which exactly can measure dissolved oxygen in the cell containing solution. We designed, fabricated, and characterized a microfabircated Clark-type oxygen sensor for measuring dissolved oxygen. The microfabricated oxygen sensor consists of 3-electrodes on a glass substrate, a FEP (Fluorinated ethylene propylene) oxygen-permeable membrane, and PDMS (Polydimethylsiloxane) reservoir for storing sample solution. Thin-film Ag/AgCl was employed as a reference electrode and its durability was verified by obtaining a stable open circuit potential for 2 hours against a commercial Ag/AgCl electrode and a stable cyclic voltammetry curve. Selectivity, response time, and linearity of the fabricated oxygen sensor were also verified well by cyclic voltammetry and amperometry depending. The fabricated oxygen sensor showed a 90% response time of 40sec and an excellent linearity with a correlation coefficient of 0.994.

가열모드에 따른 열식 질량유량센서의 설계 해석 (Numerical Analysis on the Design of a Thermal Mass Air Flow Sensor with Various Heating Modes)

  • 전홍규;이준식;박병규
    • 대한기계학회논문집B
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    • 제31권10호
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    • pp.876-883
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    • 2007
  • Numerical simulations are conducted for the design of a micro thermal mass air flow sensor (MAFS), which consists of a microfabricated heater and thermopiles on the silicon-nitride ($Si_3N_4$) thin membrane structure. It is important to find the proper locations of these thermal elements in the design of MAFS with improved sensitivity. Three heating modes of the micro-heater are considered: constant temperature, constant power and heating pulses. The analyses are focused on the membrane temperature profile near the sensing section. Considered are the practical flow velocities, ranging from 3 m/s to 35 m/s, and the corresponding Reynolds numbers from 1000 to 10000. The results show that one of optimum sensing locations is about $100{\mu}m$ away from the microheater. It is concluded that the heating mode and configurations of thermal elements are the main factors for the MAFS with higher sensitivity.

실시간 제어기를 이용한 마이크로 열식 질량공기 유량센서의 열특성 측정 (Measurements of Thermal Characteristics for a Micro-Fabricated Thermal Mass Air Flow Sensor With Real-Time Controller)

  • 박병규;이준식
    • 대한기계학회논문집B
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    • 제33권8호
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    • pp.573-579
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    • 2009
  • A thermal mass air flow sensor, which consists of a micro-heater and thermal sensors on the silicon-nitride thin membrane structure, is micro-fabricated by MEMS processes. Three thermo-resistive sensors, one for the measurement of microheater temperature, the others for the measurement of membrane temperature upstream and downstream of the micro-heater respectively, are used. The micro-heater is operated under the constant temperature difference mode via a real time controller, based on inlet air temperature. Two design models for microfabricated flow sensor are compared with experimental results and confirmed their applicabilities and limitations. The thermal characteristics are measured to find the best flow indicator. It is found that two normalized temperature indicators can be adopted with some advantages in practice. The flow sensor with this control mode can be adopted for wide capability of high speed and sensitivity in the very low and medium velocity ranges.

3-${\omega}$ 방법을 이용한 다중벽 탄소나노튜브 나노유체의 침전 안정성 및 열전도계수 측정에 관한 실험적 연구 (Stabilization and thermal conductivity measurement of MWCNT nanofluids by using the $3-{\omega}$ method)

  • 오동욱;이준식
    • 대한기계학회:학술대회논문집
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    • 대한기계학회 2007년도 춘계학술대회B
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    • pp.2171-2176
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    • 2007
  • The 3-omega (3-${\omega}$) method is utilized to measure the thermal conductivity of nanofluids. A metal line heater on a silicon nitride membrane bridge structure is microfabricated by a bulk silicon etching method. Localized measurement of the thermal conductivity within the nanofluids droplet is possible by the fabricated 3-${\omega}$ sensor. Time varying AC temperature amplitudes and thermal conductivities are measured to check the stability of the nanofluids containing multi-wall carbon nanotubes (MWCNTs). Stabilities of MWCNT nanofluids prepared with different chemical treatments are compared. Acid treated MWCNT showed best dispersion stability in water while MWCNTs dispersed in water with surfactants such as Gum Arabic and Sodium dodecyl benzene sulfate showed clear sign of gravity dependence.

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고감도 압저항 외팔보 센서를 이용한 Liposome의 검침 (Rapid detection of liposome by piezoresistive cantilever sensor)

  • 현석정;김현석;김용준;정효일
    • 센서학회지
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    • 제14권3호
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    • pp.156-159
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    • 2005
  • Liposomes are microscopic spherical vesicles that form when lipids are hydrated and have been widely used for biochemical assay, drug delivery and molecular imaging. In particular, they are well known for artificial cell membranes to study cellular functions such as cell fusions and membrane proteins. Here, we firstly report the detection of liposomes by the highly sensitive microfabricated piezoresistive cantilever sensor chip and the phosphatidylserine recognition protein C2A which is chemically immobilized on the sensor surface. The signal created from the bending motion of piezoresistive cantilever after the liposome attachment has been monitored in real time.

나노여과 기반 용량성 탈이온화의 진전 (Progress in Nanofiltration-Based Capacitive Deionization)

  • 심정환;라즈쿠마 파텔
    • 멤브레인
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    • 제34권2호
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    • pp.87-95
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    • 2024
  • 최근 연구는 역삼투압(RO), 나노여과(NF) 및 전기투석(ED)과 같은 막 공정에서 고급 용량성 탈이온화(CDI) 및 막 변형(MCDI)을 포함하는 광범위한 담수화 및 수처리 방법을 탐구합니다. 비교 분석은 저염도 시나리오에서 ED의 비용 효율성을 보여주는 반면 하이브리드 시스템(NF-MCDI, RO-NF-MCDI)은 향상된 염 제거 및 에너지 효율성을 보여줍니다. 새로운 이온 분리 방법(NF-CDI, NF-FCDI)은 향상된 효율성과 에너지 절감을 제공합니다. 이러한 연구는 또한 다양한 산업에 특정한 복잡한 폐수를 처리하는 데 있어 이러한 방법의 효율성을 강조합니다. 환경 영향 평가는 시스템 선택의 지속 가능성의 필요성을 강조합니다. 또한 마이크로 제작된 센서를 멤브레인에 통합하면 실시간 모니터링이 가능하여 기술 개발이 진전됩니다. 이러한 연구는 새로운 담수화 및 수처리 기술의 다양성과 가능성을 강조합니다. 이는 효율성 향상, 에너지 사용 최소화, 산업별 문제 해결 및 기존 방법 한계를 능가하는 혁신을 위한 귀중한 통찰력을 제공합니다. 다양한 응용 분야에서 효율성 향상, 환경 영향 최소화 및 적응성 보장에 초점을 맞춘 지속적인 발전으로 지속 가능한 수처리의 미래는 밝습니다.